{"id":"https://openalex.org/W2127184261","doi":"https://doi.org/10.1109/ecctd.2007.4529549","title":"A simplified modeling approach for a MEMS capacitive sensor","display_name":"A simplified modeling approach for a MEMS capacitive sensor","publication_year":2007,"publication_date":"2007-08-01","ids":{"openalex":"https://openalex.org/W2127184261","doi":"https://doi.org/10.1109/ecctd.2007.4529549","mag":"2127184261"},"language":"en","primary_location":{"id":"doi:10.1109/ecctd.2007.4529549","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ecctd.2007.4529549","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 18th European Conference on Circuit Theory and Design","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5086960731","display_name":"Syed Arsalan Jawed","orcid":"https://orcid.org/0000-0003-0940-6333"},"institutions":[{"id":"https://openalex.org/I2277624104","display_name":"Fondazione Bruno Kessler","ror":"https://ror.org/01j33xk10","country_code":"IT","type":"facility","lineage":["https://openalex.org/I2277624104"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"S. A. Jawed","raw_affiliation_strings":["MIS Division, Fondazione Bruno Kessler (FBK), Trento, Italy","MIS Div., Fondazione Bruno Kessler - IRST, Trento"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MIS Division, Fondazione Bruno Kessler (FBK), Trento, Italy","institution_ids":["https://openalex.org/I2277624104"]},{"raw_affiliation_string":"MIS Div., Fondazione Bruno Kessler - IRST, Trento","institution_ids":["https://openalex.org/I2277624104"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020280170","display_name":"D. Cattin","orcid":null},"institutions":[{"id":"https://openalex.org/I1323252656","display_name":"Information Technology University","ror":"https://ror.org/00ngv8j44","country_code":"PK","type":"education","lineage":["https://openalex.org/I1323252656"]},{"id":"https://openalex.org/I193223587","display_name":"University of Trento","ror":"https://ror.org/05trd4x28","country_code":"IT","type":"education","lineage":["https://openalex.org/I193223587"]}],"countries":["IT","PK"],"is_corresponding":false,"raw_author_name":"Davide Cattin","raw_affiliation_strings":["Department of Information Technology, University of Trento, Trento, Italy","Department of Information Technology, University of Trento, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Information Technology, University of Trento, Trento, Italy","institution_ids":["https://openalex.org/I193223587"]},{"raw_affiliation_string":"Department of Information Technology, University of Trento, Italy","institution_ids":["https://openalex.org/I1323252656","https://openalex.org/I193223587"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076468405","display_name":"Nicola Massari","orcid":"https://orcid.org/0000-0002-1863-4859"},"institutions":[{"id":"https://openalex.org/I2277624104","display_name":"Fondazione Bruno Kessler","ror":"https://ror.org/01j33xk10","country_code":"IT","type":"facility","lineage":["https://openalex.org/I2277624104"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"N. Massari","raw_affiliation_strings":["MIS Division, Fondazione Bruno Kessler (FBK), Trento, Italy","MIS Division, Fondazione Bruno Kessler - IRST, Trento, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MIS Division, Fondazione Bruno Kessler (FBK), Trento, Italy","institution_ids":["https://openalex.org/I2277624104"]},{"raw_affiliation_string":"MIS Division, Fondazione Bruno Kessler - IRST, Trento, Italy","institution_ids":["https://openalex.org/I2277624104"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032034155","display_name":"M. Gottardi","orcid":"https://orcid.org/0000-0003-0742-4642"},"institutions":[{"id":"https://openalex.org/I2277624104","display_name":"Fondazione Bruno Kessler","ror":"https://ror.org/01j33xk10","country_code":"IT","type":"facility","lineage":["https://openalex.org/I2277624104"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"M. Gottardi","raw_affiliation_strings":["MIS Division, Fondazione Bruno Kessler (FBK), Trento, Italy","MIS Division, Fondazione Bruno Kessler - IRST, Trento, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MIS Division, Fondazione Bruno Kessler (FBK), Trento, Italy","institution_ids":["https://openalex.org/I2277624104"]},{"raw_affiliation_string":"MIS Division, Fondazione Bruno Kessler - IRST, Trento, Italy","institution_ids":["https://openalex.org/I2277624104"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067940110","display_name":"B. Margesin","orcid":"https://orcid.org/0000-0002-1120-3968"},"institutions":[{"id":"https://openalex.org/I2277624104","display_name":"Fondazione Bruno Kessler","ror":"https://ror.org/01j33xk10","country_code":"IT","type":"facility","lineage":["https://openalex.org/I2277624104"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"B. Margesin","raw_affiliation_strings":["MIS Division, Fondazione Bruno Kessler (FBK), Trento, Italy","MIS Division, Fondazione Bruno Kessler - IRST, Trento, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MIS Division, Fondazione Bruno Kessler (FBK), Trento, Italy","institution_ids":["https://openalex.org/I2277624104"]},{"raw_affiliation_string":"MIS Division, Fondazione Bruno Kessler - IRST, Trento, Italy","institution_ids":["https://openalex.org/I2277624104"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5038780136","display_name":"A. Bas\u00e7hirotto","orcid":"https://orcid.org/0000-0002-8844-5754"},"institutions":[{"id":"https://openalex.org/I4210096856","display_name":"Innovation Engineering (Italy)","ror":"https://ror.org/00sxjp357","country_code":"IT","type":"company","lineage":["https://openalex.org/I4210096856"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"A. Baschirotto","raw_affiliation_strings":["Department of Innovation Engineering, University del Salento, Italy","Dept. of Innovation Engineering., Univ. del Salento, Italia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Innovation Engineering, University del Salento, Italy","institution_ids":["https://openalex.org/I4210096856"]},{"raw_affiliation_string":"Dept. of Innovation Engineering., Univ. del Salento, Italia","institution_ids":["https://openalex.org/I4210096856"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.16018096,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"39","issue":null,"first_page":"112","last_page":"115"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.8891611695289612},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.7495124936103821},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7308173179626465},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5523845553398132},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.49019891023635864},{"id":"https://openalex.org/keywords/amplifier","display_name":"Amplifier","score":0.47699931263923645},{"id":"https://openalex.org/keywords/range","display_name":"Range (aeronautics)","score":0.45674365758895874},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.41877374053001404},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.26317402720451355},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2200516164302826},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.19079071283340454},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.15692612528800964},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.07703661918640137}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.8891611695289612},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.7495124936103821},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7308173179626465},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5523845553398132},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.49019891023635864},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.47699931263923645},{"id":"https://openalex.org/C204323151","wikidata":"https://www.wikidata.org/wiki/Q905424","display_name":"Range (aeronautics)","level":2,"score":0.45674365758895874},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.41877374053001404},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.26317402720451355},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2200516164302826},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.19079071283340454},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15692612528800964},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.07703661918640137},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.0},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/ecctd.2007.4529549","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ecctd.2007.4529549","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 18th European Conference on Circuit Theory and Design","raw_type":"proceedings-article"},{"id":"pmh:oai:boa.unimib.it:10281/36822","is_oa":false,"landing_page_url":"http://hdl.handle.net/10281/36822","pdf_url":null,"source":{"id":"https://openalex.org/S4306401259","display_name":"BOA (University of Milano-Bicocca)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I66752286","host_organization_name":"University of Milano-Bicocca","host_organization_lineage":["https://openalex.org/I66752286"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.7300000190734863,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W2031424373","https://openalex.org/W2103198996","https://openalex.org/W2126046506","https://openalex.org/W2141976423","https://openalex.org/W2321689790","https://openalex.org/W2563505887","https://openalex.org/W6700592198"],"related_works":["https://openalex.org/W2348740411","https://openalex.org/W1966596465","https://openalex.org/W2051563071","https://openalex.org/W4386858602","https://openalex.org/W2337947459","https://openalex.org/W2118205267","https://openalex.org/W2126912594","https://openalex.org/W1988444705","https://openalex.org/W4292622326","https://openalex.org/W2053577253"],"abstract_inverted_index":{"This":[0],"paper":[1],"reports":[2],"two":[3],"behavioral":[4],"models":[5,42],"for":[6,16,66,83,112],"a":[7,17,25,67],"MEMS":[8],"capacitive":[9],"sensor":[10,50,121],"and":[11,45,101],"presents":[12],"their":[13],"simulation":[14,57],"results":[15,58,111],"bootstrapped":[18],"continuous-time":[19],"pre-amplifier.":[20],"The":[21],"first":[22],"model":[23,62,89],"uses":[24],"simplistic":[26],"voltage-source":[27],"based":[28],"approach":[29],"to":[30,76],"imitate":[31],"the":[32,36,39,43,49,60,77,87,91,94,97,105,110,116,120],"variable":[33],"capacitance":[34],"in":[35,51,96,109],"sensor,":[37,106],"while":[38],"other":[40],"accurately":[41],"mechanical":[44,100],"electrostatic":[46,102],"forces":[47],"inside":[48],"VerilogA.":[52],"It":[53],"is":[54,122],"demonstrated":[55],"through":[56],"that":[59],"simple":[61],"can":[63],"be":[64],"used":[65],"large":[68],"input":[69],"range":[70],"without":[71],"considerable":[72],"differences":[73,108],"as":[74],"compared":[75],"accurate":[78,88],"model,":[79],"proving":[80],"it":[81],"viable":[82],"functional":[84],"simulations.":[85],"Whereas,":[86],"traces":[90],"performance":[92],"of":[93,99,104,119],"pre-amplifier":[95],"presence":[98],"limitations":[103],"revealing":[107],"those":[113],"cases":[114],"where":[115],"non-linear":[117],"response":[118],"not":[123],"negligible.":[124]},"counts_by_year":[{"year":2020,"cited_by_count":1},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}