{"id":"https://openalex.org/W4403535371","doi":"https://doi.org/10.1109/codit62066.2024.10708503","title":"Enhancing Predictive Analytics in Semiconductor Manufacturing: A Deep Learning Approach for Overall Equipment Efficiency Estimation","display_name":"Enhancing Predictive Analytics in Semiconductor Manufacturing: A Deep Learning Approach for Overall Equipment Efficiency Estimation","publication_year":2024,"publication_date":"2024-07-01","ids":{"openalex":"https://openalex.org/W4403535371","doi":"https://doi.org/10.1109/codit62066.2024.10708503"},"language":"en","primary_location":{"id":"doi:10.1109/codit62066.2024.10708503","is_oa":false,"landing_page_url":"https://doi.org/10.1109/codit62066.2024.10708503","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 10th International Conference on Control, Decision and Information Technologies (CoDIT)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5086323684","display_name":"Filippo Boni","orcid":"https://orcid.org/0000-0002-2613-4432"},"institutions":[{"id":"https://openalex.org/I138689650","display_name":"University of Padua","ror":"https://ror.org/00240q980","country_code":"IT","type":"education","lineage":["https://openalex.org/I138689650"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Filippo Boni","raw_affiliation_strings":["University of Padova,Department of Physics and Astronomy,Padova,Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Padova,Department of Physics and Astronomy,Padova,Italy","institution_ids":["https://openalex.org/I138689650"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5114319999","display_name":"Riccardo De Monte","orcid":null},"institutions":[{"id":"https://openalex.org/I138689650","display_name":"University of Padua","ror":"https://ror.org/00240q980","country_code":"IT","type":"education","lineage":["https://openalex.org/I138689650"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Riccardo De Monte","raw_affiliation_strings":["University of Padova,Department of Information Engineering,Padova,Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Padova,Department of Information Engineering,Padova,Italy","institution_ids":["https://openalex.org/I138689650"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101819883","display_name":"Yao Yang","orcid":"https://orcid.org/0000-0002-0236-7899"},"institutions":[{"id":"https://openalex.org/I137594350","display_name":"Infineon Technologies (Germany)","ror":"https://ror.org/005kw6t15","country_code":"DE","type":"company","lineage":["https://openalex.org/I137594350"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Yao Yang","raw_affiliation_strings":["Infineon Technologies AG,Neubiberg,Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Infineon Technologies AG,Neubiberg,Germany","institution_ids":["https://openalex.org/I137594350"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021328260","display_name":"Natalie Gentner","orcid":"https://orcid.org/0000-0002-1245-7417"},"institutions":[{"id":"https://openalex.org/I137594350","display_name":"Infineon Technologies (Germany)","ror":"https://ror.org/005kw6t15","country_code":"DE","type":"company","lineage":["https://openalex.org/I137594350"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Natalie Gentner","raw_affiliation_strings":["Infineon Technologies AG,Neubiberg,Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Infineon Technologies AG,Neubiberg,Germany","institution_ids":["https://openalex.org/I137594350"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Joon Khim Low","orcid":null},"institutions":[{"id":"https://openalex.org/I137594350","display_name":"Infineon Technologies (Germany)","ror":"https://ror.org/005kw6t15","country_code":"DE","type":"company","lineage":["https://openalex.org/I137594350"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Joon Khim Low","raw_affiliation_strings":["Infineon Technologies AG,Neubiberg,Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Infineon Technologies AG,Neubiberg,Germany","institution_ids":["https://openalex.org/I137594350"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5026617079","display_name":"Gian Antonio Susto","orcid":"https://orcid.org/0000-0001-5739-9639"},"institutions":[{"id":"https://openalex.org/I138689650","display_name":"University of Padua","ror":"https://ror.org/00240q980","country_code":"IT","type":"education","lineage":["https://openalex.org/I138689650"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Gian Antonio Susto","raw_affiliation_strings":["University of Padova,Department of Information Engineering,Padova,Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Padova,Department of Information Engineering,Padova,Italy","institution_ids":["https://openalex.org/I138689650"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1414","last_page":"1419"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9674000144004822,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9674000144004822,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.925599992275238,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.6369584798812866},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6099648475646973},{"id":"https://openalex.org/keywords/analytics","display_name":"Analytics","score":0.5741614103317261},{"id":"https://openalex.org/keywords/predictive-analytics","display_name":"Predictive analytics","score":0.5717353224754333},{"id":"https://openalex.org/keywords/estimation","display_name":"Estimation","score":0.5160538554191589},{"id":"https://openalex.org/keywords/machine-learning","display_name":"Machine learning","score":0.3954891562461853},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.37124282121658325},{"id":"https://openalex.org/keywords/data-science","display_name":"Data science","score":0.26272323727607727},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.21784377098083496},{"id":"https://openalex.org/keywords/systems-engineering","display_name":"Systems engineering","score":0.11278852820396423},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.08999189734458923}],"concepts":[{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.6369584798812866},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6099648475646973},{"id":"https://openalex.org/C79158427","wikidata":"https://www.wikidata.org/wiki/Q485396","display_name":"Analytics","level":2,"score":0.5741614103317261},{"id":"https://openalex.org/C83209312","wikidata":"https://www.wikidata.org/wiki/Q1053367","display_name":"Predictive analytics","level":2,"score":0.5717353224754333},{"id":"https://openalex.org/C96250715","wikidata":"https://www.wikidata.org/wiki/Q965330","display_name":"Estimation","level":2,"score":0.5160538554191589},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.3954891562461853},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.37124282121658325},{"id":"https://openalex.org/C2522767166","wikidata":"https://www.wikidata.org/wiki/Q2374463","display_name":"Data science","level":1,"score":0.26272323727607727},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.21784377098083496},{"id":"https://openalex.org/C201995342","wikidata":"https://www.wikidata.org/wiki/Q682496","display_name":"Systems engineering","level":1,"score":0.11278852820396423},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.08999189734458923},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/codit62066.2024.10708503","is_oa":false,"landing_page_url":"https://doi.org/10.1109/codit62066.2024.10708503","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 10th International Conference on Control, Decision and Information Technologies (CoDIT)","raw_type":"proceedings-article"},{"id":"pmh:oai:www.research.unipd.it:11577/3531201","is_oa":false,"landing_page_url":"https://hdl.handle.net/11577/3531201","pdf_url":null,"source":{"id":"https://openalex.org/S4377196283","display_name":"Research Padua  Archive (University of Padua)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I138689650","host_organization_name":"University of Padua","host_organization_lineage":["https://openalex.org/I138689650"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.5400000214576721,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320334322","display_name":"HORIZON EUROPE Framework Programme","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":30,"referenced_works":["https://openalex.org/W1924770834","https://openalex.org/W2017049928","https://openalex.org/W2064675550","https://openalex.org/W2116512828","https://openalex.org/W2125056386","https://openalex.org/W2194775991","https://openalex.org/W2550143307","https://openalex.org/W2792764867","https://openalex.org/W2802356579","https://openalex.org/W2811120995","https://openalex.org/W2811507150","https://openalex.org/W2905238323","https://openalex.org/W2964198847","https://openalex.org/W2990563145","https://openalex.org/W2997931400","https://openalex.org/W3005231240","https://openalex.org/W3008996014","https://openalex.org/W3009713613","https://openalex.org/W3017116930","https://openalex.org/W3025079747","https://openalex.org/W3084403936","https://openalex.org/W3147314058","https://openalex.org/W3205172848","https://openalex.org/W4312659160","https://openalex.org/W4315778741","https://openalex.org/W4322708947","https://openalex.org/W4390816205","https://openalex.org/W6640212811","https://openalex.org/W6749825310","https://openalex.org/W6982627801"],"related_works":["https://openalex.org/W2570647323","https://openalex.org/W2206805568","https://openalex.org/W2076942471","https://openalex.org/W2863268765","https://openalex.org/W3027285423","https://openalex.org/W2896245927","https://openalex.org/W2953421802","https://openalex.org/W4205879366","https://openalex.org/W1961101704","https://openalex.org/W4205647111"],"abstract_inverted_index":{"Efficient":[0],"decision-making":[1,63],"is":[2],"paramount":[3],"in":[4,8,29,86,129],"manufacturing":[5,20,146],"industries,":[6],"particularly":[7],"sectors":[9],"like":[10],"semiconductor":[11,19,90,145],"manufacturing,":[12],"which":[13],"operate":[14],"within":[15],"high-demand":[16],"environments.":[17],"The":[18],"domain,":[21],"driven":[22],"by":[23],"the":[24,87,108,123,134],"pervasive":[25],"utilization":[26],"of":[27,77,89,126,136],"electronics":[28],"computing":[30],"and":[31,41,61],"sensing":[32],"devices,":[33],"confronts":[34],"escalating":[35],"challenges":[36],"related":[37],"to":[38],"quality":[39],"control":[40],"productivity":[42],"optimization.":[43],"This":[44],"work":[45],"centers":[46],"on":[47],"predicting":[48],"Overall":[49],"Equipment":[50],"Efficiency":[51],"(OEE),":[52],"a":[53,75,111,144],"pivotal":[54],"metric":[55],"for":[56,102],"pinpointing":[57],"production":[58],"efficiency":[59],"hurdles":[60],"refining":[62],"processes.":[64],"Despite":[65],"its":[66,127],"widespread":[67],"adoption":[68],"across":[69],"various":[70],"industrial":[71],"domains,":[72],"there":[73],"exists":[74],"dearth":[76],"literature":[78,85],"concerning":[79],"OEE":[80,103,130],"prediction":[81],"methodologies,":[82],"with":[83,119],"no":[84],"context":[88],"manufacturing.":[91],"In":[92],"this":[93],"work,":[94],"we":[95,106],"propose":[96],"Deep":[97],"Learning-based":[98],"Sequential":[99],"Learning":[100],"approaches":[101],"estimations.":[104],"Specifically,":[105],"employ":[107],"CEEMDAN-GRU":[109],"model,":[110],"deep":[112],"learning":[113],"architecture":[114],"that":[115],"amalgamates":[116],"modeling":[117],"techniques":[118],"signal":[120],"filtering,":[121],"marking":[122],"first":[124],"instance":[125],"application":[128],"prediction.":[131],"We":[132],"assess":[133],"efficacy":[135],"our":[137],"approach":[138],"leveraging":[139],"real-world":[140],"data":[141],"sourced":[142],"from":[143],"facility.":[147]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}