{"id":"https://openalex.org/W4312541496","doi":"https://doi.org/10.1109/essderc55479.2022.9947160","title":"Experimental fabrication of an ESF3 floating gate flash cell in an FD-SOI process","display_name":"Experimental fabrication of an ESF3 floating gate flash cell in an FD-SOI process","publication_year":2022,"publication_date":"2022-09-19","ids":{"openalex":"https://openalex.org/W4312541496","doi":"https://doi.org/10.1109/essderc55479.2022.9947160"},"language":"en","primary_location":{"id":"doi:10.1109/essderc55479.2022.9947160","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc55479.2022.9947160","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ESSDERC 2022 - IEEE 52nd European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5016001716","display_name":"Nicki Mika","orcid":"https://orcid.org/0000-0001-6496-9310"},"institutions":[{"id":"https://openalex.org/I4210142027","display_name":"GlobalFoundries (Germany)","ror":"https://ror.org/045jad561","country_code":"DE","type":"company","lineage":["https://openalex.org/I35662394","https://openalex.org/I4210142027"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Nicki Mika","raw_affiliation_strings":["Module One LLC &#x0026; Co. KG, GlobalFoundries Dresden,Dresden,Germany"],"affiliations":[{"raw_affiliation_string":"Module One LLC &#x0026; Co. KG, GlobalFoundries Dresden,Dresden,Germany","institution_ids":["https://openalex.org/I4210142027"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028759244","display_name":"T. Melde","orcid":null},"institutions":[{"id":"https://openalex.org/I4210142027","display_name":"GlobalFoundries (Germany)","ror":"https://ror.org/045jad561","country_code":"DE","type":"company","lineage":["https://openalex.org/I35662394","https://openalex.org/I4210142027"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Thomas Melde","raw_affiliation_strings":["Module One LLC &#x0026; Co. KG, GlobalFoundries Dresden,Dresden,Germany"],"affiliations":[{"raw_affiliation_string":"Module One LLC &#x0026; Co. KG, GlobalFoundries Dresden,Dresden,Germany","institution_ids":["https://openalex.org/I4210142027"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064444897","display_name":"Stefan D\u00fcnkel","orcid":null},"institutions":[{"id":"https://openalex.org/I4210142027","display_name":"GlobalFoundries (Germany)","ror":"https://ror.org/045jad561","country_code":"DE","type":"company","lineage":["https://openalex.org/I35662394","https://openalex.org/I4210142027"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Stefan Dunkel","raw_affiliation_strings":["Module One LLC &#x0026; Co. KG, GlobalFoundries Dresden,Dresden,Germany"],"affiliations":[{"raw_affiliation_string":"Module One LLC &#x0026; Co. KG, GlobalFoundries Dresden,Dresden,Germany","institution_ids":["https://openalex.org/I4210142027"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089581769","display_name":"Michael Otto","orcid":"https://orcid.org/0000-0003-0924-6165"},"institutions":[{"id":"https://openalex.org/I4210142027","display_name":"GlobalFoundries (Germany)","ror":"https://ror.org/045jad561","country_code":"DE","type":"company","lineage":["https://openalex.org/I35662394","https://openalex.org/I4210142027"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Michael Otto","raw_affiliation_strings":["Module One LLC &#x0026; Co. KG, GlobalFoundries Dresden,Dresden,Germany"],"affiliations":[{"raw_affiliation_string":"Module One LLC &#x0026; Co. KG, GlobalFoundries Dresden,Dresden,Germany","institution_ids":["https://openalex.org/I4210142027"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091137781","display_name":"Fran\u00e7ois Weisbuch","orcid":null},"institutions":[{"id":"https://openalex.org/I4210142027","display_name":"GlobalFoundries (Germany)","ror":"https://ror.org/045jad561","country_code":"DE","type":"company","lineage":["https://openalex.org/I35662394","https://openalex.org/I4210142027"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Francois Weisbuch","raw_affiliation_strings":["Module One LLC &#x0026; Co. KG, GlobalFoundries Dresden,Dresden,Germany"],"affiliations":[{"raw_affiliation_string":"Module One LLC &#x0026; Co. KG, GlobalFoundries Dresden,Dresden,Germany","institution_ids":["https://openalex.org/I4210142027"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077202847","display_name":"P. Krottenthaler","orcid":null},"institutions":[{"id":"https://openalex.org/I4210142027","display_name":"GlobalFoundries (Germany)","ror":"https://ror.org/045jad561","country_code":"DE","type":"company","lineage":["https://openalex.org/I35662394","https://openalex.org/I4210142027"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Peter Krottenthaler","raw_affiliation_strings":["Module One LLC &#x0026; Co. KG, GlobalFoundries Dresden,Dresden,Germany"],"affiliations":[{"raw_affiliation_string":"Module One LLC &#x0026; Co. KG, GlobalFoundries Dresden,Dresden,Germany","institution_ids":["https://openalex.org/I4210142027"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5003850300","display_name":"Thomas Mikolajick","orcid":"https://orcid.org/0000-0003-3814-0378"},"institutions":[{"id":"https://openalex.org/I78650965","display_name":"TU Dresden","ror":"https://ror.org/042aqky30","country_code":"DE","type":"education","lineage":["https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Thomas Mikolajick","raw_affiliation_strings":["Technical University of Dresden,Chair of Nanoelectrics,Dresden,Germany","Chair of Nanoelectrics, Technical University of Dresden, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"Technical University of Dresden,Chair of Nanoelectrics,Dresden,Germany","institution_ids":["https://openalex.org/I78650965"]},{"raw_affiliation_string":"Chair of Nanoelectrics, Technical University of Dresden, Dresden, Germany","institution_ids":["https://openalex.org/I78650965"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5016001716"],"corresponding_institution_ids":["https://openalex.org/I4210142027"],"apc_list":null,"apc_paid":null,"fwci":0.0915,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.42231509,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"356","last_page":"359"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12588","display_name":"Electronic and Structural Properties of Oxides","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.8113687038421631},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.6938182711601257},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5725288391113281},{"id":"https://openalex.org/keywords/flash","display_name":"Flash (photography)","score":0.5488000512123108},{"id":"https://openalex.org/keywords/oxide","display_name":"Oxide","score":0.5227406620979309},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4893140494823456},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.45464903116226196},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4355648159980774},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4292665123939514},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.36441856622695923},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3491830825805664},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.271859347820282},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.213593989610672},{"id":"https://openalex.org/keywords/operating-system","display_name":"Operating system","score":0.08586961030960083},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.07111212611198425}],"concepts":[{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.8113687038421631},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.6938182711601257},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5725288391113281},{"id":"https://openalex.org/C2777526259","wikidata":"https://www.wikidata.org/wiki/Q221836","display_name":"Flash (photography)","level":2,"score":0.5488000512123108},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.5227406620979309},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4893140494823456},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.45464903116226196},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4355648159980774},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4292665123939514},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.36441856622695923},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3491830825805664},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.271859347820282},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.213593989610672},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.08586961030960083},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.07111212611198425},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/essderc55479.2022.9947160","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc55479.2022.9947160","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ESSDERC 2022 - IEEE 52nd European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure","score":0.47999998927116394}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W2623060708","https://openalex.org/W2623294813","https://openalex.org/W2912535991","https://openalex.org/W3006655620","https://openalex.org/W3033330790","https://openalex.org/W3033941112","https://openalex.org/W3126394425","https://openalex.org/W3170069652","https://openalex.org/W3192589754"],"related_works":["https://openalex.org/W2104300577","https://openalex.org/W4206445530","https://openalex.org/W2771786520","https://openalex.org/W2174354966","https://openalex.org/W2810180604","https://openalex.org/W2325281603","https://openalex.org/W2944964251","https://openalex.org/W2012754971","https://openalex.org/W2082914599","https://openalex.org/W2384315251"],"abstract_inverted_index":{"As":[0],"minimum":[1],"feature":[2],"sizes":[3],"in":[4,37],"semiconductor":[5],"processes":[6],"are":[7],"continuously":[8],"decreasing,":[9],"the":[10,33,43],"parallel":[11],"implementation":[12],"of":[13,56],"embedded":[14],"non-volatile":[15],"memory":[16],"cells":[17],"becomes":[18],"increasingly":[19],"complex":[20],"for":[21],"technology":[22],"nodes":[23],"below":[24],"28":[25],"nm.":[26],"In":[27],"this":[28],"publication":[29],"it":[30],"is":[31],"demonstrated":[32],"first":[34],"ESF3":[35],"fabrication":[36],"an":[38],"advanced":[39],"SOI":[40],"process":[41,65],"using":[42],"buried":[44],"oxide":[45],"as":[46],"a":[47,52],"tunnel":[48],"oxide.":[49],"This":[50],"enables":[51],"small":[53],"cell":[54],"area":[55],"<tex":[57],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[58],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$0.086\\":[59],"\\mu\\mathrm{m}^{2}$</tex>":[60],"with":[61],"only":[62],"few":[63],"additional":[64],"steps":[66],"and":[67],"promising":[68],"electrical":[69],"data.":[70]},"counts_by_year":[{"year":2023,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}