{"id":"https://openalex.org/W2160523014","doi":"https://doi.org/10.1109/coase.2007.4341850","title":"Active Thermal Management for Precision Positioning","display_name":"Active Thermal Management for Precision Positioning","publication_year":2007,"publication_date":"2007-09-01","ids":{"openalex":"https://openalex.org/W2160523014","doi":"https://doi.org/10.1109/coase.2007.4341850","mag":"2160523014"},"language":"en","primary_location":{"id":"doi:10.1109/coase.2007.4341850","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2007.4341850","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 IEEE International Conference on Automation Science and Engineering","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5074720714","display_name":"Rongliang Zhou","orcid":null},"institutions":[{"id":"https://openalex.org/I165799507","display_name":"Rensselaer Polytechnic Institute","ror":"https://ror.org/01rtyzb94","country_code":"US","type":"education","lineage":["https://openalex.org/I165799507"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Rongliang Zhou","raw_affiliation_strings":["Center for Automation Technologies and Systems, Department of Electrical, Computer, & Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA"],"affiliations":[{"raw_affiliation_string":"Center for Automation Technologies and Systems, Department of Electrical, Computer, & Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA","institution_ids":["https://openalex.org/I165799507"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5096982237","display_name":"Bill Gressick","orcid":null},"institutions":[{"id":"https://openalex.org/I165799507","display_name":"Rensselaer Polytechnic Institute","ror":"https://ror.org/01rtyzb94","country_code":"US","type":"education","lineage":["https://openalex.org/I165799507"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Bill Gressick","raw_affiliation_strings":["Center for Automation Technologies and Systems, Department of Electrical, Computer, & Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA"],"affiliations":[{"raw_affiliation_string":"Center for Automation Technologies and Systems, Department of Electrical, Computer, & Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA","institution_ids":["https://openalex.org/I165799507"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074830403","display_name":"John T. Wen","orcid":"https://orcid.org/0000-0002-5123-5411"},"institutions":[{"id":"https://openalex.org/I165799507","display_name":"Rensselaer Polytechnic Institute","ror":"https://ror.org/01rtyzb94","country_code":"US","type":"education","lineage":["https://openalex.org/I165799507"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"John T. Wen","raw_affiliation_strings":["Center for Automation Technologies and Systems, Department of Electrical, Computer, & Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA"],"affiliations":[{"raw_affiliation_string":"Center for Automation Technologies and Systems, Department of Electrical, Computer, & Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA","institution_ids":["https://openalex.org/I165799507"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024318421","display_name":"Michael K. Jensen","orcid":"https://orcid.org/0000-0001-7574-4707"},"institutions":[{"id":"https://openalex.org/I165799507","display_name":"Rensselaer Polytechnic Institute","ror":"https://ror.org/01rtyzb94","country_code":"US","type":"education","lineage":["https://openalex.org/I165799507"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Michael Jensen","raw_affiliation_strings":["Center for Automation Technologies and Systems, Department of Electrical, Computer, & Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA"],"affiliations":[{"raw_affiliation_string":"Center for Automation Technologies and Systems, Department of Electrical, Computer, & Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA","institution_ids":["https://openalex.org/I165799507"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026893328","display_name":"Joe Frankel","orcid":null},"institutions":[{"id":"https://openalex.org/I134782154","display_name":"Electro Scientific Industries (United States)","ror":"https://ror.org/02620c122","country_code":"US","type":"company","lineage":["https://openalex.org/I134782154","https://openalex.org/I4210092805"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Joe Frankel","raw_affiliation_strings":["Electro Scientific Industries, Inc., Portland, OR, USA"],"affiliations":[{"raw_affiliation_string":"Electro Scientific Industries, Inc., Portland, OR, USA","institution_ids":["https://openalex.org/I134782154"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111978695","display_name":"G. M. Lerner","orcid":null},"institutions":[{"id":"https://openalex.org/I134782154","display_name":"Electro Scientific Industries (United States)","ror":"https://ror.org/02620c122","country_code":"US","type":"company","lineage":["https://openalex.org/I134782154","https://openalex.org/I4210092805"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Grey Lerner","raw_affiliation_strings":["Electro Scientific Industries, Inc., Portland, OR, USA"],"affiliations":[{"raw_affiliation_string":"Electro Scientific Industries, Inc., Portland, OR, USA","institution_ids":["https://openalex.org/I134782154"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5001393750","display_name":"Mark Unrath","orcid":null},"institutions":[{"id":"https://openalex.org/I134782154","display_name":"Electro Scientific Industries (United States)","ror":"https://ror.org/02620c122","country_code":"US","type":"company","lineage":["https://openalex.org/I134782154","https://openalex.org/I4210092805"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mark Unrath","raw_affiliation_strings":["Electro Scientific Industries, Inc., Portland, OR, USA"],"affiliations":[{"raw_affiliation_string":"Electro Scientific Industries, Inc., Portland, OR, USA","institution_ids":["https://openalex.org/I134782154"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5074720714"],"corresponding_institution_ids":["https://openalex.org/I165799507"],"apc_list":null,"apc_paid":null,"fwci":0.6644,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.76085866,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"45","last_page":"50"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9948999881744385,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11890","display_name":"Scientific Measurement and Uncertainty Evaluation","score":0.991100013256073,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.7665812969207764},{"id":"https://openalex.org/keywords/kalman-filter","display_name":"Kalman filter","score":0.5890569686889648},{"id":"https://openalex.org/keywords/controllability","display_name":"Controllability","score":0.5491604208946228},{"id":"https://openalex.org/keywords/estimator","display_name":"Estimator","score":0.5312761068344116},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5226109623908997},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.5169593691825867},{"id":"https://openalex.org/keywords/covariance","display_name":"Covariance","score":0.49448132514953613},{"id":"https://openalex.org/keywords/linear-quadratic-gaussian-control","display_name":"Linear-quadratic-Gaussian control","score":0.49431657791137695},{"id":"https://openalex.org/keywords/positioning-system","display_name":"Positioning system","score":0.4201023280620575},{"id":"https://openalex.org/keywords/optimal-control","display_name":"Optimal control","score":0.35555940866470337},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.20670494437217712},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.19537749886512756},{"id":"https://openalex.org/keywords/point","display_name":"Point (geometry)","score":0.17493492364883423}],"concepts":[{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.7665812969207764},{"id":"https://openalex.org/C157286648","wikidata":"https://www.wikidata.org/wiki/Q846780","display_name":"Kalman filter","level":2,"score":0.5890569686889648},{"id":"https://openalex.org/C48209547","wikidata":"https://www.wikidata.org/wiki/Q1331104","display_name":"Controllability","level":2,"score":0.5491604208946228},{"id":"https://openalex.org/C185429906","wikidata":"https://www.wikidata.org/wiki/Q1130160","display_name":"Estimator","level":2,"score":0.5312761068344116},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5226109623908997},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.5169593691825867},{"id":"https://openalex.org/C178650346","wikidata":"https://www.wikidata.org/wiki/Q201984","display_name":"Covariance","level":2,"score":0.49448132514953613},{"id":"https://openalex.org/C204495892","wikidata":"https://www.wikidata.org/wiki/Q1798304","display_name":"Linear-quadratic-Gaussian control","level":3,"score":0.49431657791137695},{"id":"https://openalex.org/C2778603505","wikidata":"https://www.wikidata.org/wiki/Q17141406","display_name":"Positioning system","level":3,"score":0.4201023280620575},{"id":"https://openalex.org/C91575142","wikidata":"https://www.wikidata.org/wiki/Q1971426","display_name":"Optimal control","level":2,"score":0.35555940866470337},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.20670494437217712},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.19537749886512756},{"id":"https://openalex.org/C28719098","wikidata":"https://www.wikidata.org/wiki/Q44946","display_name":"Point (geometry)","level":2,"score":0.17493492364883423},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C28826006","wikidata":"https://www.wikidata.org/wiki/Q33521","display_name":"Applied mathematics","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/coase.2007.4341850","is_oa":false,"landing_page_url":"https://doi.org/10.1109/coase.2007.4341850","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 IEEE International Conference on Automation Science and Engineering","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.7099999785423279,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1061180882","https://openalex.org/W1965318662","https://openalex.org/W2001122353","https://openalex.org/W2023373397","https://openalex.org/W2049417891","https://openalex.org/W2080211784","https://openalex.org/W2087283296","https://openalex.org/W2104735009","https://openalex.org/W2104937610","https://openalex.org/W2525533731","https://openalex.org/W2576629868"],"related_works":["https://openalex.org/W2036697162","https://openalex.org/W2332386680","https://openalex.org/W2248621902","https://openalex.org/W2003779889","https://openalex.org/W2561315646","https://openalex.org/W4205698120","https://openalex.org/W4239246781","https://openalex.org/W2542825942","https://openalex.org/W3201620972","https://openalex.org/W2619014647"],"abstract_inverted_index":{"Precision":[0],"positioning":[1,37,43,58],"systems":[2],"are":[3,234],"inevitably":[4],"subject":[5],"to":[6,41,55,81,140,175],"various":[7],"thermal":[8,25],"disturbances":[9,22],"including":[10],"heating":[11,169,201],"from":[12,105,117,230],"motors,":[13],"friction":[14],"between":[15,211],"components,":[16],"and":[17,27,52,96,133,181],"ambient":[18],"temperature":[19,143,164],"fluctuations.":[20],"Thermal":[21],"cause":[23],"unwanted":[24],"expansion":[26],"contraction;":[28],"the":[29,33,36,48,83,86,91,94,106,118,122,134,142,150,167,207,215,219,222,231,240],"resulting":[30],"distortion":[31],"of":[32,50,85,88,93,121,161,214,221,224,227],"components":[34],"in":[35,69],"system":[38,123],"could":[39],"lead":[40],"degraded":[42],"accuracy.":[44],"This":[45],"paper":[46],"explores":[47],"application":[49],"estimation":[51],"control":[53,97,183],"techniques":[54],"address":[56],"thermally-induced":[57],"error.":[59],"A":[60,110],"simplified":[61],"planar":[62],"system,":[63],"motivated":[64],"by":[65],"linear":[66,111],"stages":[67],"used":[68,139,189],"semiconductor":[70],"manufacturing,":[71],"is":[72,80,114,127,138,147,173,188,204],"considered":[73],"as":[74,195,197],"a":[75,158],"case":[76],"study.":[77],"The":[78,185],"goal":[79],"estimate":[82],"displacements":[84],"locations":[87,223],"interest":[89,228],"at":[90],"top":[92],"stage":[95,216],"their":[98],"positions":[99],"within":[100],"an":[101,171],"acceptable":[102],"error":[103,136],"bound":[104],"preset":[107],"target":[108],"positions.":[109],"time-invariant":[112],"model":[113],"first":[115],"identified":[116],"numerical":[119],"simulation":[120],"model.":[124],"Kalman":[125],"filter":[126],"applied":[128],"for":[129,177,190],"state":[130],"estimator":[131,151],"design":[132,187],"optimal":[135],"covariance":[137],"guide":[141],"sensor":[144],"placement.":[145],"It":[146,203],"found":[148,205],"that":[149,206],"performance":[152],"does":[153],"not":[154],"significantly":[155],"improve":[156],"beyond":[157],"small":[159],"number":[160],"well":[162,196,235],"chosen":[163],"sensors.":[165],"For":[166],"active":[168,200],"control,":[170],"offset":[172],"introduced":[174],"allow":[176],"two-way":[178],"(both":[179],"positive":[180],"negative)":[182],"action.":[184],"linear-quadratic-Gaussian":[186],"both":[191],"actuator":[192],"location":[193],"selection":[194],"closed":[198],"loop":[199],"control.":[202],"assumed":[208],"boundary":[209],"condition":[210],"different":[212],"portions":[213],"drastically":[217],"affect":[218],"controllability":[220],"interest.":[225],"Locations":[226],"far":[229],"constrained":[232,241],"points":[233,242],"regulated,":[236],"while":[237],"those":[238],"near":[239],"show":[243],"limited":[244],"improvement.":[245]},"counts_by_year":[{"year":2013,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}