{"id":"https://openalex.org/W2038331364","doi":"https://doi.org/10.1109/coase.2012.6386390","title":"A model reference adaptive PID control for electromagnetic actuated micro-positioning stage","display_name":"A model reference adaptive PID control for electromagnetic actuated micro-positioning stage","publication_year":2012,"publication_date":"2012-08-01","ids":{"openalex":"https://openalex.org/W2038331364","doi":"https://doi.org/10.1109/coase.2012.6386390","mag":"2038331364"},"language":"en","primary_location":{"id":"doi:10.1109/coase.2012.6386390","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2012.6386390","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 IEEE International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5079139355","display_name":"Shunli Xiao","orcid":null},"institutions":[{"id":"https://openalex.org/I204512498","display_name":"University of Macau","ror":"https://ror.org/01r4q9n85","country_code":"MO","type":"education","lineage":["https://openalex.org/I204512498"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"Shunli Xiao","raw_affiliation_strings":["Department of Electromechanical Engineering, University of Macau, Taipa, Macao, China","Department of Electromechanical Engineering, University of Macau, Taipa, Macao 999078, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electromechanical Engineering, University of Macau, Taipa, Macao, China","institution_ids":["https://openalex.org/I204512498"]},{"raw_affiliation_string":"Department of Electromechanical Engineering, University of Macau, Taipa, Macao 999078, China","institution_ids":["https://openalex.org/I204512498"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027712402","display_name":"Yangmin Li","orcid":"https://orcid.org/0000-0002-4448-3310"},"institutions":[{"id":"https://openalex.org/I142078773","display_name":"Shenyang Institute of Automation","ror":"https://ror.org/00ft6nj33","country_code":"CN","type":"facility","lineage":["https://openalex.org/I142078773","https://openalex.org/I19820366"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yangmin Li","raw_affiliation_strings":["State Key Laboratory Robotics of Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China","State Key Laboratory of Robotics of Shenyang Institute of Automation, Chinese Academy of Sciences, 110016, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory Robotics of Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China","institution_ids":["https://openalex.org/I142078773"]},{"raw_affiliation_string":"State Key Laboratory of Robotics of Shenyang Institute of Automation, Chinese Academy of Sciences, 110016, China","institution_ids":["https://openalex.org/I142078773","https://openalex.org/I19820366"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5060877237","display_name":"Jinguo Liu","orcid":"https://orcid.org/0000-0002-6790-6582"},"institutions":[{"id":"https://openalex.org/I142078773","display_name":"Shenyang Institute of Automation","ror":"https://ror.org/00ft6nj33","country_code":"CN","type":"facility","lineage":["https://openalex.org/I142078773","https://openalex.org/I19820366"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jinguo Liu","raw_affiliation_strings":["State Key Laboratory Robotics of Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China","State Key Laboratory of Robotics of Shenyang Institute of Automation, Chinese Academy of Sciences, 110016, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory Robotics of Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China","institution_ids":["https://openalex.org/I142078773"]},{"raw_affiliation_string":"State Key Laboratory of Robotics of Shenyang Institute of Automation, Chinese Academy of Sciences, 110016, China","institution_ids":["https://openalex.org/I142078773","https://openalex.org/I19820366"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":3.93,"has_fulltext":false,"cited_by_count":27,"citation_normalized_percentile":{"value":0.93442247,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"97","last_page":"102"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9975000023841858,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.7741658091545105},{"id":"https://openalex.org/keywords/pid-controller","display_name":"PID controller","score":0.7226768732070923},{"id":"https://openalex.org/keywords/robustness","display_name":"Robustness (evolution)","score":0.6320470571517944},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.599268913269043},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.5900806188583374},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.506527304649353},{"id":"https://openalex.org/keywords/reference-model","display_name":"Reference model","score":0.4961174428462982},{"id":"https://openalex.org/keywords/decoupling","display_name":"Decoupling (probability)","score":0.4745638966560364},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4728691279888153},{"id":"https://openalex.org/keywords/adaptive-control","display_name":"Adaptive control","score":0.4546447694301605},{"id":"https://openalex.org/keywords/kinematics","display_name":"Kinematics","score":0.4319555163383484},{"id":"https://openalex.org/keywords/control-system","display_name":"Control system","score":0.41400620341300964},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.35926273465156555},{"id":"https://openalex.org/keywords/temperature-control","display_name":"Temperature control","score":0.1289847195148468},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.08113595843315125},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.07409358024597168}],"concepts":[{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.7741658091545105},{"id":"https://openalex.org/C47116090","wikidata":"https://www.wikidata.org/wiki/Q716829","display_name":"PID controller","level":3,"score":0.7226768732070923},{"id":"https://openalex.org/C63479239","wikidata":"https://www.wikidata.org/wiki/Q7353546","display_name":"Robustness (evolution)","level":3,"score":0.6320470571517944},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.599268913269043},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.5900806188583374},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.506527304649353},{"id":"https://openalex.org/C150189527","wikidata":"https://www.wikidata.org/wiki/Q356674","display_name":"Reference model","level":2,"score":0.4961174428462982},{"id":"https://openalex.org/C205606062","wikidata":"https://www.wikidata.org/wiki/Q5249645","display_name":"Decoupling (probability)","level":2,"score":0.4745638966560364},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4728691279888153},{"id":"https://openalex.org/C107464732","wikidata":"https://www.wikidata.org/wiki/Q235781","display_name":"Adaptive control","level":3,"score":0.4546447694301605},{"id":"https://openalex.org/C39920418","wikidata":"https://www.wikidata.org/wiki/Q11476","display_name":"Kinematics","level":2,"score":0.4319555163383484},{"id":"https://openalex.org/C17500928","wikidata":"https://www.wikidata.org/wiki/Q959968","display_name":"Control system","level":2,"score":0.41400620341300964},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.35926273465156555},{"id":"https://openalex.org/C536315585","wikidata":"https://www.wikidata.org/wiki/Q7698332","display_name":"Temperature control","level":2,"score":0.1289847195148468},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.08113595843315125},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07409358024597168},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C115903868","wikidata":"https://www.wikidata.org/wiki/Q80993","display_name":"Software engineering","level":1,"score":0.0},{"id":"https://openalex.org/C104317684","wikidata":"https://www.wikidata.org/wiki/Q7187","display_name":"Gene","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/coase.2012.6386390","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2012.6386390","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 IEEE International Conference on Automation Science and Engineering (CASE)","raw_type":"proceedings-article"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.721.2583","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.721.2583","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://www.cis.umac.mo/%7Eyangmin/conferencepdf/C12-3-Xiao-Li-Liu-CASE.pdf","raw_type":"text"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.7200000286102295}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1985654547","https://openalex.org/W2010801461","https://openalex.org/W2073617009","https://openalex.org/W2102055426","https://openalex.org/W2108816037","https://openalex.org/W2113433722","https://openalex.org/W2137144825","https://openalex.org/W2159820064","https://openalex.org/W2167680182","https://openalex.org/W2168710540","https://openalex.org/W2171612630"],"related_works":["https://openalex.org/W2901382198","https://openalex.org/W2109400456","https://openalex.org/W27887875","https://openalex.org/W4289256535","https://openalex.org/W2106703520","https://openalex.org/W2095201550","https://openalex.org/W3028734724","https://openalex.org/W2147485651","https://openalex.org/W2076207321","https://openalex.org/W2673611817"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,11,104],"model":[4,74,89,105],"reference":[5,75,106,154],"adaptive":[6,76,107],"PID":[7,56,108],"controller":[8,57,109,144],"for":[9,134],"controlling":[10,135],"novel":[12],"compliant":[13],"flexures-based":[14],"XY":[15],"micro-positioning":[16,137],"stage":[17,23,149],"driven":[18],"by":[19,27],"electromagnetic":[20,36],"actuators.":[21],"The":[22],"is":[24,66,93,112],"specially":[25],"designed":[26,94],"employing":[28],"double":[29],"four-bar":[30],"parallelogram":[31],"flexures":[32],"and":[33,44,54,70,88,95,125],"four":[34],"non-contact":[35],"force":[37,45],"actuators":[38],"to":[39,82,97,150],"realize":[40],"the":[41,64,99,132,136,142,147,152],"kinematic":[42],"decoupling":[43,46],"respectively.":[47],"Based":[48],"on":[49,121],"preliminary":[50],"open":[51],"loop":[52],"experiments":[53],"simple":[55],"based":[58,120],"close-loop":[59],"experiments,":[60],"we":[61],"found":[62],"that":[63,141],"system":[65],"with":[67],"typical":[68],"hysteresis":[69],"nonlinear":[71,87],"characteristics.":[72],"As":[73],"control":[77,98,115],"techniques":[78],"possess":[79],"great":[80],"advantages":[81],"tackle":[83],"robustness":[84],"issues":[85],"of":[86],"uncertainty":[90],"systems,":[91],"it":[92],"adopted":[96,143],"micro-manipulator":[100],"system.":[101],"At":[102,127],"first,":[103],"design":[110],"process":[111,133],"introduced.":[113],"Then":[114],"parameters":[116],"are":[117],"systematically":[118],"tuned":[119],"intuitive":[122],"desired":[123,153],"performance":[124],"robustness.":[126],"last,":[128],"experimental":[129],"results":[130],"verify":[131],"stage,":[138],"which":[139],"shows":[140],"can":[145],"drive":[146],"mobile":[148],"track":[151],"path":[155],"exactly.":[156]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":8},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":3},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":3}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}