{"id":"https://openalex.org/W4387250826","doi":"https://doi.org/10.1109/essderc59256.2023.10268522","title":"Understanding the impact of La dopant position on the ferroelectric properties of hafnium zirconate","display_name":"Understanding the impact of La dopant position on the ferroelectric properties of hafnium zirconate","publication_year":2023,"publication_date":"2023-09-11","ids":{"openalex":"https://openalex.org/W4387250826","doi":"https://doi.org/10.1109/essderc59256.2023.10268522"},"language":"en","primary_location":{"id":"doi:10.1109/essderc59256.2023.10268522","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/essderc59256.2023.10268522","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ESSDERC 2023 - IEEE 53rd European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://lirias.kuleuven.be/retrieve/ee4c3879-35b2-42ab-a3cd-410c20b689c9","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5005180567","display_name":"M. Popovici","orcid":"https://orcid.org/0000-0002-9838-1088"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":true,"raw_author_name":"Mihaela Ioana Popovici","raw_affiliation_strings":["Imec,Leuven,Belgium","Imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091055725","display_name":"Jasper Bizindavyi","orcid":"https://orcid.org/0000-0002-2213-9017"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Jasper Bizindavyi","raw_affiliation_strings":["Imec,Leuven,Belgium","Imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101251223","display_name":"Gourab De","orcid":"https://orcid.org/0009-0009-3457-3353"},"institutions":[{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]},{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Gourab De","raw_affiliation_strings":["Imec,KU Leuven,Leuven,Belgium","KU Leuven, Imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"Imec,KU Leuven,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974","https://openalex.org/I99464096"]},{"raw_affiliation_string":"KU Leuven, Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974","https://openalex.org/I99464096"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084889776","display_name":"Dae Seon Kwon","orcid":"https://orcid.org/0000-0002-0025-9042"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Dae Seon Kwon","raw_affiliation_strings":["Imec,Leuven,Belgium","Imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080181961","display_name":"Gouri Sankar Kar","orcid":"https://orcid.org/0000-0003-3122-4237"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Gouri Sankar Kar","raw_affiliation_strings":["Imec,Leuven,Belgium","Imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5043193313","display_name":"Jan Van Houdt","orcid":"https://orcid.org/0000-0003-1381-6925"},"institutions":[{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]},{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Jan Van Houdt","raw_affiliation_strings":["Imec,KU Leuven,Leuven,Belgium","KU Leuven, Imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"Imec,KU Leuven,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974","https://openalex.org/I99464096"]},{"raw_affiliation_string":"KU Leuven, Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974","https://openalex.org/I99464096"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5005180567"],"corresponding_institution_ids":["https://openalex.org/I4210114974"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":{"value":0.11630136,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"121","last_page":"124"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":0.9839000105857849,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.9815999865531921,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/orthorhombic-crystal-system","display_name":"Orthorhombic crystal system","score":0.6499065160751343},{"id":"https://openalex.org/keywords/ferroelectricity","display_name":"Ferroelectricity","score":0.6280568242073059},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5032564997673035},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.45325690507888794},{"id":"https://openalex.org/keywords/dopant","display_name":"Dopant","score":0.4435373544692993},{"id":"https://openalex.org/keywords/doping","display_name":"Doping","score":0.3928467035293579},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.36410582065582275},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.3609279990196228},{"id":"https://openalex.org/keywords/crystallography","display_name":"Crystallography","score":0.3170713782310486},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.30919235944747925},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.24493330717086792},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.24456310272216797},{"id":"https://openalex.org/keywords/crystal-structure","display_name":"Crystal structure","score":0.1663840413093567},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.13105830550193787}],"concepts":[{"id":"https://openalex.org/C37243968","wikidata":"https://www.wikidata.org/wiki/Q648961","display_name":"Orthorhombic crystal system","level":3,"score":0.6499065160751343},{"id":"https://openalex.org/C79090758","wikidata":"https://www.wikidata.org/wiki/Q1045739","display_name":"Ferroelectricity","level":3,"score":0.6280568242073059},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5032564997673035},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.45325690507888794},{"id":"https://openalex.org/C191952053","wikidata":"https://www.wikidata.org/wiki/Q15119237","display_name":"Dopant","level":3,"score":0.4435373544692993},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.3928467035293579},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.36410582065582275},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3609279990196228},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.3170713782310486},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.30919235944747925},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.24493330717086792},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.24456310272216797},{"id":"https://openalex.org/C115624301","wikidata":"https://www.wikidata.org/wiki/Q895901","display_name":"Crystal structure","level":2,"score":0.1663840413093567},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.13105830550193787},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/essderc59256.2023.10268522","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/essderc59256.2023.10268522","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ESSDERC 2023 - IEEE 53rd European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},{"id":"pmh:oai:lirias2repo.kuleuven.be:20.500.12942/733413","is_oa":true,"landing_page_url":"https://lirias.kuleuven.be/handle/20.500.12942/733413","pdf_url":"https://lirias.kuleuven.be/retrieve/ee4c3879-35b2-42ab-a3cd-410c20b689c9","source":{"id":"https://openalex.org/S4306401954","display_name":"Lirias (KU Leuven)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I99464096","host_organization_name":"KU Leuven","host_organization_lineage":["https://openalex.org/I99464096"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE 53rd European Solid-State Device Research Conference (ESSDERC), PORTUGAL, Lisbon, 11-14 September 2023","raw_type":"info:eu-repo/semantics/publishedVersion"}],"best_oa_location":{"id":"pmh:oai:lirias2repo.kuleuven.be:20.500.12942/733413","is_oa":true,"landing_page_url":"https://lirias.kuleuven.be/handle/20.500.12942/733413","pdf_url":"https://lirias.kuleuven.be/retrieve/ee4c3879-35b2-42ab-a3cd-410c20b689c9","source":{"id":"https://openalex.org/S4306401954","display_name":"Lirias (KU Leuven)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I99464096","host_organization_name":"KU Leuven","host_organization_lineage":["https://openalex.org/I99464096"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE 53rd European Solid-State Device Research Conference (ESSDERC), PORTUGAL, Lisbon, 11-14 September 2023","raw_type":"info:eu-repo/semantics/publishedVersion"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4387250826.pdf","grobid_xml":"https://content.openalex.org/works/W4387250826.grobid-xml"},"referenced_works_count":11,"referenced_works":["https://openalex.org/W2048040049","https://openalex.org/W2334220755","https://openalex.org/W2781121986","https://openalex.org/W2904668006","https://openalex.org/W2909424133","https://openalex.org/W3132257265","https://openalex.org/W3156083251","https://openalex.org/W3165924785","https://openalex.org/W3215265358","https://openalex.org/W4224312138","https://openalex.org/W4317794261"],"related_works":["https://openalex.org/W2393083297","https://openalex.org/W4308043442","https://openalex.org/W1996561502","https://openalex.org/W3097217235","https://openalex.org/W2043309154","https://openalex.org/W2063963526","https://openalex.org/W2134054069","https://openalex.org/W205778126","https://openalex.org/W2362185697","https://openalex.org/W2330697841"],"abstract_inverted_index":{"The":[0],"impact":[1],"of":[2,5,21,71,91],"asymmetrical":[3],"doping":[4],"hafnium":[6],"zirconate":[7],"(HZO)":[8],"based":[9],"capacitors":[10],"is":[11,43],"studied.":[12],"By":[13],"introducing":[14],"Lanthanum":[15],"(La)":[16],"dopant":[17],"at":[18,127,132],"different":[19],"stages":[20],"the":[22,69,88,92,96],"HZO":[23,97],"deposition":[24],"process,":[25],"its":[26,33],"effect":[27],"on":[28],"orthorhombic":[29,74,93],"phase":[30,94],"formation":[31],"and":[32,51,76,109],"out-of-plane":[34,72],"preferential":[35],"orientation,":[36],"as":[37],"reflected":[38],"in":[39,95,103],"remnant":[40],"polarization":[41],"(2PR),":[42],"studied":[44],"using":[45,59],"Grazing":[46],"incident":[47],"X-ray":[48],"diffraction":[49],"(GIXRD)":[50],"electrical":[52],"measurements.":[53],"Furthermore,":[54],"tri-layer":[55,110],"stacks":[56,114],"were":[57],"fabricated":[58],"a":[60,77],"bottom":[61],"TiO<inf":[62],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[63,80,82,105,120,125,129],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</inf>":[64],"interfacial":[65,84],"layer,":[66,85,98],"which":[67,86],"promotes":[68],"growth":[70],"oriented":[73],"grains,":[75],"top":[78],"Nb<inf":[79],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</inf>O<inf":[81],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">5</inf>":[83],"enhances":[87],"overall":[89],"content":[90],"leading":[99],"to":[100],"an":[101],"increase":[102],"2P<inf":[104,119],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">R</inf>.":[106],"Both":[107],"single-layer":[108],"asymmetrically":[111],"doped":[112],"capacitor":[113],"show":[115],"improved":[116],"endurance,":[117],"demonstrating":[118],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">R</inf>":[121],">":[122],"40":[123],"\u00b5C/cm<sup":[124],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[126],"10<sup":[128],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">8</sup>":[130],"cycles":[131],"2.5":[133],"MV/cm.":[134]},"counts_by_year":[],"updated_date":"2026-03-10T16:38:18.471706","created_date":"2025-10-10T00:00:00"}