{"id":"https://openalex.org/W3121378229","doi":"https://doi.org/10.1109/csit49958.2020.9321926","title":"Modeling of Technological Process in Nanoelectronic Production","display_name":"Modeling of Technological Process in Nanoelectronic Production","publication_year":2020,"publication_date":"2020-09-23","ids":{"openalex":"https://openalex.org/W3121378229","doi":"https://doi.org/10.1109/csit49958.2020.9321926","mag":"3121378229"},"language":"en","primary_location":{"id":"doi:10.1109/csit49958.2020.9321926","is_oa":false,"landing_page_url":"https://doi.org/10.1109/csit49958.2020.9321926","pdf_url":null,"source":{"id":"https://openalex.org/S4306498651","display_name":"2020 IEEE 15th International Conference on Computer Sciences and Information Technologies (CSIT)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE 15th International Conference on Computer Sciences and Information Technologies (CSIT)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101798733","display_name":"Oleksandr Prokhorov","orcid":"https://orcid.org/0000-0003-4680-4082"},"institutions":[{"id":"https://openalex.org/I23686167","display_name":"National Aerospace University \u2013 Kharkiv Aviation Institute","ror":"https://ror.org/048j5n646","country_code":"UA","type":"education","lineage":["https://openalex.org/I23686167"]}],"countries":["UA"],"is_corresponding":true,"raw_author_name":"Oleksandr Prokhorov","raw_affiliation_strings":["Department of Computer Science and Information Technology, National Aerospace University \u201cKharkiv Aviation Institute\u201d, Kharkiv, Ukraine","Department of Computer Science and Information Technology, National Aerospace University \"Kharkiv Aviation Institute\", Kharkiv, Ukraine"],"affiliations":[{"raw_affiliation_string":"Department of Computer Science and Information Technology, National Aerospace University \u201cKharkiv Aviation Institute\u201d, Kharkiv, Ukraine","institution_ids":["https://openalex.org/I23686167"]},{"raw_affiliation_string":"Department of Computer Science and Information Technology, National Aerospace University \"Kharkiv Aviation Institute\", Kharkiv, Ukraine","institution_ids":["https://openalex.org/I23686167"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112348152","display_name":"Yurii Pronchakov","orcid":null},"institutions":[{"id":"https://openalex.org/I23686167","display_name":"National Aerospace University \u2013 Kharkiv Aviation Institute","ror":"https://ror.org/048j5n646","country_code":"UA","type":"education","lineage":["https://openalex.org/I23686167"]}],"countries":["UA"],"is_corresponding":false,"raw_author_name":"Yurii Pronchakov","raw_affiliation_strings":["Department of Software Engineering and Business, National Aerospace University \u201cKharkiv Aviation Institute\u201d, Kharkiv, Ukraine","Department of Software Engineering and Business, National Aerospace University \"Kharkiv Aviation Institute\", Kharkiv, Ukraine"],"affiliations":[{"raw_affiliation_string":"Department of Software Engineering and Business, National Aerospace University \u201cKharkiv Aviation Institute\u201d, Kharkiv, Ukraine","institution_ids":["https://openalex.org/I23686167"]},{"raw_affiliation_string":"Department of Software Engineering and Business, National Aerospace University \"Kharkiv Aviation Institute\", Kharkiv, Ukraine","institution_ids":["https://openalex.org/I23686167"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109497641","display_name":"Oleg Fedorovich","orcid":null},"institutions":[{"id":"https://openalex.org/I23686167","display_name":"National Aerospace University \u2013 Kharkiv Aviation Institute","ror":"https://ror.org/048j5n646","country_code":"UA","type":"education","lineage":["https://openalex.org/I23686167"]}],"countries":["UA"],"is_corresponding":false,"raw_author_name":"Oleg Fedorovich","raw_affiliation_strings":["Department of Computer Science and Information Technology, National Aerospace University \u201cKharkiv Aviation Institute\u201d, Kharkiv, Ukraine","Department of Computer Science and Information Technology, National Aerospace University \"Kharkiv Aviation Institute\", Kharkiv, Ukraine"],"affiliations":[{"raw_affiliation_string":"Department of Computer Science and Information Technology, National Aerospace University \u201cKharkiv Aviation Institute\u201d, Kharkiv, Ukraine","institution_ids":["https://openalex.org/I23686167"]},{"raw_affiliation_string":"Department of Computer Science and Information Technology, National Aerospace University \"Kharkiv Aviation Institute\", Kharkiv, Ukraine","institution_ids":["https://openalex.org/I23686167"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5020360978","display_name":"Nataliia Kunanets","orcid":null},"institutions":[{"id":"https://openalex.org/I98435010","display_name":"Lviv Polytechnic National University","ror":"https://ror.org/0542q3127","country_code":"UA","type":"education","lineage":["https://openalex.org/I98435010"]}],"countries":["UA"],"is_corresponding":false,"raw_author_name":"Nataliia Kunanets","raw_affiliation_strings":["Departments of Information Systems and Networks, Lviv Polytechnic National University, Lviv, Ukraine"],"affiliations":[{"raw_affiliation_string":"Departments of Information Systems and Networks, Lviv Polytechnic National University, Lviv, Ukraine","institution_ids":["https://openalex.org/I98435010"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5101798733"],"corresponding_institution_ids":["https://openalex.org/I23686167"],"apc_list":null,"apc_paid":null,"fwci":0.4653,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.6125772,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"324","last_page":"327"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.972000002861023,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.972000002861023,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13113","display_name":"Engineering Technology and Methodologies","score":0.9330999851226807,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13482","display_name":"Engineering Education and Technology","score":0.9286999702453613,"subfield":{"id":"https://openalex.org/subfields/1710","display_name":"Information Systems"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/production","display_name":"Production (economics)","score":0.7005698084831238},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6627796292304993},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5898345112800598},{"id":"https://openalex.org/keywords/cluster","display_name":"Cluster (spacecraft)","score":0.5590810775756836},{"id":"https://openalex.org/keywords/manufacturing-engineering","display_name":"Manufacturing engineering","score":0.5452223420143127},{"id":"https://openalex.org/keywords/product","display_name":"Product (mathematics)","score":0.5298879742622375},{"id":"https://openalex.org/keywords/productivity","display_name":"Productivity","score":0.4913696348667145},{"id":"https://openalex.org/keywords/resource","display_name":"Resource (disambiguation)","score":0.4877844452857971},{"id":"https://openalex.org/keywords/industrial-engineering","display_name":"Industrial engineering","score":0.42231059074401855},{"id":"https://openalex.org/keywords/systems-engineering","display_name":"Systems engineering","score":0.3699704110622406},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.18331235647201538}],"concepts":[{"id":"https://openalex.org/C2778348673","wikidata":"https://www.wikidata.org/wiki/Q739302","display_name":"Production (economics)","level":2,"score":0.7005698084831238},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6627796292304993},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5898345112800598},{"id":"https://openalex.org/C164866538","wikidata":"https://www.wikidata.org/wiki/Q367351","display_name":"Cluster (spacecraft)","level":2,"score":0.5590810775756836},{"id":"https://openalex.org/C117671659","wikidata":"https://www.wikidata.org/wiki/Q11049265","display_name":"Manufacturing engineering","level":1,"score":0.5452223420143127},{"id":"https://openalex.org/C90673727","wikidata":"https://www.wikidata.org/wiki/Q901718","display_name":"Product (mathematics)","level":2,"score":0.5298879742622375},{"id":"https://openalex.org/C204983608","wikidata":"https://www.wikidata.org/wiki/Q2111958","display_name":"Productivity","level":2,"score":0.4913696348667145},{"id":"https://openalex.org/C206345919","wikidata":"https://www.wikidata.org/wiki/Q20380951","display_name":"Resource (disambiguation)","level":2,"score":0.4877844452857971},{"id":"https://openalex.org/C13736549","wikidata":"https://www.wikidata.org/wiki/Q4489420","display_name":"Industrial engineering","level":1,"score":0.42231059074401855},{"id":"https://openalex.org/C201995342","wikidata":"https://www.wikidata.org/wiki/Q682496","display_name":"Systems engineering","level":1,"score":0.3699704110622406},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.18331235647201538},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C139719470","wikidata":"https://www.wikidata.org/wiki/Q39680","display_name":"Macroeconomics","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/csit49958.2020.9321926","is_oa":false,"landing_page_url":"https://doi.org/10.1109/csit49958.2020.9321926","pdf_url":null,"source":{"id":"https://openalex.org/S4306498651","display_name":"2020 IEEE 15th International Conference on Computer Sciences and Information Technologies (CSIT)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE 15th International Conference on Computer Sciences and Information Technologies (CSIT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/8","display_name":"Decent work and economic growth","score":0.41999998688697815}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W2033466247","https://openalex.org/W2043255436","https://openalex.org/W2099261516","https://openalex.org/W2104492191","https://openalex.org/W2150135802","https://openalex.org/W2159411172","https://openalex.org/W2784057398","https://openalex.org/W3139937486","https://openalex.org/W4233661683","https://openalex.org/W6674545817","https://openalex.org/W6683227856","https://openalex.org/W6747828122"],"related_works":["https://openalex.org/W2440403839","https://openalex.org/W599097301","https://openalex.org/W2367677619","https://openalex.org/W1967872488","https://openalex.org/W3162895297","https://openalex.org/W2606830790","https://openalex.org/W2379685433","https://openalex.org/W202636441","https://openalex.org/W2588122185","https://openalex.org/W2337755673"],"abstract_inverted_index":{"The":[0,44,96],"analysis":[1],"of":[2,5,12,15,27,38,53,57,64,78,85,98,101,105,122],"the":[3,21,25,36,51,55,62,76,99,103,120],"features":[4],"automated":[6,28],"production":[7,17,33],"processes":[8,52],"and":[9,60,93,116],"cluster":[10,29],"layout":[11],"technological":[13,83,110],"complexes":[14,84],"nanoelectronic":[16,65,123],"is":[18,42,47],"carried":[19],"out;":[20],"approach":[22],"to":[23,74,113],"increase":[24],"productivity":[26],"equipment":[30],"in":[31,81,108],"semiconductor":[32],"based":[34],"on":[35],"control":[37],"semi-finished":[39,58,79,106],"product":[40],"flows":[41,77],"proposed.":[43],"simulation":[45],"model":[46],"proposed":[48],"for":[49,70,119],"analyzing":[50],"controlling":[54],"flow":[56],"products":[59,80,107],"calculating":[61],"characteristics":[63],"production,":[66],"which":[67],"enables":[68],"search":[69],"rational":[71],"solutions":[72],"related":[73,112],"managing":[75],"multicluster":[82,109],"any":[86],"architecture,":[87],"taking":[88],"into":[89],"account":[90],"resource":[91],"limitations":[92],"risk":[94],"factors.":[95],"statement":[97],"problems":[100],"planning":[102],"movement":[104],"complexes,":[111],"various":[114],"strategies":[115],"performance":[117],"criteria":[118],"logistics":[121],"production.":[124]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2022,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}