{"id":"https://openalex.org/W2113454389","doi":"https://doi.org/10.1109/essderc.2012.6343360","title":"Micro- and nano-link ultra-low power heaters for sensors","display_name":"Micro- and nano-link ultra-low power heaters for sensors","publication_year":2012,"publication_date":"2012-09-01","ids":{"openalex":"https://openalex.org/W2113454389","doi":"https://doi.org/10.1109/essderc.2012.6343360","mag":"2113454389"},"language":"en","primary_location":{"id":"doi:10.1109/essderc.2012.6343360","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2012.6343360","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5077317252","display_name":"A.W. Groenland","orcid":null},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":true,"raw_author_name":"A. W. Groenland","raw_affiliation_strings":["MESA Institute for Nanotechnology, University of Twente, Enschede, Netherlands","MESA+?Institute for Nanotechnology, University of Twente, Enschede,#N#The Netherlands"],"affiliations":[{"raw_affiliation_string":"MESA Institute for Nanotechnology, University of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"MESA+?Institute for Nanotechnology, University of Twente, Enschede,#N#The Netherlands","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026672551","display_name":"Elizaveta Vereshchagina","orcid":"https://orcid.org/0000-0003-0632-3057"},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"E. Vereshchagina","raw_affiliation_strings":["MESA Institute for Nanotechnology, University of Twente, Enschede, Netherlands","MESA+?Institute for Nanotechnology, University of Twente, Enschede,#N#The Netherlands"],"affiliations":[{"raw_affiliation_string":"MESA Institute for Nanotechnology, University of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"MESA+?Institute for Nanotechnology, University of Twente, Enschede,#N#The Netherlands","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008300217","display_name":"Alexey Y. Kovalgin","orcid":"https://orcid.org/0000-0001-7418-7734"},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"A. Y. Kovalgin","raw_affiliation_strings":["MESA Institute for Nanotechnology, University of Twente, Enschede, Netherlands","MESA+?Institute for Nanotechnology, University of Twente, Enschede,#N#The Netherlands"],"affiliations":[{"raw_affiliation_string":"MESA Institute for Nanotechnology, University of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"MESA+?Institute for Nanotechnology, University of Twente, Enschede,#N#The Netherlands","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034409493","display_name":"R.A.M. Wolters","orcid":"https://orcid.org/0009-0007-1335-1503"},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"R. A. M. Wolters","raw_affiliation_strings":["MESA Institute for Nanotechnology, University of Twente, Enschede, Netherlands","MESA+?Institute for Nanotechnology, University of Twente, Enschede,#N#The Netherlands"],"affiliations":[{"raw_affiliation_string":"MESA Institute for Nanotechnology, University of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"MESA+?Institute for Nanotechnology, University of Twente, Enschede,#N#The Netherlands","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028167465","display_name":"Han Gardeniers","orcid":"https://orcid.org/0000-0003-0581-2668"},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"J. G. E. Gardeniers","raw_affiliation_strings":["MESA Institute for Nanotechnology, University of Twente, Enschede, Netherlands","MESA+?Institute for Nanotechnology, University of Twente, Enschede,#N#The Netherlands"],"affiliations":[{"raw_affiliation_string":"MESA Institute for Nanotechnology, University of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"MESA+?Institute for Nanotechnology, University of Twente, Enschede,#N#The Netherlands","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5026474337","display_name":"Jurriaan Schmitz","orcid":"https://orcid.org/0000-0002-9677-825X"},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"J. Schmitz","raw_affiliation_strings":["MESA Institute for Nanotechnology, University of Twente, Enschede, Netherlands","MESA+?Institute for Nanotechnology, University of Twente, Enschede,#N#The Netherlands"],"affiliations":[{"raw_affiliation_string":"MESA Institute for Nanotechnology, University of Twente, Enschede, Netherlands","institution_ids":["https://openalex.org/I94624287"]},{"raw_affiliation_string":"MESA+?Institute for Nanotechnology, University of Twente, Enschede,#N#The Netherlands","institution_ids":["https://openalex.org/I94624287"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5077317252"],"corresponding_institution_ids":["https://openalex.org/I94624287"],"apc_list":null,"apc_paid":null,"fwci":0.2121,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.58321683,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"92","issue":null,"first_page":"169","last_page":"172"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7190993428230286},{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.6571878790855408},{"id":"https://openalex.org/keywords/temperature-measurement","display_name":"Temperature measurement","score":0.6428656578063965},{"id":"https://openalex.org/keywords/thermal-conductivity","display_name":"Thermal conductivity","score":0.6030055284500122},{"id":"https://openalex.org/keywords/resistive-touchscreen","display_name":"Resistive touchscreen","score":0.5873922109603882},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5760678648948669},{"id":"https://openalex.org/keywords/nano","display_name":"Nano-","score":0.5352187156677246},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.48435649275779724},{"id":"https://openalex.org/keywords/resistor","display_name":"Resistor","score":0.48147454857826233},{"id":"https://openalex.org/keywords/thermal-resistance","display_name":"Thermal resistance","score":0.4416349232196808},{"id":"https://openalex.org/keywords/electricity-meter","display_name":"Electricity meter","score":0.43878450989723206},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.42122769355773926},{"id":"https://openalex.org/keywords/metre","display_name":"Metre","score":0.4142114520072937},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.3949274718761444},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.31282103061676025},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.15612486004829407},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.12189871072769165},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.11753618717193604},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08830374479293823}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7190993428230286},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.6571878790855408},{"id":"https://openalex.org/C72293138","wikidata":"https://www.wikidata.org/wiki/Q909741","display_name":"Temperature measurement","level":2,"score":0.6428656578063965},{"id":"https://openalex.org/C97346530","wikidata":"https://www.wikidata.org/wiki/Q487005","display_name":"Thermal conductivity","level":2,"score":0.6030055284500122},{"id":"https://openalex.org/C6899612","wikidata":"https://www.wikidata.org/wiki/Q852911","display_name":"Resistive touchscreen","level":2,"score":0.5873922109603882},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5760678648948669},{"id":"https://openalex.org/C2780357685","wikidata":"https://www.wikidata.org/wiki/Q154357","display_name":"Nano-","level":2,"score":0.5352187156677246},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.48435649275779724},{"id":"https://openalex.org/C137488568","wikidata":"https://www.wikidata.org/wiki/Q5321","display_name":"Resistor","level":3,"score":0.48147454857826233},{"id":"https://openalex.org/C137693562","wikidata":"https://www.wikidata.org/wiki/Q899628","display_name":"Thermal resistance","level":3,"score":0.4416349232196808},{"id":"https://openalex.org/C67172668","wikidata":"https://www.wikidata.org/wiki/Q622756","display_name":"Electricity meter","level":3,"score":0.43878450989723206},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.42122769355773926},{"id":"https://openalex.org/C151011524","wikidata":"https://www.wikidata.org/wiki/Q11573","display_name":"Metre","level":2,"score":0.4142114520072937},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.3949274718761444},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.31282103061676025},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.15612486004829407},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.12189871072769165},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.11753618717193604},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08830374479293823},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C1276947","wikidata":"https://www.wikidata.org/wiki/Q333","display_name":"Astronomy","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/essderc.2012.6343360","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2012.6343360","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},{"id":"pmh:oai:ris.utwente.nl:openaire_cris_publications/4fe61b3f-bac6-4212-9af2-f5790e91d56b","is_oa":false,"landing_page_url":"https://research.utwente.nl/en/publications/4fe61b3f-bac6-4212-9af2-f5790e91d56b","pdf_url":null,"source":{"id":"https://openalex.org/S4406922991","display_name":"University of Twente Research Information","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Groenland, A W, Vereshchagina, E, Kovalgin, A Y, Wolters, R A M, Gardeniers, J G E & Schmitz, J 2012, Micro- and nano-link ultra-low power heaters for sensors. in European Solid-State Device Research Conference, ESSDERC 2012. IEEE, USA, pp. 169-172, 42nd European Solid-State Device Research Conference, ESSDERC 2012, Bordeaux, France, 17/09/12. https://doi.org/10.1109/ESSDERC.2012.6343360","raw_type":"info:eu-repo/semantics/publishedVersion"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.8999999761581421}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W240284807","https://openalex.org/W2006265221","https://openalex.org/W2023485402","https://openalex.org/W2061082483","https://openalex.org/W2083486153","https://openalex.org/W2092807849","https://openalex.org/W2102382343","https://openalex.org/W2105239887","https://openalex.org/W2127459148","https://openalex.org/W2150449179","https://openalex.org/W2299124942","https://openalex.org/W2912207476","https://openalex.org/W4238510560"],"related_works":["https://openalex.org/W2798982538","https://openalex.org/W2369722944","https://openalex.org/W2275095144","https://openalex.org/W2353278756","https://openalex.org/W3023080387","https://openalex.org/W2046774982","https://openalex.org/W2599750357","https://openalex.org/W1983193880","https://openalex.org/W2020110310","https://openalex.org/W2095269826"],"abstract_inverted_index":{"A":[0,57],"new":[1],"microfabricated":[2],"device":[3],"for":[4],"heating":[5,18],"and":[6,29,40,46,53],"sensing":[7],"in":[8],"gases":[9],"is":[10,13,62],"presented.":[11],"It":[12],"based":[14],"on":[15],"the":[16,38,44],"resistive":[17],"of":[19,26,31,43,59,68,73],"a":[20,65],"micro-":[21],"or":[22],"nano-metric":[23],"hollow":[24],"cylinder":[25],"titanium":[27],"nitride,":[28],"measurement":[30],"its":[32,48],"(temperature-dependent)":[33],"resistance.":[34],"This":[35],"article":[36],"presents":[37],"fabrication":[39],"temperature":[41,58],"calibration":[42],"device,":[45],"illustrates":[47],"function":[49],"as":[50,87,89],"flow":[51],"meter":[52],"thermal":[54,82],"conductivity":[55],"meter.":[56],"280":[60],"\u00b0C":[61],"achieved":[63],"at":[64],"power":[66],"consumption":[67],"only":[69],"5.5":[70],"\u03bcW,":[71],"orders":[72],"magnitude":[74],"less":[75],"than":[76],"existing":[77],"commercial":[78],"hotplate":[79],"devices.":[80],"The":[81],"time":[83],"constant":[84],"can":[85],"be":[86],"low":[88],"60-120":[90],"microseconds.":[91]},"counts_by_year":[{"year":2016,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}