{"id":"https://openalex.org/W3013683757","doi":"https://doi.org/10.1109/drc46940.2019.9046440","title":"High Performance and Yield for Super Steep Retrograde Wells (SSRW) by Well Implant / Si-based Epitaxy on Advanced Technology FinFETs","display_name":"High Performance and Yield for Super Steep Retrograde Wells (SSRW) by Well Implant / Si-based Epitaxy on Advanced Technology FinFETs","publication_year":2019,"publication_date":"2019-06-01","ids":{"openalex":"https://openalex.org/W3013683757","doi":"https://doi.org/10.1109/drc46940.2019.9046440","mag":"3013683757"},"language":"en","primary_location":{"id":"doi:10.1109/drc46940.2019.9046440","is_oa":false,"landing_page_url":"https://doi.org/10.1109/drc46940.2019.9046440","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 Device Research Conference (DRC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5085386734","display_name":"Uzma Rana","orcid":null},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"U. Rana","raw_affiliation_strings":["GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108229077","display_name":"D.P. Brunco","orcid":null},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. P. Brunco","raw_affiliation_strings":["GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067633048","display_name":"Sanjay Raman","orcid":"https://orcid.org/0000-0002-1155-1057"},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Raman","raw_affiliation_strings":["GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073512475","display_name":"Dina H. Triyoso","orcid":"https://orcid.org/0000-0002-6186-2961"},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D.H. Triyoso","raw_affiliation_strings":["GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041373321","display_name":"M. W. Stoker","orcid":"https://orcid.org/0000-0003-0672-0183"},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M.W. Stoker","raw_affiliation_strings":["GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103416986","display_name":"Jeffrey B. Johnson","orcid":null},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. B. Johnson","raw_affiliation_strings":["GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040100161","display_name":"L. Pantisano","orcid":null},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"L. Pantisano","raw_affiliation_strings":["GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077436507","display_name":"K. Seo","orcid":null},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K. D. Seo","raw_affiliation_strings":["GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015423743","display_name":"Mingyang Zhao","orcid":"https://orcid.org/0009-0008-8462-3788"},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M. Zhao","raw_affiliation_strings":["GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028607772","display_name":"A. Reznicek","orcid":null},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. Reznicek","raw_affiliation_strings":["GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111941266","display_name":"R. Krishnan","orcid":null},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Krishnan","raw_affiliation_strings":["GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050330120","display_name":"Brian Moser","orcid":null},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"B. Moser","raw_affiliation_strings":["GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050355604","display_name":"James Freeman","orcid":"https://orcid.org/0000-0002-0429-1322"},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Freeman","raw_affiliation_strings":["GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027658459","display_name":"Linus Jang","orcid":null},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"L. Jang","raw_affiliation_strings":["GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5027239743","display_name":"E. Kaganer","orcid":null},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"E. Kaganer","raw_affiliation_strings":["GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES,400 Stone Break Rd Ext, Malta,NY,USA,12110","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, 400 Stone Break Rd Ext, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":15,"corresponding_author_ids":["https://openalex.org/A5085386734"],"corresponding_institution_ids":["https://openalex.org/I35662394"],"apc_list":null,"apc_paid":null,"fwci":0.9538,"has_fulltext":false,"cited_by_count":13,"citation_normalized_percentile":{"value":0.76940696,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"251","last_page":"252"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6717866659164429},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5966789722442627},{"id":"https://openalex.org/keywords/ring-oscillator","display_name":"Ring oscillator","score":0.5940815210342407},{"id":"https://openalex.org/keywords/dopant","display_name":"Dopant","score":0.5410441756248474},{"id":"https://openalex.org/keywords/transconductance","display_name":"Transconductance","score":0.5304075479507446},{"id":"https://openalex.org/keywords/scalability","display_name":"Scalability","score":0.5189763903617859},{"id":"https://openalex.org/keywords/doping","display_name":"Doping","score":0.49768784642219543},{"id":"https://openalex.org/keywords/epitaxy","display_name":"Epitaxy","score":0.4816635847091675},{"id":"https://openalex.org/keywords/channel","display_name":"Channel (broadcasting)","score":0.4529624283313751},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3450813591480255},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.3365878462791443},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.30488526821136475},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.28435879945755005},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.279753178358078},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.24046632647514343},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.16039079427719116},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.08455675840377808},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.08281189203262329}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6717866659164429},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5966789722442627},{"id":"https://openalex.org/C104111718","wikidata":"https://www.wikidata.org/wiki/Q2153973","display_name":"Ring oscillator","level":3,"score":0.5940815210342407},{"id":"https://openalex.org/C191952053","wikidata":"https://www.wikidata.org/wiki/Q15119237","display_name":"Dopant","level":3,"score":0.5410441756248474},{"id":"https://openalex.org/C2779283907","wikidata":"https://www.wikidata.org/wiki/Q1632964","display_name":"Transconductance","level":4,"score":0.5304075479507446},{"id":"https://openalex.org/C48044578","wikidata":"https://www.wikidata.org/wiki/Q727490","display_name":"Scalability","level":2,"score":0.5189763903617859},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.49768784642219543},{"id":"https://openalex.org/C110738630","wikidata":"https://www.wikidata.org/wiki/Q1135540","display_name":"Epitaxy","level":3,"score":0.4816635847091675},{"id":"https://openalex.org/C127162648","wikidata":"https://www.wikidata.org/wiki/Q16858953","display_name":"Channel (broadcasting)","level":2,"score":0.4529624283313751},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3450813591480255},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.3365878462791443},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.30488526821136475},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.28435879945755005},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.279753178358078},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.24046632647514343},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.16039079427719116},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.08455675840377808},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.08281189203262329},{"id":"https://openalex.org/C77088390","wikidata":"https://www.wikidata.org/wiki/Q8513","display_name":"Database","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/drc46940.2019.9046440","is_oa":false,"landing_page_url":"https://doi.org/10.1109/drc46940.2019.9046440","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 Device Research Conference (DRC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":2,"referenced_works":["https://openalex.org/W1923006977","https://openalex.org/W2150938923"],"related_works":["https://openalex.org/W2548900738","https://openalex.org/W2366149815","https://openalex.org/W2024541028","https://openalex.org/W2551134471","https://openalex.org/W2049825041","https://openalex.org/W1544954528","https://openalex.org/W2535975559","https://openalex.org/W2004049596","https://openalex.org/W2104413329","https://openalex.org/W3015531425"],"abstract_inverted_index":{"For":[0],"the":[1],"first":[2],"time,":[3],"we":[4],"present":[5],"a":[6,25],"Super":[7],"Steep":[8],"Retrograde":[9],"Well":[10],"(SSRW)":[11],"FinFET":[12],"process":[13],"utilizing":[14],"patterned":[15],"well":[16],"implants":[17],"and":[18,22,36,68,85,94],"Si-based":[19],"epitaxy":[20],"channels":[21],"compare":[23],"to":[24,52,59,96],"state-of-the-art":[26],"production":[27],"technology":[28],"(14LPP)":[29],"[1].":[30],"This":[31],"flow":[32],"offers":[33],"simpler":[34],"integration":[35],"better":[37],"scalability":[38],"than":[39],"current":[40],"methods":[41],"using":[42],"doped":[43],"glasses":[44],"[2].":[45],"Two":[46],"low":[47],"temperature":[48],"STI":[49],"options":[50],"required":[51],"minimize":[53],"dopant":[54],"diffusion":[55],"are":[56,92],"reported.":[57],"Compared":[58],"POR,":[60,97],"long":[61],"channel":[62,71],"SSRW":[63],"devices":[64],"show":[65,74],"higher":[66],"transconductance":[67],"mobility.":[69],"Short":[70],"devices,":[72],"however,":[73],"comparable":[75],"or":[76],"only":[77],"incremental":[78],"improvement":[79],"in":[80,86],"IEFF":[81],"at":[82],"target":[83],"IOFF":[84],"ring":[87],"oscillator":[88],"performance.":[89],"SRAM":[90],"yields":[91],"high":[93],"equivalent":[95],"demonstrating":[98],"no":[99],"fundamental":[100],"issues.":[101]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}