{"id":"https://openalex.org/W2899196762","doi":"https://doi.org/10.1109/embc.2018.8513028","title":"A Row-Column (RC) Addressed 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array on a Glass Substrate: Preliminary Results","display_name":"A Row-Column (RC) Addressed 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array on a Glass Substrate: Preliminary Results","publication_year":2018,"publication_date":"2018-07-01","ids":{"openalex":"https://openalex.org/W2899196762","doi":"https://doi.org/10.1109/embc.2018.8513028","mag":"2899196762","pmid":"https://pubmed.ncbi.nlm.nih.gov/30440288"},"language":"en","primary_location":{"id":"doi:10.1109/embc.2018.8513028","is_oa":false,"landing_page_url":"https://doi.org/10.1109/embc.2018.8513028","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 40th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref","pubmed"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5112398631","display_name":"Jean L. Sanders","orcid":null},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Jean L. Sanders","raw_affiliation_strings":["North Carolina State University, Raleigh, NC, US"],"affiliations":[{"raw_affiliation_string":"North Carolina State University, Raleigh, NC, US","institution_ids":["https://openalex.org/I137902535"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081293918","display_name":"Xun Wu","orcid":"https://orcid.org/0000-0003-4381-455X"},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Xun Wu","raw_affiliation_strings":["North Carolina State University, Raleigh, NC, US"],"affiliations":[{"raw_affiliation_string":"North Carolina State University, Raleigh, NC, US","institution_ids":["https://openalex.org/I137902535"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050162840","display_name":"Oluwafemi J. Adelegan","orcid":"https://orcid.org/0000-0003-3273-8117"},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Oluwafemi J. Adelegan","raw_affiliation_strings":["North Carolina State University, Raleigh, NC, US"],"affiliations":[{"raw_affiliation_string":"North Carolina State University, Raleigh, NC, US","institution_ids":["https://openalex.org/I137902535"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053098334","display_name":"M. M. Mahmud","orcid":"https://orcid.org/0000-0002-2837-2303"},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Marzana M. Mahmud","raw_affiliation_strings":["North Carolina State University, Raleigh, NC, US"],"affiliations":[{"raw_affiliation_string":"North Carolina State University, Raleigh, NC, US","institution_ids":["https://openalex.org/I137902535"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037709982","display_name":"F. Yalc\u0131n Yamaner","orcid":"https://orcid.org/0000-0003-3841-2943"},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"F. Yalcin Yamaner","raw_affiliation_strings":["North Carolina State University, Raleigh, NC, US"],"affiliations":[{"raw_affiliation_string":"North Carolina State University, Raleigh, NC, US","institution_ids":["https://openalex.org/I137902535"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005964218","display_name":"Caterina M. Gallippi","orcid":"https://orcid.org/0000-0003-0514-177X"},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Caterina M. Gallippi","raw_affiliation_strings":["Joint Department of BiomedicalEngineering, North Carolina State University and University of North Carolina, Chapel Hill, USA"],"affiliations":[{"raw_affiliation_string":"Joint Department of BiomedicalEngineering, North Carolina State University and University of North Carolina, Chapel Hill, USA","institution_ids":["https://openalex.org/I137902535"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5009868880","display_name":"\u00d6mer Oralkan","orcid":"https://orcid.org/0000-0001-8616-6877"},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Omer Oralkan","raw_affiliation_strings":["North Carolina State University, Raleigh, NC, US"],"affiliations":[{"raw_affiliation_string":"North Carolina State University, Raleigh, NC, US","institution_ids":["https://openalex.org/I137902535"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5112398631"],"corresponding_institution_ids":["https://openalex.org/I137902535"],"apc_list":null,"apc_paid":null,"fwci":0.1943,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.49818276,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"2018","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10727","display_name":"Ultrasound Imaging and Elastography","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-micromachined-ultrasonic-transducers","display_name":"Capacitive micromachined ultrasonic transducers","score":0.9677718877792358},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7931017279624939},{"id":"https://openalex.org/keywords/ultrasonic-sensor","display_name":"Ultrasonic sensor","score":0.7039230465888977},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.6817857027053833},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.6374146342277527},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.5797573328018188},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.5353029370307922},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.4568532109260559},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.45311176776885986},{"id":"https://openalex.org/keywords/electrical-impedance","display_name":"Electrical impedance","score":0.4427541494369507},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.4350054860115051},{"id":"https://openalex.org/keywords/hydrophone","display_name":"Hydrophone","score":0.4318394660949707},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.42549729347229004},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.23743709921836853},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.09363946318626404}],"concepts":[{"id":"https://openalex.org/C58772458","wikidata":"https://www.wikidata.org/wiki/Q5034480","display_name":"Capacitive micromachined ultrasonic transducers","level":3,"score":0.9677718877792358},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7931017279624939},{"id":"https://openalex.org/C81288441","wikidata":"https://www.wikidata.org/wiki/Q20736125","display_name":"Ultrasonic sensor","level":2,"score":0.7039230465888977},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.6817857027053833},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.6374146342277527},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.5797573328018188},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.5353029370307922},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.4568532109260559},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.45311176776885986},{"id":"https://openalex.org/C17829176","wikidata":"https://www.wikidata.org/wiki/Q179043","display_name":"Electrical impedance","level":2,"score":0.4427541494369507},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4350054860115051},{"id":"https://openalex.org/C2776328434","wikidata":"https://www.wikidata.org/wiki/Q798062","display_name":"Hydrophone","level":2,"score":0.4318394660949707},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.42549729347229004},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.23743709921836853},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.09363946318626404},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[{"descriptor_ui":"D003430","descriptor_name":"Cross-Sectional Studies","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D003430","descriptor_name":"Cross-Sectional Studies","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D003430","descriptor_name":"Cross-Sectional Studies","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004566","descriptor_name":"Electrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004566","descriptor_name":"Electrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004566","descriptor_name":"Electrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D014465","descriptor_name":"Ultrasonics","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D014465","descriptor_name":"Ultrasonics","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D014465","descriptor_name":"Ultrasonics","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D017097","descriptor_name":"Electric Impedance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D017097","descriptor_name":"Electric Impedance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D017097","descriptor_name":"Electric Impedance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D025802","descriptor_name":"Electric Capacitance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D025802","descriptor_name":"Electric Capacitance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D025802","descriptor_name":"Electric Capacitance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false}],"locations_count":2,"locations":[{"id":"doi:10.1109/embc.2018.8513028","is_oa":false,"landing_page_url":"https://doi.org/10.1109/embc.2018.8513028","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 40th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC)","raw_type":"proceedings-article"},{"id":"pmid:30440288","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/30440288","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society. Annual International Conference","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"},{"id":"https://openalex.org/F4320310013","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06"},{"id":"https://openalex.org/F4320325957","display_name":"Novo Nordisk Fonden","ror":"https://ror.org/04txyc737"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W322034555","https://openalex.org/W1833017711","https://openalex.org/W1991416012","https://openalex.org/W2154752051","https://openalex.org/W2547101899","https://openalex.org/W2547316462","https://openalex.org/W2598401334","https://openalex.org/W2768869545","https://openalex.org/W2769875073","https://openalex.org/W6682686233","https://openalex.org/W6728794434","https://openalex.org/W6729326406","https://openalex.org/W6746261809","https://openalex.org/W6746293520"],"related_works":["https://openalex.org/W2277106721","https://openalex.org/W4319718051","https://openalex.org/W2137987953","https://openalex.org/W3202163833","https://openalex.org/W2808928575","https://openalex.org/W4281663564","https://openalex.org/W2330836581","https://openalex.org/W2051847435","https://openalex.org/W2152252808","https://openalex.org/W2969556451"],"abstract_inverted_index":{"In":[0],"this":[1],"work,":[2],"we":[3],"present":[4],"preliminary":[5],"characterization":[6,55],"results":[7,56,84],"from":[8],"a":[9,31,80,142],"32":[10,12],"x":[11],"row-column":[13],"(RC)":[14],"addressed":[15],"2D":[16,73],"capacitive":[17],"micromachined":[18],"ultrasonic":[19],"transducer":[20],"(CMUT)":[21],"array.":[22],"The":[23,54,83,120],"device":[24,112],"was":[25,145],"fabricated":[26,50],"using":[27,79],"anodic":[28],"bonding":[29],"on":[30,51],"borosilicate":[32],"glass":[33],"substrate,":[34],"which":[35],"eliminates":[36],"the":[37,60,76,87,100,108,124],"substrate":[38],"-":[39],"bottom":[40,63,103],"electrode":[41],"coupling":[42],"previously":[43],"observed":[44],"in":[45],"traditional":[46],"CMUT":[47],"RC":[48,129],"arrays":[49,130],"silicon":[52],"substrates.":[53],"were":[57,97],"compared":[58],"for":[59,105],"top":[61,101],"and":[62,65,72,94,102,116],"electrodes":[64,96,104],"include":[66],"impedance":[67],"measurements,":[68],"pulseecho":[69],"impulse":[70],"responses,":[71],"scans":[74,122],"of":[75,107,128,141],"pressure":[77,121],"field":[78],"calibrated":[81],"hydrophone.":[82],"showed":[85],"that":[86],"array":[88],"elements":[89],"behave":[90],"similarly":[91],"when":[92],"ground":[93],"hot":[95],"switched":[98],"between":[99],"all":[106],"measured":[109],"parameters":[110],"including":[111],"capacitance,":[113],"center":[114],"frequency,":[115],"pulse-echo":[117],"response":[118],"amplitude.":[119],"verified":[123],"highly":[125],"customizable":[126],"nature":[127],"by":[131],"showing":[132],"multiple":[133],"active":[134],"element":[135],"configurations.":[136],"A":[137],"sample":[138],"cross-sectional":[139],"image":[140],"metal":[143],"target":[144],"also":[146],"demonstrated.":[147]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}
