{"id":"https://openalex.org/W2045914271","doi":"https://doi.org/10.1109/coase.2013.6653952","title":"A predictive maintenance system for integral type faults based on support vector machines: An application to ion implantation","display_name":"A predictive maintenance system for integral type faults based on support vector machines: An application to ion implantation","publication_year":2013,"publication_date":"2013-08-01","ids":{"openalex":"https://openalex.org/W2045914271","doi":"https://doi.org/10.1109/coase.2013.6653952","mag":"2045914271"},"language":"en","primary_location":{"id":"doi:10.1109/coase.2013.6653952","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2013.6653952","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 IEEE International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5026617079","display_name":"Gian Antonio Susto","orcid":"https://orcid.org/0000-0001-5739-9639"},"institutions":[{"id":"https://openalex.org/I138689650","display_name":"University of Padua","ror":"https://ror.org/00240q980","country_code":"IT","type":"education","lineage":["https://openalex.org/I138689650"]},{"id":"https://openalex.org/I157286207","display_name":"National University of Ireland, Maynooth","ror":"https://ror.org/048nfjm95","country_code":"IE","type":"education","lineage":["https://openalex.org/I157286207"]}],"countries":["IE","IT"],"is_corresponding":false,"raw_author_name":"Gian Antonio Susto","raw_affiliation_strings":["National University of Ireland, Maynooth","Department of Information Engineering, University of Padova , Padua, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National University of Ireland, Maynooth","institution_ids":["https://openalex.org/I157286207"]},{"raw_affiliation_string":"Department of Information Engineering, University of Padova , Padua, Italy","institution_ids":["https://openalex.org/I138689650"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081650242","display_name":"Andrea Schirru","orcid":"https://orcid.org/0000-0002-9249-1227"},"institutions":[{"id":"https://openalex.org/I138689650","display_name":"University of Padua","ror":"https://ror.org/00240q980","country_code":"IT","type":"education","lineage":["https://openalex.org/I138689650"]},{"id":"https://openalex.org/I25217355","display_name":"University of Pavia","ror":"https://ror.org/00s6t1f81","country_code":"IT","type":"education","lineage":["https://openalex.org/I25217355"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Andrea Schirru","raw_affiliation_strings":["Department of Information Engineering, University of Padova, Italy","Dept. of Computer Engineering and Systems Science, University of Pavia, Pavia, Italy#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Information Engineering, University of Padova, Italy","institution_ids":["https://openalex.org/I138689650"]},{"raw_affiliation_string":"Dept. of Computer Engineering and Systems Science, University of Pavia, Pavia, Italy#TAB#","institution_ids":["https://openalex.org/I25217355"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061018928","display_name":"Simone Pampuri","orcid":"https://orcid.org/0000-0002-0582-9892"},"institutions":[{"id":"https://openalex.org/I138689650","display_name":"University of Padua","ror":"https://ror.org/00240q980","country_code":"IT","type":"education","lineage":["https://openalex.org/I138689650"]},{"id":"https://openalex.org/I25217355","display_name":"University of Pavia","ror":"https://ror.org/00s6t1f81","country_code":"IT","type":"education","lineage":["https://openalex.org/I25217355"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Simone Pampuri","raw_affiliation_strings":["Department of Information Engineering, University of Padova, Italy","Dept. of Computer Engineering and Systems Science, University of Pavia, Pavia, Italy#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Information Engineering, University of Padova, Italy","institution_ids":["https://openalex.org/I138689650"]},{"raw_affiliation_string":"Dept. of Computer Engineering and Systems Science, University of Pavia, Pavia, Italy#TAB#","institution_ids":["https://openalex.org/I25217355"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087350070","display_name":"Daniele Pagano","orcid":"https://orcid.org/0000-0003-4070-454X"},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Daniele Pagano","raw_affiliation_strings":["STMicroelectronics, Catania, Italy","STMicroelectron., Catania, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics, Catania, Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectron., Catania, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005974306","display_name":"Se\u00e1n McLoone","orcid":"https://orcid.org/0000-0002-3016-6197"},"institutions":[{"id":"https://openalex.org/I157286207","display_name":"National University of Ireland, Maynooth","ror":"https://ror.org/048nfjm95","country_code":"IE","type":"education","lineage":["https://openalex.org/I157286207"]}],"countries":["IE"],"is_corresponding":false,"raw_author_name":"Sean McLoone","raw_affiliation_strings":["National University of Ireland Maynooth, Queen's University of Belfast, United Kingdom","National University of Ireland Maynooth, Ireland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National University of Ireland Maynooth, Queen's University of Belfast, United Kingdom","institution_ids":["https://openalex.org/I157286207"]},{"raw_affiliation_string":"National University of Ireland Maynooth, Ireland","institution_ids":["https://openalex.org/I157286207"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5043391732","display_name":"Alessandro Beghi","orcid":"https://orcid.org/0000-0003-2252-2179"},"institutions":[{"id":"https://openalex.org/I138689650","display_name":"University of Padua","ror":"https://ror.org/00240q980","country_code":"IT","type":"education","lineage":["https://openalex.org/I138689650"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Alessandro Beghi","raw_affiliation_strings":["Department of Information Engineering, University of Padova, Italy","Department of Information Engineering, University of Padova , Padua, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Information Engineering, University of Padova, Italy","institution_ids":["https://openalex.org/I138689650"]},{"raw_affiliation_string":"Department of Information Engineering, University of Padova , Padua, Italy","institution_ids":["https://openalex.org/I138689650"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.5069,"has_fulltext":false,"cited_by_count":30,"citation_normalized_percentile":{"value":0.85002498,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"195","last_page":"200"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.9909999966621399,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/downtime","display_name":"Downtime","score":0.9133193492889404},{"id":"https://openalex.org/keywords/predictive-maintenance","display_name":"Predictive maintenance","score":0.6745790839195251},{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.621494472026825},{"id":"https://openalex.org/keywords/support-vector-machine","display_name":"Support vector machine","score":0.6150311827659607},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.5978575944900513},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.550715446472168},{"id":"https://openalex.org/keywords/maintenance-engineering","display_name":"Maintenance engineering","score":0.515598475933075},{"id":"https://openalex.org/keywords/fault","display_name":"Fault (geology)","score":0.42824414372444153},{"id":"https://openalex.org/keywords/condition-monitoring","display_name":"Condition monitoring","score":0.423959881067276},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3306218981742859},{"id":"https://openalex.org/keywords/machine-learning","display_name":"Machine learning","score":0.24270886182785034},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.09476613998413086}],"concepts":[{"id":"https://openalex.org/C180591934","wikidata":"https://www.wikidata.org/wiki/Q1253369","display_name":"Downtime","level":2,"score":0.9133193492889404},{"id":"https://openalex.org/C70452415","wikidata":"https://www.wikidata.org/wiki/Q3182448","display_name":"Predictive maintenance","level":2,"score":0.6745790839195251},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.621494472026825},{"id":"https://openalex.org/C12267149","wikidata":"https://www.wikidata.org/wiki/Q282453","display_name":"Support vector machine","level":2,"score":0.6150311827659607},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.5978575944900513},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.550715446472168},{"id":"https://openalex.org/C23725684","wikidata":"https://www.wikidata.org/wiki/Q616377","display_name":"Maintenance engineering","level":2,"score":0.515598475933075},{"id":"https://openalex.org/C175551986","wikidata":"https://www.wikidata.org/wiki/Q47089","display_name":"Fault (geology)","level":2,"score":0.42824414372444153},{"id":"https://openalex.org/C2775846686","wikidata":"https://www.wikidata.org/wiki/Q643012","display_name":"Condition monitoring","level":2,"score":0.423959881067276},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3306218981742859},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.24270886182785034},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.09476613998413086},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C165205528","wikidata":"https://www.wikidata.org/wiki/Q83371","display_name":"Seismology","level":1,"score":0.0},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/coase.2013.6653952","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2013.6653952","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 IEEE International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"},{"id":"pmh:oai:pure.qub.ac.uk/portal:publications/de46d464-ba39-4d06-b5e2-59587df5f4ce","is_oa":false,"landing_page_url":"https://pure.qub.ac.uk/en/publications/de46d464-ba39-4d06-b5e2-59587df5f4ce","pdf_url":null,"source":{"id":"https://openalex.org/S4306402319","display_name":"Research Portal (Queen's University Belfast)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I126231945","host_organization_name":"Queen's University Belfast","host_organization_lineage":["https://openalex.org/I126231945"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Susto , G A , Schirru , A , Pampuri , S , Pagano , D , McLoone , S & Beghi , A 2013 , A predictive maintenance system for integral type faults based on support vector machines : An application to ion implantation . in IEEE International Conference on Automation Science and Engineering . , 6653952 , pp. 195-200 , 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013 , Madison , United States , 17/08/2013 . https://doi.org/10.1109/CoASE.2013.6653952","raw_type":"contributionToPeriodical"},{"id":"pmh:oai:www.research.unipd.it:11577/2795757","is_oa":false,"landing_page_url":"http://hdl.handle.net/11577/2795757","pdf_url":null,"source":{"id":"https://openalex.org/S4306402547","display_name":"Padua Research Archive (University of Padova)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I138689650","host_organization_name":"University of Padua","host_organization_lineage":["https://openalex.org/I138689650"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6200000047683716,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":26,"referenced_works":["https://openalex.org/W1480376833","https://openalex.org/W1528620860","https://openalex.org/W1596717185","https://openalex.org/W1965833531","https://openalex.org/W1977471222","https://openalex.org/W1993382184","https://openalex.org/W2006825483","https://openalex.org/W2021816127","https://openalex.org/W2033872649","https://openalex.org/W2034243637","https://openalex.org/W2044166666","https://openalex.org/W2077562320","https://openalex.org/W2095971510","https://openalex.org/W2105355692","https://openalex.org/W2116511687","https://openalex.org/W2120130912","https://openalex.org/W2148922589","https://openalex.org/W2151252797","https://openalex.org/W2169815324","https://openalex.org/W2171789818","https://openalex.org/W2336000173","https://openalex.org/W4253511749","https://openalex.org/W4298304654","https://openalex.org/W6628633436","https://openalex.org/W6703532998","https://openalex.org/W7073604306"],"related_works":["https://openalex.org/W3114992894","https://openalex.org/W2979318440","https://openalex.org/W2559035939","https://openalex.org/W3000962958","https://openalex.org/W2907568933","https://openalex.org/W2160990251","https://openalex.org/W2090362966","https://openalex.org/W2337340294","https://openalex.org/W2391563149","https://openalex.org/W2045914271"],"abstract_inverted_index":{"In":[0],"semiconductor":[1,100],"fabrication":[2],"processes,":[3],"effective":[4],"management":[5],"of":[6,56,64,74,106,112],"maintenance":[7,97],"operations":[8],"is":[9],"fundamental":[10],"to":[11,69,94],"decrease":[12],"costs":[13],"associated":[14],"with":[15],"failures":[16,65],"and":[17,27,37,72],"downtime.":[18],"Predictive":[19],"Maintenance":[20],"(PdM)":[21],"approaches,":[22],"based":[23,49],"on":[24,50,120],"statistical":[25],"methods":[26],"historical":[28],"data,":[29],"are":[30],"becoming":[31],"popular":[32],"for":[33,54],"their":[34],"predictive":[35],"capabilities":[36],"low":[38],"(potentially":[39],"zero)":[40],"added":[41],"costs.":[42],"We":[43],"present":[44],"here":[45],"a":[46,85,95,121],"PdM":[47,116],"module":[48,79,90],"Support":[51],"Vector":[52],"Machines":[53],"prediction":[55],"integral":[57],"type":[58],"faults,":[59],"that":[60,66],"is,":[61],"the":[62,104,107,110],"kind":[63],"happen":[67],"due":[68],"machine":[70],"usage":[71],"stress":[73],"equipment":[75],"parts.":[76],"The":[77,89,115],"proposed":[78],"may":[80],"also":[81],"be":[82],"employed":[83],"as":[84],"health":[86],"factor":[87],"indicator.":[88],"has":[91,117],"been":[92,118],"applied":[93],"frequent":[96],"problem":[98],"in":[99,109],"manufacturing":[101],"industry,":[102],"namely":[103],"breaking":[105],"filament":[108],"ion-source":[111],"ion-implantation":[113],"tools.":[114],"tested":[119],"real":[122],"production":[123],"dataset.":[124]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2024,"cited_by_count":6},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":6},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2}],"updated_date":"2026-07-02T09:51:11.867554","created_date":"2025-10-10T00:00:00"}