{"id":"https://openalex.org/W2536678501","doi":"https://doi.org/10.1109/essderc.2016.7599681","title":"New approach for a multi-cantilever arrays sensor system with advanced MOEMS readout","display_name":"New approach for a multi-cantilever arrays sensor system with advanced MOEMS readout","publication_year":2016,"publication_date":"2016-09-01","ids":{"openalex":"https://openalex.org/W2536678501","doi":"https://doi.org/10.1109/essderc.2016.7599681","mag":"2536678501"},"language":"en","primary_location":{"id":"doi:10.1109/essderc.2016.7599681","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2016.7599681","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 46th European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5062221796","display_name":"F. Ivaldi","orcid":"https://orcid.org/0000-0003-0904-7748"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"F. Ivaldi","raw_affiliation_strings":["Division of Silicon Microsystems and Nanostructure Technology, Instytut Technologii Elektronowej, Warsaw, Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Division of Silicon Microsystems and Nanostructure Technology, Instytut Technologii Elektronowej, Warsaw, Poland","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078874318","display_name":"T. Bieniek","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"T. Bieniek","raw_affiliation_strings":["Division of Silicon Microsystems and Nanostructure Technology, Instytut Technologii Elektronowej, Warsaw, Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Division of Silicon Microsystems and Nanostructure Technology, Instytut Technologii Elektronowej, Warsaw, Poland","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019772497","display_name":"P. Janus","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"P. Janus","raw_affiliation_strings":["Division of Silicon Microsystems and Nanostructure Technology, Instytut Technologii Elektronowej, Warsaw, Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Division of Silicon Microsystems and Nanostructure Technology, Instytut Technologii Elektronowej, Warsaw, Poland","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5107591217","display_name":"Jerzy Zaj\u0105c","orcid":"https://orcid.org/0000-0002-9529-4624"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Zajac","raw_affiliation_strings":["Division of Silicon Microsystems and Nanostructure Technology, Instytut Technologii Elektronowej, Warsaw, Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Division of Silicon Microsystems and Nanostructure Technology, Instytut Technologii Elektronowej, Warsaw, Poland","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110450890","display_name":"P. Grabiec","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"P. Grabiec","raw_affiliation_strings":["Division of Silicon Microsystems and Nanostructure Technology, Instytut Technologii Elektronowej, Warsaw, Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Division of Silicon Microsystems and Nanostructure Technology, Instytut Technologii Elektronowej, Warsaw, Poland","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060298426","display_name":"Wojciech Majstrzyk","orcid":"https://orcid.org/0000-0001-8553-8341"},"institutions":[{"id":"https://openalex.org/I11923345","display_name":"Wroc\u0142aw University of Science and Technology","ror":"https://ror.org/008fyn775","country_code":"PL","type":"education","lineage":["https://openalex.org/I11923345"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"W. Majstrzyk","raw_affiliation_strings":["Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wroclaw, Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wroclaw, Poland","institution_ids":["https://openalex.org/I11923345"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047228928","display_name":"Daniel Kopiec","orcid":"https://orcid.org/0000-0003-0349-9081"},"institutions":[{"id":"https://openalex.org/I11923345","display_name":"Wroc\u0142aw University of Science and Technology","ror":"https://ror.org/008fyn775","country_code":"PL","type":"education","lineage":["https://openalex.org/I11923345"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"D. Kopiec","raw_affiliation_strings":["Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wroclaw, Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wroclaw, Poland","institution_ids":["https://openalex.org/I11923345"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5038397671","display_name":"Teodor Gotszalk","orcid":"https://orcid.org/0000-0003-4182-9192"},"institutions":[{"id":"https://openalex.org/I11923345","display_name":"Wroc\u0142aw University of Science and Technology","ror":"https://ror.org/008fyn775","country_code":"PL","type":"education","lineage":["https://openalex.org/I11923345"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"T. Gotszalk","raw_affiliation_strings":["Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wroclaw, Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wroclaw, Poland","institution_ids":["https://openalex.org/I11923345"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2171,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.63395947,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"82","issue":null,"first_page":"444","last_page":"447"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.9297780990600586},{"id":"https://openalex.org/keywords/detector","display_name":"Detector","score":0.729116678237915},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.5718595385551453},{"id":"https://openalex.org/keywords/deflection","display_name":"Deflection (physics)","score":0.5335778594017029},{"id":"https://openalex.org/keywords/flexibility","display_name":"Flexibility (engineering)","score":0.5071089267730713},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4726535379886627},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.46715062856674194},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.32503601908683777},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.28007227182388306},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2744113802909851},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.27436769008636475},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.25808781385421753},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.24861648678779602},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.10399565100669861},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.0986858606338501}],"concepts":[{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.9297780990600586},{"id":"https://openalex.org/C94915269","wikidata":"https://www.wikidata.org/wiki/Q1834857","display_name":"Detector","level":2,"score":0.729116678237915},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.5718595385551453},{"id":"https://openalex.org/C2781355719","wikidata":"https://www.wikidata.org/wiki/Q2080698","display_name":"Deflection (physics)","level":2,"score":0.5335778594017029},{"id":"https://openalex.org/C2780598303","wikidata":"https://www.wikidata.org/wiki/Q65921492","display_name":"Flexibility (engineering)","level":2,"score":0.5071089267730713},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4726535379886627},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.46715062856674194},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.32503601908683777},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.28007227182388306},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2744113802909851},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.27436769008636475},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.25808781385421753},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.24861648678779602},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.10399565100669861},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0986858606338501},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/essderc.2016.7599681","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2016.7599681","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 46th European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","score":0.5899999737739563,"id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W2010805559","https://openalex.org/W2026509107","https://openalex.org/W2044972571","https://openalex.org/W2053755427","https://openalex.org/W2071810680","https://openalex.org/W2076042467","https://openalex.org/W2089951020","https://openalex.org/W2094396500","https://openalex.org/W2148648899"],"related_works":["https://openalex.org/W2107125189","https://openalex.org/W2760996480","https://openalex.org/W2303727101","https://openalex.org/W2368223165","https://openalex.org/W2357307510","https://openalex.org/W2048171849","https://openalex.org/W2113391978","https://openalex.org/W4366570393","https://openalex.org/W4294739349","https://openalex.org/W2372176723"],"abstract_inverted_index":{"Currently":[0],"available":[1],"sensor":[2,151],"systems":[3],"relying":[4],"on":[5,162],"multi-cantilever":[6,163],"deflection":[7],"detection":[8],"by":[9,18],"optical":[10],"means":[11],"are":[12,31,170],"generally":[13],"limited":[14],"in":[15,135,165],"their":[16],"functionality":[17],"complexity":[19],"and":[20,72,94,109,154],"cost.":[21],"Several":[22],"laser":[23,70],"sources":[24],"as":[25,27],"well":[26],"big":[28],"sized":[29,75],"detectors":[30],"needed":[32],"to":[33,105,141],"record":[34],"the":[35,42,45,119,128],"signal":[36],"from":[37,139],"each":[38,173],"cantilever":[39,64,120],"separately.":[40],"In":[41,144],"frame":[43],"of":[44,61,114,127,156,159],"ENIAC":[46],"Joint":[47],"Undertaking":[48],"project":[49],"Lab4MEMS":[50],"II":[51],"our":[52],"group":[53],"is":[54,82,102],"currently":[55],"developing":[56],"a":[57,68,73,83,98,107,149],"novel":[58],"device":[59,81],"capable":[60,113],"sensing":[62],"large":[63],"arrays":[65,164],"using":[66],"only":[67],"single":[69],"source":[71],"small":[74],"position":[76],"sensitive":[77],"detector":[78],"(PSD).":[79],"The":[80,100,125],"closely":[84],"packed":[85],"highly":[86],"integrated":[87],"Micro-Opto-Electro-Mechanical-System":[88],"(MOEMS)":[89],"featuring":[90],"dedicated":[91],"optics,":[92],"electronics":[93],"software":[95],"combined":[96],"with":[97],"micro-mirror.":[99],"system":[101,129,152],"being":[103],"developed":[104],"become":[106],"lightweight":[108],"compact":[110],"portable":[111],"device,":[112],"determining":[115],"measurement":[116],"positions":[117],"across":[118],"array":[121],"providing":[122],"self-adjustment":[123],"automatically.":[124],"flexibility":[126],"makes":[130],"it":[131],"interesting":[132],"for":[133,172],"use":[134],"several":[136,167],"fields":[137],"ranging":[138],"research":[140],"industrial":[142],"application.":[143],"this":[145],"paper":[146],"we":[147],"show":[148],"general":[150],"overview":[153],"examples":[155],"representative":[157],"results":[158],"measurements":[160],"performed":[161],"which":[166],"vibrational":[168],"modes":[169],"recorded":[171],"cantilever.":[174]},"counts_by_year":[{"year":2018,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}