{"id":"https://openalex.org/W2101318061","doi":"https://doi.org/10.1109/coase.2009.5234137","title":"Advanced studies of selection schemes for dual virtual-metrology outputs","display_name":"Advanced studies of selection schemes for dual virtual-metrology outputs","publication_year":2009,"publication_date":"2009-08-01","ids":{"openalex":"https://openalex.org/W2101318061","doi":"https://doi.org/10.1109/coase.2009.5234137","mag":"2101318061"},"language":"en","primary_location":{"id":"doi:10.1109/coase.2009.5234137","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2009.5234137","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Conference on Automation Science and Engineering","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5114626552","display_name":"Weiming Wu","orcid":"https://orcid.org/0000-0003-1016-0051"},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Wei-Ming Wu","raw_affiliation_strings":["Institute of Manufacturing Engineering, National Cheng Kung University, Tainan, Taiwan","Institute of Manufacturing Engineering, National Cheng Kung University, Tainan 70101, Taiwan, R.O.C"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Manufacturing Engineering, National Cheng Kung University, Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]},{"raw_affiliation_string":"Institute of Manufacturing Engineering, National Cheng Kung University, Tainan 70101, Taiwan, R.O.C","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037509897","display_name":"Fan\u2010Tien Cheng","orcid":"https://orcid.org/0000-0001-8201-223X"},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Fan-Tien Cheng","raw_affiliation_strings":["Institute of Manufacturing Engineering, National Cheng Kung University, Tainan, Taiwan","Institute of Manufacturing Engineering, National Cheng Kung University, Tainan 70101, Taiwan, R.O.C"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Manufacturing Engineering, National Cheng Kung University, Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]},{"raw_affiliation_string":"Institute of Manufacturing Engineering, National Cheng Kung University, Tainan 70101, Taiwan, R.O.C","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056206266","display_name":"Tung-Ho Lin","orcid":null},"institutions":[{"id":"https://openalex.org/I189290911","display_name":"National Chung Shan Institute of Science and Technology","ror":"https://ror.org/034ezwg26","country_code":"TW","type":"government","lineage":["https://openalex.org/I189290911"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Tung-Ho Lin","raw_affiliation_strings":["Chung Shang Institute of Science and Technology, Taoyuan, Taiwan","Chung San Institute of Science and Technology, Taoyuan 32505, Taiwan, R.O.C"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chung Shang Institute of Science and Technology, Taoyuan, Taiwan","institution_ids":["https://openalex.org/I189290911"]},{"raw_affiliation_string":"Chung San Institute of Science and Technology, Taoyuan 32505, Taiwan, R.O.C","institution_ids":["https://openalex.org/I189290911"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087899180","display_name":"Deng-Lin Zeng","orcid":null},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Deng-Lin Zeng","raw_affiliation_strings":["Institute of Manufacturing Engineering, National Cheng Kung University, Tainan, Taiwan","Institute of Manufacturing Engineering, National Cheng Kung University, Tainan 70101, Taiwan, R.O.C"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Manufacturing Engineering, National Cheng Kung University, Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]},{"raw_affiliation_string":"Institute of Manufacturing Engineering, National Cheng Kung University, Tainan 70101, Taiwan, R.O.C","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060155546","display_name":"Jyun-Fang Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Jyun-Fang Chen","raw_affiliation_strings":["Institute of Manufacturing Engineering, National Cheng Kung University, Tainan, Taiwan","Institute of Manufacturing Engineering, National Cheng Kung University, Tainan 70101, Taiwan, R.O.C"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Manufacturing Engineering, National Cheng Kung University, Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]},{"raw_affiliation_string":"Institute of Manufacturing Engineering, National Cheng Kung University, Tainan 70101, Taiwan, R.O.C","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5090340870","display_name":"Min\u2010Hsiung Hung","orcid":"https://orcid.org/0000-0003-2458-471X"},"institutions":[{"id":"https://openalex.org/I4210094862","display_name":"National Defense University","ror":"https://ror.org/00hkj1v53","country_code":"TW","type":"education","lineage":["https://openalex.org/I4210094862"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Min-Hsiung Hung","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, National Defence University, Taoyuan, Taiwan","Department of Electrical and Electronic Engineering, National Defence University, Taoyuan 33509, Taiwan, R.O.C"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, National Defence University, Taoyuan, Taiwan","institution_ids":["https://openalex.org/I4210094862"]},{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, National Defence University, Taoyuan 33509, Taiwan, R.O.C","institution_ids":["https://openalex.org/I4210094862"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.19819996,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"421","last_page":"426"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13114","display_name":"Image Processing Techniques and Applications","score":0.9911999702453613,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.991100013256073,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/scheme","display_name":"Scheme (mathematics)","score":0.7957526445388794},{"id":"https://openalex.org/keywords/artificial-neural-network","display_name":"Artificial neural network","score":0.6831330060958862},{"id":"https://openalex.org/keywords/conjecture","display_name":"Conjecture","score":0.6307282447814941},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.6002828478813171},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5959759950637817},{"id":"https://openalex.org/keywords/metrology","display_name":"Metrology","score":0.5826874375343323},{"id":"https://openalex.org/keywords/selection","display_name":"Selection (genetic algorithm)","score":0.5415435433387756},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.4881795048713684},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.39598608016967773},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.2538279891014099},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.09845569729804993}],"concepts":[{"id":"https://openalex.org/C77618280","wikidata":"https://www.wikidata.org/wiki/Q1155772","display_name":"Scheme (mathematics)","level":2,"score":0.7957526445388794},{"id":"https://openalex.org/C50644808","wikidata":"https://www.wikidata.org/wiki/Q192776","display_name":"Artificial neural network","level":2,"score":0.6831330060958862},{"id":"https://openalex.org/C2780990831","wikidata":"https://www.wikidata.org/wiki/Q319141","display_name":"Conjecture","level":2,"score":0.6307282447814941},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.6002828478813171},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5959759950637817},{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.5826874375343323},{"id":"https://openalex.org/C81917197","wikidata":"https://www.wikidata.org/wiki/Q628760","display_name":"Selection (genetic algorithm)","level":2,"score":0.5415435433387756},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.4881795048713684},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.39598608016967773},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.2538279891014099},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.09845569729804993},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C202444582","wikidata":"https://www.wikidata.org/wiki/Q837863","display_name":"Pure mathematics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/coase.2009.5234137","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2009.5234137","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Conference on Automation Science and Engineering","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.4399999976158142,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1549818157","https://openalex.org/W1961163223","https://openalex.org/W2034712902","https://openalex.org/W2070963892","https://openalex.org/W2075852334","https://openalex.org/W2104018023","https://openalex.org/W2106485576","https://openalex.org/W2115571336","https://openalex.org/W2129319600","https://openalex.org/W2135739205","https://openalex.org/W2137577253","https://openalex.org/W2139430280","https://openalex.org/W2147572077","https://openalex.org/W2154829656","https://openalex.org/W2791654535"],"related_works":["https://openalex.org/W1998546186","https://openalex.org/W2061967405","https://openalex.org/W2174860717","https://openalex.org/W2392646414","https://openalex.org/W2110528520","https://openalex.org/W2021243286","https://openalex.org/W2590542424","https://openalex.org/W2755767658","https://openalex.org/W2734799811","https://openalex.org/W2389192348"],"abstract_inverted_index":{"Advanced":[0],"studies":[1],"of":[2,12,66,69,116,131,189,197],"selection":[3],"schemes":[4],"between":[5],"neural-network":[6],"(NN)":[7],"and":[8,25,72,118,156,167,203],"multiple-regression":[9],"(MR)":[10],"outputs":[11],"a":[13,36,45,49,103,113,141],"virtual":[14],"metrology":[15],"system":[16],"(VMS)":[17],"are":[18,27],"presented":[19],"in":[20,81,136,151],"this":[21,152],"paper.":[22],"Both":[23],"NN":[24,50,73,95,117,179],"MR":[26,37,71,97,119],"applicable":[28],"algorithms":[29],"for":[30,176],"implementing":[31],"VM":[32,110],"conjecture":[33,88,159,180,187],"models.":[34],"But":[35],"algorithm":[38,51],"may":[39,52],"achieve":[40],"better":[41],"accuracy":[42,55,160,188],"only":[43],"with":[44,100,112,127,144],"stable":[46],"process,":[47],"whereas":[48],"has":[53,121],"superior":[54],"when":[56],"equipment":[57],"property":[58],"drift":[59],"or":[60,96],"shift":[61],"occurs.":[62],"To":[63],"take":[64],"advantage":[65],"the":[67,75,109,125,128,137,145,158,178,186,190,193],"merits":[68],"both":[70],"algorithms,":[74],"simple-selection":[76],"scheme":[77,105],"(SS-scheme)":[78],"was":[79],"proposed":[80],"CASE":[82,138],"2008":[83,139],"to":[84,154],"enhance":[85],"virtual-metrology":[86],"(VM)":[87],"accuracy.":[89],"This":[90],"SS-scheme":[91],"simply":[92],"selects":[93],"either":[94],"output.":[98],"Recently,":[99],"advanced":[101],"studies,":[102],"weighted-selection":[104],"(WS-scheme),":[106],"which":[107],"computes":[108],"output":[111],"weighted":[114],"sum":[115],"results,":[120],"been":[122],"developed.":[123],"Besides":[124],"example":[126,143],"CVD":[129],"process":[130,147],"fifth":[132],"generation":[133],"TFT-LCD":[134],"used":[135],"paper,":[140],"new":[142],"photo":[146],"is":[148,174,192],"also":[149],"adopted":[150,175],"paper":[153],"test":[155],"compare":[157],"among":[161,195],"solo":[162,164,198,200],"NN,":[163,199],"MR,":[165,201],"SS-scheme,":[166,202],"WS-scheme.":[168],"One-hidden-layered":[169],"back-propagation":[170],"neural":[171],"network":[172],"(BPNN-I)":[173],"establishing":[177],"model.":[181],"Test":[182],"results":[183],"show":[184],"that":[185],"WS-scheme":[191,204],"best":[194],"those":[196],"algorithms.":[205]},"counts_by_year":[{"year":2024,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}