{"id":"https://openalex.org/W2889441289","doi":"https://doi.org/10.1109/drc.2018.8442244","title":"Ferroelectric Aluminum-Doped Hafnium Oxide for Memory Applications","display_name":"Ferroelectric Aluminum-Doped Hafnium Oxide for Memory Applications","publication_year":2018,"publication_date":"2018-06-01","ids":{"openalex":"https://openalex.org/W2889441289","doi":"https://doi.org/10.1109/drc.2018.8442244","mag":"2889441289"},"language":"en","primary_location":{"id":"doi:10.1109/drc.2018.8442244","is_oa":false,"landing_page_url":"https://doi.org/10.1109/drc.2018.8442244","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 76th Device Research Conference (DRC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5061455147","display_name":"Hojoon Ryu","orcid":"https://orcid.org/0000-0002-8910-6498"},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Hojoon Ryu","raw_affiliation_strings":["Univeristy Illinois at Urbana-Champaign, 208 North Wright Street, Urbana, IL, USA"],"affiliations":[{"raw_affiliation_string":"Univeristy Illinois at Urbana-Champaign, 208 North Wright Street, Urbana, IL, USA","institution_ids":["https://openalex.org/I157725225"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032940889","display_name":"Kai Xu","orcid":"https://orcid.org/0000-0001-7792-8235"},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Kai Xu","raw_affiliation_strings":["Univeristy Illinois at Urbana-Champaign, 208 North Wright Street, Urbana, IL, USA"],"affiliations":[{"raw_affiliation_string":"Univeristy Illinois at Urbana-Champaign, 208 North Wright Street, Urbana, IL, USA","institution_ids":["https://openalex.org/I157725225"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079488450","display_name":"Ji Guo","orcid":"https://orcid.org/0009-0004-3284-7609"},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ji Guo","raw_affiliation_strings":["Univeristy Illinois at Urbana-Champaign, 208 North Wright Street, Urbana, IL, USA"],"affiliations":[{"raw_affiliation_string":"Univeristy Illinois at Urbana-Champaign, 208 North Wright Street, Urbana, IL, USA","institution_ids":["https://openalex.org/I157725225"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5053600949","display_name":"Wenjuan Zhu","orcid":"https://orcid.org/0000-0003-2824-1386"},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Wenjuan Zhu","raw_affiliation_strings":["Univeristy Illinois at Urbana-Champaign, 208 North Wright Street, Urbana, IL, USA"],"affiliations":[{"raw_affiliation_string":"Univeristy Illinois at Urbana-Champaign, 208 North Wright Street, Urbana, IL, USA","institution_ids":["https://openalex.org/I157725225"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5061455147"],"corresponding_institution_ids":["https://openalex.org/I157725225"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.08368439,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"2"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.9958999752998352,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":0.9876000285148621,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ferroelectricity","display_name":"Ferroelectricity","score":0.8439913392066956},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6833329796791077},{"id":"https://openalex.org/keywords/lead-zirconate-titanate","display_name":"Lead zirconate titanate","score":0.4366605281829834},{"id":"https://openalex.org/keywords/oxide","display_name":"Oxide","score":0.4265240728855133},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.31918585300445557},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.22704076766967773},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.0866708755493164}],"concepts":[{"id":"https://openalex.org/C79090758","wikidata":"https://www.wikidata.org/wiki/Q1045739","display_name":"Ferroelectricity","level":3,"score":0.8439913392066956},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6833329796791077},{"id":"https://openalex.org/C2781128178","wikidata":"https://www.wikidata.org/wiki/Q883484","display_name":"Lead zirconate titanate","level":4,"score":0.4366605281829834},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.4265240728855133},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.31918585300445557},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.22704076766967773},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0866708755493164}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/drc.2018.8442244","is_oa":false,"landing_page_url":"https://doi.org/10.1109/drc.2018.8442244","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 76th Device Research Conference (DRC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W1983176018","https://openalex.org/W2012512650","https://openalex.org/W2732063246","https://openalex.org/W2780032778"],"related_works":["https://openalex.org/W4246450666","https://openalex.org/W4388998267","https://openalex.org/W2898370298","https://openalex.org/W2137437058","https://openalex.org/W4390401159","https://openalex.org/W1967406975","https://openalex.org/W2795319754","https://openalex.org/W2744391499","https://openalex.org/W2020185829","https://openalex.org/W2393483224"],"abstract_inverted_index":{"Ferroelectric":[0,74],"complex":[1],"perovskites,":[2],"such":[3],"as":[4,126],"lead":[5,14],"zirconate":[6],"titanate":[7,17],"(PZT),":[8],"strontium":[9],"bismuth":[10],"tantalate":[11],"(SBT),":[12],"and":[13,37,59,92,115],"magnesium":[15],"niobate-lead":[16],"(PMN-PT)":[18],"have":[19,31,70],"been":[20],"widely":[21],"used":[22],"in":[23,34],"ferroelectric":[24,29,71,131],"devices.":[25],"However,":[26],"these":[27],"traditional":[28],"materials":[30],"a":[32,83,123],"limitation":[33],"thickness":[35],"scaling":[36],"are":[38],"incompatible":[39],"with":[40,95,110],"CMOS":[41,96],"processes.":[42],"In":[43,99],"the":[44,80],"last":[45],"few":[46],"years,":[47],"doped":[48],"metal":[49],"oxides,":[50],"including":[51],"hafnium":[52],"oxide":[53,61],"(HfO":[54],"<sub":[55,63,76,107,133],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[56,64,77,108,134],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[57,65,78,109,135],")":[58],"zirconium":[60],"(ZrO":[62],"),":[66],"were":[67],"found":[68,119],"to":[69,90],"phase":[72],"[1]-[2].":[73],"HfO":[75,106,132],"has":[79],"advantages":[81],"of":[82],"high":[84],"coercive":[85],"field,":[86],"excellent":[87],"scalability":[88],"(down":[89],"2.5nm),":[91],"good":[93],"compatibility":[94],"processing":[97],"[3]-[7].":[98],"this":[100],"paper,":[101],"we":[102],"systematically":[103],"investigate":[104],"Al-doped":[105],"various":[111],"electrodes,":[112],"Al":[113],"compositions":[114],"annealing":[116],"temperatures.":[117],"We":[118],"that":[120],"Ti/Pd":[121],"is":[122],"promising":[124],"candidate":[125],"top":[127],"electrode":[128],"material":[129],"for":[130],".":[136]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}