{"id":"https://openalex.org/W4200090804","doi":"https://doi.org/10.1109/essderc53440.2021.9631790","title":"Multiscale Modeling Study of Native Oxide Growth on a Si(100) Surface","display_name":"Multiscale Modeling Study of Native Oxide Growth on a Si(100) Surface","publication_year":2021,"publication_date":"2021-09-13","ids":{"openalex":"https://openalex.org/W4200090804","doi":"https://doi.org/10.1109/essderc53440.2021.9631790"},"language":"en","primary_location":{"id":"doi:10.1109/essderc53440.2021.9631790","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc53440.2021.9631790","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ESSDERC 2021 - IEEE 51st European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5007044879","display_name":"Lukas Cvitkovich","orcid":"https://orcid.org/0000-0003-2453-507X"},"institutions":[{"id":"https://openalex.org/I4210165005","display_name":"BioElectronics (United States)","ror":"https://ror.org/05mh3a113","country_code":"US","type":"company","lineage":["https://openalex.org/I4210165005"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"L. Cvitkovich","raw_affiliation_strings":["Technische Universität Wien,Institute for Microelectronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Technische Universität Wien,Institute for Microelectronics","institution_ids":["https://openalex.org/I4210165005"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041086926","display_name":"Markus Jech","orcid":"https://orcid.org/0000-0003-3003-8168"},"institutions":[{"id":"https://openalex.org/I4210165005","display_name":"BioElectronics (United States)","ror":"https://ror.org/05mh3a113","country_code":"US","type":"company","lineage":["https://openalex.org/I4210165005"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M. Jech","raw_affiliation_strings":["Technische Universität Wien,Institute for Microelectronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Technische Universität Wien,Institute for Microelectronics","institution_ids":["https://openalex.org/I4210165005"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112873917","display_name":"Dominic Waldh\u00f6r","orcid":null},"institutions":[{"id":"https://openalex.org/I4210105054","display_name":"Christian Doppler Laboratory for Thermoelectricity","ror":"https://ror.org/01cbw5x35","country_code":"AT","type":"facility","lineage":["https://openalex.org/I129774422","https://openalex.org/I145847075","https://openalex.org/I4210105054"]},{"id":"https://openalex.org/I4210165005","display_name":"BioElectronics (United States)","ror":"https://ror.org/05mh3a113","country_code":"US","type":"company","lineage":["https://openalex.org/I4210165005"]}],"countries":["AT","US"],"is_corresponding":false,"raw_author_name":"D. Waldhor","raw_affiliation_strings":["Technische Universität Wien,Institute for Microelectronics","Christian Doppler Laboratory for Single-Defect Spectroscopy in Semiconductor Devices, Vienna, Austria"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Technische Universität Wien,Institute for Microelectronics","institution_ids":["https://openalex.org/I4210165005"]},{"raw_affiliation_string":"Christian Doppler Laboratory for Single-Defect Spectroscopy in Semiconductor Devices, Vienna, Austria","institution_ids":["https://openalex.org/I4210105054"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022460576","display_name":"Al-Moatasem El-Sayed","orcid":"https://orcid.org/0000-0001-5191-1240"},"institutions":[{"id":"https://openalex.org/I4210139004","display_name":"Nanolayers","ror":"https://ror.org/0462c0k61","country_code":"GB","type":"facility","lineage":["https://openalex.org/I4210139004"]},{"id":"https://openalex.org/I4210165005","display_name":"BioElectronics (United States)","ror":"https://ror.org/05mh3a113","country_code":"US","type":"company","lineage":["https://openalex.org/I4210165005"]}],"countries":["GB","US"],"is_corresponding":false,"raw_author_name":"A.-M. El-Sayed","raw_affiliation_strings":["Technische Universität Wien,Institute for Microelectronics","Nanolayers Research Computing, Ltd., London, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Technische Universität Wien,Institute for Microelectronics","institution_ids":["https://openalex.org/I4210165005"]},{"raw_affiliation_string":"Nanolayers Research Computing, Ltd., London, United Kingdom","institution_ids":["https://openalex.org/I4210139004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085874744","display_name":"Christoph Wilhelmer","orcid":"https://orcid.org/0000-0002-9996-2589"},"institutions":[{"id":"https://openalex.org/I4210165005","display_name":"BioElectronics (United States)","ror":"https://ror.org/05mh3a113","country_code":"US","type":"company","lineage":["https://openalex.org/I4210165005"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C. Wilhelmer","raw_affiliation_strings":["Technische Universität Wien,Institute for Microelectronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Technische Universität Wien,Institute for Microelectronics","institution_ids":["https://openalex.org/I4210165005"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5062594496","display_name":"Tibor Grasser","orcid":"https://orcid.org/0000-0001-6536-2238"},"institutions":[{"id":"https://openalex.org/I4210165005","display_name":"BioElectronics (United States)","ror":"https://ror.org/05mh3a113","country_code":"US","type":"company","lineage":["https://openalex.org/I4210165005"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"T. Grasser","raw_affiliation_strings":["Technische Universität Wien,Institute for Microelectronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Technische Universität Wien,Institute for Microelectronics","institution_ids":["https://openalex.org/I4210165005"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.22244655,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"111","issue":null,"first_page":"235","last_page":"238"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10192","display_name":"Catalytic Processes in Materials Science","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10913","display_name":"Molecular Junctions and Nanostructures","score":0.991100013256073,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/adsorption","display_name":"Adsorption","score":0.6576765179634094},{"id":"https://openalex.org/keywords/dissociation","display_name":"Dissociation (chemistry)","score":0.6134676933288574},{"id":"https://openalex.org/keywords/oxide","display_name":"Oxide","score":0.5807860493659973},{"id":"https://openalex.org/keywords/density-functional-theory","display_name":"Density functional theory","score":0.48932594060897827},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.46722304821014404},{"id":"https://openalex.org/keywords/molecule","display_name":"Molecule","score":0.41725271940231323},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.382860004901886},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.34674888849258423},{"id":"https://openalex.org/keywords/computational-chemistry","display_name":"Computational chemistry","score":0.3199288249015808},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.3160601854324341},{"id":"https://openalex.org/keywords/physical-chemistry","display_name":"Physical chemistry","score":0.2646479606628418},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.12614312767982483},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.10356104373931885}],"concepts":[{"id":"https://openalex.org/C150394285","wikidata":"https://www.wikidata.org/wiki/Q180254","display_name":"Adsorption","level":2,"score":0.6576765179634094},{"id":"https://openalex.org/C102931765","wikidata":"https://www.wikidata.org/wiki/Q189673","display_name":"Dissociation (chemistry)","level":2,"score":0.6134676933288574},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.5807860493659973},{"id":"https://openalex.org/C152365726","wikidata":"https://www.wikidata.org/wiki/Q1048589","display_name":"Density functional theory","level":2,"score":0.48932594060897827},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.46722304821014404},{"id":"https://openalex.org/C32909587","wikidata":"https://www.wikidata.org/wiki/Q11369","display_name":"Molecule","level":2,"score":0.41725271940231323},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.382860004901886},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.34674888849258423},{"id":"https://openalex.org/C147597530","wikidata":"https://www.wikidata.org/wiki/Q369472","display_name":"Computational chemistry","level":1,"score":0.3199288249015808},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.3160601854324341},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.2646479606628418},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.12614312767982483},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.10356104373931885}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/essderc53440.2021.9631790","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc53440.2021.9631790","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ESSDERC 2021 - IEEE 51st European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G8057653975","display_name":null,"funder_award_id":"871813","funder_id":"https://openalex.org/F4320333065","funder_display_name":"Seventh Framework Programme"}],"funders":[{"id":"https://openalex.org/F4320333065","display_name":"Seventh Framework Programme","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":28,"referenced_works":["https://openalex.org/W1559987997","https://openalex.org/W1581770884","https://openalex.org/W1970959666","https://openalex.org/W1985290495","https://openalex.org/W1987730200","https://openalex.org/W1989060947","https://openalex.org/W2000770615","https://openalex.org/W2003974290","https://openalex.org/W2014166972","https://openalex.org/W2022696619","https://openalex.org/W2023023112","https://openalex.org/W2037782625","https://openalex.org/W2040249893","https://openalex.org/W2056641273","https://openalex.org/W2058443574","https://openalex.org/W2063384380","https://openalex.org/W2071312077","https://openalex.org/W2076585312","https://openalex.org/W2079183913","https://openalex.org/W2087730641","https://openalex.org/W2092077040","https://openalex.org/W2093914900","https://openalex.org/W2122427541","https://openalex.org/W2150687058","https://openalex.org/W2741353833","https://openalex.org/W2989387189","https://openalex.org/W6660120735","https://openalex.org/W6668401984"],"related_works":["https://openalex.org/W3011831393","https://openalex.org/W2518845051","https://openalex.org/W2043818199","https://openalex.org/W3208296585","https://openalex.org/W2038256311","https://openalex.org/W2516241657","https://openalex.org/W2188254326","https://openalex.org/W3192895269","https://openalex.org/W2587744446","https://openalex.org/W2321366725"],"abstract_inverted_index":{"Silicon":[0],"and":[1,27,32,62,81],"its":[2],"native":[3],"oxide":[4],"SiO2are":[5],"the":[6,24,28,51,60,73,77],"most":[7],"commonly":[8],"used":[9,103],"materials":[10],"in":[11,19,104],"semiconductor":[12],"device":[13],"technology.":[14],"After":[15],"decades":[16],"of":[17,23,38,54,64,76,91,95],"research":[18],"this":[20,41,105],"field,":[21],"details":[22],"initial":[25,74],"oxidation":[26,52,75],"subsequent":[29,82],"O":[30,83],"migration":[31],"amorphization":[33],"are":[34],"still":[35],"a":[36,45,55,88,92],"subject":[37],"interest.":[39],"In":[40],"paper,":[42],"we":[43,67,86],"present":[44],"multiscale":[46],"modeling":[47],"approach":[48],"to":[49,113,120],"investigate":[50],"process":[53],"Si(100)":[56],"surface.":[57],"Starting":[58],"from":[59,108],"adsorption":[61],"dissociation":[63],"single":[65],"O2molecules,":[66],"further":[68],"extended":[69],"our":[70],"investigations":[71],"towards":[72],"first":[78],"Si":[79],"layer":[80],"migration.":[84],"Finally,":[85],"construct":[87],"realistic":[89],"model":[90],"Si/SiO2interface":[93],"consisting":[94],"around":[96],"5000":[97],"atoms.":[98],"The":[99],"employed":[100],"simulation":[101],"techniques":[102],"study":[106],"range":[107],"density":[109,114],"functional":[110,115],"theory":[111],"(DFT)":[112],"based":[116],"tight":[117],"binding":[118],"(DFTB)":[119],"classical":[121],"molecular":[122],"dynamics":[123],"(MD).":[124]},"counts_by_year":[],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}