{"id":"https://openalex.org/W2537505931","doi":"https://doi.org/10.1109/essderc.2016.7599627","title":"Opportunities brought by sequential 3D CoolCube\u2122 integration","display_name":"Opportunities brought by sequential 3D CoolCube\u2122 integration","publication_year":2016,"publication_date":"2016-09-01","ids":{"openalex":"https://openalex.org/W2537505931","doi":"https://doi.org/10.1109/essderc.2016.7599627","mag":"2537505931"},"language":"en","primary_location":{"id":"doi:10.1109/essderc.2016.7599627","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2016.7599627","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 46th European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5019983362","display_name":"M. Vinet","orcid":"https://orcid.org/0000-0001-6757-295X"},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210152203","display_name":"Campus France","ror":"https://ror.org/04wtce741","country_code":"FR","type":"funder","lineage":["https://openalex.org/I4210152203"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"Maud Vinet","raw_affiliation_strings":["CEA-Leti MINATEC Campus, France"],"affiliations":[{"raw_affiliation_string":"CEA-Leti MINATEC Campus, France","institution_ids":["https://openalex.org/I4210150049","https://openalex.org/I4210152203","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045610872","display_name":"P. Batude","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Perrine Batude","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112344520","display_name":"C. Fenouillet-B\u00e9ranger","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Claire Fenouillet-Beranger","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085640684","display_name":"Laurent Brunet","orcid":"https://orcid.org/0009-0005-5148-9541"},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Laurent Brunet","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041560295","display_name":"Vincent Mazzochi","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Vincent Mazzochi","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042092735","display_name":"Cao-Minh Vincent Lu","orcid":null},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Cao-Minh Vincent Lu","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073683355","display_name":"Fabien Deprat","orcid":"https://orcid.org/0000-0002-4465-7325"},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Fabien Deprat","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009196233","display_name":"J. Micout","orcid":null},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Jessy Micout","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066003606","display_name":"B. Pr\u00e9vitali","orcid":null},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Bernard Previtali","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090287891","display_name":"P. Besombes","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Paul Besombes","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033867079","display_name":"N. Rambal","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Nils Rambal","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069215871","display_name":"F. Andrieu","orcid":"https://orcid.org/0000-0002-1951-1033"},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Francois Andrieu","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073233302","display_name":"Olivier Billoint","orcid":null},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Olivier Billoint","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019686563","display_name":"M. Brocard","orcid":null},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Melanie Brocard","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037060249","display_name":"S\u00e9bastien Thuries","orcid":null},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Sebastien Thuries","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078565365","display_name":"Guillaume Berhault","orcid":null},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Guillaume Berhault","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102247114","display_name":"Cristiano Lopes dos Santos","orcid":null},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Cristiano Lopes Dos Santos","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030155683","display_name":"G. Cibrario","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Gerald Cibrario","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112314416","display_name":"Fabien Clermidy","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Fabien Clermidy","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076829404","display_name":"Daniel Gitlin","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Daniel Gitlin","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103521312","display_name":"Olivier Faynot","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Olivier Faynot","raw_affiliation_strings":["Daniel Gitlin is an independent consultant working for CEA-Leti","Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"Daniel Gitlin is an independent consultant working for CEA-Leti","institution_ids":[]},{"raw_affiliation_string":"Universit\u00e9 Grenoble Alpes, C-M.V. Lu is with STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693","https://openalex.org/I899635006"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":21,"corresponding_author_ids":["https://openalex.org/A5019983362"],"corresponding_institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049","https://openalex.org/I4210152203"],"apc_list":null,"apc_paid":null,"fwci":1.3067,"has_fulltext":false,"cited_by_count":14,"citation_normalized_percentile":{"value":0.8296744,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"226","last_page":"229"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10363","display_name":"Low-power high-performance VLSI design","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.7160919904708862},{"id":"https://openalex.org/keywords/very-large-scale-integration","display_name":"Very-large-scale integration","score":0.6710879802703857},{"id":"https://openalex.org/keywords/stacking","display_name":"Stacking","score":0.6419093608856201},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.53212571144104},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5066867470741272},{"id":"https://openalex.org/keywords/scaling","display_name":"Scaling","score":0.4989969730377197},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.46559369564056396},{"id":"https://openalex.org/keywords/reduction","display_name":"Reduction (mathematics)","score":0.4502224624156952},{"id":"https://openalex.org/keywords/process-integration","display_name":"Process integration","score":0.4470073878765106},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3918381333351135},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3234669268131256},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.2659534215927124},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2431333065032959},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.18609580397605896},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.08538153767585754},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.08321872353553772},{"id":"https://openalex.org/keywords/process-engineering","display_name":"Process engineering","score":0.08200404047966003}],"concepts":[{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.7160919904708862},{"id":"https://openalex.org/C14580979","wikidata":"https://www.wikidata.org/wiki/Q876049","display_name":"Very-large-scale integration","level":2,"score":0.6710879802703857},{"id":"https://openalex.org/C33347731","wikidata":"https://www.wikidata.org/wiki/Q285210","display_name":"Stacking","level":2,"score":0.6419093608856201},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.53212571144104},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5066867470741272},{"id":"https://openalex.org/C99844830","wikidata":"https://www.wikidata.org/wiki/Q102441924","display_name":"Scaling","level":2,"score":0.4989969730377197},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.46559369564056396},{"id":"https://openalex.org/C111335779","wikidata":"https://www.wikidata.org/wiki/Q3454686","display_name":"Reduction (mathematics)","level":2,"score":0.4502224624156952},{"id":"https://openalex.org/C54725748","wikidata":"https://www.wikidata.org/wiki/Q7247277","display_name":"Process integration","level":2,"score":0.4470073878765106},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3918381333351135},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3234669268131256},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.2659534215927124},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2431333065032959},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.18609580397605896},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.08538153767585754},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.08321872353553772},{"id":"https://openalex.org/C21880701","wikidata":"https://www.wikidata.org/wiki/Q2144042","display_name":"Process engineering","level":1,"score":0.08200404047966003},{"id":"https://openalex.org/C46141821","wikidata":"https://www.wikidata.org/wiki/Q209402","display_name":"Nuclear magnetic resonance","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/essderc.2016.7599627","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2016.7599627","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 46th European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","score":0.4300000071525574,"id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320316862","display_name":"Equipex","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":16,"referenced_works":["https://openalex.org/W1751600266","https://openalex.org/W1964678809","https://openalex.org/W2012602696","https://openalex.org/W2012709351","https://openalex.org/W2013397418","https://openalex.org/W2023668401","https://openalex.org/W2031887472","https://openalex.org/W2128337944","https://openalex.org/W2163262984","https://openalex.org/W2245094412","https://openalex.org/W2525903134","https://openalex.org/W2526709850","https://openalex.org/W4232424867","https://openalex.org/W4244413711","https://openalex.org/W6637775719","https://openalex.org/W6653767489"],"related_works":["https://openalex.org/W2035329725","https://openalex.org/W4376641153","https://openalex.org/W2070875936","https://openalex.org/W4250391473","https://openalex.org/W3045075405","https://openalex.org/W4302292679","https://openalex.org/W4241625287","https://openalex.org/W2501578203","https://openalex.org/W2113108952","https://openalex.org/W2101762475"],"abstract_inverted_index":{"3D":[0,60,86],"VLSI":[1],"with":[2,15],"a":[3,16],"CoolCube\u2122":[4,76,90],"monolithic":[5],"integration":[6,61],"flow":[7],"allows":[8],"vertically":[9],"stacking":[10],"several":[11],"layers":[12],"of":[13,23,66,85],"devices":[14,33],"unique":[17],"connecting":[18],"via":[19],"density":[20,34],"above":[21],"tens":[22],"million/mm":[24],"<sup":[25],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[26],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[27],".":[28],"This":[29],"results":[30],"in":[31,37,64],"increased":[32],"and":[35,39,77],"gains":[36],"power":[38,56],"performance":[40],"thanks":[41],"to":[42,50,55],"wire-length":[43],"reduction":[44],"without":[45],"the":[46,72,80],"extra":[47],"cost":[48],"associated":[49],"transistor":[51],"scaling.":[52],"In":[53],"addition":[54],"saving,":[57],"this":[58],"true":[59],"opens":[62],"perspectives":[63],"terms":[65],"heterogeneous":[67],"integration.":[68,91],"We":[69],"will":[70,78],"review":[71],"opportunities":[73],"brought":[74],"by":[75],"present":[79],"most":[81],"advanced":[82],"technological":[83],"demonstration":[84],"CMOS":[87,89],"over":[88]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":4},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":3}],"updated_date":"2026-04-04T16:13:02.066488","created_date":"2025-10-10T00:00:00"}