{"id":"https://openalex.org/W2068173362","doi":"https://doi.org/10.1109/essderc.2013.6818893","title":"Investigation of gate material ductility enables flexible a-IGZO TFTs bendable to a radius of 1.7 mm","display_name":"Investigation of gate material ductility enables flexible a-IGZO TFTs bendable to a radius of 1.7 mm","publication_year":2013,"publication_date":"2013-09-01","ids":{"openalex":"https://openalex.org/W2068173362","doi":"https://doi.org/10.1109/essderc.2013.6818893","mag":"2068173362"},"language":"en","primary_location":{"id":"doi:10.1109/essderc.2013.6818893","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2013.6818893","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5028256613","display_name":"Niko M\u00fcnzenrieder","orcid":"https://orcid.org/0000-0003-4653-5927"},"institutions":[{"id":"https://openalex.org/I35440088","display_name":"ETH Zurich","ror":"https://ror.org/05a28rw58","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I35440088"]},{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":true,"raw_author_name":"Niko Munzenrieder","raw_affiliation_strings":["Institute for Electronics, Swiss Federal Institute of Technology Zurich, Zurich, Switzerland","Institute for Electronics Swiss Federal Institute of Technology Zurich Zurich, 8092, Switzerland"],"affiliations":[{"raw_affiliation_string":"Institute for Electronics, Swiss Federal Institute of Technology Zurich, Zurich, Switzerland","institution_ids":["https://openalex.org/I5124864"]},{"raw_affiliation_string":"Institute for Electronics Swiss Federal Institute of Technology Zurich Zurich, 8092, Switzerland","institution_ids":["https://openalex.org/I35440088"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030656573","display_name":"Luisa Petti","orcid":"https://orcid.org/0000-0003-0264-7185"},"institutions":[{"id":"https://openalex.org/I35440088","display_name":"ETH Zurich","ror":"https://ror.org/05a28rw58","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I35440088"]},{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Luisa Petti","raw_affiliation_strings":["Institute for Electronics, Swiss Federal Institute of Technology Zurich, Zurich, Switzerland","Institute for Electronics Swiss Federal Institute of Technology Zurich Zurich, 8092, Switzerland"],"affiliations":[{"raw_affiliation_string":"Institute for Electronics, Swiss Federal Institute of Technology Zurich, Zurich, Switzerland","institution_ids":["https://openalex.org/I5124864"]},{"raw_affiliation_string":"Institute for Electronics Swiss Federal Institute of Technology Zurich Zurich, 8092, Switzerland","institution_ids":["https://openalex.org/I35440088"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013899612","display_name":"Christoph Zysset","orcid":null},"institutions":[{"id":"https://openalex.org/I35440088","display_name":"ETH Zurich","ror":"https://ror.org/05a28rw58","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I35440088"]},{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Christoph Zysset","raw_affiliation_strings":["Institute for Electronics, Swiss Federal Institute of Technology Zurich, Zurich, Switzerland","Institute for Electronics Swiss Federal Institute of Technology Zurich Zurich, 8092, Switzerland"],"affiliations":[{"raw_affiliation_string":"Institute for Electronics, Swiss Federal Institute of Technology Zurich, Zurich, Switzerland","institution_ids":["https://openalex.org/I5124864"]},{"raw_affiliation_string":"Institute for Electronics Swiss Federal Institute of Technology Zurich Zurich, 8092, Switzerland","institution_ids":["https://openalex.org/I35440088"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061393795","display_name":"Deniz Gork","orcid":null},"institutions":[{"id":"https://openalex.org/I35440088","display_name":"ETH Zurich","ror":"https://ror.org/05a28rw58","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I35440088"]},{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Deniz Gork","raw_affiliation_strings":["Institute for Electronics, Swiss Federal Institute of Technology Zurich, Zurich, Switzerland","Institute for Electronics Swiss Federal Institute of Technology Zurich Zurich, 8092, Switzerland"],"affiliations":[{"raw_affiliation_string":"Institute for Electronics, Swiss Federal Institute of Technology Zurich, Zurich, Switzerland","institution_ids":["https://openalex.org/I5124864"]},{"raw_affiliation_string":"Institute for Electronics Swiss Federal Institute of Technology Zurich Zurich, 8092, Switzerland","institution_ids":["https://openalex.org/I35440088"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052825122","display_name":"Lars B\u00fcthe","orcid":null},"institutions":[{"id":"https://openalex.org/I35440088","display_name":"ETH Zurich","ror":"https://ror.org/05a28rw58","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I35440088"]},{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Lars Buthe","raw_affiliation_strings":["Institute for Electronics, Swiss Federal Institute of Technology Zurich, Zurich, Switzerland","Institute for Electronics Swiss Federal Institute of Technology Zurich Zurich, 8092, Switzerland"],"affiliations":[{"raw_affiliation_string":"Institute for Electronics, Swiss Federal Institute of Technology Zurich, Zurich, Switzerland","institution_ids":["https://openalex.org/I5124864"]},{"raw_affiliation_string":"Institute for Electronics Swiss Federal Institute of Technology Zurich Zurich, 8092, Switzerland","institution_ids":["https://openalex.org/I35440088"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025109886","display_name":"Giovanni A. Salvatore","orcid":"https://orcid.org/0000-0002-8983-3257"},"institutions":[{"id":"https://openalex.org/I35440088","display_name":"ETH Zurich","ror":"https://ror.org/05a28rw58","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I35440088"]},{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Giovanni A. Salvatore","raw_affiliation_strings":["Institute for Electronics, Swiss Federal Institute of Technology Zurich, Zurich, Switzerland","Institute for Electronics Swiss Federal Institute of Technology Zurich Zurich, 8092, Switzerland"],"affiliations":[{"raw_affiliation_string":"Institute for Electronics, Swiss Federal Institute of Technology Zurich, Zurich, Switzerland","institution_ids":["https://openalex.org/I5124864"]},{"raw_affiliation_string":"Institute for Electronics Swiss Federal Institute of Technology Zurich Zurich, 8092, Switzerland","institution_ids":["https://openalex.org/I35440088"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5017473656","display_name":"Gerhard Tr\u00f6ster","orcid":"https://orcid.org/0000-0002-9278-1638"},"institutions":[{"id":"https://openalex.org/I35440088","display_name":"ETH Zurich","ror":"https://ror.org/05a28rw58","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I35440088"]},{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Gerhard Troster","raw_affiliation_strings":["Institute for Electronics, Swiss Federal Institute of Technology Zurich, Zurich, Switzerland","Institute for Electronics Swiss Federal Institute of Technology Zurich Zurich, 8092, Switzerland"],"affiliations":[{"raw_affiliation_string":"Institute for Electronics, Swiss Federal Institute of Technology Zurich, Zurich, Switzerland","institution_ids":["https://openalex.org/I5124864"]},{"raw_affiliation_string":"Institute for Electronics Swiss Federal Institute of Technology Zurich Zurich, 8092, Switzerland","institution_ids":["https://openalex.org/I35440088"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5028256613"],"corresponding_institution_ids":["https://openalex.org/I35440088","https://openalex.org/I5124864"],"apc_list":null,"apc_paid":null,"fwci":2.161,"has_fulltext":false,"cited_by_count":29,"citation_normalized_percentile":{"value":0.88679436,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"362","last_page":"365"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9746000170707703,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10090","display_name":"ZnO doping and properties","score":0.9614999890327454,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5451575517654419},{"id":"https://openalex.org/keywords/amorphous-solid","display_name":"Amorphous solid","score":0.4769101142883301},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3774716556072235},{"id":"https://openalex.org/keywords/crystallography","display_name":"Crystallography","score":0.2750703692436218},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.12047648429870605}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5451575517654419},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.4769101142883301},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3774716556072235},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.2750703692436218},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.12047648429870605}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.1109/essderc.2013.6818893","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2013.6818893","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},{"id":"pmh:oai:alma.39UBZ_INST:11235132950001241","is_oa":false,"landing_page_url":"https://ieeexplore.ieee.org/abstract/document/6818893","pdf_url":null,"source":{"id":"https://openalex.org/S4210197018","display_name":"View","issn_l":"2688-268X","issn":["2688-268X","2688-3988"],"is_oa":false,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"text"},{"id":"pmh:oai:iris.unive.it:10278/5000924","is_oa":false,"landing_page_url":"http://hdl.handle.net/10278/5000924","pdf_url":null,"source":{"id":"https://openalex.org/S4306402336","display_name":"ARCA (Universit\u00e0 Ca' Foscari Venezia)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I149461666","host_organization_name":"Ca' Foscari University of Venice","host_organization_lineage":["https://openalex.org/I149461666"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/conferenceObject"},{"id":"pmh:oai:unibz.it:11235132950001241","is_oa":false,"landing_page_url":"https://bia.unibz.it/esploro/outputs/conferenceProceeding/Investigation-of-gate-material-ductility-enables/991005772315201241","pdf_url":null,"source":{"id":"https://openalex.org/S4210197018","display_name":"View","issn_l":"2688-268X","issn":["2688-268X","2688-3988"],"is_oa":false,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"text"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321652","display_name":"Eidgen\u00f6ssische Technische Hochschule Z\u00fcrich","ror":"https://ror.org/05a28rw58"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W1974791436","https://openalex.org/W1986448207","https://openalex.org/W1999589524","https://openalex.org/W2022249543","https://openalex.org/W2034219028","https://openalex.org/W2034803133","https://openalex.org/W2086118989","https://openalex.org/W2087354683","https://openalex.org/W2087998461","https://openalex.org/W2089255251","https://openalex.org/W2091211577","https://openalex.org/W2092208263","https://openalex.org/W2132820487","https://openalex.org/W2149856173","https://openalex.org/W2164827488","https://openalex.org/W2167903931","https://openalex.org/W3147289055","https://openalex.org/W4253542522"],"related_works":["https://openalex.org/W4402299999","https://openalex.org/W4246450666","https://openalex.org/W4388998267","https://openalex.org/W2898370298","https://openalex.org/W2137437058","https://openalex.org/W4390401159","https://openalex.org/W2744391499","https://openalex.org/W2800070131","https://openalex.org/W4230250635","https://openalex.org/W3041790586"],"abstract_inverted_index":{"TFTs":[0,52,97,187],"on":[1,165,188],"flexible":[2],"plastic":[3,24,190],"foils":[4],"have":[5,53],"the":[6,20,79,83,87,166,169],"potential":[7],"to":[8,19,59,77,176,184],"enable":[9],"new":[10],"applications":[11],"like":[12],"electronic":[13],"skins":[14],"or":[15,119],"smart":[16],"textiles.":[17],"Due":[18],"temperature":[21],"sensitivity":[22],"of":[23,89,168,200],"substrates,":[25],"amorphous":[26],"In-Ga-Zn-O":[27],"(a-IGZO)":[28],"is":[29],"a":[30,36,66,99,122,197],"promising":[31],"semiconductor":[32],"since":[33],"it":[34],"provides":[35],"carrier":[37],"mobility":[38,125],">10":[39,152],"cm":[40,144],"<sup":[41,145,153],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[42,103,107,128,135,146,154,210,215],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[43,147],"/Vs":[44],"when":[45],"deposited":[46],"at":[47,196],"room":[48],"temperature.":[49],"Therefore,":[50],"a-IGZO":[51,93,96,186],"significantly":[54],"increased":[55],"electrical":[56],"performance":[57],"compared":[58],"organic":[60],"TFTs,":[61],"but":[62],"also":[63],"suffer":[64],"from":[65],"decreased":[67],"bendability.":[68],"Here,":[69],"focused":[70],"ion":[71],"beam":[72],"(FIB)":[73],"images":[74],"are":[75,174],"used":[76,175],"identify":[78,177],"gate":[80,109,113,170,181],"metal":[81],"as":[82,179],"dominant":[84],"factor":[85],"for":[86],"formation":[88],"cracks":[90],"in":[91],"bent":[92],"TFTs.":[94],"Flexible":[95],"using":[98],"high-k":[100],"Al":[101],"<sub":[102,106,127,134,209,214],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[104],"O":[105],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</sub>":[108],"dielectric":[110],"and":[111,138,151,183,212,221],"different":[112],"contact":[114],"materials":[115],"(Cr,":[116],"Pt,":[117],"Ti,":[118],"Cu)":[120],"exhibit":[121],"similar":[123],"effective":[124],"\u03bc":[126,208],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">FE</sub>":[129,211],",":[130,137],"threshold":[131],"voltage":[132],"V":[133,213],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">TH</sub>":[136,216],"on-off":[139],"current":[140],"ratio":[141],"of:":[142],"\u224815":[143],"/Vs,":[148],"\u22481":[149],"V,":[150],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">9</sup>":[155],".":[156],"Simultaneously,":[157],"bending":[158,198,206],"experiments":[159],"confirmed":[160],"that":[161],"their":[162],"bendability":[163],"depends":[164],"ductility":[167],"material.":[171],"These":[172],"findings":[173],"Cu":[178],"suitable":[180],"material,":[182],"fabricate":[185],"free-standing":[189],"foil":[191],"which":[192],"can":[193],"be":[194],"operated":[195],"radius":[199],"1.7":[201],"mm":[202],"(1.55%":[203],"strain),":[204],"whereas":[205],"shifts":[207],"only":[217],"by":[218],"+":[219],"2%,":[220],"-":[222],"6":[223],"mV.":[224]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":2},{"year":2019,"cited_by_count":5},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":7},{"year":2016,"cited_by_count":4},{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":2}],"updated_date":"2026-03-31T07:56:22.981413","created_date":"2016-06-24T00:00:00"}