{"id":"https://openalex.org/W4200592776","doi":"https://doi.org/10.1109/essderc53440.2021.9631769","title":"Mechanical Band Gap Formation in Anisotropic CMOS Back-End-of-Line Stacks for Monolithic High-Q MEMS Resonator Confinement","display_name":"Mechanical Band Gap Formation in Anisotropic CMOS Back-End-of-Line Stacks for Monolithic High-Q MEMS Resonator Confinement","publication_year":2021,"publication_date":"2021-09-13","ids":{"openalex":"https://openalex.org/W4200592776","doi":"https://doi.org/10.1109/essderc53440.2021.9631769"},"language":"en","primary_location":{"id":"doi:10.1109/essderc53440.2021.9631769","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc53440.2021.9631769","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ESSDERC 2021 - IEEE 51st European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5025505130","display_name":"Richard Hudeczek","orcid":"https://orcid.org/0000-0002-3809-8862"},"institutions":[{"id":"https://openalex.org/I4210094487","display_name":"Intel (Germany)","ror":"https://ror.org/00m2x0g47","country_code":"DE","type":"company","lineage":["https://openalex.org/I1343180700","https://openalex.org/I4210094487"]},{"id":"https://openalex.org/I62916508","display_name":"Technical University of Munich","ror":"https://ror.org/02kkvpp62","country_code":"DE","type":"education","lineage":["https://openalex.org/I62916508"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Richard Hudeczek","raw_affiliation_strings":["Technical University of Munich,Department of Electrical Engineering and Information Technology,Germany","Intel Germany, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Technical University of Munich,Department of Electrical Engineering and Information Technology,Germany","institution_ids":["https://openalex.org/I62916508"]},{"raw_affiliation_string":"Intel Germany, Germany","institution_ids":["https://openalex.org/I4210094487"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5049918570","display_name":"Peter Baumgartner","orcid":"https://orcid.org/0000-0003-3111-1494"},"institutions":[{"id":"https://openalex.org/I4210094487","display_name":"Intel (Germany)","ror":"https://ror.org/00m2x0g47","country_code":"DE","type":"company","lineage":["https://openalex.org/I1343180700","https://openalex.org/I4210094487"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Peter Baumgartner","raw_affiliation_strings":["Intel Germany,Germany","Intel Germany, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Intel Germany,Germany","institution_ids":["https://openalex.org/I4210094487"]},{"raw_affiliation_string":"Intel Germany, Germany","institution_ids":["https://openalex.org/I4210094487"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.4833,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.6325475,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"211","last_page":"214"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7631773948669434},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7420620918273926},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.7179749011993408},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5628136992454529},{"id":"https://openalex.org/keywords/anisotropy","display_name":"Anisotropy","score":0.46124476194381714},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.4523417353630066},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.34763509035110474},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.158183753490448}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7631773948669434},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7420620918273926},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.7179749011993408},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5628136992454529},{"id":"https://openalex.org/C85725439","wikidata":"https://www.wikidata.org/wiki/Q466686","display_name":"Anisotropy","level":2,"score":0.46124476194381714},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.4523417353630066},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.34763509035110474},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.158183753490448}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/essderc53440.2021.9631769","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc53440.2021.9631769","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ESSDERC 2021 - IEEE 51st European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/11","display_name":"Sustainable cities and communities","score":0.6100000143051147}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W353562331","https://openalex.org/W1988818220","https://openalex.org/W1993141344","https://openalex.org/W1995062313","https://openalex.org/W2008451950","https://openalex.org/W2038667420","https://openalex.org/W2176335645","https://openalex.org/W2333980478","https://openalex.org/W2598890271","https://openalex.org/W2792195532","https://openalex.org/W3092437756","https://openalex.org/W3103527158","https://openalex.org/W3121988450","https://openalex.org/W4388955818"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W1998662473","https://openalex.org/W1763916368","https://openalex.org/W2319192085","https://openalex.org/W2059751975","https://openalex.org/W2075391483","https://openalex.org/W2537716684","https://openalex.org/W2152087047"],"abstract_inverted_index":{"With":[0],"rising":[1],"demand":[2],"for":[3,59,69,113],"higher":[4],"frequency":[5],"system-on-chip":[6],"MEMS,":[7],"accuracy":[8],"in":[9,30,74,107],"the":[10,25,46,75,83,88,92,108],"modelling":[11],"and":[12,40],"design":[13],"phase":[14],"becomes":[15],"increasingly":[16],"important.":[17],"The":[18],"impact":[19],"of":[20,48,91,95],"mechanical":[21,71,104],"anisotropic":[22,49,115],"layers":[23],"on":[24,82,87],"acoustic":[26],"band":[27,105],"gap":[28,106],"formation":[29],"a":[31,70,102],"CMOS":[32],"back-end-of-line":[33,109],"Bragg":[34],"mirror":[35],"is":[36,57,66,111],"studied":[37],"by":[38,101],"analytic":[39],"finite":[41],"element":[42],"approaches.":[43],"In":[44],"particular":[45],"influence":[47],"monocrystalline":[50],"copper":[51,116],"sheets,":[52],"with":[53],"varying":[54],"crystal":[55,117],"orientations,":[56],"investigated":[58],"monolithic":[60],"high-Q":[61],"MEMS":[62],"resonator":[63,73],"confinement.":[64],"It":[65],"shown":[67],"that":[68],"FinFET":[72],"front-end-of-line":[76],"multiple":[77],"resonant":[78],"frequencies":[79],"can":[80],"coexist":[81],"same":[84],"wafer,":[85],"depending":[86],"spatial":[89],"extents":[90],"device.":[93],"All":[94],"which":[96,110],"need":[97],"to":[98],"be":[99],"accommodated":[100],"broadband":[103],"demonstrated":[112],"different":[114],"orientations.":[118]},"counts_by_year":[{"year":2022,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}