{"id":"https://openalex.org/W3185309183","doi":"https://doi.org/10.1109/eit51626.2021.9491836","title":"Branch selection and data optimization for selecting machines for processes in semiconductor manufacturing using AI-based predictions","display_name":"Branch selection and data optimization for selecting machines for processes in semiconductor manufacturing using AI-based predictions","publication_year":2021,"publication_date":"2021-05-14","ids":{"openalex":"https://openalex.org/W3185309183","doi":"https://doi.org/10.1109/eit51626.2021.9491836","mag":"3185309183"},"language":"en","primary_location":{"id":"doi:10.1109/eit51626.2021.9491836","is_oa":false,"landing_page_url":"https://doi.org/10.1109/eit51626.2021.9491836","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE International Conference on Electro Information Technology (EIT)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5024810435","display_name":"Peter Stich","orcid":null},"institutions":[{"id":"https://openalex.org/I206895457","display_name":"University of Siegen","ror":"https://ror.org/02azyry73","country_code":"DE","type":"education","lineage":["https://openalex.org/I206895457"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Peter Stich","raw_affiliation_strings":["University of Siegen,Digital Integrated Systems,Siegen,Germany","Digital Integrated Systems, University of Siegen, Siegen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Siegen,Digital Integrated Systems,Siegen,Germany","institution_ids":["https://openalex.org/I206895457"]},{"raw_affiliation_string":"Digital Integrated Systems, University of Siegen, Siegen, Germany","institution_ids":["https://openalex.org/I206895457"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033719082","display_name":"Rebecca Busch","orcid":"https://orcid.org/0009-0006-0603-0229"},"institutions":[{"id":"https://openalex.org/I206895457","display_name":"University of Siegen","ror":"https://ror.org/02azyry73","country_code":"DE","type":"education","lineage":["https://openalex.org/I206895457"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Rebecca Busch","raw_affiliation_strings":["University of Siegen,Digital Integrated Systems,Siegen,Germany","Digital Integrated Systems, University of Siegen, Siegen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Siegen,Digital Integrated Systems,Siegen,Germany","institution_ids":["https://openalex.org/I206895457"]},{"raw_affiliation_string":"Digital Integrated Systems, University of Siegen, Siegen, Germany","institution_ids":["https://openalex.org/I206895457"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029221410","display_name":"M. Wahl","orcid":"https://orcid.org/0000-0002-9448-918X"},"institutions":[{"id":"https://openalex.org/I206895457","display_name":"University of Siegen","ror":"https://ror.org/02azyry73","country_code":"DE","type":"education","lineage":["https://openalex.org/I206895457"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Michael Wahl","raw_affiliation_strings":["University of Siegen,Digital Integrated Systems,Siegen,Germany","Digital Integrated Systems, University of Siegen, Siegen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Siegen,Digital Integrated Systems,Siegen,Germany","institution_ids":["https://openalex.org/I206895457"]},{"raw_affiliation_string":"Digital Integrated Systems, University of Siegen, Siegen, Germany","institution_ids":["https://openalex.org/I206895457"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091541300","display_name":"Christian Weber","orcid":"https://orcid.org/0000-0001-6606-5577"},"institutions":[{"id":"https://openalex.org/I206895457","display_name":"University of Siegen","ror":"https://ror.org/02azyry73","country_code":"DE","type":"education","lineage":["https://openalex.org/I206895457"]},{"id":"https://openalex.org/I4210155382","display_name":"Knowledge Based Systems (United States)","ror":"https://ror.org/04gtf4q04","country_code":"US","type":"company","lineage":["https://openalex.org/I4210155382"]}],"countries":["DE","US"],"is_corresponding":false,"raw_author_name":"Christian Weber","raw_affiliation_strings":["University of Siegen,Knowledge Based Systems and Knowledge Management,Siegen,Germany","Knowledge Based Systems and Knowledge Management, University of Siegen, Siegen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Siegen,Knowledge Based Systems and Knowledge Management,Siegen,Germany","institution_ids":["https://openalex.org/I206895457","https://openalex.org/I4210155382"]},{"raw_affiliation_string":"Knowledge Based Systems and Knowledge Management, University of Siegen, Siegen, Germany","institution_ids":["https://openalex.org/I206895457"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5037843564","display_name":"Madjid Fathi","orcid":"https://orcid.org/0000-0002-7602-9593"},"institutions":[{"id":"https://openalex.org/I206895457","display_name":"University of Siegen","ror":"https://ror.org/02azyry73","country_code":"DE","type":"education","lineage":["https://openalex.org/I206895457"]},{"id":"https://openalex.org/I4210155382","display_name":"Knowledge Based Systems (United States)","ror":"https://ror.org/04gtf4q04","country_code":"US","type":"company","lineage":["https://openalex.org/I4210155382"]}],"countries":["DE","US"],"is_corresponding":false,"raw_author_name":"Madjid Fathi","raw_affiliation_strings":["University of Siegen,Knowledge Based Systems and Knowledge Management,Siegen,Germany","Knowledge Based Systems and Knowledge Management, University of Siegen, Siegen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Siegen,Knowledge Based Systems and Knowledge Management,Siegen,Germany","institution_ids":["https://openalex.org/I206895457","https://openalex.org/I4210155382"]},{"raw_affiliation_string":"Knowledge Based Systems and Knowledge Management, University of Siegen, Siegen, Germany","institution_ids":["https://openalex.org/I206895457"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.11891269,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9940000176429749,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9934999942779541,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/selection","display_name":"Selection (genetic algorithm)","score":0.7590399980545044},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.6658080816268921},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6638253927230835},{"id":"https://openalex.org/keywords/task","display_name":"Task (project management)","score":0.656586229801178},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.6437134742736816},{"id":"https://openalex.org/keywords/path","display_name":"Path (computing)","score":0.5685589909553528},{"id":"https://openalex.org/keywords/yield","display_name":"Yield (engineering)","score":0.5071439743041992},{"id":"https://openalex.org/keywords/semiconductor-industry","display_name":"Semiconductor industry","score":0.4491904079914093},{"id":"https://openalex.org/keywords/industrial-engineering","display_name":"Industrial engineering","score":0.4301590323448181},{"id":"https://openalex.org/keywords/machine-learning","display_name":"Machine learning","score":0.37945181131362915},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.3454752266407013},{"id":"https://openalex.org/keywords/manufacturing-engineering","display_name":"Manufacturing engineering","score":0.306049644947052},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.23258903622627258},{"id":"https://openalex.org/keywords/systems-engineering","display_name":"Systems engineering","score":0.09897896647453308}],"concepts":[{"id":"https://openalex.org/C81917197","wikidata":"https://www.wikidata.org/wiki/Q628760","display_name":"Selection (genetic algorithm)","level":2,"score":0.7590399980545044},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.6658080816268921},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6638253927230835},{"id":"https://openalex.org/C2780451532","wikidata":"https://www.wikidata.org/wiki/Q759676","display_name":"Task (project management)","level":2,"score":0.656586229801178},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.6437134742736816},{"id":"https://openalex.org/C2777735758","wikidata":"https://www.wikidata.org/wiki/Q817765","display_name":"Path (computing)","level":2,"score":0.5685589909553528},{"id":"https://openalex.org/C134121241","wikidata":"https://www.wikidata.org/wiki/Q899301","display_name":"Yield (engineering)","level":2,"score":0.5071439743041992},{"id":"https://openalex.org/C2987888538","wikidata":"https://www.wikidata.org/wiki/Q2986369","display_name":"Semiconductor industry","level":2,"score":0.4491904079914093},{"id":"https://openalex.org/C13736549","wikidata":"https://www.wikidata.org/wiki/Q4489420","display_name":"Industrial engineering","level":1,"score":0.4301590323448181},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.37945181131362915},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.3454752266407013},{"id":"https://openalex.org/C117671659","wikidata":"https://www.wikidata.org/wiki/Q11049265","display_name":"Manufacturing engineering","level":1,"score":0.306049644947052},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23258903622627258},{"id":"https://openalex.org/C201995342","wikidata":"https://www.wikidata.org/wiki/Q682496","display_name":"Systems engineering","level":1,"score":0.09897896647453308},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.0},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.0},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/eit51626.2021.9491836","is_oa":false,"landing_page_url":"https://doi.org/10.1109/eit51626.2021.9491836","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE International Conference on Electro Information Technology (EIT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure","score":0.5899999737739563}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W75691264","https://openalex.org/W589744691","https://openalex.org/W1607019360","https://openalex.org/W2156665896","https://openalex.org/W2786149013","https://openalex.org/W2990745009","https://openalex.org/W3091391475","https://openalex.org/W4252114917","https://openalex.org/W4252518827","https://openalex.org/W6603198261"],"related_works":["https://openalex.org/W1979703647","https://openalex.org/W2796831252","https://openalex.org/W1573850012","https://openalex.org/W2917828100","https://openalex.org/W2146075642","https://openalex.org/W2361830001","https://openalex.org/W1529487987","https://openalex.org/W2741400606","https://openalex.org/W2738936808","https://openalex.org/W1483525138"],"abstract_inverted_index":{"In":[0,97],"the":[1,4,7,13,42,47,63,67,120,127,137],"semiconductor":[2],"industry,":[3],"sequence":[5],"of":[6,113],"manufacturing":[8,29],"steps":[9,33,129],"is":[10,84,108],"given":[11],"by":[12],"recipe":[14],"for":[15,26,49,75,130],"each":[16],"specific":[17],"device.":[18],"Whereas":[19],"only":[20],"one":[21],"machine":[22],"may":[23],"be":[24,58,80],"available":[25],"an":[27,72],"individual":[28],"step,":[30],"there":[31,35,55,83],"are":[32],"where":[34],"exists":[36],"a":[37,85,93,132],"choice":[38],"between":[39],"machines":[40],"performing":[41],"same":[43],"task,":[44],"so":[45],"that":[46],"path":[48],"different":[50],"batches":[51],"can":[52],"vary.":[53],"Although":[54],"should":[56,79],"not":[57],"any":[59],"difference,":[60],"in":[61],"reality,":[62],"yield":[64,133],"depends":[65],"on":[66,110],"choice.":[68,86],"This":[69,87],"paper":[70],"presents":[71],"AI-based":[73],"strategy":[74],"selecting":[76],"which":[77,107,135],"branch":[78,104],"taken,":[81],"whenever":[82],"optimized":[88],"selection":[89,105,138],"will":[90,101,125],"lead":[91],"to":[92],"higher":[94],"overall":[95],"yield.":[96],"more":[98],"detail,":[99],"we":[100],"describe":[102,126],"our":[103],"approach":[106],"based":[109],"statistical":[111],"analysis":[112],"existing":[114],"production":[115],"data":[116],"as":[117,119],"well":[118],"current":[121],"process":[122],"parameters.":[123],"We":[124],"first":[128],"generating":[131],"indicator":[134],"guides":[136],"process.":[139]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}