{"id":"https://openalex.org/W2141444104","doi":"https://doi.org/10.1109/emeit.2011.6023227","title":"3-DOF MEMS Gyroscope modeling and design","display_name":"3-DOF MEMS Gyroscope modeling and design","publication_year":2011,"publication_date":"2011-08-01","ids":{"openalex":"https://openalex.org/W2141444104","doi":"https://doi.org/10.1109/emeit.2011.6023227","mag":"2141444104"},"language":"en","primary_location":{"id":"doi:10.1109/emeit.2011.6023227","is_oa":false,"landing_page_url":"https://doi.org/10.1109/emeit.2011.6023227","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of 2011 International Conference on Electronic & Mechanical Engineering and Information Technology","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5012009247","display_name":"Xuguo Huang","orcid":null},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Xuguo Huang","raw_affiliation_strings":["Chengdu Goldtel Electronic Technology Co,. LTD, Chenadu, China","Chengdu Goldtel Electronic Technology Co,. LTD, Chengdu, China"],"affiliations":[{"raw_affiliation_string":"Chengdu Goldtel Electronic Technology Co,. LTD, Chenadu, China","institution_ids":[]},{"raw_affiliation_string":"Chengdu Goldtel Electronic Technology Co,. LTD, Chengdu, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101675333","display_name":"Ping Sun","orcid":"https://orcid.org/0000-0002-4405-1577"},"institutions":[{"id":"https://openalex.org/I37574244","display_name":"Sichuan Agricultural University","ror":"https://ror.org/0388c3403","country_code":"CN","type":"education","lineage":["https://openalex.org/I37574244"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ping Sun","raw_affiliation_strings":["Sichuan Agriculture University, Ya'an, China","Sichuan Agriculture University Ya'an, China"],"affiliations":[{"raw_affiliation_string":"Sichuan Agriculture University, Ya'an, China","institution_ids":["https://openalex.org/I37574244"]},{"raw_affiliation_string":"Sichuan Agriculture University Ya'an, China","institution_ids":["https://openalex.org/I37574244"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100376381","display_name":"Zhi Wang","orcid":"https://orcid.org/0000-0002-0490-2031"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Zhi Wang","raw_affiliation_strings":["Chengdu Goldtel Electronic Technology Co,. LTD, Chenadu, China","Chengdu Goldtel Electronic Technology Co,. LTD, Chengdu, China"],"affiliations":[{"raw_affiliation_string":"Chengdu Goldtel Electronic Technology Co,. LTD, Chenadu, China","institution_ids":[]},{"raw_affiliation_string":"Chengdu Goldtel Electronic Technology Co,. LTD, Chengdu, China","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5012009247"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.15788307,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"2007","issue":null,"first_page":"849","last_page":"852"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9975000023841858,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.9322541952133179},{"id":"https://openalex.org/keywords/vibrating-structure-gyroscope","display_name":"Vibrating structure gyroscope","score":0.901599645614624},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7969415187835693},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.6594241857528687},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.6390380859375},{"id":"https://openalex.org/keywords/scale-factor","display_name":"Scale factor (cosmology)","score":0.5838925838470459},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5406280755996704},{"id":"https://openalex.org/keywords/q-factor","display_name":"Q factor","score":0.4826539158821106},{"id":"https://openalex.org/keywords/rate-integrating-gyroscope","display_name":"Rate integrating gyroscope","score":0.44985589385032654},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3994940519332886},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.35601842403411865},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.33459097146987915},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3227692246437073},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.18284732103347778},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.17557522654533386},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.12164351344108582},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.10567864775657654}],"concepts":[{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.9322541952133179},{"id":"https://openalex.org/C72768775","wikidata":"https://www.wikidata.org/wiki/Q844456","display_name":"Vibrating structure gyroscope","level":3,"score":0.901599645614624},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7969415187835693},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.6594241857528687},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.6390380859375},{"id":"https://openalex.org/C144386022","wikidata":"https://www.wikidata.org/wiki/Q1332997","display_name":"Scale factor (cosmology)","level":5,"score":0.5838925838470459},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5406280755996704},{"id":"https://openalex.org/C187725362","wikidata":"https://www.wikidata.org/wiki/Q830521","display_name":"Q factor","level":3,"score":0.4826539158821106},{"id":"https://openalex.org/C46724921","wikidata":"https://www.wikidata.org/wiki/Q7295536","display_name":"Rate integrating gyroscope","level":4,"score":0.44985589385032654},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3994940519332886},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.35601842403411865},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.33459097146987915},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3227692246437073},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.18284732103347778},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.17557522654533386},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.12164351344108582},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.10567864775657654},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C26405456","wikidata":"https://www.wikidata.org/wiki/Q338","display_name":"Cosmology","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C172790937","wikidata":"https://www.wikidata.org/wiki/Q18343","display_name":"Dark energy","level":3,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C20154449","wikidata":"https://www.wikidata.org/wiki/Q1129469","display_name":"Metric expansion of space","level":4,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/emeit.2011.6023227","is_oa":false,"landing_page_url":"https://doi.org/10.1109/emeit.2011.6023227","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of 2011 International Conference on Electronic & Mechanical Engineering and Information Technology","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/16","display_name":"Peace, Justice and strong institutions","score":0.8100000023841858}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1606844280","https://openalex.org/W1923793735","https://openalex.org/W2015317083","https://openalex.org/W2115570435","https://openalex.org/W2130700751","https://openalex.org/W2148160407","https://openalex.org/W2148521405","https://openalex.org/W3119645284","https://openalex.org/W6788684828"],"related_works":["https://openalex.org/W2138812454","https://openalex.org/W2030928067","https://openalex.org/W2049901089","https://openalex.org/W2116681061","https://openalex.org/W2328178686","https://openalex.org/W1969906513","https://openalex.org/W2343017148","https://openalex.org/W3201539581","https://openalex.org/W4309472545","https://openalex.org/W2183916695"],"abstract_inverted_index":{"In":[0,91],"this":[1],"paper,":[2],"issues":[3],"related":[4],"to":[5,29,61],"the":[6,34,41,73,92,97],"modeling":[7],"and":[8,27,37,58,71,84],"designs":[9],"on":[10],"a":[11,22],"3-DOF":[12,45],"(degree-of-freedom)":[13],"MEMS":[14,19,46],"Gyroscope":[15,20,47],"are":[16],"studied.":[17],"The":[18,44,77],"employs":[21],"combination":[23],"of":[24],"two":[25],"proof-masses":[26],"flexures":[28],"form":[30],"1-DOF":[31],"resonator":[32],"in":[33,40,63],"drive":[35],"direction":[36],"2-DOF":[38],"oscillator":[39],"sense":[42],"direction.":[43],"has":[48],"very":[49],"stable":[50],"responses":[51],"within":[52],"flat":[53],"region":[54],"for":[55],"both":[56],"gain":[57],"phase":[59],"corresponding":[60],"variations":[62],"spring":[64],"coefficient":[65],"or":[66],"quality":[67],"factor.":[68],"Through":[69],"simulation":[70],"analyses,":[72],"gyroscope":[74],"is":[75,89,105],"optimized.":[76],"high":[78,98],"operational":[79],"frequency":[80],"device":[81],"(5.053":[82],"kHz)":[83],"bandwidth":[85],"over":[86],"1":[87],"kHz":[88],"designed.":[90],"full":[93],"scale":[94,99],"range":[95],"\u00b15007s,":[96],"factor":[100],"about":[101],"0.527":[102],"mv/":[103],"(\u00b0/s)":[104],"achieved.":[106]},"counts_by_year":[{"year":2016,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}