{"id":"https://openalex.org/W1964744866","doi":"https://doi.org/10.1109/coase.2012.6386510","title":"Treatment of missing values for association rule-based tool commonality analysis in semiconductor manufacturing","display_name":"Treatment of missing values for association rule-based tool commonality analysis in semiconductor manufacturing","publication_year":2012,"publication_date":"2012-08-01","ids":{"openalex":"https://openalex.org/W1964744866","doi":"https://doi.org/10.1109/coase.2012.6386510","mag":"1964744866"},"language":"en","primary_location":{"id":"doi:10.1109/coase.2012.6386510","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2012.6386510","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 IEEE International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5066090325","display_name":"Rong-Huei Chen","orcid":"https://orcid.org/0000-0002-8717-2838"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Rong-Huei Chen","raw_affiliation_strings":["Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan","Department of Electrical Engineering, National Taiwan University, No.1, Sec. 4, Roosevelt Road, Taipei, Taiwan, R.O.C"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]},{"raw_affiliation_string":"Department of Electrical Engineering, National Taiwan University, No.1, Sec. 4, Roosevelt Road, Taipei, Taiwan, R.O.C","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5061951715","display_name":"Chih-Ming Fan","orcid":null},"institutions":[{"id":"https://openalex.org/I99908691","display_name":"Yuan Ze University","ror":"https://ror.org/01fv1ds98","country_code":"TW","type":"education","lineage":["https://openalex.org/I99908691"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chih-Ming Fan","raw_affiliation_strings":["Department of Industrial Engineering and Management, Yuan Ze University, Taoyuan, Taiwan","Department of Industrial Engineering and Management, Yuan Ze University, 135, Yuan-Tung Road, Chungli, Taoyuan, Taiwan, R.O.C"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering and Management, Yuan Ze University, Taoyuan, Taiwan","institution_ids":["https://openalex.org/I99908691"]},{"raw_affiliation_string":"Department of Industrial Engineering and Management, Yuan Ze University, 135, Yuan-Tung Road, Chungli, Taoyuan, Taiwan, R.O.C","institution_ids":["https://openalex.org/I99908691"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":3.7945,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.92133098,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"886","last_page":"891"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9900000095367432,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.963100016117096,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/missing-data","display_name":"Missing data","score":0.6656423807144165},{"id":"https://openalex.org/keywords/identification","display_name":"Identification (biology)","score":0.5866720080375671},{"id":"https://openalex.org/keywords/markov-chain","display_name":"Markov chain","score":0.5794480443000793},{"id":"https://openalex.org/keywords/probabilistic-logic","display_name":"Probabilistic logic","score":0.5732991099357605},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.5548596382141113},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.535478949546814},{"id":"https://openalex.org/keywords/convergence","display_name":"Convergence (economics)","score":0.5299219489097595},{"id":"https://openalex.org/keywords/data-mining","display_name":"Data mining","score":0.48490840196609497},{"id":"https://openalex.org/keywords/association-rule-learning","display_name":"Association rule learning","score":0.48064175248146057},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.42897123098373413},{"id":"https://openalex.org/keywords/bayesian-probability","display_name":"Bayesian probability","score":0.42795929312705994},{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.33054065704345703},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.2756462097167969},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2634463310241699},{"id":"https://openalex.org/keywords/machine-learning","display_name":"Machine learning","score":0.22792384028434753}],"concepts":[{"id":"https://openalex.org/C9357733","wikidata":"https://www.wikidata.org/wiki/Q6878417","display_name":"Missing data","level":2,"score":0.6656423807144165},{"id":"https://openalex.org/C116834253","wikidata":"https://www.wikidata.org/wiki/Q2039217","display_name":"Identification (biology)","level":2,"score":0.5866720080375671},{"id":"https://openalex.org/C98763669","wikidata":"https://www.wikidata.org/wiki/Q176645","display_name":"Markov chain","level":2,"score":0.5794480443000793},{"id":"https://openalex.org/C49937458","wikidata":"https://www.wikidata.org/wiki/Q2599292","display_name":"Probabilistic logic","level":2,"score":0.5732991099357605},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.5548596382141113},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.535478949546814},{"id":"https://openalex.org/C2777303404","wikidata":"https://www.wikidata.org/wiki/Q759757","display_name":"Convergence (economics)","level":2,"score":0.5299219489097595},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.48490840196609497},{"id":"https://openalex.org/C193524817","wikidata":"https://www.wikidata.org/wiki/Q386780","display_name":"Association rule learning","level":2,"score":0.48064175248146057},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.42897123098373413},{"id":"https://openalex.org/C107673813","wikidata":"https://www.wikidata.org/wiki/Q812534","display_name":"Bayesian probability","level":2,"score":0.42795929312705994},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.33054065704345703},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.2756462097167969},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2634463310241699},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.22792384028434753},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.0},{"id":"https://openalex.org/C59822182","wikidata":"https://www.wikidata.org/wiki/Q441","display_name":"Botany","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C50522688","wikidata":"https://www.wikidata.org/wiki/Q189833","display_name":"Economic growth","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/coase.2012.6386510","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2012.6386510","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 IEEE International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6299999952316284,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W1712463113","https://openalex.org/W2007480051","https://openalex.org/W2158758163","https://openalex.org/W2160565072","https://openalex.org/W4212997602","https://openalex.org/W6637446097"],"related_works":["https://openalex.org/W4380150146","https://openalex.org/W3024870410","https://openalex.org/W2410652950","https://openalex.org/W4283773154","https://openalex.org/W3139174110","https://openalex.org/W4289597203","https://openalex.org/W2085630472","https://openalex.org/W1977098485","https://openalex.org/W4285201053","https://openalex.org/W2753779043"],"abstract_inverted_index":{"In":[0],"semiconductor":[1],"manufacturing,":[2],"there":[3],"are":[4],"hundreds":[5],"of":[6,62,65,99,113],"processing":[7],"steps":[8],"with":[9,117],"multiple":[10],"tools":[11],"at":[12],"most":[13],"steps.":[14],"Association":[15],"rule-based":[16,58,101],"tool":[17,30],"commonality":[18],"analysis":[19],"(TCA)":[20],"is":[21,90],"believed":[22],"to":[23,28,48,95,108,145],"be":[24],"an":[25,105],"effective":[26],"approach":[27,107],"identify":[29],"excursions":[31],"for":[32,141],"yield":[33,66],"enhancement.":[34],"However,":[35],"we":[36],"found":[37],"that":[38,135],"missing":[39,115,143],"values":[40,144],"frequently":[41],"occurred":[42],"in":[43,56,92,150],"industry":[44],"practice":[45],"will":[46],"lead":[47],"high":[49],"false":[50,53],"positive":[51],"and":[52],"negative":[54],"rates":[55],"association":[57,100],"TCA.":[59,102,151],"Incorrect":[60],"identification":[61,148],"root":[63],"cause":[64],"loss":[67],"not":[68],"only":[69],"loses":[70],"engineer's":[71],"trust":[72],"on":[73],"TCA":[74],"but":[75],"also":[76],"delays":[77],"the":[78,97,110,114,118,147],"process":[79],"improvement":[80],"opportunity.":[81],"A":[82],"Markov-chain":[83],"based":[84],"Missing":[85],"Value":[86],"Estimation":[87],"(MC-MVE)":[88],"method":[89],"proposed":[91],"this":[93],"paper":[94],"improve":[96,146],"effectiveness":[98],"MC-MVE":[103,136],"adopts":[104],"iterative":[106],"estimate":[109],"probabilistic":[111],"state":[112,119],"values,":[116],"transition":[120],"probability":[121],"derived":[122],"by":[123],"a":[124,138],"Bernoulli":[125],"distribution,":[126],"until":[127],"convergence":[128],"criteria.":[129],"The":[130],"real":[131],"case":[132],"study":[133],"shows":[134],"has":[137],"better":[139],"accuracy":[140,149],"recovering":[142]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2012,"cited_by_count":2}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}