{"id":"https://openalex.org/W2334316142","doi":"https://doi.org/10.1109/embc.2014.6943861","title":"A low pull-in SU-8 based Capacitive Micromachined Ultrasonic Transducer for medical imaging applications","display_name":"A low pull-in SU-8 based Capacitive Micromachined Ultrasonic Transducer for medical imaging applications","publication_year":2014,"publication_date":"2014-08-01","ids":{"openalex":"https://openalex.org/W2334316142","doi":"https://doi.org/10.1109/embc.2014.6943861","mag":"2334316142","pmid":"https://pubmed.ncbi.nlm.nih.gov/25570229"},"language":"en","primary_location":{"id":"doi:10.1109/embc.2014.6943861","is_oa":false,"landing_page_url":"https://doi.org/10.1109/embc.2014.6943861","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 36th Annual International Conference of the IEEE Engineering in Medicine and Biology Society","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref","pubmed"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5054499441","display_name":"Jose Joseph","orcid":"https://orcid.org/0000-0002-5621-7044"},"institutions":[{"id":"https://openalex.org/I65181880","display_name":"Indian Institute of Technology Hyderabad","ror":"https://ror.org/01j4v3x97","country_code":"IN","type":"education","lineage":["https://openalex.org/I65181880"]}],"countries":["IN"],"is_corresponding":true,"raw_author_name":"Jose Joseph","raw_affiliation_strings":["Department of Electrical Engineering, Indian Institute of Technology, Hyderabad, India"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Indian Institute of Technology, Hyderabad, India","institution_ids":["https://openalex.org/I65181880"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005811349","display_name":"Shiv Govind Singh","orcid":"https://orcid.org/0000-0001-7319-879X"},"institutions":[{"id":"https://openalex.org/I65181880","display_name":"Indian Institute of Technology Hyderabad","ror":"https://ror.org/01j4v3x97","country_code":"IN","type":"education","lineage":["https://openalex.org/I65181880"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Shiv Govind Singh","raw_affiliation_strings":["Department of Electrical Engineering, Indian Institute of Technology, Hyderabad, India"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Indian Institute of Technology, Hyderabad, India","institution_ids":["https://openalex.org/I65181880"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5037818922","display_name":"Siva Rama Krishna Vanjari","orcid":"https://orcid.org/0000-0001-6753-2800"},"institutions":[{"id":"https://openalex.org/I65181880","display_name":"Indian Institute of Technology Hyderabad","ror":"https://ror.org/01j4v3x97","country_code":"IN","type":"education","lineage":["https://openalex.org/I65181880"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Siva Rama Krishna Vanjari","raw_affiliation_strings":["Department of Electrical Engineering, Indian Institute of Technology, Hyderabad, India"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Indian Institute of Technology, Hyderabad, India","institution_ids":["https://openalex.org/I65181880"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5054499441"],"corresponding_institution_ids":["https://openalex.org/I65181880"],"apc_list":null,"apc_paid":null,"fwci":0.2124,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.63988125,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"2014","issue":null,"first_page":"1398","last_page":"1401"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10727","display_name":"Ultrasound Imaging and Elastography","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-micromachined-ultrasonic-transducers","display_name":"Capacitive micromachined ultrasonic transducers","score":0.973264753818512},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.7218276262283325},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.7125126123428345},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6987632513046265},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.6932653188705444},{"id":"https://openalex.org/keywords/ultrasonic-sensor","display_name":"Ultrasonic sensor","score":0.6696267127990723},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.5834274888038635},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.4924941956996918},{"id":"https://openalex.org/keywords/capacitive-coupling","display_name":"Capacitive coupling","score":0.4916144013404846},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.4741073250770569},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4732677936553955},{"id":"https://openalex.org/keywords/coupling-coefficient-of-resonators","display_name":"Coupling coefficient of resonators","score":0.4666561782360077},{"id":"https://openalex.org/keywords/electromechanical-coupling-coefficient","display_name":"Electromechanical coupling coefficient","score":0.4625505805015564},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4543534815311432},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.44633376598358154},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.36670511960983276},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.29725995659828186},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.20714911818504333},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.20266839861869812},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.14263588190078735},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.07430315017700195}],"concepts":[{"id":"https://openalex.org/C58772458","wikidata":"https://www.wikidata.org/wiki/Q5034480","display_name":"Capacitive micromachined ultrasonic transducers","level":3,"score":0.973264753818512},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.7218276262283325},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.7125126123428345},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6987632513046265},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6932653188705444},{"id":"https://openalex.org/C81288441","wikidata":"https://www.wikidata.org/wiki/Q20736125","display_name":"Ultrasonic sensor","level":2,"score":0.6696267127990723},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.5834274888038635},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.4924941956996918},{"id":"https://openalex.org/C68278764","wikidata":"https://www.wikidata.org/wiki/Q444167","display_name":"Capacitive coupling","level":3,"score":0.4916144013404846},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.4741073250770569},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4732677936553955},{"id":"https://openalex.org/C91397564","wikidata":"https://www.wikidata.org/wiki/Q15059729","display_name":"Coupling coefficient of resonators","level":3,"score":0.4666561782360077},{"id":"https://openalex.org/C86194701","wikidata":"https://www.wikidata.org/wiki/Q2981748","display_name":"Electromechanical coupling coefficient","level":3,"score":0.4625505805015564},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4543534815311432},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.44633376598358154},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.36670511960983276},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.29725995659828186},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.20714911818504333},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.20266839861869812},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.14263588190078735},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07430315017700195},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[{"descriptor_ui":"D003952","descriptor_name":"Diagnostic Imaging","qualifier_ui":"Q000379","qualifier_name":"methods","is_major_topic":false},{"descriptor_ui":"D003952","descriptor_name":"Diagnostic Imaging","qualifier_ui":"Q000379","qualifier_name":"methods","is_major_topic":false},{"descriptor_ui":"D003952","descriptor_name":"Diagnostic Imaging","qualifier_ui":"Q000379","qualifier_name":"methods","is_major_topic":false},{"descriptor_ui":"D004852","descriptor_name":"Epoxy Compounds","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D004852","descriptor_name":"Epoxy Compounds","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D004852","descriptor_name":"Epoxy Compounds","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D011108","descriptor_name":"Polymers","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D011108","descriptor_name":"Polymers","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D011108","descriptor_name":"Polymers","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D014465","descriptor_name":"Ultrasonics","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D014465","descriptor_name":"Ultrasonics","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D014465","descriptor_name":"Ultrasonics","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D017655","descriptor_name":"Silicon Compounds","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D017655","descriptor_name":"Silicon Compounds","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D017655","descriptor_name":"Silicon Compounds","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D025802","descriptor_name":"Electric Capacitance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D025802","descriptor_name":"Electric Capacitance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D025802","descriptor_name":"Electric Capacitance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D055616","descriptor_name":"Microtechnology","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055616","descriptor_name":"Microtechnology","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055616","descriptor_name":"Microtechnology","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false}],"locations_count":3,"locations":[{"id":"doi:10.1109/embc.2014.6943861","is_oa":false,"landing_page_url":"https://doi.org/10.1109/embc.2014.6943861","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 36th Annual International Conference of the IEEE Engineering in Medicine and Biology Society","raw_type":"proceedings-article"},{"id":"pmid:25570229","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/25570229","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society. Annual International Conference","raw_type":null},{"id":"pmh:oai:raiith.iith.ac.in:1559","is_oa":false,"landing_page_url":"http://raiith.iith.ac.in/1559/","pdf_url":null,"source":{"id":"https://openalex.org/S4306400292","display_name":"Research Archive of Indian Institute of Technology Hyderabad (Indian Institute of Technology Hyderabad)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I65181880","host_organization_name":"Indian Institute of Technology Hyderabad","host_organization_lineage":["https://openalex.org/I65181880"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Conference or Workshop Item"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8600000143051147,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W1560133025","https://openalex.org/W1605570476","https://openalex.org/W2025762116","https://openalex.org/W2027755057","https://openalex.org/W2051512211","https://openalex.org/W2096239760","https://openalex.org/W2101505555","https://openalex.org/W2105394554","https://openalex.org/W2137303156","https://openalex.org/W2138107098","https://openalex.org/W2140073697","https://openalex.org/W2141540593","https://openalex.org/W2150637132","https://openalex.org/W2159442239","https://openalex.org/W2313858200","https://openalex.org/W2546383106","https://openalex.org/W6636362563"],"related_works":["https://openalex.org/W2027755057","https://openalex.org/W2051189320","https://openalex.org/W4229010990","https://openalex.org/W2015906754","https://openalex.org/W2064151353","https://openalex.org/W2328075641","https://openalex.org/W2969556451","https://openalex.org/W2067288997","https://openalex.org/W3172496825","https://openalex.org/W3096615936"],"abstract_inverted_index":{"In":[0],"this":[1],"paper":[2],"we":[3],"present":[4],"a":[5,9,35,49,98],"thorough":[6],"analysis":[7],"of":[8,38,43],"low":[10,79,99],"pull-in":[11,80],"voltage":[12,81],"Capacitive":[13],"Micromachined":[14],"Ultrasonic":[15],"Transducer":[16],"(CMUT)":[17],"using":[18],"SU-8":[19],"as":[20],"the":[21,41,55,60,65,69,93],"membrane":[22,76],"material.":[23],"It":[24],"is":[25,97],"designed":[26],"to":[27,59],"operate":[28],"at":[29],"1":[30],"MHz":[31],"frequency":[32],"that":[33],"has":[34],"wide":[36],"range":[37],"applications":[39],"including":[40],"imaging":[42],"deeper":[44],"organs.":[45],"We":[46],"also":[47],"propose":[48],"simple":[50],"state-of-the-art":[51],"fabrication":[52,95],"methodology":[53,96],"for":[54],"same.":[56],"As":[57],"compared":[58],"standard":[61],"Silicon":[62],"Nitride":[63],"CMUTs,":[64],"proposed":[66,94],"structure":[67],"gives":[68],"same":[70],"electromechanical":[71],"coupling":[72],"coefficient":[73],"with":[74],"lower":[75],"dimensions":[77],"and":[78,89],"which":[82,102],"in":[83,86],"turn":[84],"results":[85],"reduced":[87],"area":[88],"power":[90],"consumption.":[91],"Moreover":[92],"temperature":[100],"process":[101],"makes":[103],"it":[104],"CMOS":[105],"compatible.":[106]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":3},{"year":2015,"cited_by_count":1}],"updated_date":"2026-04-04T16:13:02.066488","created_date":"2025-10-10T00:00:00"}