{"id":"https://openalex.org/W2578583356","doi":"https://doi.org/10.1109/ecc.2016.7810663","title":"Exact plant inversion of flexible motion systems with a time-varying state-to-output map","display_name":"Exact plant inversion of flexible motion systems with a time-varying state-to-output map","publication_year":2016,"publication_date":"2016-06-01","ids":{"openalex":"https://openalex.org/W2578583356","doi":"https://doi.org/10.1109/ecc.2016.7810663","mag":"2578583356"},"language":"en","primary_location":{"id":"doi:10.1109/ecc.2016.7810663","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ecc.2016.7810663","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 European Control Conference (ECC)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5082247271","display_name":"Yanin Kasemsinsup","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yanin Kasemsinsup","raw_affiliation_strings":["Control Systems Group, Department of Electrical Engineering"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Control Systems Group, Department of Electrical Engineering","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088330069","display_name":"Marcel Heertjes","orcid":"https://orcid.org/0000-0001-6775-5078"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]},{"id":"https://openalex.org/I927257375","display_name":"ASML (Netherlands)","ror":"https://ror.org/01vxknj13","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210092504","https://openalex.org/I927257375"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Marcel Heertjes","raw_affiliation_strings":["ASML, Veldhoven, Netherlands","Department of Mechanical Engineering Eindhoven, University of Technology, Eindhoven, Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML, Veldhoven, Netherlands","institution_ids":["https://openalex.org/I927257375"]},{"raw_affiliation_string":"Department of Mechanical Engineering Eindhoven, University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060272451","display_name":"Hans Butler","orcid":"https://orcid.org/0000-0002-2650-4798"},"institutions":[{"id":"https://openalex.org/I927257375","display_name":"ASML (Netherlands)","ror":"https://ror.org/01vxknj13","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210092504","https://openalex.org/I927257375"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Hans Butler","raw_affiliation_strings":["ASML, Veldhoven, Netherlands","Control Systems Group, Department of Electrical Engineering"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML, Veldhoven, Netherlands","institution_ids":["https://openalex.org/I927257375"]},{"raw_affiliation_string":"Control Systems Group, Department of Electrical Engineering","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5006584942","display_name":"S. Weiland","orcid":"https://orcid.org/0000-0002-6131-4658"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Siep Weiland","raw_affiliation_strings":["Control Systems Group, Department of Electrical Engineering"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Control Systems Group, Department of Electrical Engineering","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":3.0826,"has_fulltext":false,"cited_by_count":12,"citation_normalized_percentile":{"value":0.92678276,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"85","issue":null,"first_page":"2483","last_page":"2488"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13644","display_name":"Control Systems in Engineering","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10040","display_name":"Adaptive Control of Nonlinear Systems","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/feed-forward","display_name":"Feed forward","score":0.7680371403694153},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.7381095886230469},{"id":"https://openalex.org/keywords/lti-system-theory","display_name":"LTI system theory","score":0.6732267141342163},{"id":"https://openalex.org/keywords/linear-system","display_name":"Linear system","score":0.5857816338539124},{"id":"https://openalex.org/keywords/position","display_name":"Position (finance)","score":0.5728301405906677},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5459614396095276},{"id":"https://openalex.org/keywords/motion-control","display_name":"Motion control","score":0.4587474465370178},{"id":"https://openalex.org/keywords/inverse","display_name":"Inverse","score":0.43399718403816223},{"id":"https://openalex.org/keywords/motion-system","display_name":"Motion system","score":0.4285939633846283},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.3866806626319885},{"id":"https://openalex.org/keywords/motion","display_name":"Motion (physics)","score":0.29759612679481506},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2552546262741089},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.19735288619995117},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.17038163542747498},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.13790619373321533},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.12152794003486633}],"concepts":[{"id":"https://openalex.org/C38858127","wikidata":"https://www.wikidata.org/wiki/Q5441228","display_name":"Feed forward","level":2,"score":0.7680371403694153},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.7381095886230469},{"id":"https://openalex.org/C87698059","wikidata":"https://www.wikidata.org/wiki/Q1808960","display_name":"LTI system theory","level":3,"score":0.6732267141342163},{"id":"https://openalex.org/C6802819","wikidata":"https://www.wikidata.org/wiki/Q1072174","display_name":"Linear system","level":2,"score":0.5857816338539124},{"id":"https://openalex.org/C198082294","wikidata":"https://www.wikidata.org/wiki/Q3399648","display_name":"Position (finance)","level":2,"score":0.5728301405906677},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5459614396095276},{"id":"https://openalex.org/C145565327","wikidata":"https://www.wikidata.org/wiki/Q852514","display_name":"Motion control","level":3,"score":0.4587474465370178},{"id":"https://openalex.org/C207467116","wikidata":"https://www.wikidata.org/wiki/Q4385666","display_name":"Inverse","level":2,"score":0.43399718403816223},{"id":"https://openalex.org/C100673868","wikidata":"https://www.wikidata.org/wiki/Q6917799","display_name":"Motion system","level":3,"score":0.4285939633846283},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.3866806626319885},{"id":"https://openalex.org/C104114177","wikidata":"https://www.wikidata.org/wiki/Q79782","display_name":"Motion (physics)","level":2,"score":0.29759612679481506},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2552546262741089},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.19735288619995117},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.17038163542747498},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.13790619373321533},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.12152794003486633},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C10138342","wikidata":"https://www.wikidata.org/wiki/Q43015","display_name":"Finance","level":1,"score":0.0}],"mesh":[],"locations_count":7,"locations":[{"id":"doi:10.1109/ecc.2016.7810663","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ecc.2016.7810663","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 European Control Conference (ECC)","raw_type":"proceedings-article"},{"id":"pmh:oai:pure.tue.nl:openaire_cris_publications/fa1d2cdf-5d43-440c-8202-f90fe6cba4d8","is_oa":false,"landing_page_url":"https://research.tue.nl/en/publications/fa1d2cdf-5d43-440c-8202-f90fe6cba4d8","pdf_url":null,"source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Kasemsinsup, Y, Heertjes, M F, Butler, H & Weiland, S 2016, Exact plant inversion of flexible motion systems with a time-varying state-to-output map. in 2016 European Control Conference, ECC 2016., 7810663, Institute of Electrical and Electronics Engineers, Piscataway, pp. 2483-2488, 15th European Control Conference, ECC 2016, Aalborg, Denmark, 29/06/16. https://doi.org/10.1109/ECC.2016.7810663","raw_type":"info:eu-repo/semantics/conferenceObject"},{"id":"pmh:856913","is_oa":false,"landing_page_url":"http://library.tue.nl/csp/dare/LinkToRepository.csp?recordnumber=856913","pdf_url":null,"source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":null},{"id":"pmh:883940","is_oa":false,"landing_page_url":"http://library.tue.nl/csp/dare/LinkToRepository.csp?recordnumber=883940","pdf_url":null,"source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":null},{"id":"pmh:oai:library.tue.nl:856913","is_oa":false,"landing_page_url":"http://repository.tue.nl/856913","pdf_url":null,"source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":null},{"id":"pmh:oai:library.tue.nl:883940","is_oa":false,"landing_page_url":"http://repository.tue.nl/883940","pdf_url":null,"source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":null},{"id":"pmh:tue:oai:pure.tue.nl:publications/fa1d2cdf-5d43-440c-8202-f90fe6cba4d8","is_oa":false,"landing_page_url":"https://research.tue.nl/nl/publications/fa1d2cdf-5d43-440c-8202-f90fe6cba4d8","pdf_url":null,"source":{"id":"https://openalex.org/S4306401843","display_name":"Data Archiving and Networked Services (DANS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1322597698","host_organization_name":"Royal Netherlands Academy of Arts and Sciences","host_organization_lineage":["https://openalex.org/I1322597698"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2016 European Control Conference, ECC 2016, 2483 - 2488","raw_type":"info:eu-repo/semantics/conferencepaper"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","score":0.5799999833106995,"display_name":"Industry, innovation and infrastructure"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W791128552","https://openalex.org/W1964598083","https://openalex.org/W1966232946","https://openalex.org/W1974984002","https://openalex.org/W2010169311","https://openalex.org/W2015953559","https://openalex.org/W2042492368","https://openalex.org/W2065297540","https://openalex.org/W2098860323","https://openalex.org/W2099043630","https://openalex.org/W2111770009","https://openalex.org/W2112832785","https://openalex.org/W2135195563","https://openalex.org/W2139676975","https://openalex.org/W2158302837","https://openalex.org/W2167341428","https://openalex.org/W3207781852","https://openalex.org/W4235684208","https://openalex.org/W6680720861","https://openalex.org/W6684408004","https://openalex.org/W6802135958"],"related_works":["https://openalex.org/W2057244293","https://openalex.org/W2053005959","https://openalex.org/W1589486833","https://openalex.org/W2116883285","https://openalex.org/W2144143333","https://openalex.org/W2299538996","https://openalex.org/W2027136373","https://openalex.org/W4386631510","https://openalex.org/W2276636510","https://openalex.org/W2105658174"],"abstract_inverted_index":{"Many":[0],"high-accuracy":[1],"positioning":[2,23],"systems":[3,24,43,69],"have":[4],"a":[5,36,77,81,92,100,111],"target":[6],"performance":[7,106],"location":[8],"that":[9,84],"varies":[10],"with":[11,51,109],"time":[12,63],"and":[13,97],"position.":[14],"A":[15],"typical":[16],"example":[17],"is":[18,94],"given":[19],"by":[20],"wafer":[21],"stage":[22],"in":[25],"the":[26,68,87,104],"lithographic":[27],"industry.":[28],"The":[29],"design":[30],"of":[31,38,67,90],"feedforward":[32,82],"compensators":[33],"for":[34],"such":[35,62,91,110],"class":[37],"systems,":[39],"i.e.":[40],"flexible":[41],"motion":[42],"having":[44],"Linear":[45,52],"Time":[46],"Invariant":[47],"(LTI)":[48],"state":[49],"dynamics":[50],"Time-Varying":[53],"(LTV)":[54],"state-to-output":[55],"map,":[56],"can":[57],"be":[58],"considerably":[59],"enhanced":[60],"if":[61],"or":[64],"position-varying":[65],"characteristics":[66],"are":[70],"taken":[71],"into":[72],"account.":[73],"In":[74],"this":[75],"work,":[76],"strategy":[78],"to":[79],"construct":[80],"controller":[83],"exactly":[85],"matches":[86],"time-dependent":[88],"inverse":[89],"system":[93],"investigated.":[95],"Analysis":[96],"simulation":[98],"on":[99],"simplified":[101],"model":[102],"show":[103],"potential":[105],"improvement":[107],"obtained":[108],"strategy.":[112]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":4},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}