{"id":"https://openalex.org/W1967026525","doi":"https://doi.org/10.1109/coase.2010.5584562","title":"An open scheduling architecture for cluster tools","display_name":"An open scheduling architecture for cluster tools","publication_year":2010,"publication_date":"2010-08-01","ids":{"openalex":"https://openalex.org/W1967026525","doi":"https://doi.org/10.1109/coase.2010.5584562","mag":"1967026525"},"language":"en","primary_location":{"id":"doi:10.1109/coase.2010.5584562","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2010.5584562","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE International Conference on Automation Science and Engineering","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100366235","display_name":"Jun-Ho Lee","orcid":"https://orcid.org/0000-0001-7693-8896"},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Jun-Ho Lee","raw_affiliation_strings":["Department of Industrial and Systems Engineering, Korea Advanced Institute of Science and Technology, Taejon, South Korea","Department of Industrial and Systems Engineering, Korea Advanced Institute of Science and Technology, (KAIST), Taejon 305-701, Korea"],"affiliations":[{"raw_affiliation_string":"Department of Industrial and Systems Engineering, Korea Advanced Institute of Science and Technology, Taejon, South Korea","institution_ids":["https://openalex.org/I157485424"]},{"raw_affiliation_string":"Department of Industrial and Systems Engineering, Korea Advanced Institute of Science and Technology, (KAIST), Taejon 305-701, Korea","institution_ids":["https://openalex.org/I157485424"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5014167840","display_name":"Tae\u2010Eog Lee","orcid":"https://orcid.org/0000-0003-0885-6359"},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Tae-Eog Lee","raw_affiliation_strings":["Department of Industrial and Systems Engineering, Korea Advanced Institute of Science and Technology, Taejon, South Korea","Department of Industrial and Systems Engineering, Korea Advanced Institute of Science and Technology, (KAIST), Taejon 305-701, Korea"],"affiliations":[{"raw_affiliation_string":"Department of Industrial and Systems Engineering, Korea Advanced Institute of Science and Technology, Taejon, South Korea","institution_ids":["https://openalex.org/I157485424"]},{"raw_affiliation_string":"Department of Industrial and Systems Engineering, Korea Advanced Institute of Science and Technology, (KAIST), Taejon 305-701, Korea","institution_ids":["https://openalex.org/I157485424"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5100366235"],"corresponding_institution_ids":["https://openalex.org/I157485424"],"apc_list":null,"apc_paid":null,"fwci":3.6798,"has_fulltext":false,"cited_by_count":14,"citation_normalized_percentile":{"value":0.92660835,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11125","display_name":"Petri Nets in System Modeling","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/1703","display_name":"Computational Theory and Mathematics"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11125","display_name":"Petri Nets in System Modeling","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/1703","display_name":"Computational Theory and Mathematics"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11741","display_name":"Flexible and Reconfigurable Manufacturing Systems","score":0.9969000220298767,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.8095578551292419},{"id":"https://openalex.org/keywords/two-level-scheduling","display_name":"Two-level scheduling","score":0.6021984219551086},{"id":"https://openalex.org/keywords/fair-share-scheduling","display_name":"Fair-share scheduling","score":0.5697937607765198},{"id":"https://openalex.org/keywords/distributed-computing","display_name":"Distributed computing","score":0.5470772385597229},{"id":"https://openalex.org/keywords/dynamic-priority-scheduling","display_name":"Dynamic priority scheduling","score":0.5448694825172424},{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.5238585472106934},{"id":"https://openalex.org/keywords/fixed-priority-pre-emptive-scheduling","display_name":"Fixed-priority pre-emptive scheduling","score":0.5063959360122681},{"id":"https://openalex.org/keywords/earliest-deadline-first-scheduling","display_name":"Earliest deadline first scheduling","score":0.4119825065135956},{"id":"https://openalex.org/keywords/rate-monotonic-scheduling","display_name":"Rate-monotonic scheduling","score":0.4092344045639038},{"id":"https://openalex.org/keywords/operating-system","display_name":"Operating system","score":0.27001869678497314},{"id":"https://openalex.org/keywords/schedule","display_name":"Schedule","score":0.13854816555976868},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1112213134765625}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.8095578551292419},{"id":"https://openalex.org/C119948110","wikidata":"https://www.wikidata.org/wiki/Q7858726","display_name":"Two-level scheduling","level":4,"score":0.6021984219551086},{"id":"https://openalex.org/C31689143","wikidata":"https://www.wikidata.org/wiki/Q733809","display_name":"Fair-share scheduling","level":3,"score":0.5697937607765198},{"id":"https://openalex.org/C120314980","wikidata":"https://www.wikidata.org/wiki/Q180634","display_name":"Distributed computing","level":1,"score":0.5470772385597229},{"id":"https://openalex.org/C107568181","wikidata":"https://www.wikidata.org/wiki/Q5319000","display_name":"Dynamic priority scheduling","level":3,"score":0.5448694825172424},{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.5238585472106934},{"id":"https://openalex.org/C122141398","wikidata":"https://www.wikidata.org/wiki/Q5456330","display_name":"Fixed-priority pre-emptive scheduling","level":5,"score":0.5063959360122681},{"id":"https://openalex.org/C32310161","wikidata":"https://www.wikidata.org/wiki/Q666365","display_name":"Earliest deadline first scheduling","level":5,"score":0.4119825065135956},{"id":"https://openalex.org/C127456818","wikidata":"https://www.wikidata.org/wiki/Q238879","display_name":"Rate-monotonic scheduling","level":4,"score":0.4092344045639038},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.27001869678497314},{"id":"https://openalex.org/C68387754","wikidata":"https://www.wikidata.org/wiki/Q7271585","display_name":"Schedule","level":2,"score":0.13854816555976868},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1112213134765625},{"id":"https://openalex.org/C21547014","wikidata":"https://www.wikidata.org/wiki/Q1423657","display_name":"Operations management","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/coase.2010.5584562","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2010.5584562","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE International Conference on Automation Science and Engineering","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9","score":0.5600000023841858}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W1547786256","https://openalex.org/W1996109622","https://openalex.org/W2053388262","https://openalex.org/W2055893616","https://openalex.org/W2063846645","https://openalex.org/W2104772533","https://openalex.org/W2109845613","https://openalex.org/W2113733577","https://openalex.org/W2127104083","https://openalex.org/W2134790798","https://openalex.org/W2137987710","https://openalex.org/W2144283213","https://openalex.org/W2151611544","https://openalex.org/W2164448196","https://openalex.org/W2241632266","https://openalex.org/W2245323894","https://openalex.org/W4242037947","https://openalex.org/W6677036213","https://openalex.org/W6679883049","https://openalex.org/W6690512060"],"related_works":["https://openalex.org/W2184166483","https://openalex.org/W4300092030","https://openalex.org/W3184267879","https://openalex.org/W1545991362","https://openalex.org/W2167574351","https://openalex.org/W2545511463","https://openalex.org/W2404383452","https://openalex.org/W2106332846","https://openalex.org/W2978148977","https://openalex.org/W2172075652"],"abstract_inverted_index":{"Cluster":[0],"tools,":[1,104],"which":[2,64,173],"have":[3,20],"several":[4],"processing":[5],"modules":[6],"(PMs)":[7],"and":[8,23,31,42,59,68,78,94,107,122,140],"wafer":[9,29,76,128],"transport":[10],"module(s)":[11],"(TM),":[12],"are":[13,148],"widely":[14],"used":[15],"for":[16,57,120,170],"semiconductor":[17],"manufacturing.":[18],"They":[19],"diverse":[21],"architectures":[22],"scheduling":[24,32,36,62,80,88,100,135,143,146,178,193],"requirements.":[25,81],"Each":[26],"time":[27],"the":[28,35,61,72,75,79,87,99,103,114,124,127,132,134,137,142,159],"recipe":[30],"requirement":[33],"change,":[34],"rules":[37,89,101,147],"should":[38,65],"be":[39,66],"properly":[40],"designed":[41],"timely":[43],"changed":[44,69],"or":[45,131],"tuned.":[46],"To":[47,109],"make":[48],"such":[49],"changes":[50],"easy,":[51],"we":[52,112,187],"propose":[53,113,164],"an":[54,176],"open":[55],"standard":[56],"specifying":[58,123,171],"exchanging":[60],"rules,":[63],"determined":[67],"depending":[70],"on":[71],"tool":[73,105,125,138,199],"architecture,":[74,126],"recipe,":[77,133],"It":[82],"is":[83],"to":[84,95,190],"easily":[85],"implement":[86,191],"into":[90],"a":[91,151,192,197],"real-time":[92],"scheduler":[93],"improve":[96],"interoperability":[97],"of":[98,116,158],"between":[102],"vendors,":[106],"fabs.":[108],"do":[110],"this,":[111],"use":[115],"Petri":[117,160],"net":[118,161],"models":[119],"modeling":[121],"flow":[129],"pattern":[130],"requirements,":[136],"behavior,":[139],"finally":[141],"rules.":[144],"The":[145],"defined":[149],"as":[150],"token":[152],"routing":[153],"rule":[154],"in":[155],"conflict":[156],"places":[157],"model.":[162],"We":[163],"XML(eXtensible":[165],"Markup":[166],"Language)-based":[167],"file":[168,195],"formats":[169],"these,":[172],"all":[174],"constitute":[175],"integrated":[177],"information":[179],"exchange":[180],"format,":[181],"called":[182],"Scheduling":[183],"Command":[184],"File.":[185],"Finally,":[186],"explain":[188],"how":[189],"command":[194],"within":[196],"cluster":[198],"controller.":[200]},"counts_by_year":[{"year":2020,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":5}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}