{"id":"https://openalex.org/W4389542938","doi":"https://doi.org/10.1109/embc40787.2023.10340058","title":"Fabrication of Implantable Microelectrode Array using Cyclic Olefin Copolymer and SU-8 via Photocrosslinking Lamination","display_name":"Fabrication of Implantable Microelectrode Array using Cyclic Olefin Copolymer and SU-8 via Photocrosslinking Lamination","publication_year":2023,"publication_date":"2023-07-24","ids":{"openalex":"https://openalex.org/W4389542938","doi":"https://doi.org/10.1109/embc40787.2023.10340058","pmid":"https://pubmed.ncbi.nlm.nih.gov/38083392"},"language":"en","primary_location":{"id":"doi:10.1109/embc40787.2023.10340058","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/embc40787.2023.10340058","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 45th Annual International Conference of the IEEE Engineering in Medicine & Biology Society (EMBC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref","pubmed"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101891810","display_name":"Joo-Won Lee","orcid":"https://orcid.org/0000-0003-2003-5422"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Joowon Lee","raw_affiliation_strings":["College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University,Department of Electrical and Computer Engineering","Department of Electrical and Computer Engineering, College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University"],"affiliations":[{"raw_affiliation_string":"College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University,Department of Electrical and Computer Engineering","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035004639","display_name":"Hyunbeen Jeong","orcid":"https://orcid.org/0000-0002-8084-2763"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Hyunbeen Jeong","raw_affiliation_strings":["College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University,Department of Electrical and Computer Engineering","Department of Electrical and Computer Engineering, College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University"],"affiliations":[{"raw_affiliation_string":"College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University,Department of Electrical and Computer Engineering","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101559955","display_name":"Tae Kyung Lee","orcid":"https://orcid.org/0009-0000-3108-7653"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Taekyung Lee","raw_affiliation_strings":["College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University,Department of Electrical and Computer Engineering","Department of Electrical and Computer Engineering, College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University"],"affiliations":[{"raw_affiliation_string":"College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University,Department of Electrical and Computer Engineering","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5018334271","display_name":"Jong-Mo Seo","orcid":"https://orcid.org/0000-0002-1889-7405"},"institutions":[{"id":"https://openalex.org/I2802835388","display_name":"Seoul National University Hospital","ror":"https://ror.org/01z4nnt86","country_code":"KR","type":"healthcare","lineage":["https://openalex.org/I139264467","https://openalex.org/I2802835388"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jong-Mo Seo","raw_affiliation_strings":["College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University and Biomedical Research Institute of Seoul National University Hospital,Department of Electrical and Computer Engineering,Seoul,South Korea","Department of Electrical and Computer Engineering, College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University and Biomedical Research Institute of Seoul National University Hospital, Seoul, South Korea"],"affiliations":[{"raw_affiliation_string":"College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University and Biomedical Research Institute of Seoul National University Hospital,Department of Electrical and Computer Engineering,Seoul,South Korea","institution_ids":["https://openalex.org/I2802835388"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, College of Engineering and Inter-University Semiconductor Research Center (ISRC) in the Seoul National University and Biomedical Research Institute of Seoul National University Hospital, Seoul, South Korea","institution_ids":["https://openalex.org/I2802835388"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5101891810"],"corresponding_institution_ids":["https://openalex.org/I139264467"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.21940729,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"159","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},"topics":[{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T10660","display_name":"Conducting polymers and applications","score":0.9979000091552734,"subfield":{"id":"https://openalex.org/subfields/2507","display_name":"Polymers and Plastics"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9940000176429749,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/passivation","display_name":"Passivation","score":0.8891258239746094},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8043837547302246},{"id":"https://openalex.org/keywords/photolithography","display_name":"Photolithography","score":0.7916316986083984},{"id":"https://openalex.org/keywords/lamination","display_name":"Lamination","score":0.7581958770751953},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.7433492541313171},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.6780292987823486},{"id":"https://openalex.org/keywords/thermal-stability","display_name":"Thermal stability","score":0.5802056789398193},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.5540199875831604},{"id":"https://openalex.org/keywords/biocompatibility","display_name":"Biocompatibility","score":0.5184897184371948},{"id":"https://openalex.org/keywords/copolymer","display_name":"Copolymer","score":0.5029324889183044},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.4985008239746094},{"id":"https://openalex.org/keywords/microelectrode","display_name":"Microelectrode","score":0.4980010986328125},{"id":"https://openalex.org/keywords/multielectrode-array","display_name":"Multielectrode array","score":0.42286279797554016},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3910096287727356},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.37717992067337036},{"id":"https://openalex.org/keywords/polymer","display_name":"Polymer","score":0.3013761043548584},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.2992287874221802},{"id":"https://openalex.org/keywords/chemical-engineering","display_name":"Chemical engineering","score":0.2765190005302429},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.07796764373779297},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.054906249046325684}],"concepts":[{"id":"https://openalex.org/C33574316","wikidata":"https://www.wikidata.org/wiki/Q917260","display_name":"Passivation","level":3,"score":0.8891258239746094},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8043837547302246},{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.7916316986083984},{"id":"https://openalex.org/C2777557983","wikidata":"https://www.wikidata.org/wiki/Q384943","display_name":"Lamination","level":3,"score":0.7581958770751953},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7433492541313171},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.6780292987823486},{"id":"https://openalex.org/C59061564","wikidata":"https://www.wikidata.org/wiki/Q7783071","display_name":"Thermal stability","level":2,"score":0.5802056789398193},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.5540199875831604},{"id":"https://openalex.org/C2777230088","wikidata":"https://www.wikidata.org/wiki/Q864426","display_name":"Biocompatibility","level":2,"score":0.5184897184371948},{"id":"https://openalex.org/C15920480","wikidata":"https://www.wikidata.org/wiki/Q421281","display_name":"Copolymer","level":3,"score":0.5029324889183044},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4985008239746094},{"id":"https://openalex.org/C111670793","wikidata":"https://www.wikidata.org/wiki/Q16979465","display_name":"Microelectrode","level":3,"score":0.4980010986328125},{"id":"https://openalex.org/C95967509","wikidata":"https://www.wikidata.org/wiki/Q1952355","display_name":"Multielectrode array","level":4,"score":0.42286279797554016},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3910096287727356},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.37717992067337036},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.3013761043548584},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2992287874221802},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.2765190005302429},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.07796764373779297},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.054906249046325684},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0}],"mesh":[{"descriptor_ui":"D003516","descriptor_name":"Cycloparaffins","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D003516","descriptor_name":"Cycloparaffins","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D003516","descriptor_name":"Cycloparaffins","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D003516","descriptor_name":"Cycloparaffins","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D003516","descriptor_name":"Cycloparaffins","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D004567","descriptor_name":"Electrodes, Implanted","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004567","descriptor_name":"Electrodes, Implanted","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004567","descriptor_name":"Electrodes, Implanted","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004567","descriptor_name":"Electrodes, Implanted","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004567","descriptor_name":"Electrodes, Implanted","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008839","descriptor_name":"Microelectrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008839","descriptor_name":"Microelectrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008839","descriptor_name":"Microelectrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008839","descriptor_name":"Microelectrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008839","descriptor_name":"Microelectrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false}],"locations_count":2,"locations":[{"id":"doi:10.1109/embc40787.2023.10340058","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/embc40787.2023.10340058","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 45th Annual International Conference of the IEEE Engineering in Medicine & Biology Society (EMBC)","raw_type":"proceedings-article"},{"id":"pmid:38083392","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/38083392","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society. Annual International Conference","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320322014","display_name":"Ministry of Food and Drug Safety","ror":"https://ror.org/01f7dp456"},{"id":"https://openalex.org/F4320338440","display_name":"HORIZON EUROPE Health","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W1556836592","https://openalex.org/W1967638753","https://openalex.org/W1968152273","https://openalex.org/W1973029267","https://openalex.org/W1982413884","https://openalex.org/W1994488863","https://openalex.org/W2019117243","https://openalex.org/W2027910517","https://openalex.org/W2049072600","https://openalex.org/W2067692467","https://openalex.org/W2078231187","https://openalex.org/W2118236587","https://openalex.org/W2135013010","https://openalex.org/W2485737397","https://openalex.org/W2944759844","https://openalex.org/W2980024114","https://openalex.org/W2999531231","https://openalex.org/W3112460648","https://openalex.org/W6725849058"],"related_works":["https://openalex.org/W2061877343","https://openalex.org/W2028205923","https://openalex.org/W2381760774","https://openalex.org/W2037345099","https://openalex.org/W4386697944","https://openalex.org/W2768056422","https://openalex.org/W2417316355","https://openalex.org/W2162019548","https://openalex.org/W2354662944","https://openalex.org/W2019889235"],"abstract_inverted_index":{"In":[0],"this":[1],"work,":[2],"a":[3,10,17],"fabrication":[4],"process":[5],"for":[6,31],"implantable":[7,32],"electrodes":[8,34,45,78],"using":[9],"Cyclic":[11],"Olefin":[12],"Copolymer":[13],"(COC)":[14],"substrate":[15,70],"and":[16,24,41,53,71],"SU-8":[18,25,55],"passivation":[19,56,72],"layer":[20,57,73],"was":[21,58,74],"presented.":[22],"COC":[23,51],"were":[26,46],"shown":[27],"to":[28,36,76],"be":[29],"suitable":[30],"neural":[33],"due":[35],"their":[37],"biocompatibility,":[38],"chemical":[39],"resistance,":[40],"thermal":[42],"stability.":[43],"The":[44,65],"successfully":[47],"patterned":[48],"on":[49],"the":[50,54,69],"film,":[52],"coated":[59],"while":[60],"maintaining":[61],"site-opened":[62],"via":[63],"photolithography.":[64],"photocrosslinking":[66],"lamination":[67],"of":[68,83],"used":[75],"produce":[77],"with":[79],"fine":[80],"line":[81],"widths":[82],"20um":[84],"without":[85],"applying":[86],"heat.":[87]},"counts_by_year":[],"updated_date":"2025-12-25T23:11:45.687758","created_date":"2025-10-10T00:00:00"}