{"id":"https://openalex.org/W3090906669","doi":"https://doi.org/10.1109/eit48999.2020.9208236","title":"A Highly Sensitive Capacitive Based Dual-Axis Accelerometer for Wearable Applications","display_name":"A Highly Sensitive Capacitive Based Dual-Axis Accelerometer for Wearable Applications","publication_year":2020,"publication_date":"2020-07-01","ids":{"openalex":"https://openalex.org/W3090906669","doi":"https://doi.org/10.1109/eit48999.2020.9208236","mag":"3090906669"},"language":"en","primary_location":{"id":"doi:10.1109/eit48999.2020.9208236","is_oa":false,"landing_page_url":"https://doi.org/10.1109/eit48999.2020.9208236","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE International Conference on Electro Information Technology (EIT)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5075611190","display_name":"S. Masihi","orcid":"https://orcid.org/0000-0002-0662-7467"},"institutions":[{"id":"https://openalex.org/I141649380","display_name":"Western Michigan University","ror":"https://ror.org/04j198w64","country_code":"US","type":"education","lineage":["https://openalex.org/I141649380"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"S. Masihi","raw_affiliation_strings":["Western Michigan University, Kalamazoo, MI, USA"],"affiliations":[{"raw_affiliation_string":"Western Michigan University, Kalamazoo, MI, USA","institution_ids":["https://openalex.org/I141649380"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103797557","display_name":"Masoud Shariat Panahi","orcid":null},"institutions":[{"id":"https://openalex.org/I141649380","display_name":"Western Michigan University","ror":"https://ror.org/04j198w64","country_code":"US","type":"education","lineage":["https://openalex.org/I141649380"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M. Panahi","raw_affiliation_strings":["Western Michigan University, Kalamazoo, MI, USA"],"affiliations":[{"raw_affiliation_string":"Western Michigan University, Kalamazoo, MI, USA","institution_ids":["https://openalex.org/I141649380"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039299338","display_name":"S. Hajian","orcid":"https://orcid.org/0000-0002-2995-8066"},"institutions":[{"id":"https://openalex.org/I141649380","display_name":"Western Michigan University","ror":"https://ror.org/04j198w64","country_code":"US","type":"education","lineage":["https://openalex.org/I141649380"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Hajian","raw_affiliation_strings":["Western Michigan University, Kalamazoo, MI, USA"],"affiliations":[{"raw_affiliation_string":"Western Michigan University, Kalamazoo, MI, USA","institution_ids":["https://openalex.org/I141649380"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033007222","display_name":"Dinesh Maddipatla","orcid":"https://orcid.org/0000-0003-2288-8779"},"institutions":[{"id":"https://openalex.org/I141649380","display_name":"Western Michigan University","ror":"https://ror.org/04j198w64","country_code":"US","type":"education","lineage":["https://openalex.org/I141649380"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. Maddipatla","raw_affiliation_strings":["Western Michigan University, Kalamazoo, MI, USA"],"affiliations":[{"raw_affiliation_string":"Western Michigan University, Kalamazoo, MI, USA","institution_ids":["https://openalex.org/I141649380"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018710619","display_name":"S. Ali","orcid":"https://orcid.org/0000-0002-3459-3452"},"institutions":[{"id":"https://openalex.org/I141649380","display_name":"Western Michigan University","ror":"https://ror.org/04j198w64","country_code":"US","type":"education","lineage":["https://openalex.org/I141649380"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Ali","raw_affiliation_strings":["Western Michigan University, Kalamazoo, MI, USA"],"affiliations":[{"raw_affiliation_string":"Western Michigan University, Kalamazoo, MI, USA","institution_ids":["https://openalex.org/I141649380"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020815437","display_name":"X. Zhang","orcid":"https://orcid.org/0000-0002-7530-0038"},"institutions":[{"id":"https://openalex.org/I141649380","display_name":"Western Michigan University","ror":"https://ror.org/04j198w64","country_code":"US","type":"education","lineage":["https://openalex.org/I141649380"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"X. Zhang","raw_affiliation_strings":["Western Michigan University, Kalamazoo, MI, USA"],"affiliations":[{"raw_affiliation_string":"Western Michigan University, Kalamazoo, MI, USA","institution_ids":["https://openalex.org/I141649380"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074986684","display_name":"A. K. Bose","orcid":"https://orcid.org/0000-0003-0618-5301"},"institutions":[{"id":"https://openalex.org/I141649380","display_name":"Western Michigan University","ror":"https://ror.org/04j198w64","country_code":"US","type":"education","lineage":["https://openalex.org/I141649380"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. K. Bose","raw_affiliation_strings":["Western Michigan University, Kalamazoo, MI, USA"],"affiliations":[{"raw_affiliation_string":"Western Michigan University, Kalamazoo, MI, USA","institution_ids":["https://openalex.org/I141649380"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068600968","display_name":"Binu B. Narakathu","orcid":"https://orcid.org/0000-0002-2841-741X"},"institutions":[{"id":"https://openalex.org/I141649380","display_name":"Western Michigan University","ror":"https://ror.org/04j198w64","country_code":"US","type":"education","lineage":["https://openalex.org/I141649380"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"B. B. Narakathu","raw_affiliation_strings":["Western Michigan University, Kalamazoo, MI, USA"],"affiliations":[{"raw_affiliation_string":"Western Michigan University, Kalamazoo, MI, USA","institution_ids":["https://openalex.org/I141649380"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028074094","display_name":"Bradley J. Bazuin","orcid":"https://orcid.org/0000-0002-3638-3176"},"institutions":[{"id":"https://openalex.org/I141649380","display_name":"Western Michigan University","ror":"https://ror.org/04j198w64","country_code":"US","type":"education","lineage":["https://openalex.org/I141649380"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"B. J. Bazuin","raw_affiliation_strings":["Western Michigan University, Kalamazoo, MI, USA"],"affiliations":[{"raw_affiliation_string":"Western Michigan University, Kalamazoo, MI, USA","institution_ids":["https://openalex.org/I141649380"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5060873201","display_name":"Massood Z. Atashbar","orcid":"https://orcid.org/0000-0003-2981-6321"},"institutions":[{"id":"https://openalex.org/I141649380","display_name":"Western Michigan University","ror":"https://ror.org/04j198w64","country_code":"US","type":"education","lineage":["https://openalex.org/I141649380"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M. Z. Atashbar","raw_affiliation_strings":["Western Michigan University, Kalamazoo, MI, USA"],"affiliations":[{"raw_affiliation_string":"Western Michigan University, Kalamazoo, MI, USA","institution_ids":["https://openalex.org/I141649380"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":10,"corresponding_author_ids":["https://openalex.org/A5075611190"],"corresponding_institution_ids":["https://openalex.org/I141649380"],"apc_list":null,"apc_paid":null,"fwci":0.3433,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.5520963,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":"25","issue":null,"first_page":"557","last_page":"561"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.9244564771652222},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.8044341206550598},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.7504918575286865},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.737519383430481},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.6675467491149902},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5910381078720093},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.5003659725189209},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.48690712451934814},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4336734414100647},{"id":"https://openalex.org/keywords/multiphysics","display_name":"Multiphysics","score":0.42336374521255493},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.39625298976898193},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3797902762889862},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3554816246032715},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.23262599110603333},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.21625792980194092},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.07393017411231995},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.07075253129005432}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.9244564771652222},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.8044341206550598},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.7504918575286865},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.737519383430481},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.6675467491149902},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5910381078720093},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.5003659725189209},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.48690712451934814},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4336734414100647},{"id":"https://openalex.org/C46435376","wikidata":"https://www.wikidata.org/wiki/Q1829750","display_name":"Multiphysics","level":3,"score":0.42336374521255493},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.39625298976898193},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3797902762889862},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3554816246032715},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.23262599110603333},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.21625792980194092},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.07393017411231995},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.07075253129005432},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/eit48999.2020.9208236","is_oa":false,"landing_page_url":"https://doi.org/10.1109/eit48999.2020.9208236","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE International Conference on Electro Information Technology (EIT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.8299999833106995}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":42,"referenced_works":["https://openalex.org/W1843981434","https://openalex.org/W1973722683","https://openalex.org/W1982673810","https://openalex.org/W1987460000","https://openalex.org/W1999584240","https://openalex.org/W2003552035","https://openalex.org/W2044330180","https://openalex.org/W2048769187","https://openalex.org/W2072917902","https://openalex.org/W2088524433","https://openalex.org/W2096386935","https://openalex.org/W2103559710","https://openalex.org/W2110914239","https://openalex.org/W2126507756","https://openalex.org/W2161672759","https://openalex.org/W2171890746","https://openalex.org/W2244434349","https://openalex.org/W2246453787","https://openalex.org/W2321986967","https://openalex.org/W2504642052","https://openalex.org/W2606131926","https://openalex.org/W2739441093","https://openalex.org/W2744826789","https://openalex.org/W2758250805","https://openalex.org/W2800997629","https://openalex.org/W2805081264","https://openalex.org/W2807876097","https://openalex.org/W2811028385","https://openalex.org/W2902852752","https://openalex.org/W2903231346","https://openalex.org/W2906680243","https://openalex.org/W2944601776","https://openalex.org/W2967493137","https://openalex.org/W2968799984","https://openalex.org/W2969074744","https://openalex.org/W2999404065","https://openalex.org/W3000198689","https://openalex.org/W3000276193","https://openalex.org/W4211229466","https://openalex.org/W6643740206","https://openalex.org/W6757284722","https://openalex.org/W6767067259"],"related_works":["https://openalex.org/W4245472411","https://openalex.org/W3161496874","https://openalex.org/W2045042928","https://openalex.org/W4379746342","https://openalex.org/W2160325238","https://openalex.org/W2902633157","https://openalex.org/W2922271745","https://openalex.org/W2953240087","https://openalex.org/W4232743211","https://openalex.org/W756886103"],"abstract_inverted_index":{"A":[0,149],"novel":[1],"highly":[2],"sensitive":[3],"miniaturized":[4],"accelerometer":[5,68,100],"was":[6,56,69,92,143,153],"developed":[7],"for":[8,58,77,111,145,155],"wearable":[9],"applications":[10],"using":[11],"microelectromechanical":[12],"system":[13],"(MEMS)":[14],"based":[15,67,137],"silicon-on-glass":[16],"(SOG)":[17],"technology.":[18],"The":[19,65,94],"accelerometer,":[20],"with":[21],"an":[22],"overall":[23],"dimension":[24],"of":[25,33,46,90,97,126,151],"2":[26,28,130,133],"x":[27,29,51],"0.6":[30],"mm,":[31],"consists":[32],"four":[34],"narrow":[35],"meander":[36],"beams":[37],"that":[38],"supports":[39],"the":[40,50,98,112,139,146,156],"proof":[41],"mass":[42],"which":[43],"is":[44],"capable":[45],"moving":[47],"in":[48,73,122],"both":[49],"and":[52,55,71,85],"y-":[53],"axis,":[54],"designed":[57],"measuring":[59],"accelerations":[60],"up":[61],"to":[62,82,108,118],"53":[63],"g.":[64],"capacitive":[66],"modeled":[70],"simulated":[72],"COMSOL":[74],"Multiphysics\u00ae":[75],"software":[76],"voltages":[78,114],"varying":[79],"from":[80,105,116],"0":[81,117],"10":[83,119],"V":[84,120],"a":[86,102,123,129],"relative":[87],"capacitance":[88,103,124],"change":[89,104,125],"1300%":[91],"observed.":[93],"experimental":[95],"results":[96],"fabricated":[99,144],"revealed":[101],"100":[106],"pF":[107,110],"1,300":[109],"applied":[113],"ranging":[115],"resulting":[121],"1200%.":[127],"Further,":[128],"mm":[131,134],"\u00d7":[132],"readout":[135,157],"circuit":[136],"on":[138],"E/D":[140],"NMOS":[141],"technology":[142],"MEMS-based":[147],"accelerometer.":[148],"gain":[150],"5.3":[152],"measured":[154],"circuit.":[158]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}