{"id":"https://openalex.org/W3177668772","doi":"https://doi.org/10.1109/drc52342.2021.9467229","title":"Reduced Switching Current Density and Improved Interface Quality using Oxynitride Tunnel Barrier in Magnetic Tunnel Junctions for MRAM Application","display_name":"Reduced Switching Current Density and Improved Interface Quality using Oxynitride Tunnel Barrier in Magnetic Tunnel Junctions for MRAM Application","publication_year":2021,"publication_date":"2021-06-20","ids":{"openalex":"https://openalex.org/W3177668772","doi":"https://doi.org/10.1109/drc52342.2021.9467229","mag":"3177668772"},"language":"en","primary_location":{"id":"doi:10.1109/drc52342.2021.9467229","is_oa":false,"landing_page_url":"https://doi.org/10.1109/drc52342.2021.9467229","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 Device Research Conference (DRC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5055948188","display_name":"Mohamad G. Moinuddin","orcid":"https://orcid.org/0000-0002-9762-5589"},"institutions":[{"id":"https://openalex.org/I9579091","display_name":"Indian Institute of Technology Mandi","ror":"https://ror.org/05r9r2f34","country_code":"IN","type":"education","lineage":["https://openalex.org/I9579091"]}],"countries":["IN"],"is_corresponding":true,"raw_author_name":"Mohamad G. Moinuddin","raw_affiliation_strings":["School of Computing and Electrical Engineering, Indian Institute of Technology (IIT) Mandi, Mandi, India"],"affiliations":[{"raw_affiliation_string":"School of Computing and Electrical Engineering, Indian Institute of Technology (IIT) Mandi, Mandi, India","institution_ids":["https://openalex.org/I9579091"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061888863","display_name":"Srikant Srinivasan","orcid":"https://orcid.org/0000-0001-8605-3952"},"institutions":[{"id":"https://openalex.org/I9579091","display_name":"Indian Institute of Technology Mandi","ror":"https://ror.org/05r9r2f34","country_code":"IN","type":"education","lineage":["https://openalex.org/I9579091"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Srikant Srinivasan","raw_affiliation_strings":["School of Computing and Electrical Engineering, Indian Institute of Technology (IIT) Mandi, Mandi, India"],"affiliations":[{"raw_affiliation_string":"School of Computing and Electrical Engineering, Indian Institute of Technology (IIT) Mandi, Mandi, India","institution_ids":["https://openalex.org/I9579091"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5054822912","display_name":"Satinder K. Sharma","orcid":"https://orcid.org/0000-0001-9313-5550"},"institutions":[{"id":"https://openalex.org/I9579091","display_name":"Indian Institute of Technology Mandi","ror":"https://ror.org/05r9r2f34","country_code":"IN","type":"education","lineage":["https://openalex.org/I9579091"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Satinder K. Sharma","raw_affiliation_strings":["School of Computing and Electrical Engineering, Indian Institute of Technology (IIT) Mandi, Mandi, India"],"affiliations":[{"raw_affiliation_string":"School of Computing and Electrical Engineering, Indian Institute of Technology (IIT) Mandi, Mandi, India","institution_ids":["https://openalex.org/I9579091"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5055948188"],"corresponding_institution_ids":["https://openalex.org/I9579091"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.06249885,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"2"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10049","display_name":"Magnetic properties of thin films","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":0.9957000017166138,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/magnetoresistive-random-access-memory","display_name":"Magnetoresistive random-access memory","score":0.8082761168479919},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7406299114227295},{"id":"https://openalex.org/keywords/tunnel-magnetoresistance","display_name":"Tunnel magnetoresistance","score":0.7154173851013184},{"id":"https://openalex.org/keywords/sputtering","display_name":"Sputtering","score":0.5771579146385193},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5387384295463562},{"id":"https://openalex.org/keywords/ferromagnetism","display_name":"Ferromagnetism","score":0.509421169757843},{"id":"https://openalex.org/keywords/current-density","display_name":"Current density","score":0.49672847986221313},{"id":"https://openalex.org/keywords/doping","display_name":"Doping","score":0.4880026876926422},{"id":"https://openalex.org/keywords/magnetoresistance","display_name":"Magnetoresistance","score":0.4876655340194702},{"id":"https://openalex.org/keywords/ion-beam-assisted-deposition","display_name":"Ion beam-assisted deposition","score":0.4550803601741791},{"id":"https://openalex.org/keywords/quantum-tunnelling","display_name":"Quantum tunnelling","score":0.4411441683769226},{"id":"https://openalex.org/keywords/random-access-memory","display_name":"Random access memory","score":0.3081967532634735},{"id":"https://openalex.org/keywords/condensed-matter-physics","display_name":"Condensed matter physics","score":0.3011817932128906},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.30062246322631836},{"id":"https://openalex.org/keywords/ion-beam","display_name":"Ion beam","score":0.24556651711463928},{"id":"https://openalex.org/keywords/ion","display_name":"Ion","score":0.24450793862342834},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.23660323023796082},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.21992433071136475},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.2128320336341858},{"id":"https://openalex.org/keywords/magnetic-field","display_name":"Magnetic field","score":0.1592526137828827},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.15079191327095032},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.1339924931526184}],"concepts":[{"id":"https://openalex.org/C46891859","wikidata":"https://www.wikidata.org/wiki/Q1061546","display_name":"Magnetoresistive random-access memory","level":3,"score":0.8082761168479919},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7406299114227295},{"id":"https://openalex.org/C56202322","wikidata":"https://www.wikidata.org/wiki/Q1884383","display_name":"Tunnel magnetoresistance","level":3,"score":0.7154173851013184},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.5771579146385193},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5387384295463562},{"id":"https://openalex.org/C82217956","wikidata":"https://www.wikidata.org/wiki/Q184207","display_name":"Ferromagnetism","level":2,"score":0.509421169757843},{"id":"https://openalex.org/C207740977","wikidata":"https://www.wikidata.org/wiki/Q234072","display_name":"Current density","level":2,"score":0.49672847986221313},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.4880026876926422},{"id":"https://openalex.org/C117958382","wikidata":"https://www.wikidata.org/wiki/Q58347","display_name":"Magnetoresistance","level":3,"score":0.4876655340194702},{"id":"https://openalex.org/C2781463530","wikidata":"https://www.wikidata.org/wiki/Q904053","display_name":"Ion beam-assisted deposition","level":4,"score":0.4550803601741791},{"id":"https://openalex.org/C120398109","wikidata":"https://www.wikidata.org/wiki/Q175751","display_name":"Quantum tunnelling","level":2,"score":0.4411441683769226},{"id":"https://openalex.org/C2994168587","wikidata":"https://www.wikidata.org/wiki/Q5295","display_name":"Random access memory","level":2,"score":0.3081967532634735},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.3011817932128906},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.30062246322631836},{"id":"https://openalex.org/C50774322","wikidata":"https://www.wikidata.org/wiki/Q644248","display_name":"Ion beam","level":3,"score":0.24556651711463928},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.24450793862342834},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.23660323023796082},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.21992433071136475},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.2128320336341858},{"id":"https://openalex.org/C115260700","wikidata":"https://www.wikidata.org/wiki/Q11408","display_name":"Magnetic field","level":2,"score":0.1592526137828827},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.15079191327095032},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.1339924931526184},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C9390403","wikidata":"https://www.wikidata.org/wiki/Q3966","display_name":"Computer hardware","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/drc52342.2021.9467229","is_oa":false,"landing_page_url":"https://doi.org/10.1109/drc52342.2021.9467229","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 Device Research Conference (DRC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.4300000071525574}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W2022776056","https://openalex.org/W2058427449","https://openalex.org/W2331328369","https://openalex.org/W2981640342","https://openalex.org/W2996304814","https://openalex.org/W3067010295"],"related_works":["https://openalex.org/W1545438037","https://openalex.org/W1977755618","https://openalex.org/W2131964951","https://openalex.org/W2897770615","https://openalex.org/W4226197542","https://openalex.org/W4214681414","https://openalex.org/W1890124164","https://openalex.org/W2032117939","https://openalex.org/W2034593071","https://openalex.org/W2160372845"],"abstract_inverted_index":{"Magnetic":[0],"tunnel":[1,92],"junctions":[2],"(MTJs)":[3],"have":[4],"recently":[5],"been":[6,154],"commercialized":[7],"for":[8],"memory":[9],"applications,":[10],"both":[11],"as":[12,124],"read-head":[13],"sensors":[14],"and":[15,33,46,56,84,107,128,136,161],"non-volatile":[16],"magnetic":[17],"random-access":[18],"memories":[19],"(MRAMs)":[20],"[1]":[21],".":[22,144,164],"The":[23,54],"key":[24],"parameters":[25],"of":[26,159],"MTJs":[27],"are":[28,59,131],"resistance":[29],"area":[30],"(RA)":[31],"product":[32],"write/switching":[34],"current":[35],"density":[36],"(":[37],"J":[38,57,85,162],"C":[39,58,86,163],"),":[40],"which":[41,70],"affect":[42],"the":[43,48,63,91,110,146],"device":[44],"failure":[45],"decrease":[47],"stability":[49],"due":[50],"to":[51,81],"localized":[52],"heating.":[53],"RA":[55,83],"critically":[60],"influenced":[61],"by":[62],"ferromagnet":[64],"metal":[65,103],"(FM)/tunnel":[66],"barrier":[67,93],"(TB)":[68,94],"interface,":[69],"therefore,":[71],"requires":[72],"maintaining":[73],"high":[74],"quality":[75],"while":[76],"scaling":[77],"down.":[78],"Several":[79],"techniques":[80,140],"reduce":[82],"include":[87],"(1)":[88],"thinning":[89],"down":[90],"effective":[95],"thickness":[96],"(EOT)":[97],"[2]":[98],",":[99,116,142],"(2)":[100],"adding":[101],"ultra-thin":[102],"dust":[104],"in":[105,157],"TB,":[106],"(3)":[108],"modulating":[109],"TB":[111,122],"with":[112,133],"different":[113],"doping":[114],"[3]":[115],"(4)":[117],"using":[118],"alternate":[119],"nitrogen":[120],"containing":[121],"such":[123],"TiON,":[125],"AlON,":[126],"h-BN,":[127],"TiAlON":[129],"that":[130],"deposited":[132],"reactive":[134,137],"sputtering":[135],"ion-beam":[138],"deposition":[139],"[4]":[141],"[5]":[143],"On":[145],"other":[147],"hand,":[148],"room":[149],"temperature":[150],"oxynitride-MTJ":[151],"has":[152],"not":[153],"explored":[155],"much":[156],"terms":[158],"TMR":[160]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}
