{"id":"https://openalex.org/W4315488760","doi":"https://doi.org/10.1109/cdc51059.2022.9993133","title":"An AFM Scanning Method with a Rotating Probe and an Adaptive Scanning Speed Strategy","display_name":"An AFM Scanning Method with a Rotating Probe and an Adaptive Scanning Speed Strategy","publication_year":2022,"publication_date":"2022-12-06","ids":{"openalex":"https://openalex.org/W4315488760","doi":"https://doi.org/10.1109/cdc51059.2022.9993133"},"language":"en","primary_location":{"id":"doi:10.1109/cdc51059.2022.9993133","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cdc51059.2022.9993133","pdf_url":null,"source":{"id":"https://openalex.org/S4363607710","display_name":"2022 IEEE 61st Conference on Decision and Control (CDC)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE 61st Conference on Decision and Control (CDC)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5024600786","display_name":"Sheng\u2010An Lee","orcid":"https://orcid.org/0009-0008-7953-7877"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Sheng-An Lee","raw_affiliation_strings":["National Taiwan University,Department of Electrical Engineering,Taipei,Taiwan,106"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Taiwan University,Department of Electrical Engineering,Taipei,Taiwan,106","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036381684","display_name":"Huang-Chih Chen","orcid":"https://orcid.org/0000-0002-0838-1069"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Huang-Chih Chen","raw_affiliation_strings":["National Taiwan University,Department of Electrical Engineering,Taipei,Taiwan,106"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Taiwan University,Department of Electrical Engineering,Taipei,Taiwan,106","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031073130","display_name":"Hsiang-Hung Wei","orcid":null},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Hsiang-Hung Wei","raw_affiliation_strings":["National Taiwan University,Department of Electrical Engineering,Taipei,Taiwan,106"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Taiwan University,Department of Electrical Engineering,Taipei,Taiwan,106","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101925654","display_name":"Li\u2010Chen Fu","orcid":"https://orcid.org/0000-0002-6947-7646"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Li-Chen Fu","raw_affiliation_strings":["National Taiwan University,Department of Electrical Engineering,Taipei,Taiwan,106"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Taiwan University,Department of Electrical Engineering,Taipei,Taiwan,106","institution_ids":["https://openalex.org/I16733864"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I16733864"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"7630","last_page":"7635"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12466","display_name":"Near-Field Optical Microscopy","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/raster-scan","display_name":"Raster scan","score":0.6649674773216248},{"id":"https://openalex.org/keywords/scanning-probe-microscopy","display_name":"Scanning probe microscopy","score":0.5927267074584961},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5311993956565857},{"id":"https://openalex.org/keywords/raster-graphics","display_name":"Raster graphics","score":0.5212617516517639},{"id":"https://openalex.org/keywords/sample","display_name":"Sample (material)","score":0.5135838985443115},{"id":"https://openalex.org/keywords/distortion","display_name":"Distortion (music)","score":0.5043843984603882},{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.4819797873497009},{"id":"https://openalex.org/keywords/3d-scanning","display_name":"3d scanning","score":0.4248707890510559},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.4048665463924408},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.3413262367248535},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.22059157490730286},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.09018811583518982}],"concepts":[{"id":"https://openalex.org/C145406643","wikidata":"https://www.wikidata.org/wiki/Q2641959","display_name":"Raster scan","level":2,"score":0.6649674773216248},{"id":"https://openalex.org/C36628996","wikidata":"https://www.wikidata.org/wiki/Q907287","display_name":"Scanning probe microscopy","level":2,"score":0.5927267074584961},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5311993956565857},{"id":"https://openalex.org/C181844469","wikidata":"https://www.wikidata.org/wiki/Q182270","display_name":"Raster graphics","level":2,"score":0.5212617516517639},{"id":"https://openalex.org/C198531522","wikidata":"https://www.wikidata.org/wiki/Q485146","display_name":"Sample (material)","level":2,"score":0.5135838985443115},{"id":"https://openalex.org/C126780896","wikidata":"https://www.wikidata.org/wiki/Q899871","display_name":"Distortion (music)","level":4,"score":0.5043843984603882},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.4819797873497009},{"id":"https://openalex.org/C3019493240","wikidata":"https://www.wikidata.org/wiki/Q94701573","display_name":"3d scanning","level":2,"score":0.4248707890510559},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4048665463924408},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.3413262367248535},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.22059157490730286},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.09018811583518982},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/cdc51059.2022.9993133","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cdc51059.2022.9993133","pdf_url":null,"source":{"id":"https://openalex.org/S4363607710","display_name":"2022 IEEE 61st Conference on Decision and Control (CDC)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE 61st Conference on Decision and Control (CDC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320323900","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":25,"referenced_works":["https://openalex.org/W285475345","https://openalex.org/W651464779","https://openalex.org/W2036898174","https://openalex.org/W2066073858","https://openalex.org/W2068686248","https://openalex.org/W2111971067","https://openalex.org/W2113693626","https://openalex.org/W2214506747","https://openalex.org/W2249852635","https://openalex.org/W2278195658","https://openalex.org/W2290457235","https://openalex.org/W2530229664","https://openalex.org/W2735473394","https://openalex.org/W2763586588","https://openalex.org/W2782415710","https://openalex.org/W2931287830","https://openalex.org/W2960936784","https://openalex.org/W3013016125","https://openalex.org/W3027760060","https://openalex.org/W3084637283","https://openalex.org/W3094527452","https://openalex.org/W3148981780","https://openalex.org/W3150248096","https://openalex.org/W3164801534","https://openalex.org/W3194986362"],"related_works":["https://openalex.org/W2093392189","https://openalex.org/W1984055937","https://openalex.org/W4385770201","https://openalex.org/W1974004953","https://openalex.org/W2072796508","https://openalex.org/W204409194","https://openalex.org/W4397293267","https://openalex.org/W2377833861","https://openalex.org/W2028294394","https://openalex.org/W2360170166"],"abstract_inverted_index":{"Since":[0],"its":[1,112],"invention":[2],"in":[3],"1986,":[4],"the":[5,14,24,41,49,53,61,77,105,121,125,134,145,152,156,170,175,182,189,215],"AFM":[6],"(Atomic":[7],"Force":[8],"Microscope)":[9],"has":[10],"been":[11],"one":[12],"of":[13,60,120,163,169,219],"most":[15,35],"prominent":[16],"tools":[17],"to":[18,48,71,74,85,141,159,187,198,213],"help":[19],"us":[20,115,130],"examine":[21],"and":[22,37,52,132,138,217],"understand":[23],"microscopic":[25],"world.":[26],"However,":[27],"it":[28],"does":[29],"not":[30],"come":[31],"without":[32],"disadvantages.":[33],"The":[34,98],"glaring":[36],"noticeable":[38],"ones":[39],"are":[40,211],"generally":[42],"slow":[43],"imaging":[44],"speed,":[45],"distortion":[46,83],"due":[47,84],"probe":[50,135,146,183,206],"geometry,":[51,87],"nonuniform":[54],"data":[55,113,128,164,202],"distribution":[56],"at":[57,204],"different":[58,205],"slopes":[59],"sample":[62,122],"topography.":[63,123,190],"In":[64],"this":[65],"paper,":[66],"we":[67,88],"focus":[68],"on":[69,151,166],"trying":[70],"provide":[72],"means":[73],"deal":[75],"with":[76,93,111],"last":[78],"two":[79],"simultaneously.":[80],"To":[81],"alleviate":[82],"tip":[86,184],"introduce":[89],"a":[90,94,117,192],"scanning":[91,100,127,172],"method":[92,195],"dynamically":[95],"rotating":[96,207],"probe.":[97],"raster":[99],"pattern":[101],"is":[102,108,178,185,196],"adopted,":[103],"where":[104,131],"trace":[106,126],"path":[107],"scanned":[109,201],"conventionally,":[110],"helping":[114],"gain":[116],"rough":[118],"idea":[119],"Then,":[124],"tells":[129],"when":[133],"should":[136],"rotate":[137,142],"what":[139],"angle":[140],"so":[143,180],"that":[144,181],"consequently":[147],"follows":[148],"such":[149],"guidance":[150],"retrace":[153],"path.":[154],"On":[155],"other":[157],"hand,":[158],"ensure":[160],"better":[161],"uniformity":[162],"density":[165],"every":[167],"part":[168],"sample,":[171],"speed":[173],"along":[174],"fast":[176],"axis":[177],"adaptive":[179],"able":[186],"track":[188],"Lastly,":[191],"simple":[193],"calibration":[194],"proposed":[197],"reasonably":[199],"merge":[200],"points":[203],"angles.":[208],"Simulation":[209],"results":[210],"given":[212],"test":[214],"feasibility":[216],"effectiveness":[218],"said":[220],"methods.":[221]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}