{"id":"https://openalex.org/W2536912433","doi":"https://doi.org/10.1109/embc.2016.7591311","title":"A double-sided fabrication process for intrafascicular parylene C based electrode arrays","display_name":"A double-sided fabrication process for intrafascicular parylene C based electrode arrays","publication_year":2016,"publication_date":"2016-08-01","ids":{"openalex":"https://openalex.org/W2536912433","doi":"https://doi.org/10.1109/embc.2016.7591311","mag":"2536912433","pmid":"https://pubmed.ncbi.nlm.nih.gov/28268899"},"language":"en","primary_location":{"id":"doi:10.1109/embc.2016.7591311","is_oa":false,"landing_page_url":"https://doi.org/10.1109/embc.2016.7591311","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 38th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref","pubmed"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101571545","display_name":"Matthias Mueller","orcid":"https://orcid.org/0000-0003-2074-144X"},"institutions":[{"id":"https://openalex.org/I161046081","display_name":"University of Freiburg","ror":"https://ror.org/0245cg223","country_code":"DE","type":"education","lineage":["https://openalex.org/I161046081"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"M. Mueller","raw_affiliation_strings":["Dept. of Microsystems Engineering, IMTEK, Univ. of Freiburg, Germany"],"affiliations":[{"raw_affiliation_string":"Dept. of Microsystems Engineering, IMTEK, Univ. of Freiburg, Germany","institution_ids":["https://openalex.org/I161046081"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079592712","display_name":"Christian Boehler","orcid":"https://orcid.org/0000-0002-7961-7411"},"institutions":[{"id":"https://openalex.org/I161046081","display_name":"University of Freiburg","ror":"https://ror.org/0245cg223","country_code":"DE","type":"education","lineage":["https://openalex.org/I161046081"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"C. Boehler","raw_affiliation_strings":["Dept. of Microsystems Engineering, IMTEK, Univ. of Freiburg, Germany"],"affiliations":[{"raw_affiliation_string":"Dept. of Microsystems Engineering, IMTEK, Univ. of Freiburg, Germany","institution_ids":["https://openalex.org/I161046081"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014328438","display_name":"J-C. De Jaeger","orcid":null},"institutions":[{"id":"https://openalex.org/I161046081","display_name":"University of Freiburg","ror":"https://ror.org/0245cg223","country_code":"DE","type":"education","lineage":["https://openalex.org/I161046081"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"J. Jaeger","raw_affiliation_strings":["Dept. of Microsystems Engineering, IMTEK, Univ. of Freiburg, Germany"],"affiliations":[{"raw_affiliation_string":"Dept. of Microsystems Engineering, IMTEK, Univ. of Freiburg, Germany","institution_ids":["https://openalex.org/I161046081"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078019282","display_name":"Maria Asplund","orcid":"https://orcid.org/0000-0001-8779-7478"},"institutions":[{"id":"https://openalex.org/I161046081","display_name":"University of Freiburg","ror":"https://ror.org/0245cg223","country_code":"DE","type":"education","lineage":["https://openalex.org/I161046081"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Asplund","raw_affiliation_strings":["Dept. of Microsystems Engineering, IMTEK, Univ. of Freiburg, Germany"],"affiliations":[{"raw_affiliation_string":"Dept. of Microsystems Engineering, IMTEK, Univ. of Freiburg, Germany","institution_ids":["https://openalex.org/I161046081"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5058067206","display_name":"Thomas Stieglitz","orcid":"https://orcid.org/0000-0002-7349-4254"},"institutions":[{"id":"https://openalex.org/I161046081","display_name":"University of Freiburg","ror":"https://ror.org/0245cg223","country_code":"DE","type":"education","lineage":["https://openalex.org/I161046081"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"T. Stieglitz","raw_affiliation_strings":["Dept. of Microsystems Engineering, IMTEK, Univ. of Freiburg, Germany"],"affiliations":[{"raw_affiliation_string":"Dept. of Microsystems Engineering, IMTEK, Univ. of Freiburg, Germany","institution_ids":["https://openalex.org/I161046081"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5101571545"],"corresponding_institution_ids":["https://openalex.org/I161046081"],"apc_list":null,"apc_paid":null,"fwci":0.3245,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.60849443,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"2016","issue":null,"first_page":"2798","last_page":"2801"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},"topics":[{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":0.9861000180244446,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10660","display_name":"Conducting polymers and applications","score":0.984000027179718,"subfield":{"id":"https://openalex.org/subfields/2507","display_name":"Polymers and Plastics"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.8274564743041992},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8170354962348938},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.7429882884025574},{"id":"https://openalex.org/keywords/parylene","display_name":"Parylene","score":0.687274694442749},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5651002526283264},{"id":"https://openalex.org/keywords/laser-ablation","display_name":"Laser ablation","score":0.497541218996048},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.43051978945732117},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.27162379026412964},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.2063097357749939},{"id":"https://openalex.org/keywords/polymer","display_name":"Polymer","score":0.07399740815162659}],"concepts":[{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.8274564743041992},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8170354962348938},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.7429882884025574},{"id":"https://openalex.org/C2777385008","wikidata":"https://www.wikidata.org/wiki/Q448540","display_name":"Parylene","level":3,"score":0.687274694442749},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5651002526283264},{"id":"https://openalex.org/C2779188808","wikidata":"https://www.wikidata.org/wiki/Q1806547","display_name":"Laser ablation","level":3,"score":0.497541218996048},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.43051978945732117},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.27162379026412964},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2063097357749939},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.07399740815162659},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[{"descriptor_ui":"D004567","descriptor_name":"Electrodes, Implanted","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D004567","descriptor_name":"Electrodes, Implanted","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D004567","descriptor_name":"Electrodes, Implanted","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D005240","descriptor_name":"Feasibility Studies","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D005240","descriptor_name":"Feasibility Studies","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D005240","descriptor_name":"Feasibility Studies","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006801","descriptor_name":"Humans","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006801","descriptor_name":"Humans","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006801","descriptor_name":"Humans","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D007495","descriptor_name":"Iridium","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D007495","descriptor_name":"Iridium","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D007495","descriptor_name":"Iridium","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D007834","descriptor_name":"Lasers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D007834","descriptor_name":"Lasers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D007834","descriptor_name":"Lasers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008839","descriptor_name":"Microelectrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008839","descriptor_name":"Microelectrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008839","descriptor_name":"Microelectrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008962","descriptor_name":"Models, Theoretical","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008962","descriptor_name":"Models, Theoretical","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008962","descriptor_name":"Models, Theoretical","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D009474","descriptor_name":"Neurons","qualifier_ui":"Q000502","qualifier_name":"physiology","is_major_topic":false},{"descriptor_ui":"D009474","descriptor_name":"Neurons","qualifier_ui":"Q000502","qualifier_name":"physiology","is_major_topic":false},{"descriptor_ui":"D009474","descriptor_name":"Neurons","qualifier_ui":"Q000502","qualifier_name":"physiology","is_major_topic":false},{"descriptor_ui":"D010984","descriptor_name":"Platinum","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D010984","descriptor_name":"Platinum","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D010984","descriptor_name":"Platinum","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D011108","descriptor_name":"Polymers","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D011108","descriptor_name":"Polymers","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D011108","descriptor_name":"Polymers","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D014992","descriptor_name":"Xylenes","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D014992","descriptor_name":"Xylenes","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D014992","descriptor_name":"Xylenes","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D017097","descriptor_name":"Electric Impedance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D017097","descriptor_name":"Electric Impedance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D017097","descriptor_name":"Electric Impedance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false}],"locations_count":2,"locations":[{"id":"doi:10.1109/embc.2016.7591311","is_oa":false,"landing_page_url":"https://doi.org/10.1109/embc.2016.7591311","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 38th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC)","raw_type":"proceedings-article"},{"id":"pmid:28268899","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/28268899","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society. Annual International Conference","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1190686642","https://openalex.org/W1501691262","https://openalex.org/W1968134304","https://openalex.org/W2012853348","https://openalex.org/W2029665044","https://openalex.org/W2061453480","https://openalex.org/W2112896847","https://openalex.org/W2121404213","https://openalex.org/W2122276783","https://openalex.org/W2204802825","https://openalex.org/W2326037086"],"related_works":["https://openalex.org/W2953703289","https://openalex.org/W2075707675","https://openalex.org/W2082914599","https://openalex.org/W2756570351","https://openalex.org/W2294645879","https://openalex.org/W2129592855","https://openalex.org/W2763746343","https://openalex.org/W2058003992","https://openalex.org/W83428874","https://openalex.org/W2067464657"],"abstract_inverted_index":{"After":[0],"the":[1,45,79,125,143,146,151,163,169,174],"development":[2],"of":[3,124,133,145,153],"a":[4,28,58,104,122,155],"single-sided":[5],"fabrication":[6,126,199],"process":[7,32,127,200],"for":[8,190,208],"intrafascicular":[9],"parylene":[10,54],"C":[11,55],"based":[12],"electrode":[13,107,212],"arrays":[14,213],"tests":[15],"showed":[16],"that":[17,73,108,197],"an":[18,202],"increase":[19],"in":[20,78,214],"integration":[21],"density":[22],"can":[23,74],"only":[24],"be":[25,75,187],"achieved":[26],"by":[27,130],"double-side":[29],"process.":[30],"The":[31,91,178],"uses":[33],"25":[34],"\u03bcm":[35,52,70,97],"thick":[36,53,71],"platinum":[37],"iridium":[38],"foil,":[39],"which":[40],"is":[41,109],"thinned":[42],"down":[43,149],"with":[44],"laser":[46,60,171],"and":[47,103,161,210],"sandwiched":[48],"between":[49],"two":[50],"10":[51],"layers.":[56],"Utilizing":[57],"picosecond":[59,170],"(355":[61],"nm":[62],"Nd:YVO4)":[63],"it":[64,139],"was":[65,184],"possible":[66,140],"to":[67,111,118,141,150,168,186,204],"fabricate":[68],"40":[69],"electrodes":[72,99,148],"implanted":[76],"directly":[77],"nerve":[80],"without":[81],"relying":[82],"on":[83,100,173],"additional":[84],"support":[85],"layers":[86],"like":[87],"chitosan":[88],"or":[89],"silk.":[90],"fabricated":[92],"samples":[93],"feature":[94],"three":[95],"80":[96],"diameter":[98],"each":[101],"side":[102,120,176],"large":[105],"ground":[106],"opened":[110],"both":[112],"sides.":[113],"Impedance":[114],"mismatches":[115],"from":[116],"front":[117,175],"back":[119],"as":[121],"result":[123],"are":[128],"compensated":[129],"electrochemical":[131],"deposition":[132],"nanostructured":[134],"platinum.":[135],"This":[136],"step":[137],"makes":[138],"bring":[142],"impedances":[144],"small":[147],"range":[152],"just":[154],"few":[156],"k\u03a9":[157],"at":[158],"1":[159],"kHz":[160],"illustrate":[162],"additionally":[164],"gained":[165],"surface":[166],"due":[167],"ablation":[172],"electrodes.":[177,193],"safely":[179],"injectable":[180],"charge":[181],"per":[182],"pulse":[183],"found":[185],"635.75":[188],"\u03bcC/cm2":[189],"such":[191],"coated":[192],"Optical":[194],"investigations":[195],"show":[196],"this":[198],"offers":[201],"alternative":[203],"established":[205],"lithographic":[206],"processes":[207],"thin":[209],"flexible":[211],"neural":[215],"implants.":[216]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}