{"id":"https://openalex.org/W3210117808","doi":"https://doi.org/10.1109/esscirc53450.2021.9567751","title":"Wafer-scale fabrication of biologically sensitive Si nanowire FET: from pH sensing to electrical detection of DNA hybridization","display_name":"Wafer-scale fabrication of biologically sensitive Si nanowire FET: from pH sensing to electrical detection of DNA hybridization","publication_year":2021,"publication_date":"2021-09-13","ids":{"openalex":"https://openalex.org/W3210117808","doi":"https://doi.org/10.1109/esscirc53450.2021.9567751","mag":"3210117808"},"language":"en","primary_location":{"id":"doi:10.1109/esscirc53450.2021.9567751","is_oa":false,"landing_page_url":"https://doi.org/10.1109/esscirc53450.2021.9567751","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ESSCIRC 2021 - IEEE 47th European Solid State Circuits Conference (ESSCIRC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5018416662","display_name":"R. Midahuen","orcid":"https://orcid.org/0000-0003-2082-1503"},"institutions":[{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"R. Midahuen","raw_affiliation_strings":["CEA, LETI, MINATEC Campus and Univ. Grenoble Alpes, Grenoble, France","CEA-LETI - Commissariat \u00e0 l'\u00e9nergie atomique et aux \u00e9nergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (MINATEC 17, rue des Martyrs, 38054, Grenoble Cedex 9 - France)"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus and Univ. Grenoble Alpes, Grenoble, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA-LETI - Commissariat \u00e0 l'\u00e9nergie atomique et aux \u00e9nergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (MINATEC 17, rue des Martyrs, 38054, Grenoble Cedex 9 - France)","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I4210150049","https://openalex.org/I2738703131","https://openalex.org/I106785703"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066003606","display_name":"B. Pr\u00e9vitali","orcid":null},"institutions":[{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"B. Previtali","raw_affiliation_strings":["CEA, LETI, MINATEC Campus and Univ. Grenoble Alpes, Grenoble, France","CEA-LETI - Commissariat \u00e0 l'\u00e9nergie atomique et aux \u00e9nergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (MINATEC 17, rue des Martyrs, 38054, Grenoble Cedex 9 - France)"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus and Univ. Grenoble Alpes, Grenoble, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA-LETI - Commissariat \u00e0 l'\u00e9nergie atomique et aux \u00e9nergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (MINATEC 17, rue des Martyrs, 38054, Grenoble Cedex 9 - France)","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I4210150049","https://openalex.org/I2738703131","https://openalex.org/I106785703"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062192112","display_name":"Caroline Fontelaye","orcid":null},"institutions":[{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C. Fontelaye","raw_affiliation_strings":["CEA, LETI, MINATEC Campus and Univ. Grenoble Alpes, Grenoble, France","CEA-LETI - Commissariat \u00e0 l'\u00e9nergie atomique et aux \u00e9nergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (MINATEC 17, rue des Martyrs, 38054, Grenoble Cedex 9 - France)"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus and Univ. Grenoble Alpes, Grenoble, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA-LETI - Commissariat \u00e0 l'\u00e9nergie atomique et aux \u00e9nergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (MINATEC 17, rue des Martyrs, 38054, Grenoble Cedex 9 - France)","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I4210150049","https://openalex.org/I2738703131","https://openalex.org/I106785703"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074729841","display_name":"Guillaume Nonglaton","orcid":"https://orcid.org/0000-0003-2975-5338"},"institutions":[{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"G. Nonglaton","raw_affiliation_strings":["CEA, LETI, MINATEC Campus and Univ. Grenoble Alpes, Grenoble, France","CEA-LETI - Commissariat \u00e0 l'\u00e9nergie atomique et aux \u00e9nergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (MINATEC 17, rue des Martyrs, 38054, Grenoble Cedex 9 - France)"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus and Univ. Grenoble Alpes, Grenoble, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA-LETI - Commissariat \u00e0 l'\u00e9nergie atomique et aux \u00e9nergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (MINATEC 17, rue des Martyrs, 38054, Grenoble Cedex 9 - France)","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I4210150049","https://openalex.org/I2738703131","https://openalex.org/I106785703"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068051865","display_name":"Sylvain Barraud","orcid":"https://orcid.org/0000-0002-4334-9638"},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"S. Barraud","raw_affiliation_strings":["CEA, LETI, MINATEC Campus and Univ. Grenoble Alpes, Grenoble, France","CEA-LETI - Commissariat \u00e0 l'\u00e9nergie atomique et aux \u00e9nergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (MINATEC 17, rue des Martyrs, 38054, Grenoble Cedex 9 - France)"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus and Univ. Grenoble Alpes, Grenoble, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA-LETI - Commissariat \u00e0 l'\u00e9nergie atomique et aux \u00e9nergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (MINATEC 17, rue des Martyrs, 38054, Grenoble Cedex 9 - France)","institution_ids":["https://openalex.org/I3020098449","https://openalex.org/I4210150049","https://openalex.org/I2738703131","https://openalex.org/I106785703"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5032391357","display_name":"V. Stambouli","orcid":null},"institutions":[{"id":"https://openalex.org/I4210100844","display_name":"Laboratoire des Mat\u00e9riaux et du G\u00e9nie Physique","ror":"https://ror.org/014n97s28","country_code":"FR","type":"facility","lineage":["https://openalex.org/I106785703","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I4210100844","https://openalex.org/I4210128300","https://openalex.org/I899635006","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"V. Stambouli","raw_affiliation_strings":["Univ. Grenoble Alpes, CNRS, Grenoble-INP, LMGP, Grenoble, France","LMGP - Laboratoire des mat\u00e9riaux et du g\u00e9nie physique (Grenoble INP Minatec - 3 parvis Louis N\u00e9el - CS 50257- 38016 Grenoble Cedex 1 - France)"],"affiliations":[{"raw_affiliation_string":"Univ. Grenoble Alpes, CNRS, Grenoble-INP, LMGP, Grenoble, France","institution_ids":["https://openalex.org/I106785703","https://openalex.org/I899635006","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"LMGP - Laboratoire des mat\u00e9riaux et du g\u00e9nie physique (Grenoble INP Minatec - 3 parvis Louis N\u00e9el - CS 50257- 38016 Grenoble Cedex 1 - France)","institution_ids":["https://openalex.org/I4210100844","https://openalex.org/I106785703"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5018416662"],"corresponding_institution_ids":["https://openalex.org/I106785703","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049","https://openalex.org/I899635006"],"apc_list":null,"apc_paid":null,"fwci":0.4833,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.62563544,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"175","last_page":"178"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5240514278411865},{"id":"https://openalex.org/keywords/nanowire","display_name":"Nanowire","score":0.46740466356277466},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.42179998755455017},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.4096328616142273},{"id":"https://openalex.org/keywords/combinatorial-chemistry","display_name":"Combinatorial chemistry","score":0.3451572060585022},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.33051976561546326},{"id":"https://openalex.org/keywords/topology","display_name":"Topology (electrical circuits)","score":0.3280091881752014},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.27162379026412964},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.21165922284126282},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.09816968441009521}],"concepts":[{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5240514278411865},{"id":"https://openalex.org/C74214498","wikidata":"https://www.wikidata.org/wiki/Q631739","display_name":"Nanowire","level":2,"score":0.46740466356277466},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.42179998755455017},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4096328616142273},{"id":"https://openalex.org/C21951064","wikidata":"https://www.wikidata.org/wiki/Q899212","display_name":"Combinatorial chemistry","level":1,"score":0.3451572060585022},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.33051976561546326},{"id":"https://openalex.org/C184720557","wikidata":"https://www.wikidata.org/wiki/Q7825049","display_name":"Topology (electrical circuits)","level":2,"score":0.3280091881752014},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.27162379026412964},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.21165922284126282},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.09816968441009521},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/esscirc53450.2021.9567751","is_oa":false,"landing_page_url":"https://doi.org/10.1109/esscirc53450.2021.9567751","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ESSCIRC 2021 - IEEE 47th European Solid State Circuits Conference (ESSCIRC)","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:hal-03429205v1","is_oa":false,"landing_page_url":"https://hal.science/hal-03429205","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"ESSCIRC 2021 - IEEE 47th European Solid State Circuits Conference (ESSCIRC), Sep 2021, Grenoble, France. pp.175-178, &#x27E8;10.1109/ESSCIRC53450.2021.9567751&#x27E9;","raw_type":"Conference papers"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1970382032","https://openalex.org/W1988929438","https://openalex.org/W2007963269","https://openalex.org/W2013388602","https://openalex.org/W2022690372","https://openalex.org/W2032237132","https://openalex.org/W2049295103","https://openalex.org/W2116489497","https://openalex.org/W2119399232","https://openalex.org/W2130686586","https://openalex.org/W2138818058","https://openalex.org/W2317669397","https://openalex.org/W2461893227","https://openalex.org/W3108738234"],"related_works":["https://openalex.org/W3143516596","https://openalex.org/W2089372549","https://openalex.org/W4300780679","https://openalex.org/W1669133231","https://openalex.org/W2033291290","https://openalex.org/W134694013","https://openalex.org/W2804617689","https://openalex.org/W2013679403","https://openalex.org/W2775410575","https://openalex.org/W1997083299"],"abstract_inverted_index":{"In":[0],"this":[1],"work,":[2],"a":[3,33,79,118,132],"wafer-scale":[4],"fabrication":[5],"of":[6,20,36,107,142,145],"biologically":[7],"sensitive":[8],"Si":[9,124],"nanowire":[10],"FET":[11,82],"is":[12,114,129,154],"demonstrated":[13],"for":[14],"pH":[15,127,133],"sensing":[16],"and":[17,42,67],"electrical":[18],"detection":[19],"DNA":[21,152],"hybridization.":[22],"Based":[23],"on":[24],"conventional":[25,80],"\u201ctop-down\u201d":[26],"CMOS":[27],"compatible":[28],"technology,":[29],"our":[30,122],"bioFETs":[31],"explore":[32],"wide":[34],"range":[35],"design":[37],"(nanowires":[38],"[NW],":[39],"nanoribbons":[40],"[NR],":[41],"honeycomb":[43],"[HC]":[44],"structures)":[45],"with":[46,84,131],"opening":[47],"access":[48],"scaled":[49],"down":[50],"to":[51,136,149],"only":[52],"120":[53],"nm.":[54],"After":[55],"device":[56],"fabrication,":[57],"I":[58,68,86],"<inf":[59,63,69,73,87,91],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[60,64,70,74,88,92,99],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">DS</inf>":[61,71,75],"-V":[62,72],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">BG</inf>":[65],"transfer":[66],"output":[76],"characteristics":[77],"show":[78],"n-type":[81,146],"behavior":[83],"an":[85,105],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">ON</inf>":[89],"/I":[90],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">OFF</inf>":[93],"value":[94],"higher":[95],"than":[96],"10":[97],"<sup":[98],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">5</sup>":[100],",":[101],"as":[102,104,110],"well":[103],"increase":[106,141],"threshold":[108,143],"voltage":[109,144],"the":[111,126,140],"NW":[112],"width":[113],"reduced.":[115],"Then,":[116],"using":[117],"capacitive":[119],"coupling":[120],"in":[121],"dual-gated":[123],"bioFETs,":[125],"sensitivity":[128],"enhanced":[130],"response":[134],"up":[135],"600":[137],"mV/pH.":[138],"Finally,":[139],"SiNWs":[147],"due":[148],"hybridized":[150],"target":[151],"molecules":[153],"successfully":[155],"detected.":[156]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2023,"cited_by_count":3}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}