{"id":"https://openalex.org/W2889528421","doi":"https://doi.org/10.1109/drc.2018.8442144","title":"A homogeneous and reproducible large-area, low dispersion GaN-on-Si normally-off 600 V transistor technology using selective GaN etching","display_name":"A homogeneous and reproducible large-area, low dispersion GaN-on-Si normally-off 600 V transistor technology using selective GaN etching","publication_year":2018,"publication_date":"2018-06-01","ids":{"openalex":"https://openalex.org/W2889528421","doi":"https://doi.org/10.1109/drc.2018.8442144","mag":"2889528421"},"language":"en","primary_location":{"id":"doi:10.1109/drc.2018.8442144","is_oa":false,"landing_page_url":"https://doi.org/10.1109/drc.2018.8442144","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 76th Device Research Conference (DRC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5001431880","display_name":"Patrick Waltereit","orcid":"https://orcid.org/0000-0001-5834-6790"},"institutions":[{"id":"https://openalex.org/I4210090068","display_name":"Fraunhofer Institute for Applied Solid State Physics","ror":"https://ror.org/0083ncs46","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210090068","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Patrick Waltereit","raw_affiliation_strings":["Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany","institution_ids":["https://openalex.org/I4210090068"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068592309","display_name":"Marina Preschle","orcid":null},"institutions":[{"id":"https://openalex.org/I4210090068","display_name":"Fraunhofer Institute for Applied Solid State Physics","ror":"https://ror.org/0083ncs46","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210090068","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Marina Preschle","raw_affiliation_strings":["Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany","institution_ids":["https://openalex.org/I4210090068"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101516779","display_name":"S. M\u00fcller","orcid":"https://orcid.org/0000-0001-9097-9213"},"institutions":[{"id":"https://openalex.org/I4210090068","display_name":"Fraunhofer Institute for Applied Solid State Physics","ror":"https://ror.org/0083ncs46","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210090068","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Stefan Muller","raw_affiliation_strings":["Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany","institution_ids":["https://openalex.org/I4210090068"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027301263","display_name":"Lutz Kirste","orcid":"https://orcid.org/0000-0002-5274-2650"},"institutions":[{"id":"https://openalex.org/I4210090068","display_name":"Fraunhofer Institute for Applied Solid State Physics","ror":"https://ror.org/0083ncs46","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210090068","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Lutz Kirste","raw_affiliation_strings":["Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany","institution_ids":["https://openalex.org/I4210090068"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031912547","display_name":"Heiko Czap","orcid":"https://orcid.org/0000-0003-4454-1215"},"institutions":[{"id":"https://openalex.org/I4210090068","display_name":"Fraunhofer Institute for Applied Solid State Physics","ror":"https://ror.org/0083ncs46","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210090068","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Heiko Czap","raw_affiliation_strings":["Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany","institution_ids":["https://openalex.org/I4210090068"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057811827","display_name":"Joachim Ruster","orcid":null},"institutions":[{"id":"https://openalex.org/I4210090068","display_name":"Fraunhofer Institute for Applied Solid State Physics","ror":"https://ror.org/0083ncs46","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210090068","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Joachim Ruster","raw_affiliation_strings":["Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany","institution_ids":["https://openalex.org/I4210090068"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112440907","display_name":"Michael Dammann","orcid":"https://orcid.org/0000-0003-4644-2712"},"institutions":[{"id":"https://openalex.org/I4210090068","display_name":"Fraunhofer Institute for Applied Solid State Physics","ror":"https://ror.org/0083ncs46","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210090068","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Michael Dammann","raw_affiliation_strings":["Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany","institution_ids":["https://openalex.org/I4210090068"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5030630169","display_name":"Richard Reiner","orcid":"https://orcid.org/0000-0002-9529-5109"},"institutions":[{"id":"https://openalex.org/I4210090068","display_name":"Fraunhofer Institute for Applied Solid State Physics","ror":"https://ror.org/0083ncs46","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210090068","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Richard Reiner","raw_affiliation_strings":["Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, Freiburg, 79108, Germany","institution_ids":["https://openalex.org/I4210090068"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5001431880"],"corresponding_institution_ids":["https://openalex.org/I4210090068"],"apc_list":null,"apc_paid":null,"fwci":0.7444,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.72822901,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"2"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.57968670129776},{"id":"https://openalex.org/keywords/epitaxy","display_name":"Epitaxy","score":0.45096829533576965},{"id":"https://openalex.org/keywords/doping","display_name":"Doping","score":0.4398535490036011},{"id":"https://openalex.org/keywords/acceptor","display_name":"Acceptor","score":0.4261499345302582},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.4241119623184204},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.34165501594543457},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.3172578811645508},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.22614631056785583},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.21187478303909302},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1931118667125702},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.10091269016265869}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.57968670129776},{"id":"https://openalex.org/C110738630","wikidata":"https://www.wikidata.org/wiki/Q1135540","display_name":"Epitaxy","level":3,"score":0.45096829533576965},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.4398535490036011},{"id":"https://openalex.org/C2779892579","wikidata":"https://www.wikidata.org/wiki/Q912138","display_name":"Acceptor","level":2,"score":0.4261499345302582},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4241119623184204},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.34165501594543457},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.3172578811645508},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.22614631056785583},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.21187478303909302},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1931118667125702},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.10091269016265869},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/drc.2018.8442144","is_oa":false,"landing_page_url":"https://doi.org/10.1109/drc.2018.8442144","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 76th Device Research Conference (DRC)","raw_type":"proceedings-article"},{"id":"pmh:oai:fraunhofer.de:N-520176","is_oa":false,"landing_page_url":"http://publica.fraunhofer.de/documents/N-520176.html","pdf_url":null,"source":{"id":"https://openalex.org/S4306400801","display_name":"Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Fraunhofer IAF","raw_type":"Conference Paper"},{"id":"pmh:oai:publica.fraunhofer.de:publica/403192","is_oa":false,"landing_page_url":"https://publica.fraunhofer.de/handle/publica/403192","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"conference paper"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W2008135258","https://openalex.org/W2031606911","https://openalex.org/W2073934232"],"related_works":["https://openalex.org/W2071549041","https://openalex.org/W2027167691","https://openalex.org/W2027491795","https://openalex.org/W4244931600","https://openalex.org/W2024471745","https://openalex.org/W2972426140","https://openalex.org/W2049125200","https://openalex.org/W2012656502","https://openalex.org/W2019421230","https://openalex.org/W1963656064"],"abstract_inverted_index":{"The":[0,44,76,91,116,161],"epitaxial":[1],"structures":[2],"are":[3,82,105],"grown":[4],"by":[5,40,48,165],"metal-organic":[6],"chemical":[7],"vapor":[8],"deposition":[9],"on":[10,131],"4-inch":[11],"Si(lll)":[12],"substrates.":[13],"First,":[14],"a":[15,29,49,59,121,132,166],"graded":[16],"AlGaN":[17,103],"buffer":[18],"is":[19,37,46,54,163],"deposited":[20],"to":[21,71,111,152,172],"mitigate":[22],"lattice":[23],"and":[24,96],"thermal":[25],"coefficient":[26],"mismatches.":[27],"Second,":[28],"thick":[30],"GaN":[31,51,118,156],"layer":[32],"with":[33,58],"an":[34],"AIN":[35],"interlayer":[36],"grown,":[38],"followed":[39],"the":[41,80,102,108,154],"AIGaN/GaN":[42],"heterojunction.":[43],"structure":[45],"capped":[47],"p-doped":[50,117,155],"layer.":[52],"Mg":[53],"used":[55],"as":[56],"acceptor":[57],"concentration":[60],"around":[61,123],"3-4\u00d710":[62],"<sup":[63,67],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[64,68,135,139,143],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">19</sup>":[65],"cm":[66],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-3</sup>":[69],"according":[70],"secondary":[72],"ion":[73],"mass":[74],"spectrometry.":[75],"structural":[77],"properties":[78],"of":[79,101],"samples":[81],"investigated":[83],"using":[84],"high-resolution":[85],"X-ray":[86],"diffraction,":[87],"see":[88,158],"Figure":[89,159],"1.":[90],"thickness":[92,122],"(approx.":[93],"15":[94],"nm)":[95],"composition":[97],"(around":[98],"20%":[99],"Aluminum)":[100],"barrier":[104],"well":[106],"within":[107],"parameter":[109],"space":[110],"obtain":[112],"normally-off":[113],"devices":[114],"[1].":[115],"cap":[119],"has":[120,147],"53":[124],"nm.":[125],"A":[126],"two-step":[127],"dry-etch":[128],"process":[129,162,168],"based":[130],"Cl":[133],"<sub":[134,138,142],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[136,140,144],"/N":[137],"/O":[141],"plasma":[145],"[2]":[146],"been":[148],"adapted":[149],"in":[150,170],"order":[151,171],"remove":[153],"cap,":[157],"2.":[160],"characterized":[164],"large":[167],"window":[169],"provide":[173],"high":[174],"reproducibility.":[175]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2020,"cited_by_count":3},{"year":2019,"cited_by_count":1}],"updated_date":"2026-03-25T13:04:00.132906","created_date":"2025-10-10T00:00:00"}