{"id":"https://openalex.org/W2904907849","doi":"https://doi.org/10.1109/coase.2018.8560435","title":"Equipment Deterioration Modeling and Causes Diagnosis in Semiconductor Manufacturing","display_name":"Equipment Deterioration Modeling and Causes Diagnosis in Semiconductor Manufacturing","publication_year":2018,"publication_date":"2018-08-01","ids":{"openalex":"https://openalex.org/W2904907849","doi":"https://doi.org/10.1109/coase.2018.8560435","mag":"2904907849"},"language":"en","primary_location":{"id":"doi:10.1109/coase.2018.8560435","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2018.8560435","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE 14th International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5037906591","display_name":"Hamideh Rostami","orcid":"https://orcid.org/0000-0002-5129-2395"},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Hamideh Rostami","raw_affiliation_strings":["Department of Manufacturing Sciences and Logistics, Center of Microelectronics in Provence, Gardanne, France"],"affiliations":[{"raw_affiliation_string":"Department of Manufacturing Sciences and Logistics, Center of Microelectronics in Provence, Gardanne, France","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030237107","display_name":"Jakey Blue","orcid":"https://orcid.org/0000-0001-7771-4368"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jakey Blue","raw_affiliation_strings":["Department of Manufacturing Sciences and Logistics, Center of Microelectronics in Provence, Gardanne, France"],"affiliations":[{"raw_affiliation_string":"Department of Manufacturing Sciences and Logistics, Center of Microelectronics in Provence, Gardanne, France","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078294576","display_name":"Argon Chen","orcid":"https://orcid.org/0000-0002-7951-9950"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Argon Chen","raw_affiliation_strings":["Graduate Institute of Industrial Engineering, National Taiwan Universiry, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate Institute of Industrial Engineering, National Taiwan Universiry, Taipei, Taiwan","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5084485824","display_name":"Claude Yugma","orcid":"https://orcid.org/0000-0001-7749-0480"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Claude Yugma","raw_affiliation_strings":["Department of Manufacturing Sciences and Logistics, Center of Microelectronics in Provence, Gardanne, France"],"affiliations":[{"raw_affiliation_string":"Department of Manufacturing Sciences and Logistics, Center of Microelectronics in Provence, Gardanne, France","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5037906591"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.1715753,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"28","issue":null,"first_page":"1316","last_page":"1321"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.9891999959945679,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9891999959945679,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.6694447994232178},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.6501818895339966},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5445518493652344},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5405058264732361},{"id":"https://openalex.org/keywords/function","display_name":"Function (biology)","score":0.4539071321487427},{"id":"https://openalex.org/keywords/macro","display_name":"Macro","score":0.4464150667190552},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.4346771240234375},{"id":"https://openalex.org/keywords/production","display_name":"Production (economics)","score":0.4310840666294098},{"id":"https://openalex.org/keywords/condition-monitoring","display_name":"Condition monitoring","score":0.4289478659629822},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.3776368200778961},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3504667580127716},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.2010008692741394},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1213608980178833}],"concepts":[{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.6694447994232178},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.6501818895339966},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5445518493652344},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5405058264732361},{"id":"https://openalex.org/C14036430","wikidata":"https://www.wikidata.org/wiki/Q3736076","display_name":"Function (biology)","level":2,"score":0.4539071321487427},{"id":"https://openalex.org/C166955791","wikidata":"https://www.wikidata.org/wiki/Q629579","display_name":"Macro","level":2,"score":0.4464150667190552},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.4346771240234375},{"id":"https://openalex.org/C2778348673","wikidata":"https://www.wikidata.org/wiki/Q739302","display_name":"Production (economics)","level":2,"score":0.4310840666294098},{"id":"https://openalex.org/C2775846686","wikidata":"https://www.wikidata.org/wiki/Q643012","display_name":"Condition monitoring","level":2,"score":0.4289478659629822},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.3776368200778961},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3504667580127716},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.2010008692741394},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1213608980178833},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C139719470","wikidata":"https://www.wikidata.org/wiki/Q39680","display_name":"Macroeconomics","level":1,"score":0.0},{"id":"https://openalex.org/C78458016","wikidata":"https://www.wikidata.org/wiki/Q840400","display_name":"Evolutionary biology","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/coase.2018.8560435","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2018.8560435","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE 14th International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6100000143051147,"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W94595694","https://openalex.org/W1984040899","https://openalex.org/W2012374927","https://openalex.org/W2027330308","https://openalex.org/W2037325790","https://openalex.org/W2089228033","https://openalex.org/W2118282559","https://openalex.org/W2134146825","https://openalex.org/W2547389789","https://openalex.org/W2612322835","https://openalex.org/W2735560402","https://openalex.org/W2736047415","https://openalex.org/W2791268362","https://openalex.org/W4249490807"],"related_works":["https://openalex.org/W2030816003","https://openalex.org/W4239992647","https://openalex.org/W2150013480","https://openalex.org/W1554458299","https://openalex.org/W81423522","https://openalex.org/W1509860481","https://openalex.org/W2488264085","https://openalex.org/W2076325756","https://openalex.org/W2992897358","https://openalex.org/W2631724279"],"abstract_inverted_index":{"Semiconductor":[0],"equipment,":[1],"which":[2],"serves":[3],"as":[4,157],"the":[5,10,22,25,38,54,68,75,92,98,113,119,146,150,158,165,177,182,189,194],"most":[6],"expensive":[7],"asset":[8],"in":[9,72,91],"industry,":[11],"is":[12,47,62,109,153,185],"expected":[13],"to":[14,37,50,64,117],"function":[15],"efficiently":[16],"and":[17,52,66,89,104,124,136,155,192],"produce":[18],"qualified":[19],"wafers.":[20],"As":[21],"tech-node":[23],"advances,":[24],"equipment":[26,39,55,69,78,85,101,159,195],"utilization":[27],"becomes":[28],"even":[29],"more":[30],"critical":[31],"because":[32],"any":[33],"faulty":[34],"events":[35],"occurred":[36],"will":[40,140],"cause":[41],"enormous":[42],"cost.":[43],"Condition-based":[44],"Monitoring":[45],"(CBM)":[46],"practically":[48],"used":[49],"model":[51,65],"monitor":[53,67],"condition":[56],"for":[57,106,164],"better":[58],"production":[59],"efficiency.":[60],"It":[61],"essential":[63],"behavior":[70],"effectively":[71],"CBM.":[73],"In":[74,95],"prognostic":[76],"aspect,":[77],"deterioration":[79,102,166],"can":[80],"be":[81,141],"traced":[82],"while":[83],"unexpected":[84],"faults":[86],"are":[87,167],"detected":[88],"investigated":[90],"diagnostic":[93],"part.":[94],"this":[96],"research,":[97],"framework":[99],"of":[100,131,145,149,176,187],"modeling":[103],"monitoring":[105],"batch":[107],"processes":[108],"proposed.":[110],"Through":[111],"using":[112],"wavelet":[114],"packet":[115],"decomposition":[116],"transform":[118],"temporal":[120],"data":[121],"into":[122],"macro":[123],"micro":[125],"level":[126],"domains,":[127],"two":[128],"different":[129],"types":[130],"deterioration:":[132],"shifted":[133],"process":[134],"pattern":[135],"nonstationary":[137],"noise":[138],"variation,":[139],"captured.":[142],"The":[143,161,174],"determinant":[144],"correlation":[147],"matrix":[148],"decomposed":[151],"signals":[152],"calculated":[154],"treated":[156],"condition.":[160],"accountable":[162],"factors":[163,191],"pinpointed":[168],"through":[169],"a":[170],"stepwise":[171],"searching":[172],"algorithm.":[173],"results":[175],"case":[178],"study":[179],"show":[180],"that":[181],"proposed":[183],"methodology":[184],"capable":[186],"identifying":[188],"responsible":[190],"forming":[193],"deterioration.":[196]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}