{"id":"https://openalex.org/W2538411677","doi":"https://doi.org/10.1109/essderc.2016.7599640","title":"CMOS-compatible SOI micro-hotplate-based oxygen sensor","display_name":"CMOS-compatible SOI micro-hotplate-based oxygen sensor","publication_year":2016,"publication_date":"2016-09-01","ids":{"openalex":"https://openalex.org/W2538411677","doi":"https://doi.org/10.1109/essderc.2016.7599640","mag":"2538411677"},"language":"en","primary_location":{"id":"doi:10.1109/essderc.2016.7599640","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2016.7599640","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 46th European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref","datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://doi.org/10.17863/cam.34151","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103998160","display_name":"Viorel Avramescu","orcid":null},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Viorel Avramescu","raw_affiliation_strings":["Sensors and Wireless Lab Bucharest, ACS Global Lab, Bucharest, Romania"],"affiliations":[{"raw_affiliation_string":"Sensors and Wireless Lab Bucharest, ACS Global Lab, Bucharest, Romania","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028536242","display_name":"Andrea De Luca","orcid":"https://orcid.org/0000-0002-9481-4747"},"institutions":[{"id":"https://openalex.org/I241749","display_name":"University of Cambridge","ror":"https://ror.org/013meh722","country_code":"GB","type":"education","lineage":["https://openalex.org/I241749"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Andrea De Luca","raw_affiliation_strings":["Department of Engineering, University of Cambridge, Cambridge, UK"],"affiliations":[{"raw_affiliation_string":"Department of Engineering, University of Cambridge, Cambridge, UK","institution_ids":["https://openalex.org/I241749"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025778760","display_name":"M. Brezeanu","orcid":"https://orcid.org/0000-0001-7835-4798"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Mihai Brezeanu","raw_affiliation_strings":["Sensors and Wireless Lab Bucharest, ACS Global Lab, Bucharest, Romania"],"affiliations":[{"raw_affiliation_string":"Sensors and Wireless Lab Bucharest, ACS Global Lab, Bucharest, Romania","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108143835","display_name":"Syed Zeeshan Ali","orcid":null},"institutions":[{"id":"https://openalex.org/I4210165949","display_name":"Cambridge CMOS Sensors (United Kingdom)","ror":"https://ror.org/04kwbxb88","country_code":"GB","type":"company","lineage":["https://openalex.org/I4210165949"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Syed Zeeshan Ali","raw_affiliation_strings":["Cambridge CMOS Sensors Ltd, Deanland House, 160 Cowley Road, CB4 0DL, UK"],"affiliations":[{"raw_affiliation_string":"Cambridge CMOS Sensors Ltd, Deanland House, 160 Cowley Road, CB4 0DL, UK","institution_ids":["https://openalex.org/I4210165949"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066534887","display_name":"Florin Udrea","orcid":"https://orcid.org/0000-0002-7288-3370"},"institutions":[{"id":"https://openalex.org/I4210165949","display_name":"Cambridge CMOS Sensors (United Kingdom)","ror":"https://ror.org/04kwbxb88","country_code":"GB","type":"company","lineage":["https://openalex.org/I4210165949"]},{"id":"https://openalex.org/I241749","display_name":"University of Cambridge","ror":"https://ror.org/013meh722","country_code":"GB","type":"education","lineage":["https://openalex.org/I241749"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Florin Udrea","raw_affiliation_strings":["Cambridge CMOS Sensors Ltd, Cambridge, UK","Department of Engineering, University of Cambridge, Cambridge, UK"],"affiliations":[{"raw_affiliation_string":"Cambridge CMOS Sensors Ltd, Cambridge, UK","institution_ids":["https://openalex.org/I4210165949"]},{"raw_affiliation_string":"Department of Engineering, University of Cambridge, Cambridge, UK","institution_ids":["https://openalex.org/I241749"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084322755","display_name":"Octavian Buiu","orcid":"https://orcid.org/0000-0002-5713-4304"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Octavian Buiu","raw_affiliation_strings":["Sensors and Wireless Lab Bucharest, ACS Global Lab, Bucharest, Romania"],"affiliations":[{"raw_affiliation_string":"Sensors and Wireless Lab Bucharest, ACS Global Lab, Bucharest, Romania","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085343841","display_name":"C. Cobianu","orcid":"https://orcid.org/0000-0001-9237-9262"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Cornel Cobianu","raw_affiliation_strings":["Sensors and Wireless Lab Bucharest, ACS Global Lab, Bucharest, Romania"],"affiliations":[{"raw_affiliation_string":"Sensors and Wireless Lab Bucharest, ACS Global Lab, Bucharest, Romania","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110480826","display_name":"Bogdan C\u0103t\u0103lin \u0218erban","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Bogdan Serban","raw_affiliation_strings":["Sensors and Wireless Lab Bucharest, ACS Global Lab, Bucharest, Romania"],"affiliations":[{"raw_affiliation_string":"Sensors and Wireless Lab Bucharest, ACS Global Lab, Bucharest, Romania","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085053574","display_name":"Julian W. Gardner","orcid":"https://orcid.org/0000-0002-4706-0049"},"institutions":[{"id":"https://openalex.org/I39555362","display_name":"University of Warwick","ror":"https://ror.org/01a77tt86","country_code":"GB","type":"education","lineage":["https://openalex.org/I39555362"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Julian Gardner","raw_affiliation_strings":["University of Warwick, School of Engineering, Coventry, UK"],"affiliations":[{"raw_affiliation_string":"University of Warwick, School of Engineering, Coventry, UK","institution_ids":["https://openalex.org/I39555362"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063410119","display_name":"V. Dumitru","orcid":"https://orcid.org/0000-0001-6378-4891"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Viorel Dumitru","raw_affiliation_strings":["Sensors and Wireless Lab Bucharest, ACS Global Lab, Bucharest, Romania"],"affiliations":[{"raw_affiliation_string":"Sensors and Wireless Lab Bucharest, ACS Global Lab, Bucharest, Romania","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110107952","display_name":"Alisa Stratulat","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Alisa Stratulat","raw_affiliation_strings":["Sensors and Wireless Lab Bucharest, ACS Global Lab, Bucharest, Romania"],"affiliations":[{"raw_affiliation_string":"Sensors and Wireless Lab Bucharest, ACS Global Lab, Bucharest, Romania","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":11,"corresponding_author_ids":["https://openalex.org/A5103998160"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.3718,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.67054546,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"280","last_page":"283"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.56330806016922},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.4760596454143524},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.47397202253341675},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.3812384605407715},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.3519137501716614},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2744579315185547},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.24213141202926636},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.0938434898853302}],"concepts":[{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.56330806016922},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.4760596454143524},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.47397202253341675},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3812384605407715},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.3519137501716614},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2744579315185547},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.24213141202926636},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0938434898853302}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.1109/essderc.2016.7599640","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2016.7599640","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 46th European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},{"id":"pmh:oai:generic.eprints.org:868890","is_oa":false,"landing_page_url":"http://publications.eng.cam.ac.uk/868890/","pdf_url":null,"source":{"id":"https://openalex.org/S4406922847","display_name":"Cambridge University Engineering Department Publications Database","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Conference or Workshop Item"},{"id":"pmh:oai:www.repository.cam.ac.uk:1810/286845","is_oa":false,"landing_page_url":"https://www.repository.cam.ac.uk/handle/1810/286845","pdf_url":null,"source":{"id":"https://openalex.org/S4306401777","display_name":"Apollo (University of Cambridge)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I241749","host_organization_name":"University of Cambridge","host_organization_lineage":["https://openalex.org/I241749"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Conference Object"},{"id":"doi:10.17863/cam.34151","is_oa":true,"landing_page_url":"https://doi.org/10.17863/cam.34151","pdf_url":null,"source":{"id":"https://openalex.org/S7407050737","display_name":"Apollo","issn_l":null,"issn":[],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":null,"raw_source_name":null,"raw_type":"article"}],"best_oa_location":{"id":"doi:10.17863/cam.34151","is_oa":true,"landing_page_url":"https://doi.org/10.17863/cam.34151","pdf_url":null,"source":{"id":"https://openalex.org/S7407050737","display_name":"Apollo","issn_l":null,"issn":[],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G4751106683","display_name":null,"funder_award_id":"EP/K035282/1","funder_id":"https://openalex.org/F4320334627","funder_display_name":"Engineering and Physical Sciences Research Council"}],"funders":[{"id":"https://openalex.org/F4320334627","display_name":"Engineering and Physical Sciences Research Council","ror":"https://ror.org/0439y7842"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W1669093829","https://openalex.org/W1711274862","https://openalex.org/W1992324231","https://openalex.org/W2014623387","https://openalex.org/W2020268241","https://openalex.org/W2024040956","https://openalex.org/W2039937342","https://openalex.org/W2043034649","https://openalex.org/W2044549947","https://openalex.org/W2053199621","https://openalex.org/W2064632152","https://openalex.org/W2074130654","https://openalex.org/W2075655721","https://openalex.org/W2079000393","https://openalex.org/W2097531253","https://openalex.org/W2132941586","https://openalex.org/W2150859722","https://openalex.org/W2159334502","https://openalex.org/W2160992885"],"related_works":["https://openalex.org/W2104300577","https://openalex.org/W4206445530","https://openalex.org/W2771786520","https://openalex.org/W2034653092","https://openalex.org/W2174354966","https://openalex.org/W2810180604","https://openalex.org/W2325281603","https://openalex.org/W2944964251","https://openalex.org/W2012754971","https://openalex.org/W4246450666"],"abstract_inverted_index":{"The":[0,32],"paper":[1],"reports":[2],"upon":[3],"the":[4,72,76,85,115,120],"design":[5],"and":[6,20,61,79,91],"characterization":[7],"of":[8,74,122],"a":[9,110],"resistive":[10],"O":[11,43,99,126],"<inf":[12,36,40,44,100,127],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[13,37,41,45,101,128],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</inf>":[14,102,129],"sensor,":[15],"which":[16],"is":[17,21,114],"fully":[18],"CMOS-compatible":[19],"based":[22],"on":[23,27],"an":[24],"ultra-low-power":[25],"Silicon":[26],"Insulator":[28],"(SOI)":[29],"micro-hotplate":[30],"membrane.":[31],"microsensor":[33],"employs":[34],"SrTi":[35],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">0.4</inf>":[38],"Fe":[39],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">0.6</inf>":[42],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2.8</inf>":[46],"(STFO60)":[47],"as":[48,125],"sensing":[49,77],"layer.":[50],"Thermo-Gravimetric":[51],"Analysis":[52],"(TGA)":[53],"Energy-Dispersive":[54],"X-ray":[55,58],"Spectroscopy":[56],"(EDX),":[57],"Diffraction":[59],"(XRD)":[60],"Scanning":[62],"Electron":[63],"Microscope":[64],"(SEM)":[65],"techniques":[66],"have":[67],"been":[68],"used":[69],"to":[70,98,107],"assess":[71],"quality":[73],"both":[75],"layer":[78],"STFO-SOI":[80],"interface.":[81],"At":[82],"room":[83],"temperature,":[84],"SOI":[86],"sensor":[87],"shows":[88],"good":[89],"sensitivity":[90],"fast":[92],"response":[93],"time":[94],"(\u2264":[95],"6":[96],"seconds)":[97],"concentration":[103],"ranging":[104],"from":[105],"0%":[106],"20%":[108],"in":[109],"nitrogen":[111],"atmosphere.":[112],"This":[113],"first":[116],"experimental":[117],"result":[118],"showing":[119],"potential":[121],"this":[123],"structure":[124],"sensor.":[130]},"counts_by_year":[{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2026-04-05T17:49:38.594831","created_date":"2025-10-10T00:00:00"}