{"id":"https://openalex.org/W4292388141","doi":"https://doi.org/10.1109/drc55272.2022.9855791","title":"MoS<sub>2</sub>/Quantum Dot Hybrid Photodetectors on Flexible Substrates","display_name":"MoS<sub>2</sub>/Quantum Dot Hybrid Photodetectors on Flexible Substrates","publication_year":2022,"publication_date":"2022-06-26","ids":{"openalex":"https://openalex.org/W4292388141","doi":"https://doi.org/10.1109/drc55272.2022.9855791"},"language":"en","primary_location":{"id":"doi:10.1109/drc55272.2022.9855791","is_oa":false,"landing_page_url":"https://doi.org/10.1109/drc55272.2022.9855791","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 Device Research Conference (DRC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://doi.org/10.1109/DRC55272.2022.9855791","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5024841863","display_name":"Ozan Yakar","orcid":"https://orcid.org/0000-0003-1679-8750"},"institutions":[{"id":"https://openalex.org/I4210108354","display_name":"AMO (Germany)","ror":"https://ror.org/01sd0e661","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210108354"]},{"id":"https://openalex.org/I887968799","display_name":"RWTH Aachen University","ror":"https://ror.org/04xfq0f34","country_code":"DE","type":"education","lineage":["https://openalex.org/I887968799"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Ozan Yakar","raw_affiliation_strings":["AMO GmbH, Advanced Microelectronic Center Aachen (AMICA),Aachen,Germany,52074","Chair of Electronic Devices, RWTH Aachen University, Aachen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"AMO GmbH, Advanced Microelectronic Center Aachen (AMICA),Aachen,Germany,52074","institution_ids":["https://openalex.org/I4210108354"]},{"raw_affiliation_string":"Chair of Electronic Devices, RWTH Aachen University, Aachen, Germany","institution_ids":["https://openalex.org/I887968799"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032405269","display_name":"Burkay Uzlu","orcid":"https://orcid.org/0000-0001-6776-8901"},"institutions":[{"id":"https://openalex.org/I4210108354","display_name":"AMO (Germany)","ror":"https://ror.org/01sd0e661","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210108354"]},{"id":"https://openalex.org/I887968799","display_name":"RWTH Aachen University","ror":"https://ror.org/04xfq0f34","country_code":"DE","type":"education","lineage":["https://openalex.org/I887968799"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Burkay Uzlu","raw_affiliation_strings":["AMO GmbH, Advanced Microelectronic Center Aachen (AMICA),Aachen,Germany,52074","Chair of Electronic Devices, RWTH Aachen University, Aachen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"AMO GmbH, Advanced Microelectronic Center Aachen (AMICA),Aachen,Germany,52074","institution_ids":["https://openalex.org/I4210108354"]},{"raw_affiliation_string":"Chair of Electronic Devices, RWTH Aachen University, Aachen, Germany","institution_ids":["https://openalex.org/I887968799"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014139604","display_name":"Daniel Schneider","orcid":"https://orcid.org/0000-0002-2409-9645"},"institutions":[{"id":"https://openalex.org/I4210108354","display_name":"AMO (Germany)","ror":"https://ror.org/01sd0e661","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210108354"]},{"id":"https://openalex.org/I887968799","display_name":"RWTH Aachen University","ror":"https://ror.org/04xfq0f34","country_code":"DE","type":"education","lineage":["https://openalex.org/I887968799"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Daniel S. Schneider","raw_affiliation_strings":["AMO GmbH, Advanced Microelectronic Center Aachen (AMICA),Aachen,Germany,52074","Chair of Electronic Devices, RWTH Aachen University, Aachen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"AMO GmbH, Advanced Microelectronic Center Aachen (AMICA),Aachen,Germany,52074","institution_ids":["https://openalex.org/I4210108354"]},{"raw_affiliation_string":"Chair of Electronic Devices, RWTH Aachen University, Aachen, Germany","institution_ids":["https://openalex.org/I887968799"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001042513","display_name":"Annika Grundmann","orcid":"https://orcid.org/0000-0002-0836-7793"},"institutions":[{"id":"https://openalex.org/I4210128088","display_name":"Compound Semiconductor Technologies (United Kingdom)","ror":"https://ror.org/036mg3k91","country_code":"GB","type":"company","lineage":["https://openalex.org/I4210128088"]},{"id":"https://openalex.org/I887968799","display_name":"RWTH Aachen University","ror":"https://ror.org/04xfq0f34","country_code":"DE","type":"education","lineage":["https://openalex.org/I887968799"]}],"countries":["DE","GB"],"is_corresponding":false,"raw_author_name":"Annika Grundmann","raw_affiliation_strings":["Compound Semiconductor Technology, RWTH Aachen,Aachen,52074"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Compound Semiconductor Technology, RWTH Aachen,Aachen,52074","institution_ids":["https://openalex.org/I4210128088","https://openalex.org/I887968799"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112858355","display_name":"Soren Becker","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120526","display_name":"Fraunhofer Institute for Electronic Nano Systems","ror":"https://ror.org/02h12bg79","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210120526","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Soren Becker","raw_affiliation_strings":["Fraunhofer Center for Applied Nanotechnology CAN,Hamburg,Germany,20146"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Center for Applied Nanotechnology CAN,Hamburg,Germany,20146","institution_ids":["https://openalex.org/I4210120526"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019923561","display_name":"Jan Niehaus","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120526","display_name":"Fraunhofer Institute for Electronic Nano Systems","ror":"https://ror.org/02h12bg79","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210120526","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Jan S. Niehaus","raw_affiliation_strings":["Fraunhofer Center for Applied Nanotechnology CAN,Hamburg,Germany,20146"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Center for Applied Nanotechnology CAN,Hamburg,Germany,20146","institution_ids":["https://openalex.org/I4210120526"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025242135","display_name":"Hendrik Schlicke","orcid":"https://orcid.org/0000-0002-6977-4042"},"institutions":[{"id":"https://openalex.org/I4210120526","display_name":"Fraunhofer Institute for Electronic Nano Systems","ror":"https://ror.org/02h12bg79","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210120526","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Hendrik Schlicke","raw_affiliation_strings":["Fraunhofer Center for Applied Nanotechnology CAN,Hamburg,Germany,20146"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Center for Applied Nanotechnology CAN,Hamburg,Germany,20146","institution_ids":["https://openalex.org/I4210120526"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022414227","display_name":"M. Heuken","orcid":"https://orcid.org/0000-0001-9739-9692"},"institutions":[{"id":"https://openalex.org/I2801287017","display_name":"Aixtron (Germany)","ror":"https://ror.org/02adgag39","country_code":"DE","type":"company","lineage":["https://openalex.org/I2801287017"]},{"id":"https://openalex.org/I4210128088","display_name":"Compound Semiconductor Technologies (United Kingdom)","ror":"https://ror.org/036mg3k91","country_code":"GB","type":"company","lineage":["https://openalex.org/I4210128088"]},{"id":"https://openalex.org/I887968799","display_name":"RWTH Aachen University","ror":"https://ror.org/04xfq0f34","country_code":"DE","type":"education","lineage":["https://openalex.org/I887968799"]}],"countries":["DE","GB"],"is_corresponding":false,"raw_author_name":"Michael Heuken","raw_affiliation_strings":["Compound Semiconductor Technology, RWTH Aachen,Aachen,52074","AIXTRON SE, Herzogenrath, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Compound Semiconductor Technology, RWTH Aachen,Aachen,52074","institution_ids":["https://openalex.org/I4210128088","https://openalex.org/I887968799"]},{"raw_affiliation_string":"AIXTRON SE, Herzogenrath, Germany","institution_ids":["https://openalex.org/I2801287017"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046505569","display_name":"H. Kalisch","orcid":"https://orcid.org/0009-0000-4475-3766"},"institutions":[{"id":"https://openalex.org/I4210128088","display_name":"Compound Semiconductor Technologies (United Kingdom)","ror":"https://ror.org/036mg3k91","country_code":"GB","type":"company","lineage":["https://openalex.org/I4210128088"]},{"id":"https://openalex.org/I887968799","display_name":"RWTH Aachen University","ror":"https://ror.org/04xfq0f34","country_code":"DE","type":"education","lineage":["https://openalex.org/I887968799"]}],"countries":["DE","GB"],"is_corresponding":false,"raw_author_name":"Holger Kalisch","raw_affiliation_strings":["Compound Semiconductor Technology, RWTH Aachen,Aachen,52074"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Compound Semiconductor Technology, RWTH Aachen,Aachen,52074","institution_ids":["https://openalex.org/I4210128088","https://openalex.org/I887968799"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042867835","display_name":"Andrei Vescan","orcid":"https://orcid.org/0000-0001-9465-2621"},"institutions":[{"id":"https://openalex.org/I4210128088","display_name":"Compound Semiconductor Technologies (United Kingdom)","ror":"https://ror.org/036mg3k91","country_code":"GB","type":"company","lineage":["https://openalex.org/I4210128088"]},{"id":"https://openalex.org/I887968799","display_name":"RWTH Aachen University","ror":"https://ror.org/04xfq0f34","country_code":"DE","type":"education","lineage":["https://openalex.org/I887968799"]}],"countries":["DE","GB"],"is_corresponding":false,"raw_author_name":"Andrei Vescan","raw_affiliation_strings":["Compound Semiconductor Technology, RWTH Aachen,Aachen,52074"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Compound Semiconductor Technology, RWTH Aachen,Aachen,52074","institution_ids":["https://openalex.org/I4210128088","https://openalex.org/I887968799"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035837243","display_name":"Zhenxing Wang","orcid":"https://orcid.org/0000-0002-2103-7692"},"institutions":[{"id":"https://openalex.org/I4210108354","display_name":"AMO (Germany)","ror":"https://ror.org/01sd0e661","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210108354"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Zhenxing Wang","raw_affiliation_strings":["AMO GmbH, Advanced Microelectronic Center Aachen (AMICA),Aachen,Germany,52074"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"AMO GmbH, Advanced Microelectronic Center Aachen (AMICA),Aachen,Germany,52074","institution_ids":["https://openalex.org/I4210108354"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5087833312","display_name":"Max C. Lemme","orcid":"https://orcid.org/0000-0003-4552-2411"},"institutions":[{"id":"https://openalex.org/I4210108354","display_name":"AMO (Germany)","ror":"https://ror.org/01sd0e661","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210108354"]},{"id":"https://openalex.org/I887968799","display_name":"RWTH Aachen University","ror":"https://ror.org/04xfq0f34","country_code":"DE","type":"education","lineage":["https://openalex.org/I887968799"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Max C. Lemme","raw_affiliation_strings":["AMO GmbH, Advanced Microelectronic Center Aachen (AMICA),Aachen,Germany,52074","Chair of Electronic Devices, RWTH Aachen University, Aachen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"AMO GmbH, Advanced Microelectronic Center Aachen (AMICA),Aachen,Germany,52074","institution_ids":["https://openalex.org/I4210108354"]},{"raw_affiliation_string":"Chair of Electronic Devices, RWTH Aachen University, Aachen, Germany","institution_ids":["https://openalex.org/I887968799"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":12,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.05955902,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"6","issue":null,"first_page":"1","last_page":"2"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10275","display_name":"2D Materials and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10275","display_name":"2D Materials and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9962999820709229,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12529","display_name":"Ga2O3 and related materials","score":0.9962000250816345,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/photodetector","display_name":"Photodetector","score":0.4472719132900238},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4342663586139679},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.41823068261146545},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4137246608734131},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.35995498299598694},{"id":"https://openalex.org/keywords/biology","display_name":"Biology","score":0.10510614514350891}],"concepts":[{"id":"https://openalex.org/C23125352","wikidata":"https://www.wikidata.org/wiki/Q210765","display_name":"Photodetector","level":2,"score":0.4472719132900238},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4342663586139679},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.41823068261146545},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4137246608734131},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.35995498299598694},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.10510614514350891},{"id":"https://openalex.org/C18903297","wikidata":"https://www.wikidata.org/wiki/Q7150","display_name":"Ecology","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/drc55272.2022.9855791","is_oa":false,"landing_page_url":"https://doi.org/10.1109/drc55272.2022.9855791","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 Device Research Conference (DRC)","raw_type":"proceedings-article"},{"id":"pmh:oai:publica.fraunhofer.de:publica/452266","is_oa":false,"landing_page_url":"https://publica.fraunhofer.de/handle/publica/452266","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"conference paper"},{"id":"pmh:oai:zenodo.org:7496364","is_oa":true,"landing_page_url":"https://doi.org/10.1109/DRC55272.2022.9855791","pdf_url":null,"source":{"id":"https://openalex.org/S4306400562","display_name":"Zenodo (CERN European Organization for Nuclear Research)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I67311998","host_organization_name":"European Organization for Nuclear Research","host_organization_lineage":["https://openalex.org/I67311998"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2022 Device Research Conference (DRC), Columbus, OH, USA, 26-29 June 2022","raw_type":"info:eu-repo/semantics/conferencePaper"}],"best_oa_location":{"id":"pmh:oai:zenodo.org:7496364","is_oa":true,"landing_page_url":"https://doi.org/10.1109/DRC55272.2022.9855791","pdf_url":null,"source":{"id":"https://openalex.org/S4306400562","display_name":"Zenodo (CERN European Organization for Nuclear Research)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I67311998","host_organization_name":"European Organization for Nuclear Research","host_organization_lineage":["https://openalex.org/I67311998"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2022 Device Research Conference (DRC), Columbus, OH, USA, 26-29 June 2022","raw_type":"info:eu-repo/semantics/conferencePaper"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W2170276498","https://openalex.org/W2343358570","https://openalex.org/W2554247934","https://openalex.org/W2975293539","https://openalex.org/W3101526348"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2935759653","https://openalex.org/W3105167352","https://openalex.org/W54078636","https://openalex.org/W2954470139","https://openalex.org/W1501425562","https://openalex.org/W2182698433","https://openalex.org/W3119076404","https://openalex.org/W1966960004","https://openalex.org/W3024664220"],"abstract_inverted_index":{"MoS":[0,37,73,111,138,144],"<inf":[1,38,74,112,139,145],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[2,39,75,113,140,146],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</inf>":[3,40,76,114,141,147],"is":[4,172],"a":[5,122,173],"semiconducting":[6],"transition-metal":[7],"dichalcogenide":[8],"and":[9,15,28,47,77,103,158],"an":[10],"attractive":[11],"candidate":[12],"for":[13,66],"optoelectronics":[14],"flexible":[16,127,177],"electronics":[17],"due":[18],"to":[19,85,91],"its":[20],"strong":[21],"excitonic":[22],"interactions,":[23],"low":[24,48],"dark":[25],"current":[26],"(IDark)":[27],"high":[29,45,119],"mechanical":[30,160],"strength.":[31],"Photo":[32],"detectors":[33],"(PDs)":[34],"based":[35,116],"on":[36,104,126,169],"have":[41,82],"been":[42,83],"demonstrated":[43],"with":[44,118,131],"responsivities":[46],"IDark":[49],"[1]\u2013[3].":[50],"However,":[51],"long":[52],"response":[53,88,152],"times,":[54],"often":[55],"in":[56,154],"the":[57,87,92,155],"range":[58,94,157],"of":[59,72],"several":[60],"seconds,":[61],"severely":[62],"limit":[63],"their":[64],"use":[65],"imaging":[67],"applications.":[68],"Hybrid":[69],"structures":[70],"made":[71,99],"colloidal":[78],"quantum":[79],"dots":[80],"(CQDs)":[81],"shown":[84],"improve":[86],"times":[89,153],"down":[90],"ms":[93,156],"[4].":[95],"These":[96],"devices":[97],"were":[98],"from":[100],"exfoliated":[101],"materials":[102],"rigid":[105],"substrate.":[106],"Here,":[107],"we":[108],"present":[109],"hybrid":[110],"/CQDs":[115,148],"PDs":[117,149],"performance":[120],"using":[121],"scalable":[123,167],"fabrication":[124],"approach":[125,175],"polyimide":[128],"(PI)":[129],"substrates":[130,171],"metalorganic":[132],"vapor":[133],"phase":[134],"epitaxy":[135],"(MOVPE)":[136],"grown":[137],".":[142],"Our":[143],"show":[150],"fast":[151],"withstand":[159],"strain,":[161],"which":[162],"provides":[163],"evidence":[164],"that":[165],"our":[166],"process":[168],"PI":[170],"promising":[174],"towards":[176],"optoelectronics,":[178],"e.g.":[179],"wearable":[180],"sensors":[181],"or":[182],"healthcare":[183],"systems.":[184]},"counts_by_year":[],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}