{"id":"https://openalex.org/W3092166587","doi":"https://doi.org/10.1109/dac18072.2020.9218580","title":"Wafer Map Defect Patterns Classification using Deep Selective Learning","display_name":"Wafer Map Defect Patterns Classification using Deep Selective Learning","publication_year":2020,"publication_date":"2020-07-01","ids":{"openalex":"https://openalex.org/W3092166587","doi":"https://doi.org/10.1109/dac18072.2020.9218580","mag":"3092166587"},"language":"en","primary_location":{"id":"doi:10.1109/dac18072.2020.9218580","is_oa":false,"landing_page_url":"https://doi.org/10.1109/dac18072.2020.9218580","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 57th ACM/IEEE Design Automation Conference (DAC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5038501242","display_name":"Mohamed Baker Alawieh","orcid":"https://orcid.org/0000-0002-3546-0336"},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mohamed Baker Alawieh","raw_affiliation_strings":["ECE Department, University of Texas at Austin, Austin, TX, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ECE Department, University of Texas at Austin, Austin, TX, USA","institution_ids":["https://openalex.org/I86519309"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066048721","display_name":"Duane S. Boning","orcid":"https://orcid.org/0000-0002-0417-445X"},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Duane Boning","raw_affiliation_strings":["EECS Department, Massachusetts Institute of Technology, Cambridge, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"EECS Department, Massachusetts Institute of Technology, Cambridge, MA, USA","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5011883763","display_name":"David Z. Pan","orcid":"https://orcid.org/0000-0002-5705-2501"},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"David Z. Pan","raw_affiliation_strings":["ECE Department, University of Texas at Austin, Austin, TX, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ECE Department, University of Texas at Austin, Austin, TX, USA","institution_ids":["https://openalex.org/I86519309"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":4.7007,"has_fulltext":false,"cited_by_count":57,"citation_normalized_percentile":{"value":0.95074967,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":100},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.7263031601905823},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.6625137329101562},{"id":"https://openalex.org/keywords/scheme","display_name":"Scheme (mathematics)","score":0.5727710723876953},{"id":"https://openalex.org/keywords/deep-learning","display_name":"Deep learning","score":0.5622682571411133},{"id":"https://openalex.org/keywords/class","display_name":"Class (philosophy)","score":0.5342515707015991},{"id":"https://openalex.org/keywords/encoder","display_name":"Encoder","score":0.5135927200317383},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.4800471067428589},{"id":"https://openalex.org/keywords/machine-learning","display_name":"Machine learning","score":0.4722953140735626},{"id":"https://openalex.org/keywords/convolutional-neural-network","display_name":"Convolutional neural network","score":0.4639790654182434},{"id":"https://openalex.org/keywords/pattern-recognition","display_name":"Pattern recognition (psychology)","score":0.4633408784866333},{"id":"https://openalex.org/keywords/data-mining","display_name":"Data mining","score":0.4014744460582733},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.19122794270515442},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.07946127653121948}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.7263031601905823},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.6625137329101562},{"id":"https://openalex.org/C77618280","wikidata":"https://www.wikidata.org/wiki/Q1155772","display_name":"Scheme (mathematics)","level":2,"score":0.5727710723876953},{"id":"https://openalex.org/C108583219","wikidata":"https://www.wikidata.org/wiki/Q197536","display_name":"Deep learning","level":2,"score":0.5622682571411133},{"id":"https://openalex.org/C2777212361","wikidata":"https://www.wikidata.org/wiki/Q5127848","display_name":"Class (philosophy)","level":2,"score":0.5342515707015991},{"id":"https://openalex.org/C118505674","wikidata":"https://www.wikidata.org/wiki/Q42586063","display_name":"Encoder","level":2,"score":0.5135927200317383},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.4800471067428589},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.4722953140735626},{"id":"https://openalex.org/C81363708","wikidata":"https://www.wikidata.org/wiki/Q17084460","display_name":"Convolutional neural network","level":2,"score":0.4639790654182434},{"id":"https://openalex.org/C153180895","wikidata":"https://www.wikidata.org/wiki/Q7148389","display_name":"Pattern recognition (psychology)","level":2,"score":0.4633408784866333},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.4014744460582733},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.19122794270515442},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.07946127653121948},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/dac18072.2020.9218580","is_oa":false,"landing_page_url":"https://doi.org/10.1109/dac18072.2020.9218580","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 57th ACM/IEEE Design Automation Conference (DAC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Decent work and economic growth","id":"https://metadata.un.org/sdg/8","score":0.4399999976158142}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":27,"referenced_works":["https://openalex.org/W398859631","https://openalex.org/W569478347","https://openalex.org/W1502364872","https://openalex.org/W1941659294","https://openalex.org/W1975617480","https://openalex.org/W2009618608","https://openalex.org/W2020286945","https://openalex.org/W2035969035","https://openalex.org/W2071563913","https://openalex.org/W2082562420","https://openalex.org/W2100495367","https://openalex.org/W2101946573","https://openalex.org/W2104550562","https://openalex.org/W2147947791","https://openalex.org/W2265219688","https://openalex.org/W2296629652","https://openalex.org/W2509074878","https://openalex.org/W2737795851","https://openalex.org/W2913204915","https://openalex.org/W2914735679","https://openalex.org/W2946116851","https://openalex.org/W2963108767","https://openalex.org/W2963384319","https://openalex.org/W2996886069","https://openalex.org/W6675108834","https://openalex.org/W6745553787","https://openalex.org/W6759230470"],"related_works":["https://openalex.org/W1998662473","https://openalex.org/W1988252515","https://openalex.org/W2075391483","https://openalex.org/W2742348144","https://openalex.org/W4226493464","https://openalex.org/W4312417841","https://openalex.org/W3133861977","https://openalex.org/W2951211570","https://openalex.org/W3103566983","https://openalex.org/W3029198973"],"abstract_inverted_index":{"With":[0],"the":[1,45,90,95,124],"continuous":[2],"drive":[3],"toward":[4],"integrated":[5,41],"circuits":[6],"scaling,":[7],"efficient":[8],"yield":[9],"analysis":[10],"is":[11,58,121],"becoming":[12],"more":[13,16],"crucial":[14],"yet":[15],"challenging.":[17],"In":[18],"this":[19],"paper,":[20],"we":[21,99],"propose":[22,100],"a":[23,52,62,101,107],"novel":[24],"methodology":[25],"for":[26,75,111],"wafer":[27,96],"map":[28,97],"defect":[29,77,145],"pattern":[30],"classification":[31],"using":[32],"deep":[33],"selective":[34,71,139],"learning.":[35],"Our":[36],"proposed":[37,119],"approach":[38,120],"features":[39],"an":[40],"reject":[42],"option":[43],"where":[44,128],"model":[46,110],"chooses":[47],"to":[48,88],"abstain":[49],"from":[50],"predicting":[51],"class":[53,78,91],"label":[54],"when":[55],"misclassification":[56,68],"risk":[57],"high.":[59],"Thus,":[60],"providing":[61],"trade-off":[63],"between":[64],"prediction":[65],"coverage":[66,135],"and":[67,83,87,136],"risk.":[69],"This":[70],"learning":[72,140],"scheme":[73],"allows":[74],"new":[76,144],"detection,":[79,82],"concept":[80],"shift":[81],"resource":[84],"allocation.":[85],"Besides,":[86],"address":[89],"imbalance":[92],"problem":[93],"in":[94],"classification,":[98],"data":[102],"augmentation":[103],"framework":[104],"built":[105],"around":[106],"convolutional":[108],"auto-encoder":[109],"synthetic":[112],"sample":[113],"generation.":[114],"The":[115],"efficacy":[116],"of":[117],"our":[118],"demonstrated":[122],"on":[123],"WM-811k":[125],"industrial":[126],"dataset":[127],"it":[129],"achieves":[130],"94%":[131],"accuracy":[132],"under":[133],"full":[134],"99%":[137],"with":[138],"while":[141],"successfully":[142],"detecting":[143],"types.":[146]},"counts_by_year":[{"year":2026,"cited_by_count":4},{"year":2025,"cited_by_count":12},{"year":2024,"cited_by_count":15},{"year":2023,"cited_by_count":5},{"year":2022,"cited_by_count":11},{"year":2021,"cited_by_count":9},{"year":2020,"cited_by_count":1}],"updated_date":"2026-06-19T17:40:00.097472","created_date":"2025-10-10T00:00:00"}