{"id":"https://openalex.org/W1985467742","doi":"https://doi.org/10.1109/essderc.2014.6948759","title":"A 6.7 MHz nanoelectromechanical ring oscillator using curved cantilever switches coated with amorphous carbon","display_name":"A 6.7 MHz nanoelectromechanical ring oscillator using curved cantilever switches coated with amorphous carbon","publication_year":2014,"publication_date":"2014-09-01","ids":{"openalex":"https://openalex.org/W1985467742","doi":"https://doi.org/10.1109/essderc.2014.6948759","mag":"1985467742"},"language":"en","primary_location":{"id":"doi:10.1109/essderc.2014.6948759","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2014.6948759","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 44th European Solid State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://infoscience.epfl.ch/record/203107","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5002788508","display_name":"Christopher L. Ayala","orcid":"https://orcid.org/0000-0002-3510-9626"},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH","US"],"is_corresponding":false,"raw_author_name":"Christopher L. Ayala","raw_affiliation_strings":["IBM Research - Zurich, R\u00fcschlikon, Switzerland","IBM Research --- Zurich, R\u00fcschlikon, Switzerland#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research - Zurich, R\u00fcschlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]},{"raw_affiliation_string":"IBM Research --- Zurich, R\u00fcschlikon, Switzerland#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069988603","display_name":"Daniel Grogg","orcid":null},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH","US"],"is_corresponding":false,"raw_author_name":"Daniel Grogg","raw_affiliation_strings":["IBM Research - Zurich, R\u00fcschlikon, Switzerland","IBM Research --- Zurich, R\u00fcschlikon, Switzerland#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research - Zurich, R\u00fcschlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]},{"raw_affiliation_string":"IBM Research --- Zurich, R\u00fcschlikon, Switzerland#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062560576","display_name":"Antonios Bazigos","orcid":"https://orcid.org/0000-0002-2967-8208"},"institutions":[{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Antonios Bazigos","raw_affiliation_strings":["Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne, Lausanne, Switzerland","\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne; Lausanne Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne, Lausanne, Switzerland","institution_ids":["https://openalex.org/I5124864"]},{"raw_affiliation_string":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne; Lausanne Switzerland","institution_ids":["https://openalex.org/I5124864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083925703","display_name":"Montserrat Fern\u00e1ndez-Bola\u00f1os Bad\u00eda","orcid":null},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH","US"],"is_corresponding":false,"raw_author_name":"Montserrat Fernandez-Bolanos Badia","raw_affiliation_strings":["IBM Research - Zurich, R\u00fcschlikon, Switzerland","IBM Research --- Zurich, R\u00fcschlikon, Switzerland#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research - Zurich, R\u00fcschlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]},{"raw_affiliation_string":"IBM Research --- Zurich, R\u00fcschlikon, Switzerland#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085502498","display_name":"Urs Duerig","orcid":"https://orcid.org/0000-0003-4017-1894"},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH","US"],"is_corresponding":false,"raw_author_name":"Urs T. Duerig","raw_affiliation_strings":["IBM Research - Zurich, R\u00fcschlikon, Switzerland","IBM Research --- Zurich, R\u00fcschlikon, Switzerland#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research - Zurich, R\u00fcschlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]},{"raw_affiliation_string":"IBM Research --- Zurich, R\u00fcschlikon, Switzerland#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034920866","display_name":"M. Despont","orcid":"https://orcid.org/0000-0002-2334-1778"},"institutions":[{"id":"https://openalex.org/I135218257","display_name":"Swiss Center for Electronics and Microtechnology (Switzerland)","ror":"https://ror.org/05nrrsx06","country_code":"CH","type":"company","lineage":["https://openalex.org/I135218257"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Michel Despont","raw_affiliation_strings":["Centre Suisse d'Electronique et de Microtechnique, Neuch\u00e2tel, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centre Suisse d'Electronique et de Microtechnique, Neuch\u00e2tel, Switzerland","institution_ids":["https://openalex.org/I135218257"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5001983294","display_name":"Christoph Hagleitner","orcid":"https://orcid.org/0000-0002-6815-7835"},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH","US"],"is_corresponding":false,"raw_author_name":"Christoph Hagleitner","raw_affiliation_strings":["IBM Research - Zurich, R\u00fcschlikon, Switzerland","IBM Research --- Zurich, R\u00fcschlikon, Switzerland#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research - Zurich, R\u00fcschlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]},{"raw_affiliation_string":"IBM Research --- Zurich, R\u00fcschlikon, Switzerland#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":7,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.5259,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.81733289,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"66","last_page":"69"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ring-oscillator","display_name":"Ring oscillator","score":0.6714480519294739},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.5730004906654358},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.545634925365448},{"id":"https://openalex.org/keywords/colpitts-oscillator","display_name":"Colpitts oscillator","score":0.514575183391571},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5129460692405701},{"id":"https://openalex.org/keywords/very-large-scale-integration","display_name":"Very-large-scale integration","score":0.49140822887420654},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.46177661418914795},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.4405527114868164},{"id":"https://openalex.org/keywords/digitally-controlled-oscillator","display_name":"Digitally controlled oscillator","score":0.43611258268356323},{"id":"https://openalex.org/keywords/nanosecond","display_name":"Nanosecond","score":0.42081645131111145},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.41480138897895813},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.35772833228111267},{"id":"https://openalex.org/keywords/vack\u00e1\u0159-oscillator","display_name":"Vack\u00e1\u0159 oscillator","score":0.30348843336105347},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.29385650157928467},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22657763957977295},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.22464579343795776},{"id":"https://openalex.org/keywords/voltage-controlled-oscillator","display_name":"Voltage-controlled oscillator","score":0.20068293809890747},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.0913785994052887}],"concepts":[{"id":"https://openalex.org/C104111718","wikidata":"https://www.wikidata.org/wiki/Q2153973","display_name":"Ring oscillator","level":3,"score":0.6714480519294739},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.5730004906654358},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.545634925365448},{"id":"https://openalex.org/C146847952","wikidata":"https://www.wikidata.org/wiki/Q933121","display_name":"Colpitts oscillator","level":5,"score":0.514575183391571},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5129460692405701},{"id":"https://openalex.org/C14580979","wikidata":"https://www.wikidata.org/wiki/Q876049","display_name":"Very-large-scale integration","level":2,"score":0.49140822887420654},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.46177661418914795},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.4405527114868164},{"id":"https://openalex.org/C167872736","wikidata":"https://www.wikidata.org/wiki/Q5276224","display_name":"Digitally controlled oscillator","level":5,"score":0.43611258268356323},{"id":"https://openalex.org/C51141536","wikidata":"https://www.wikidata.org/wiki/Q838801","display_name":"Nanosecond","level":3,"score":0.42081645131111145},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.41480138897895813},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.35772833228111267},{"id":"https://openalex.org/C111657199","wikidata":"https://www.wikidata.org/wiki/Q2300256","display_name":"Vack\u00e1\u0159 oscillator","level":4,"score":0.30348843336105347},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.29385650157928467},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22657763957977295},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.22464579343795776},{"id":"https://openalex.org/C5291336","wikidata":"https://www.wikidata.org/wiki/Q852341","display_name":"Voltage-controlled oscillator","level":3,"score":0.20068293809890747},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.0913785994052887},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/essderc.2014.6948759","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2014.6948759","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 44th European Solid State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},{"id":"pmh:oai:infoscience.epfl.ch:203107","is_oa":true,"landing_page_url":"http://infoscience.epfl.ch/record/203107","pdf_url":null,"source":{"id":"https://openalex.org/S4306400487","display_name":"Infoscience (Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text"},{"id":"pmh:oai:infoscience.tind.io:207156","is_oa":true,"landing_page_url":"http://infoscience.epfl.ch/record/207156","pdf_url":null,"source":{"id":"https://openalex.org/S4306400487","display_name":"Infoscience (Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-nc-nd","license_id":"https://openalex.org/licenses/cc-by-nc-nd","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"conference proceedings"}],"best_oa_location":{"id":"pmh:oai:infoscience.epfl.ch:203107","is_oa":true,"landing_page_url":"http://infoscience.epfl.ch/record/203107","pdf_url":null,"source":{"id":"https://openalex.org/S4306400487","display_name":"Infoscience (Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.5}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1998885047","https://openalex.org/W2020998658","https://openalex.org/W2072524948","https://openalex.org/W2077070937","https://openalex.org/W2118418514","https://openalex.org/W2120217715","https://openalex.org/W2538854995","https://openalex.org/W2963771263"],"related_works":["https://openalex.org/W4230767006","https://openalex.org/W1521697648","https://openalex.org/W1989207882","https://openalex.org/W2354924531","https://openalex.org/W1538672484","https://openalex.org/W2188820598","https://openalex.org/W3197208440","https://openalex.org/W42113357","https://openalex.org/W2188709823","https://openalex.org/W3102884484"],"abstract_inverted_index":{"Nanoelectromechanical":[0],"(NEM)":[1],"switches":[2],"have":[3],"the":[4,14,24,27,83,104],"potential":[5],"to":[6],"complement":[7],"or":[8],"replace":[9],"traditional":[10],"CMOS":[11],"transistors":[12],"in":[13],"area":[15],"of":[16,26,48,58,78,88,96],"ultra-low":[17],"power":[18],"digital":[19,34],"electronics.":[20],"This":[21],"paper":[22],"reports":[23],"demonstration":[25],"first":[28],"ring":[29,72],"oscillator":[30,73],"built":[31],"using":[32],"cell-level":[33],"logic":[35],"elements":[36],"based":[37],"on":[38,103],"curved":[39],"NEM":[40,43],"switches.":[41],"The":[42,71,91],"switch":[44],"has":[45],"a":[46,76,100],"size":[47],"5\u00d73":[49],"\u03bcm":[50],"<sup":[51],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[52],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[53],",":[54],"an":[55,107],"air":[56],"gap":[57],"60":[59],"nm":[60],"and":[61,81,94,118],"is":[62,99],"coated":[63],"with":[64,111],"amorphous":[65],"carbon":[66],"(a-C)":[67],"for":[68],"reliable":[69],"operation.":[70],"operates":[74],"at":[75],"frequency":[77],"6.7":[79],"MHz":[80],"confirms":[82],"simulated":[84],"inverter":[85],"propagation":[86],"delay":[87],"25":[89],"ns.":[90],"successful":[92],"fabrication":[93],"measurement":[95],"this":[97],"demonstrator":[98],"key":[101],"milestone":[102],"way":[105],"towards":[106],"optimized,":[108],"scaled":[109],"technology":[110],"sub-nanosecond":[112],"switching":[113],"times,":[114],"lower":[115],"operating":[116],"voltages":[117],"VLSI":[119],"implementation.":[120]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2015,"cited_by_count":6},{"year":2014,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}