{"id":"https://openalex.org/W1582593222","doi":"https://doi.org/10.1109/cec.2003.1299752","title":"DIWA: device independent wafermap analysis","display_name":"DIWA: device independent wafermap analysis","publication_year":2004,"publication_date":"2004-07-09","ids":{"openalex":"https://openalex.org/W1582593222","doi":"https://doi.org/10.1109/cec.2003.1299752","mag":"1582593222"},"language":"en","primary_location":{"id":"doi:10.1109/cec.2003.1299752","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cec.2003.1299752","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 2003 Congress on Evolutionary Computation, 2003. CEC '03.","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5044601243","display_name":"Emilio Miguela\u00f1ez","orcid":null},"institutions":[{"id":"https://openalex.org/I32062511","display_name":"Heriot-Watt University","ror":"https://ror.org/04mghma93","country_code":"GB","type":"education","lineage":["https://openalex.org/I32062511"]}],"countries":["GB"],"is_corresponding":true,"raw_author_name":"E. Miguelanez","raw_affiliation_strings":["Department of Electrical, Electronic and Computer Engineering School of Engineering and Physical Sciences, Heriot-Watt University, Edinburgh, UK"],"affiliations":[{"raw_affiliation_string":"Department of Electrical, Electronic and Computer Engineering School of Engineering and Physical Sciences, Heriot-Watt University, Edinburgh, UK","institution_ids":["https://openalex.org/I32062511"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111377875","display_name":"A.M.S. Zalzala","orcid":null},"institutions":[{"id":"https://openalex.org/I32062511","display_name":"Heriot-Watt University","ror":"https://ror.org/04mghma93","country_code":"GB","type":"education","lineage":["https://openalex.org/I32062511"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"A.M.S. Zalzala","raw_affiliation_strings":["Department of Electrical, Electronic and Computer Engineering School of Engineering and Physical Sciences, Heriot-Watt University, Edinburgh, UK"],"affiliations":[{"raw_affiliation_string":"Department of Electrical, Electronic and Computer Engineering School of Engineering and Physical Sciences, Heriot-Watt University, Edinburgh, UK","institution_ids":["https://openalex.org/I32062511"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5075666006","display_name":"Paul Tabor","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"P. Tabor","raw_affiliation_strings":["Test Advantage, Inc., Tempe, AZ, USA"],"affiliations":[{"raw_affiliation_string":"Test Advantage, Inc., Tempe, AZ, USA","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5044601243"],"corresponding_institution_ids":["https://openalex.org/I32062511"],"apc_list":null,"apc_paid":null,"fwci":1.6782,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.83823326,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"2","issue":null,"first_page":"823","last_page":"829"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/bitmap","display_name":"Bitmap","score":0.8370765447616577},{"id":"https://openalex.org/keywords/classifier","display_name":"Classifier (UML)","score":0.6675715446472168},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6569003462791443},{"id":"https://openalex.org/keywords/pattern-recognition","display_name":"Pattern recognition (psychology)","score":0.647489607334137},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.6343400478363037},{"id":"https://openalex.org/keywords/artificial-neural-network","display_name":"Artificial neural network","score":0.5711796879768372},{"id":"https://openalex.org/keywords/feature-selection","display_name":"Feature selection","score":0.54475337266922},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.5023858547210693},{"id":"https://openalex.org/keywords/feature-extraction","display_name":"Feature extraction","score":0.4596637487411499},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.15127435326576233}],"concepts":[{"id":"https://openalex.org/C3115412","wikidata":"https://www.wikidata.org/wiki/Q1194708","display_name":"Bitmap","level":2,"score":0.8370765447616577},{"id":"https://openalex.org/C95623464","wikidata":"https://www.wikidata.org/wiki/Q1096149","display_name":"Classifier (UML)","level":2,"score":0.6675715446472168},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6569003462791443},{"id":"https://openalex.org/C153180895","wikidata":"https://www.wikidata.org/wiki/Q7148389","display_name":"Pattern recognition (psychology)","level":2,"score":0.647489607334137},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.6343400478363037},{"id":"https://openalex.org/C50644808","wikidata":"https://www.wikidata.org/wiki/Q192776","display_name":"Artificial neural network","level":2,"score":0.5711796879768372},{"id":"https://openalex.org/C148483581","wikidata":"https://www.wikidata.org/wiki/Q446488","display_name":"Feature selection","level":2,"score":0.54475337266922},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5023858547210693},{"id":"https://openalex.org/C52622490","wikidata":"https://www.wikidata.org/wiki/Q1026626","display_name":"Feature extraction","level":2,"score":0.4596637487411499},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.15127435326576233},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/cec.2003.1299752","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cec.2003.1299752","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 2003 Congress on Evolutionary Computation, 2003. CEC '03.","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1528719827","https://openalex.org/W1627054999","https://openalex.org/W1890398906","https://openalex.org/W1938538487","https://openalex.org/W2046245205","https://openalex.org/W2102009083","https://openalex.org/W2104550562","https://openalex.org/W2112236820","https://openalex.org/W2117812871","https://openalex.org/W2159498975","https://openalex.org/W2161278885","https://openalex.org/W2170698782","https://openalex.org/W2265219688","https://openalex.org/W2883779626","https://openalex.org/W6631569088"],"related_works":["https://openalex.org/W2350456333","https://openalex.org/W2101993108","https://openalex.org/W2356608866","https://openalex.org/W2355840328","https://openalex.org/W1975966184","https://openalex.org/W2364393392","https://openalex.org/W2137246017","https://openalex.org/W2377096008","https://openalex.org/W3126935378","https://openalex.org/W2809136181"],"abstract_inverted_index":{"An":[0,33],"automatic":[1],"defect":[2],"classification":[3,83],"system":[4],"for":[5],"electrical":[6],"test":[7,39],"analysis":[8],"of":[9,15,65,74,87,100,103],"semiconductor":[10],"wafer":[11],"using":[12],"a":[13,16,20,24,29,107],"combination":[14],"genetic":[17],"algorithm":[18],"as":[19,28],"feature":[21,57],"selector":[22],"and":[23,41,47],"RBF":[25],"neural":[26],"network":[27],"classifier":[30],"is":[31,35],"introduced.":[32],"e-bitmap":[34,82],"obtained":[36],"from":[37],"the":[38,56,70,75,92,101],"stage":[40],"several":[42],"features":[43,66,88],"including":[44],"mass,":[45],"moments":[46,49],"invariant":[48],"are":[50,53],"extracted.":[51],"These":[52],"presented":[54,68],"to":[55,60,69,94],"selection":[58],"method":[59],"generate":[61],"an":[62,79],"optimal":[63],"set":[64],"thus":[67],"classifier.":[71],"The":[72,85],"performance":[73],"reported":[76],"approach":[77,91],"show":[78],"87%":[80],"correct":[81],"rate.":[84],"use":[86],"gives":[89],"this":[90],"capability":[93],"be":[95],"device":[96],"independent":[97,99],"(i.e.":[98],"format":[102],"die":[104],"layout":[105],"on":[106],"tested":[108],"wafer).":[109]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}