{"id":"https://openalex.org/W2119550225","doi":"https://doi.org/10.1109/cicc.2003.1249445","title":"Bipolar pulse width modulation driver for MEMS electrostatic actuator arrays","display_name":"Bipolar pulse width modulation driver for MEMS electrostatic actuator arrays","publication_year":2004,"publication_date":"2004-02-03","ids":{"openalex":"https://openalex.org/W2119550225","doi":"https://doi.org/10.1109/cicc.2003.1249445","mag":"2119550225"},"language":"en","primary_location":{"id":"doi:10.1109/cicc.2003.1249445","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cicc.2003.1249445","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the IEEE 2003 Custom Integrated Circuits Conference, 2003.","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111737925","display_name":"S.L. Garverick","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"S.L. Garverick","raw_affiliation_strings":["Movaz Networks, Inc., Norcross, GA, USA","Movaz Networks Inc., Norcross, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Movaz Networks, Inc., Norcross, GA, USA","institution_ids":[]},{"raw_affiliation_string":"Movaz Networks Inc., Norcross, GA, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076450522","display_name":"M.L. Nagy","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M.L. Nagy","raw_affiliation_strings":["Movaz Networks, Inc., Norcross, GA, USA","Movaz Networks Inc., Norcross, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Movaz Networks, Inc., Norcross, GA, USA","institution_ids":[]},{"raw_affiliation_string":"Movaz Networks Inc., Norcross, GA, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035039255","display_name":"Michael J. Kane","orcid":"https://orcid.org/0000-0002-6965-5430"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M.J. Kane","raw_affiliation_strings":["Movaz Networks, Inc., Norcross, GA, USA","Movaz Networks Inc., Norcross, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Movaz Networks, Inc., Norcross, GA, USA","institution_ids":[]},{"raw_affiliation_string":"Movaz Networks Inc., Norcross, GA, USA","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5011615612","display_name":"Jun Guo","orcid":"https://orcid.org/0000-0001-6776-5989"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jun Guo","raw_affiliation_strings":["Movaz Networks, Inc., Norcross, GA, USA","Movaz Networks Inc., Norcross, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Movaz Networks, Inc., Norcross, GA, USA","institution_ids":[]},{"raw_affiliation_string":"Movaz Networks Inc., Norcross, GA, USA","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.6953,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.84729708,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"481","last_page":"484"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.984000027179718,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.9810000061988831,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/pulse-width-modulation","display_name":"Pulse-width modulation","score":0.7811427116394043},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7780135273933411},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.6654300689697266},{"id":"https://openalex.org/keywords/modulation","display_name":"Modulation (music)","score":0.5899302363395691},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5564548969268799},{"id":"https://openalex.org/keywords/pulse","display_name":"Pulse (music)","score":0.4667629897594452},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4493029713630676},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.38610386848449707},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.33925575017929077},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.24490070343017578},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.23706671595573425},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2238975167274475},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.16304072737693787}],"concepts":[{"id":"https://openalex.org/C92746544","wikidata":"https://www.wikidata.org/wiki/Q585184","display_name":"Pulse-width modulation","level":3,"score":0.7811427116394043},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7780135273933411},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.6654300689697266},{"id":"https://openalex.org/C123079801","wikidata":"https://www.wikidata.org/wiki/Q750240","display_name":"Modulation (music)","level":2,"score":0.5899302363395691},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5564548969268799},{"id":"https://openalex.org/C2780167933","wikidata":"https://www.wikidata.org/wiki/Q1550652","display_name":"Pulse (music)","level":3,"score":0.4667629897594452},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4493029713630676},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.38610386848449707},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.33925575017929077},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.24490070343017578},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23706671595573425},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2238975167274475},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.16304072737693787}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/cicc.2003.1249445","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cicc.2003.1249445","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the IEEE 2003 Custom Integrated Circuits Conference, 2003.","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.8399999737739563,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W1968198809","https://openalex.org/W2147753829","https://openalex.org/W2156287921"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W2319192085","https://openalex.org/W1763916368","https://openalex.org/W2391127530","https://openalex.org/W2045074154","https://openalex.org/W2346208161","https://openalex.org/W2089389693","https://openalex.org/W2370850561"],"abstract_inverted_index":{"Three-level":[0],"pulse":[1],"width":[2],"modulation":[3],"serves":[4],"as":[5],"the":[6,31],"basis":[7],"of":[8,16,65],"an":[9,14,47,63],"all-digital":[10],"technique":[11],"for":[12],"driving":[13],"array":[15,55],"high-voltage":[17],"electrostatic":[18],"microactuators.":[19],"DC":[20],"bias":[21],"is":[22,28,56],"zero":[23],"and":[24,46,69,75],"maximum":[25],"RMS":[26],"voltage":[27],"equal":[29],"to":[30],"single":[32],"supply":[33],"voltage.":[34],"Driver":[35],"arrays":[36],"are":[37],"implemented":[38],"using":[39],"a":[40,43],"two-chip":[41],"architecture:":[42],"logic":[44],"chip":[45],"HV":[48],"level":[49],"translator":[50],"array.":[51],"A":[52],"micromirror":[53],"driver":[54],"described,":[57],"with":[58],"1920":[59],"drivers":[60],"that":[61],"occupy":[62],"area":[64],"1280":[66],"mm/sup":[67],"2/":[68],"consumes":[70],"12.3":[71],"W":[72],"from":[73],"5-V":[74],"200-V":[76],"supplies.":[77]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}