{"id":"https://openalex.org/W2098014231","doi":"https://doi.org/10.1109/coase.2008.4626541","title":"On the precision alignment and hybrid assembly aspects in manufacturing of a microspectrometer","display_name":"On the precision alignment and hybrid assembly aspects in manufacturing of a microspectrometer","publication_year":2008,"publication_date":"2008-08-01","ids":{"openalex":"https://openalex.org/W2098014231","doi":"https://doi.org/10.1109/coase.2008.4626541","mag":"2098014231"},"language":"en","primary_location":{"id":"doi:10.1109/coase.2008.4626541","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2008.4626541","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2008 IEEE International Conference on Automation Science and Engineering","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101822889","display_name":"Aditya N. Das","orcid":"https://orcid.org/0000-0002-6418-0181"},"institutions":[{"id":"https://openalex.org/I189196454","display_name":"The University of Texas at Arlington","ror":"https://ror.org/019kgqr73","country_code":"US","type":"education","lineage":["https://openalex.org/I189196454"]},{"id":"https://openalex.org/I4210116723","display_name":"Robotics Research (United States)","ror":"https://ror.org/020w2fr77","country_code":"US","type":"company","lineage":["https://openalex.org/I4210116723"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Aditya N. Das","raw_affiliation_strings":["Automation and Robotics Research Institute (ARRI), University of Texas, Arlington, Fort Worth, TX, USA","Autom. & Robot. Res. Inst. (ARRI), Univ. of Texas at Arlington, Fort Worth, TX"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Automation and Robotics Research Institute (ARRI), University of Texas, Arlington, Fort Worth, TX, USA","institution_ids":["https://openalex.org/I4210116723"]},{"raw_affiliation_string":"Autom. & Robot. Res. Inst. (ARRI), Univ. of Texas at Arlington, Fort Worth, TX","institution_ids":["https://openalex.org/I189196454"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109004700","display_name":"Jeongsik Sin","orcid":null},"institutions":[{"id":"https://openalex.org/I189196454","display_name":"The University of Texas at Arlington","ror":"https://ror.org/019kgqr73","country_code":"US","type":"education","lineage":["https://openalex.org/I189196454"]},{"id":"https://openalex.org/I4210116723","display_name":"Robotics Research (United States)","ror":"https://ror.org/020w2fr77","country_code":"US","type":"company","lineage":["https://openalex.org/I4210116723"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jeongsik Sin","raw_affiliation_strings":["Automation and Robotics Research Institute (ARRI), University of Texas, Arlington, Fort Worth, TX, USA","Autom. & Robot. Res. Inst. (ARRI), Univ. of Texas at Arlington, Fort Worth, TX"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Automation and Robotics Research Institute (ARRI), University of Texas, Arlington, Fort Worth, TX, USA","institution_ids":["https://openalex.org/I4210116723"]},{"raw_affiliation_string":"Autom. & Robot. Res. Inst. (ARRI), Univ. of Texas at Arlington, Fort Worth, TX","institution_ids":["https://openalex.org/I189196454"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108082534","display_name":"Dan O. Popa","orcid":null},"institutions":[{"id":"https://openalex.org/I189196454","display_name":"The University of Texas at Arlington","ror":"https://ror.org/019kgqr73","country_code":"US","type":"education","lineage":["https://openalex.org/I189196454"]},{"id":"https://openalex.org/I4210116723","display_name":"Robotics Research (United States)","ror":"https://ror.org/020w2fr77","country_code":"US","type":"company","lineage":["https://openalex.org/I4210116723"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Dan O. Popa","raw_affiliation_strings":["Automation and Robotics Research Institute (ARRI), University of Texas, Arlington, Fort Worth, TX, USA","Autom. & Robot. Res. Inst. (ARRI), Univ. of Texas at Arlington, Fort Worth, TX"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Automation and Robotics Research Institute (ARRI), University of Texas, Arlington, Fort Worth, TX, USA","institution_ids":["https://openalex.org/I4210116723"]},{"raw_affiliation_string":"Autom. & Robot. Res. Inst. (ARRI), Univ. of Texas at Arlington, Fort Worth, TX","institution_ids":["https://openalex.org/I189196454"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108479720","display_name":"H.E. Stephanou","orcid":null},"institutions":[{"id":"https://openalex.org/I189196454","display_name":"The University of Texas at Arlington","ror":"https://ror.org/019kgqr73","country_code":"US","type":"education","lineage":["https://openalex.org/I189196454"]},{"id":"https://openalex.org/I4210116723","display_name":"Robotics Research (United States)","ror":"https://ror.org/020w2fr77","country_code":"US","type":"company","lineage":["https://openalex.org/I4210116723"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Harry E. Stephanou","raw_affiliation_strings":["Automation and Robotics Research Institute (ARRI), University of Texas, Arlington, Fort Worth, TX, USA","Autom. & Robot. Res. Inst. (ARRI), Univ. of Texas at Arlington, Fort Worth, TX"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Automation and Robotics Research Institute (ARRI), University of Texas, Arlington, Fort Worth, TX, USA","institution_ids":["https://openalex.org/I4210116723"]},{"raw_affiliation_string":"Autom. & Robot. Res. Inst. (ARRI), Univ. of Texas at Arlington, Fort Worth, TX","institution_ids":["https://openalex.org/I189196454"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":20,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"6466","issue":null,"first_page":"959","last_page":"966"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9958999752998352,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9939000010490417,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microscale-chemistry","display_name":"Microscale chemistry","score":0.6944494247436523},{"id":"https://openalex.org/keywords/spectrometer","display_name":"Spectrometer","score":0.6342741250991821},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.6324777007102966},{"id":"https://openalex.org/keywords/interferometry","display_name":"Interferometry","score":0.5914449095726013},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5821027159690857},{"id":"https://openalex.org/keywords/optical-fiber","display_name":"Optical fiber","score":0.5584622025489807},{"id":"https://openalex.org/keywords/michelson-interferometer","display_name":"Michelson interferometer","score":0.5065613985061646},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.4982891082763672},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.45149916410446167},{"id":"https://openalex.org/keywords/modular-design","display_name":"Modular design","score":0.4272991716861725},{"id":"https://openalex.org/keywords/interference","display_name":"Interference (communication)","score":0.41328659653663635},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3545899987220764},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.33563321828842163},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.20493486523628235},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.07706654071807861}],"concepts":[{"id":"https://openalex.org/C179428855","wikidata":"https://www.wikidata.org/wiki/Q1069216","display_name":"Microscale chemistry","level":2,"score":0.6944494247436523},{"id":"https://openalex.org/C33390570","wikidata":"https://www.wikidata.org/wiki/Q188463","display_name":"Spectrometer","level":2,"score":0.6342741250991821},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.6324777007102966},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.5914449095726013},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5821027159690857},{"id":"https://openalex.org/C194232370","wikidata":"https://www.wikidata.org/wiki/Q162","display_name":"Optical fiber","level":2,"score":0.5584622025489807},{"id":"https://openalex.org/C9809166","wikidata":"https://www.wikidata.org/wiki/Q733088","display_name":"Michelson interferometer","level":3,"score":0.5065613985061646},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.4982891082763672},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.45149916410446167},{"id":"https://openalex.org/C101468663","wikidata":"https://www.wikidata.org/wiki/Q1620158","display_name":"Modular design","level":2,"score":0.4272991716861725},{"id":"https://openalex.org/C32022120","wikidata":"https://www.wikidata.org/wiki/Q797225","display_name":"Interference (communication)","level":3,"score":0.41328659653663635},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3545899987220764},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.33563321828842163},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.20493486523628235},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.07706654071807861},{"id":"https://openalex.org/C127162648","wikidata":"https://www.wikidata.org/wiki/Q16858953","display_name":"Channel (broadcasting)","level":2,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C145420912","wikidata":"https://www.wikidata.org/wiki/Q853077","display_name":"Mathematics education","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/coase.2008.4626541","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2008.4626541","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2008 IEEE International Conference on Automation Science and Engineering","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.8199999928474426}],"awards":[],"funders":[{"id":"https://openalex.org/F4320337345","display_name":"Office of Naval Research","ror":"https://ror.org/00rk2pe57"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":28,"referenced_works":["https://openalex.org/W624456751","https://openalex.org/W1505332024","https://openalex.org/W1594564371","https://openalex.org/W1951905369","https://openalex.org/W1973234584","https://openalex.org/W2002337806","https://openalex.org/W2004048451","https://openalex.org/W2010946497","https://openalex.org/W2023981481","https://openalex.org/W2044856183","https://openalex.org/W2058379082","https://openalex.org/W2059475991","https://openalex.org/W2098249697","https://openalex.org/W2112531993","https://openalex.org/W2113725351","https://openalex.org/W2116486710","https://openalex.org/W2139931863","https://openalex.org/W2149678673","https://openalex.org/W2150352833","https://openalex.org/W2151329898","https://openalex.org/W2154644761","https://openalex.org/W2156956864","https://openalex.org/W2179845289","https://openalex.org/W2321590911","https://openalex.org/W2533278571","https://openalex.org/W4230434589","https://openalex.org/W6651262806","https://openalex.org/W6680472444"],"related_works":["https://openalex.org/W2552882567","https://openalex.org/W2781378818","https://openalex.org/W2055212743","https://openalex.org/W2043348382","https://openalex.org/W1983075060","https://openalex.org/W2372667864","https://openalex.org/W2075723552","https://openalex.org/W1971200888","https://openalex.org/W2028312166","https://openalex.org/W4242048312"],"abstract_inverted_index":{"Microoptics":[0],"is":[1,75],"a":[2,23,40,65,81,90,122],"fertile":[3],"area":[4],"for":[5],"hybrid":[6],"assembly":[7,36,146],"of":[8,39,94,135,149],"miniaturized":[9],"components,":[10],"due":[11],"to":[12,15,34,120],"the":[13,35,104,133,144,150,154],"need":[14],"integrate":[16],"different":[17],"optical":[18,51,151],"and":[19,37,55,60,100,106,139,147],"actuation":[20],"materials":[21],"in":[22,103],"single":[24],"precision":[25],"bench.":[26,84,130],"In":[27],"this":[28,136],"paper":[29],"we":[30],"discuss":[31,132],"issues":[32],"related":[33],"alignment":[38,71,148],"microspectrometer":[41,88],"using":[42],"3D":[43],"miniature":[44],"non-silicon":[45],"objects":[46],"such":[47],"as":[48],"glass":[49],"lenses,":[50],"fibers,":[52],"laser":[53],"sources,":[54],"detectors":[56],"onto":[57],"silicon":[58],"fixtures":[59],"microactuators.":[61],"The":[62],"resulting":[63],"instrument,":[64],"fiber-coupled":[66,86],"MOEMS":[67],"spectrometer,":[68],"requires":[69],"high":[70],"precision,":[72],"because":[73],"it":[74],"based":[76],"on":[77,153],"interference":[78],"fringes":[79],"from":[80],"Michelson":[82],"Interferometer":[83],"Our":[85],"Fourier-Transform":[87],"has":[89],"nominal":[91],"packaged":[92],"size":[93],"3cm":[95,97],"x":[96,98,125,127],"3cm,":[99],"targets":[101],"wavelengths":[102],"visible":[105],"NIR":[107],"spectra.":[108],"We":[109,131],"use":[110],"modular":[111],"microscale":[112],"parts,":[113],"including":[114],"minimum":[115],"energy":[116],"compliant":[117],"MEMS":[118],"fasteners":[119],"configure":[121],"die-sized":[123],"(1cm":[124],"1cm":[126],"0.5cm)":[128],"microoptical":[129],"tolerance":[134],"complex":[137],"assembly,":[138],"present":[140],"experimental":[141],"results":[142],"validating":[143],"automated":[145],"components":[152],"microbench.":[155]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":2}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}