{"id":"https://openalex.org/W2001397059","doi":"https://doi.org/10.1109/essderc.2013.6818890","title":"Low power finfet ph-sensor with high-sensitivity voltage readout","display_name":"Low power finfet ph-sensor with high-sensitivity voltage readout","publication_year":2013,"publication_date":"2013-09-01","ids":{"openalex":"https://openalex.org/W2001397059","doi":"https://doi.org/10.1109/essderc.2013.6818890","mag":"2001397059"},"language":"en","primary_location":{"id":"doi:10.1109/essderc.2013.6818890","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2013.6818890","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5028953276","display_name":"Sara Rigante","orcid":null},"institutions":[{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"S. Rigante","raw_affiliation_strings":["Nanoelectronic Devices Laboratory, EPFL, Lausanne, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanoelectronic Devices Laboratory, EPFL, Lausanne, Switzerland","institution_ids":["https://openalex.org/I5124864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013109328","display_name":"Paolo Livi","orcid":"https://orcid.org/0000-0002-6672-9123"},"institutions":[{"id":"https://openalex.org/I35440088","display_name":"ETH Zurich","ror":"https://ror.org/05a28rw58","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I35440088"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"P. Livi","raw_affiliation_strings":["Bio Engineering Laboratory, ETH Zurich, Basel, Switzerland","Bio Engineering Laboratory, ETH Z\u00fcrich, Basel, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Bio Engineering Laboratory, ETH Zurich, Basel, Switzerland","institution_ids":["https://openalex.org/I35440088"]},{"raw_affiliation_string":"Bio Engineering Laboratory, ETH Z\u00fcrich, Basel, Switzerland","institution_ids":["https://openalex.org/I35440088"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075067499","display_name":"Mathias Wipf","orcid":"https://orcid.org/0000-0002-9071-7894"},"institutions":[{"id":"https://openalex.org/I1850255","display_name":"University of Basel","ror":"https://ror.org/02s6k3f65","country_code":"CH","type":"education","lineage":["https://openalex.org/I1850255"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"M. Wipf","raw_affiliation_strings":["Department of Physics, University of Basel, Switzerland","Department of Physics, University of Basel,,Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, University of Basel, Switzerland","institution_ids":["https://openalex.org/I1850255"]},{"raw_affiliation_string":"Department of Physics, University of Basel,,Switzerland","institution_ids":["https://openalex.org/I1850255"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057687488","display_name":"K. Bedner","orcid":null},"institutions":[{"id":"https://openalex.org/I135218257","display_name":"Swiss Center for Electronics and Microtechnology (Switzerland)","ror":"https://ror.org/05nrrsx06","country_code":"CH","type":"company","lineage":["https://openalex.org/I135218257"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"K. Bedner","raw_affiliation_strings":["Laboratory for Micro-and Nanotechnology, PSI, Switzerland","Laboratory for Micro- and Nanotechnology, PSI, Villigen, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratory for Micro-and Nanotechnology, PSI, Switzerland","institution_ids":["https://openalex.org/I135218257"]},{"raw_affiliation_string":"Laboratory for Micro- and Nanotechnology, PSI, Villigen, Switzerland","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088363441","display_name":"D. Bouvet","orcid":"https://orcid.org/0000-0001-9556-4914"},"institutions":[{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"D. Bouvet","raw_affiliation_strings":["Nanoelectronic Devices Laboratory, EPFL, Lausanne, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanoelectronic Devices Laboratory, EPFL, Lausanne, Switzerland","institution_ids":["https://openalex.org/I5124864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062560576","display_name":"Antonios Bazigos","orcid":"https://orcid.org/0000-0002-2967-8208"},"institutions":[{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"A. Bazigos","raw_affiliation_strings":["Nanoelectronic Devices Laboratory, EPFL, Lausanne, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanoelectronic Devices Laboratory, EPFL, Lausanne, Switzerland","institution_ids":["https://openalex.org/I5124864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102885126","display_name":"A. Rusu","orcid":"https://orcid.org/0009-0004-9875-3074"},"institutions":[{"id":"https://openalex.org/I61641377","display_name":"Universitatea Na\u021bional\u0103 de \u0218tiin\u021b\u0103 \u0219i Tehnologie Politehnica Bucure\u0219ti","ror":"https://ror.org/0558j5q12","country_code":"RO","type":"education","lineage":["https://openalex.org/I61641377"]}],"countries":["RO"],"is_corresponding":false,"raw_author_name":"A. Rusu","raw_affiliation_strings":["\u201cPOLITEHNICA\u201d University Bucharest, Romania"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"\u201cPOLITEHNICA\u201d University Bucharest, Romania","institution_ids":["https://openalex.org/I61641377"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000470100","display_name":"Andreas Hierlemann","orcid":"https://orcid.org/0000-0002-3838-2468"},"institutions":[{"id":"https://openalex.org/I35440088","display_name":"ETH Zurich","ror":"https://ror.org/05a28rw58","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I35440088"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"A. Hierlemann","raw_affiliation_strings":["Bio Engineering Laboratory, ETH Zurich, Basel, Switzerland","Bio Engineering Laboratory, ETH Z\u00fcrich, Basel, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Bio Engineering Laboratory, ETH Zurich, Basel, Switzerland","institution_ids":["https://openalex.org/I35440088"]},{"raw_affiliation_string":"Bio Engineering Laboratory, ETH Z\u00fcrich, Basel, Switzerland","institution_ids":["https://openalex.org/I35440088"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5053654772","display_name":"Adrian M. Ionescu","orcid":"https://orcid.org/0000-0003-2314-8887"},"institutions":[{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"A. M. Ionescu","raw_affiliation_strings":["Nanoelectronic Devices Laboratory, EPFL, Lausanne, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanoelectronic Devices Laboratory, EPFL, Lausanne, Switzerland","institution_ids":["https://openalex.org/I5124864"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":9,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.24,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.59478328,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"7","issue":null,"first_page":"350","last_page":"353"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.6134405732154846},{"id":"https://openalex.org/keywords/amplifier","display_name":"Amplifier","score":0.5591588616371155},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.47747135162353516},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.4604855477809906},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.45908987522125244},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.45371732115745544},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.44332340359687805},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.42175182700157166},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.3996029496192932},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3892068862915039},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.3608989715576172},{"id":"https://openalex.org/keywords/topology","display_name":"Topology (electrical circuits)","score":0.35575634241104126},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.27043116092681885},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.13044369220733643}],"concepts":[{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6134405732154846},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.5591588616371155},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.47747135162353516},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.4604855477809906},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.45908987522125244},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.45371732115745544},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.44332340359687805},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.42175182700157166},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.3996029496192932},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3892068862915039},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.3608989715576172},{"id":"https://openalex.org/C184720557","wikidata":"https://www.wikidata.org/wiki/Q7825049","display_name":"Topology (electrical circuits)","level":2,"score":0.35575634241104126},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.27043116092681885},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.13044369220733643},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/essderc.2013.6818890","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2013.6818890","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},{"id":"pmh:oai:dora:psi_65820","is_oa":false,"landing_page_url":"https://www.dora.lib4ri.ch/psi/islandora/object/psi%3A65820","pdf_url":null,"source":{"id":"https://openalex.org/S4306402574","display_name":"DORA PSI (Paul Scherrer Institute)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I2802229908","host_organization_name":"Paul Scherrer Institute","host_organization_lineage":["https://openalex.org/I2802229908"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Proceedings Paper"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.5899999737739563,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W2009770540","https://openalex.org/W2026456093","https://openalex.org/W2029236613","https://openalex.org/W2034136756","https://openalex.org/W2034912053","https://openalex.org/W2053192345","https://openalex.org/W2100606738","https://openalex.org/W2152587744","https://openalex.org/W2320811563"],"related_works":["https://openalex.org/W2053520333","https://openalex.org/W2010481829","https://openalex.org/W1536397480","https://openalex.org/W2076467392","https://openalex.org/W2140182689","https://openalex.org/W2158574352","https://openalex.org/W2073911469","https://openalex.org/W2886828597","https://openalex.org/W2886265503","https://openalex.org/W4308089776"],"abstract_inverted_index":{"Low":[0],"power":[1],"n-channel":[2],"fully":[3],"depleted":[4],"local-SOI":[5,106],"FinFET":[6,26,67,108],"integrated":[7],"sensors":[8],"have":[9,98],"been":[10,87,99],"developed":[11],"and":[12,31,93,115,136],"validated":[13],"for":[14],"the":[15,60,68,125],"amplification":[16],"of":[17,42,51,127],"pH":[18,48],"sensing":[19,66,92],"signals.":[20],"A":[21],"simple":[22],"architecture":[23],"with":[24,45,63],"one":[25,33],"connected":[27],"as":[28,34],"depletion-mode":[29],"load":[30],"another":[32],"driving":[35],"sensor,":[36],"provides":[37],"a":[38,46,64,105],"maximum":[39,47],"readout":[40,49,72],"gain":[41],"6.6":[43],"V/V":[44],"sensitivity":[50],"185":[52],"mV/pH,":[53],"at":[54],"2":[55],"V":[56],"operation.":[57],"By":[58],"comparing":[59],"proposed":[61],"amplifier":[62],"single":[65],"threshold":[69],"voltage":[70],"shift":[71],"is":[73],"shown":[74],"to":[75,89],"be":[76],"4.4":[77],"times":[78],"larger.":[79],"High-k":[80],"dielectric":[81],"HfO":[82],"<sub":[83,111,118,141],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[84,112,119,142],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[85],"has":[86],"used":[88],"maximize":[90],"both":[91],"electronic":[94],"performances.":[95],"The":[96],"FinFETs":[97],"fabricated":[100],"on":[101],"bulk":[102],"silicon":[103],"by":[104],"technique.":[107],"thickness":[109],"(T":[110],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">Fin</sub>":[113,120,143],")":[114,121],"height":[116],"(H":[117],"achieved":[122],"are":[123],"in":[124],"range":[126],"20":[128],"nm":[129,135,138],"\u2264":[130,133,139,144],"T":[131],"Fin":[132],"40":[134],"65":[137],"H":[140],"120":[145],"nm.":[146]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2015,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}