{"id":"https://openalex.org/W2125240972","doi":"https://doi.org/10.1109/cicc.2011.6055368","title":"Thermal diffusivity sensing: A new temperature sensing paradigm","display_name":"Thermal diffusivity sensing: A new temperature sensing paradigm","publication_year":2011,"publication_date":"2011-09-01","ids":{"openalex":"https://openalex.org/W2125240972","doi":"https://doi.org/10.1109/cicc.2011.6055368","mag":"2125240972"},"language":"en","primary_location":{"id":"doi:10.1109/cicc.2011.6055368","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cicc.2011.6055368","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE Custom Integrated Circuits Conference (CICC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5007859796","display_name":"C.P.L. van Vroonhoven","orcid":null},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":true,"raw_author_name":"C.P.L. van Vroonhoven","raw_affiliation_strings":["Electronic Instrumentation Laboratory, DIMES, Delft University of Technology, Delft, Netherlands","Electronic Instrumentation Laboratory / DIMES, Delft University of Technology, the Netherlands"],"affiliations":[{"raw_affiliation_string":"Electronic Instrumentation Laboratory, DIMES, Delft University of Technology, Delft, Netherlands","institution_ids":["https://openalex.org/I98358874"]},{"raw_affiliation_string":"Electronic Instrumentation Laboratory / DIMES, Delft University of Technology, the Netherlands","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5029302924","display_name":"Kofi A. A. Makinwa","orcid":"https://orcid.org/0000-0002-2992-5467"},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"K.A.A. Makinwa","raw_affiliation_strings":["Electronic Instrumentation Laboratory, DIMES, Delft University of Technology, Delft, Netherlands","Electronic Instrumentation Laboratory / DIMES, Delft University of Technology, the Netherlands"],"affiliations":[{"raw_affiliation_string":"Electronic Instrumentation Laboratory, DIMES, Delft University of Technology, Delft, Netherlands","institution_ids":["https://openalex.org/I98358874"]},{"raw_affiliation_string":"Electronic Instrumentation Laboratory / DIMES, Delft University of Technology, the Netherlands","institution_ids":["https://openalex.org/I98358874"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5007859796"],"corresponding_institution_ids":["https://openalex.org/I98358874"],"apc_list":null,"apc_paid":null,"fwci":0.7949,"has_fulltext":false,"cited_by_count":13,"citation_normalized_percentile":{"value":0.76751436,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/thermal-diffusivity","display_name":"Thermal diffusivity","score":0.9149947762489319},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.7800875902175903},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6396613121032715},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.6007202863693237},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.5924268960952759},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.5623262524604797},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.5521734952926636},{"id":"https://openalex.org/keywords/atmospheric-temperature-range","display_name":"Atmospheric temperature range","score":0.5022497177124023},{"id":"https://openalex.org/keywords/work","display_name":"Work (physics)","score":0.4985620975494385},{"id":"https://openalex.org/keywords/temperature-measurement","display_name":"Temperature measurement","score":0.48531216382980347},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.46718743443489075},{"id":"https://openalex.org/keywords/ring-oscillator","display_name":"Ring oscillator","score":0.43051743507385254},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.41505375504493713},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3637649714946747},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1699749231338501},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.16734793782234192},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.16588494181632996},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.0820695161819458}],"concepts":[{"id":"https://openalex.org/C37668627","wikidata":"https://www.wikidata.org/wiki/Q3381809","display_name":"Thermal diffusivity","level":2,"score":0.9149947762489319},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.7800875902175903},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6396613121032715},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.6007202863693237},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.5924268960952759},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.5623262524604797},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5521734952926636},{"id":"https://openalex.org/C39353612","wikidata":"https://www.wikidata.org/wiki/Q5283759","display_name":"Atmospheric temperature range","level":2,"score":0.5022497177124023},{"id":"https://openalex.org/C18762648","wikidata":"https://www.wikidata.org/wiki/Q42213","display_name":"Work (physics)","level":2,"score":0.4985620975494385},{"id":"https://openalex.org/C72293138","wikidata":"https://www.wikidata.org/wiki/Q909741","display_name":"Temperature measurement","level":2,"score":0.48531216382980347},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.46718743443489075},{"id":"https://openalex.org/C104111718","wikidata":"https://www.wikidata.org/wiki/Q2153973","display_name":"Ring oscillator","level":3,"score":0.43051743507385254},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.41505375504493713},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3637649714946747},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1699749231338501},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.16734793782234192},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.16588494181632996},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0820695161819458}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/cicc.2011.6055368","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cicc.2011.6055368","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE Custom Integrated Circuits Conference (CICC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.699999988079071,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":37,"referenced_works":["https://openalex.org/W793426341","https://openalex.org/W1588570632","https://openalex.org/W1672592200","https://openalex.org/W1965838897","https://openalex.org/W1973751801","https://openalex.org/W2005704146","https://openalex.org/W2015063649","https://openalex.org/W2015326492","https://openalex.org/W2037271313","https://openalex.org/W2041865906","https://openalex.org/W2048264716","https://openalex.org/W2050668688","https://openalex.org/W2055944305","https://openalex.org/W2065124251","https://openalex.org/W2090351433","https://openalex.org/W2102905963","https://openalex.org/W2107271589","https://openalex.org/W2108150940","https://openalex.org/W2110191162","https://openalex.org/W2112352003","https://openalex.org/W2119167252","https://openalex.org/W2119423667","https://openalex.org/W2122837809","https://openalex.org/W2122984288","https://openalex.org/W2124899616","https://openalex.org/W2143316697","https://openalex.org/W2144282368","https://openalex.org/W2148114249","https://openalex.org/W2163951489","https://openalex.org/W2168914671","https://openalex.org/W2173995140","https://openalex.org/W2259658882","https://openalex.org/W3140921582","https://openalex.org/W3186269358","https://openalex.org/W4247586331","https://openalex.org/W4285719527","https://openalex.org/W6622883811"],"related_works":["https://openalex.org/W2385382668","https://openalex.org/W2283102826","https://openalex.org/W1974236007","https://openalex.org/W2023596821","https://openalex.org/W2351460627","https://openalex.org/W4247079838","https://openalex.org/W2984377685","https://openalex.org/W2983009729","https://openalex.org/W2507745370","https://openalex.org/W4318601828"],"abstract_inverted_index":{"This":[0,64],"paper":[1],"presents":[2],"an":[3,55,59,78,143],"overview":[4],"of":[5,15,19,26,77,103,123,146],"recently":[6],"developed":[7],"absolute":[8],"temperature":[9,37,62,104,111],"sensors":[10,23,84,125],"based":[11],"on":[12],"the":[13,16,27,51,74,121],"measurement":[14],"thermal":[17,52,81],"diffusivity":[18,82],"silicon,":[20,32],"D.":[21],"Such":[22],"make":[24],"use":[25],"fact":[28],"that,":[29],"in":[30,87,94,138],"IC-grade":[31],"D":[33,45],"has":[34],"a":[35,109],"well-defined":[36,101],"dependence":[38],"and":[39,58,89,93,105,130],"is":[40,131],"insensitive":[41,132],"to":[42,72,115,133,151],"process":[43,128],"spread.":[44],"can":[46,66],"be":[47,68],"determined":[48],"by":[49],"measuring":[50],"delay":[53,65],"between":[54],"on-chip":[56,60],"heater":[57],"relative":[61],"sensor":[63],"then":[67],"digitized":[69],"or":[70],"used":[71],"define":[73],"output":[75],"frequency":[76],"oscillator.":[79],"Proof-of-concept":[80],"(TD)":[83],"were":[85],"fabricated":[86],"0.7\u00b5m":[88],"0.18\u00b5m":[90,139],"bulk":[91,140],"CMOS,":[92],"0.5\u00b5m":[95],"SOI":[96],"technology.":[97],"Their":[98],"outputs":[99],"are":[100],"functions":[102],"they":[106],"work":[107],"over":[108],"wide":[110],"range":[112],"from":[113,149],"\u221270\u00b0C":[114],"170\u00b0C.":[116],"It":[117],"was":[118],"found":[119],"that":[120],"inaccuracy":[122,145],"TD":[124],"scales":[126],"with":[127],"technology":[129],"mechanical":[134],"stress.":[135],"An":[136],"implementation":[137],"CMOS":[141],"achieved":[142],"untrimmed":[144],"\u00b10.2\u00b0C":[147],"(3\u03c3)":[148],"\u221255\u00b0C":[150],"125\u00b0C.":[152]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":3},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2012,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}
