{"id":"https://openalex.org/W4401071740","doi":"https://doi.org/10.1109/drc61706.2024.10605286","title":"Improved Tunability of BEoL-integrated Hafnium Zirconium Oxide Varactors for mmWave Applications","display_name":"Improved Tunability of BEoL-integrated Hafnium Zirconium Oxide Varactors for mmWave Applications","publication_year":2024,"publication_date":"2024-06-24","ids":{"openalex":"https://openalex.org/W4401071740","doi":"https://doi.org/10.1109/drc61706.2024.10605286"},"language":"en","primary_location":{"id":"doi:10.1109/drc61706.2024.10605286","is_oa":false,"landing_page_url":"https://doi.org/10.1109/drc61706.2024.10605286","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 Device Research Conference (DRC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5004046006","display_name":"Sukhrob Abdulazhanov","orcid":"https://orcid.org/0000-0001-7305-2811"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"S. Abdulazhanov","raw_affiliation_strings":["Center Nanoelectric Technology,Fraunhofer IPMS,Dresden,Germany,01109"],"affiliations":[{"raw_affiliation_string":"Center Nanoelectric Technology,Fraunhofer IPMS,Dresden,Germany,01109","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020690703","display_name":"Quang Huy L\u00ea","orcid":"https://orcid.org/0000-0001-9698-3862"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Q. H. Le","raw_affiliation_strings":["Center Nanoelectric Technology,Fraunhofer IPMS,Dresden,Germany,01109"],"affiliations":[{"raw_affiliation_string":"Center Nanoelectric Technology,Fraunhofer IPMS,Dresden,Germany,01109","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077632577","display_name":"David Lehninger","orcid":"https://orcid.org/0000-0002-1545-5177"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"D. Lehninger","raw_affiliation_strings":["Center Nanoelectric Technology,Fraunhofer IPMS,Dresden,Germany,01109"],"affiliations":[{"raw_affiliation_string":"Center Nanoelectric Technology,Fraunhofer IPMS,Dresden,Germany,01109","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040090182","display_name":"Ayse S\u00fcnb\u00fcl","orcid":"https://orcid.org/0000-0003-0464-8739"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"A. S\u00fcnb\u00fcl","raw_affiliation_strings":["Center Nanoelectric Technology,Fraunhofer IPMS,Dresden,Germany,01109"],"affiliations":[{"raw_affiliation_string":"Center Nanoelectric Technology,Fraunhofer IPMS,Dresden,Germany,01109","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079324627","display_name":"Thomas K\u00e4mpfe","orcid":"https://orcid.org/0000-0002-4672-8676"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"T. K\u00e4mpfe","raw_affiliation_strings":["Center Nanoelectric Technology,Fraunhofer IPMS,Dresden,Germany,01109"],"affiliations":[{"raw_affiliation_string":"Center Nanoelectric Technology,Fraunhofer IPMS,Dresden,Germany,01109","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5069710257","display_name":"G. Gerlach","orcid":null},"institutions":[{"id":"https://openalex.org/I78650965","display_name":"TU Dresden","ror":"https://ror.org/042aqky30","country_code":"DE","type":"education","lineage":["https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"G. Gerlach","raw_affiliation_strings":["Faculty of Solid State Electronics,TU Dresden,Dresden,Germany,01069"],"affiliations":[{"raw_affiliation_string":"Faculty of Solid State Electronics,TU Dresden,Dresden,Germany,01069","institution_ids":["https://openalex.org/I78650965"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5004046006"],"corresponding_institution_ids":["https://openalex.org/I4210110247"],"apc_list":null,"apc_paid":null,"fwci":0.6659,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.68892181,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"2"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10187","display_name":"Radio Frequency Integrated Circuit Design","score":0.9805999994277954,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10187","display_name":"Radio Frequency Integrated Circuit Design","score":0.9805999994277954,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12042","display_name":"Satellite Communication Systems","score":0.9674999713897705,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11607","display_name":"Microwave and Dielectric Measurement Techniques","score":0.9642999768257141,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/hafnium","display_name":"Hafnium","score":0.8888609409332275},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7157469391822815},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.6424285173416138},{"id":"https://openalex.org/keywords/zirconium","display_name":"Zirconium","score":0.6322553157806396},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.34744566679000854},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.11680465936660767},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.11220672726631165}],"concepts":[{"id":"https://openalex.org/C546638069","wikidata":"https://www.wikidata.org/wiki/Q1119","display_name":"Hafnium","level":3,"score":0.8888609409332275},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7157469391822815},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6424285173416138},{"id":"https://openalex.org/C534791751","wikidata":"https://www.wikidata.org/wiki/Q1038","display_name":"Zirconium","level":2,"score":0.6322553157806396},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.34744566679000854},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.11680465936660767},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.11220672726631165}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/drc61706.2024.10605286","is_oa":false,"landing_page_url":"https://doi.org/10.1109/drc61706.2024.10605286","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 Device Research Conference (DRC)","raw_type":"proceedings-article"},{"id":"pmh:oai:null:publica/475924","is_oa":false,"landing_page_url":"https://publica.fraunhofer.de/handle/publica/475924","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"conference paper"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.4000000059604645,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W1625170149","https://openalex.org/W2059912591","https://openalex.org/W2998803344","https://openalex.org/W3196445230"],"related_works":["https://openalex.org/W2099851698","https://openalex.org/W2027585877","https://openalex.org/W2378316091","https://openalex.org/W2385573488","https://openalex.org/W1905296800","https://openalex.org/W2057287011","https://openalex.org/W3096772672","https://openalex.org/W4205110898","https://openalex.org/W2364376105","https://openalex.org/W1964313734"],"abstract_inverted_index":{"The":[0],"discovery":[1],"of":[2],"ferroelectricity":[3],"in":[4,16,75],"hafnium":[5],"oxide":[6],"has":[7],"gained":[8],"significant":[9],"attention":[10],"due":[11],"to":[12,48],"its":[13],"detrimental":[14],"role":[15],"modern":[17],"microelectronics":[18],"[1]":[19],".":[20,87],"If":[21],"doped":[22],"with":[23,73],"zirconium,":[24],"Hf":[25],"x":[26],"Zr":[27],"1-x":[28],"O":[29],"2":[30],"(HZO),":[31],"it":[32],"crystallizes":[33],"into":[34],"an":[35,64],"orthorhombic":[36],"ferroelectric":[37],"phase":[38],"at":[39],"sufficiently":[40],"lower":[41],"temperatures":[42],"[3]":[43],",":[44,81,83,85],"which":[45],"is":[46],"important":[47],"meet":[49],"the":[50],"requirements":[51],"on":[52],"maximum":[53],"anneal":[54],"temperature":[55],"for":[56,67],"conventional":[57],"Back-End-of-Line":[58],"(BEoL)":[59],"processes.":[60],"This":[61],"makes":[62],"HZO":[63],"ideal":[65],"candidate":[66],"use":[68],"as":[69],"a":[70],"thin-film":[71],"varactor":[72],"applications":[74],"RF":[76],"and":[77],"mmWave":[78],"networks":[79],"[4":[80],"5":[82],"6":[84],"7]":[86]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2}],"updated_date":"2025-12-21T23:12:01.093139","created_date":"2025-10-10T00:00:00"}