{"id":"https://openalex.org/W2176265295","doi":"https://doi.org/10.1109/cicc.2015.7338377","title":"Holisitic device exploration for 7nm node","display_name":"Holisitic device exploration for 7nm node","publication_year":2015,"publication_date":"2015-09-01","ids":{"openalex":"https://openalex.org/W2176265295","doi":"https://doi.org/10.1109/cicc.2015.7338377","mag":"2176265295"},"language":"en","primary_location":{"id":"doi:10.1109/cicc.2015.7338377","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cicc.2015.7338377","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE Custom Integrated Circuits Conference (CICC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5086560921","display_name":"Prasanth Raghavan","orcid":"https://orcid.org/0000-0002-9888-665X"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":true,"raw_author_name":"P. Raghavan","raw_affiliation_strings":["IMEC, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075099844","display_name":"M. Garcia Bardon","orcid":"https://orcid.org/0000-0001-5772-5406"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"M. Garcia Bardon","raw_affiliation_strings":["IMEC, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101779807","display_name":"Doyoung Jang","orcid":"https://orcid.org/0000-0001-6128-7218"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"D. Jang","raw_affiliation_strings":["IMEC, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017651762","display_name":"P. Schuddinck","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"P. Schuddinck","raw_affiliation_strings":["IMEC, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082050068","display_name":"Dmitry Yakimets","orcid":"https://orcid.org/0000-0002-0772-7398"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"D. Yakimets","raw_affiliation_strings":["IMEC, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103112055","display_name":"Julien Ryckaert","orcid":"https://orcid.org/0009-0001-0140-3042"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"J. Ryckaert","raw_affiliation_strings":["IMEC, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032421605","display_name":"A. Mercha","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Mercha","raw_affiliation_strings":["IMEC, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065113949","display_name":"Naoto Horiguchi","orcid":"https://orcid.org/0000-0001-5490-0416"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"N. Horiguchi","raw_affiliation_strings":["IMEC, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046242688","display_name":"Nadine Collaert","orcid":"https://orcid.org/0000-0002-8062-3165"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"N. Collaert","raw_affiliation_strings":["IMEC, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111996467","display_name":"A. Mocuta","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Mocuta","raw_affiliation_strings":["IMEC, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049394620","display_name":"D. Mocuta","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"D. Mocuta","raw_affiliation_strings":["IMEC, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110507565","display_name":"Zs. T\u00f4kei","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Z. Tokei","raw_affiliation_strings":["IMEC, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108761749","display_name":"Diederik Verkest","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"D. Verkest","raw_affiliation_strings":["IMEC, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050315289","display_name":"Aaron Thean","orcid":"https://orcid.org/0000-0003-2418-6404"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Thean","raw_affiliation_strings":["IMEC, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5036818878","display_name":"An Steegen","orcid":"https://orcid.org/0000-0001-7011-2452"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Steegen","raw_affiliation_strings":["IMEC, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":15,"corresponding_author_ids":["https://openalex.org/A5086560921"],"corresponding_institution_ids":["https://openalex.org/I4210114974"],"apc_list":null,"apc_paid":null,"fwci":3.9457,"has_fulltext":false,"cited_by_count":43,"citation_normalized_percentile":{"value":0.94080226,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"5"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/parasitic-extraction","display_name":"Parasitic extraction","score":0.9166133999824524},{"id":"https://openalex.org/keywords/node","display_name":"Node (physics)","score":0.7125585079193115},{"id":"https://openalex.org/keywords/key","display_name":"Key (lock)","score":0.5827470421791077},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.566425621509552},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4629989266395569},{"id":"https://openalex.org/keywords/fin","display_name":"Fin","score":0.4613708257675171},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.4499283730983734},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3720127046108246},{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.35502028465270996},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.3272073268890381},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2613222599029541},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.17448237538337708},{"id":"https://openalex.org/keywords/operating-system","display_name":"Operating system","score":0.14517804980278015},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.07965773344039917}],"concepts":[{"id":"https://openalex.org/C159818811","wikidata":"https://www.wikidata.org/wiki/Q7135947","display_name":"Parasitic extraction","level":2,"score":0.9166133999824524},{"id":"https://openalex.org/C62611344","wikidata":"https://www.wikidata.org/wiki/Q1062658","display_name":"Node (physics)","level":2,"score":0.7125585079193115},{"id":"https://openalex.org/C26517878","wikidata":"https://www.wikidata.org/wiki/Q228039","display_name":"Key (lock)","level":2,"score":0.5827470421791077},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.566425621509552},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4629989266395569},{"id":"https://openalex.org/C91721477","wikidata":"https://www.wikidata.org/wiki/Q778612","display_name":"Fin","level":2,"score":0.4613708257675171},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.4499283730983734},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3720127046108246},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.35502028465270996},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.3272073268890381},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2613222599029541},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.17448237538337708},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.14517804980278015},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07965773344039917},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/cicc.2015.7338377","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cicc.2015.7338377","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE Custom Integrated Circuits Conference (CICC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W2135650105"],"related_works":["https://openalex.org/W1905216755","https://openalex.org/W2104218257","https://openalex.org/W2117417104","https://openalex.org/W1923048618","https://openalex.org/W1990010037","https://openalex.org/W2198432996","https://openalex.org/W4255141013","https://openalex.org/W2534619547","https://openalex.org/W2027218961","https://openalex.org/W85694287"],"abstract_inverted_index":{"In":[0],"this":[1],"paper,":[2],"we":[3,44],"review":[4],"the":[5,15,20,25,35,39,49,63,66,81,90],"conditions":[6],"at":[7,14],"which":[8],"FinFETs":[9],"could":[10],"meet":[11,24,56],"system":[12],"requirements":[13],"7nm":[16,30],"node.":[17,31],"We":[18,32,47],"explore":[19,62],"key":[21],"enablers":[22],"to":[23,55],"power":[26,59],"performance":[27,41],"targets":[28],"for":[29],"show":[33],"that":[34,53],"device":[36,50],"parasitics":[37],"is":[38],"biggest":[40],"detractor":[42],"as":[43,74,95],"scale":[45],"down.":[46],"illustrate":[48],"design":[51,91],"space":[52],"allows":[54],"speed":[57],"and":[58,78,83,89],"targets,":[60],"then":[61],"optimization":[64],"of":[65,85],"geometry":[67],"in":[68],"combination":[69],"with":[70],"disruptive":[71],"solutions":[72,93],"such":[73,94],"air":[75],"gap":[76],"spacers":[77],"wrapped":[79],"contacts,":[80],"benefits":[82],"drawbacks":[84],"increased":[86],"fin":[87,96],"height,":[88],"level":[92],"depopulation.":[97]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":6},{"year":2019,"cited_by_count":4},{"year":2018,"cited_by_count":5},{"year":2017,"cited_by_count":7},{"year":2016,"cited_by_count":7},{"year":2015,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}