{"id":"https://openalex.org/W4391019871","doi":"https://doi.org/10.1109/cdc49753.2023.10384162","title":"Fourth-Order Reference Trajectories in Lithography Stages with Weakly-Damped Modes - a Frequency-Domain Perspective","display_name":"Fourth-Order Reference Trajectories in Lithography Stages with Weakly-Damped Modes - a Frequency-Domain Perspective","publication_year":2023,"publication_date":"2023-12-13","ids":{"openalex":"https://openalex.org/W4391019871","doi":"https://doi.org/10.1109/cdc49753.2023.10384162"},"language":"en","primary_location":{"id":"doi:10.1109/cdc49753.2023.10384162","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cdc49753.2023.10384162","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 62nd IEEE Conference on Decision and Control (CDC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://pure.tue.nl/ws/files/337916101/Fourth-Order_Reference_Trajectories_in_Lithography_Stages_with_Weakly-Damped_Modes_-_a_Frequency-Domain_Perspective.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5088330069","display_name":"Marcel Heertjes","orcid":"https://orcid.org/0000-0001-6775-5078"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]},{"id":"https://openalex.org/I927257375","display_name":"ASML (Netherlands)","ror":"https://ror.org/01vxknj13","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210092504","https://openalex.org/I4210122849","https://openalex.org/I927257375"]}],"countries":["NL"],"is_corresponding":true,"raw_author_name":"Marcel Heertjes","raw_affiliation_strings":["Eindhoven University of Technology,Control Systems Technology group,Department of Mechanical Engineering,The Netherlands","ASML, D&E wafer stage control group, The Netherlands","Department of Mechanical Engineering, Control Systems Technology group, Eindhoven University of Technology, The Netherlands"],"affiliations":[{"raw_affiliation_string":"Eindhoven University of Technology,Control Systems Technology group,Department of Mechanical Engineering,The Netherlands","institution_ids":["https://openalex.org/I83019370"]},{"raw_affiliation_string":"ASML, D&E wafer stage control group, The Netherlands","institution_ids":["https://openalex.org/I927257375"]},{"raw_affiliation_string":"Department of Mechanical Engineering, Control Systems Technology group, Eindhoven University of Technology, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112185332","display_name":"Jazm\u00edn Zenteno Torres","orcid":null},"institutions":[{"id":"https://openalex.org/I927257375","display_name":"ASML (Netherlands)","ror":"https://ror.org/01vxknj13","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210092504","https://openalex.org/I4210122849","https://openalex.org/I927257375"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Jazmin Zenteno Torres","raw_affiliation_strings":["ASML, Research mechatronics group,The Netherlands","ASML, Research mechatronics group, The Netherlands"],"affiliations":[{"raw_affiliation_string":"ASML, Research mechatronics group,The Netherlands","institution_ids":["https://openalex.org/I927257375"]},{"raw_affiliation_string":"ASML, Research mechatronics group, The Netherlands","institution_ids":["https://openalex.org/I927257375"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5056883585","display_name":"Mohammad Al Janaideh","orcid":"https://orcid.org/0000-0003-0142-1045"},"institutions":[{"id":"https://openalex.org/I79817857","display_name":"University of Guelph","ror":"https://ror.org/01r7awg59","country_code":"CA","type":"education","lineage":["https://openalex.org/I79817857"]},{"id":"https://openalex.org/I130438778","display_name":"Memorial University of Newfoundland","ror":"https://ror.org/04haebc03","country_code":"CA","type":"education","lineage":["https://openalex.org/I130438778"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Mohammad Al Janaideh","raw_affiliation_strings":["Memorial University,Department of Mechanical Engineering,St. John's,Newfoundland","School of Engineering, University of Guelph, Guelph, Canada"],"affiliations":[{"raw_affiliation_string":"Memorial University,Department of Mechanical Engineering,St. John's,Newfoundland","institution_ids":["https://openalex.org/I130438778"]},{"raw_affiliation_string":"School of Engineering, University of Guelph, Guelph, Canada","institution_ids":["https://openalex.org/I79817857"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5088330069"],"corresponding_institution_ids":["https://openalex.org/I83019370","https://openalex.org/I927257375"],"apc_list":null,"apc_paid":null,"fwci":0.5569,"has_fulltext":true,"cited_by_count":3,"citation_normalized_percentile":{"value":0.68247313,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"8696","last_page":"8701"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11394","display_name":"Dynamics and Control of Mechanical Systems","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13644","display_name":"Control Systems in Engineering","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/metrology","display_name":"Metrology","score":0.7172555923461914},{"id":"https://openalex.org/keywords/jerk","display_name":"Jerk","score":0.6717767715454102},{"id":"https://openalex.org/keywords/frequency-domain","display_name":"Frequency domain","score":0.6395151019096375},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5971629023551941},{"id":"https://openalex.org/keywords/perspective","display_name":"Perspective (graphical)","score":0.5707671046257019},{"id":"https://openalex.org/keywords/trajectory","display_name":"Trajectory","score":0.5693408250808716},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.5458912253379822},{"id":"https://openalex.org/keywords/motion-control","display_name":"Motion control","score":0.5189132690429688},{"id":"https://openalex.org/keywords/point","display_name":"Point (geometry)","score":0.4813981056213379},{"id":"https://openalex.org/keywords/tracking","display_name":"Tracking (education)","score":0.4595796465873718},{"id":"https://openalex.org/keywords/domain","display_name":"Domain (mathematical analysis)","score":0.45246198773384094},{"id":"https://openalex.org/keywords/pairing","display_name":"Pairing","score":0.4513120949268341},{"id":"https://openalex.org/keywords/motion","display_name":"Motion (physics)","score":0.4452044367790222},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.44430550932884216},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.42389976978302},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.34103280305862427},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.2041112780570984},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.1913135051727295},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.1658669412136078},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.14905160665512085},{"id":"https://openalex.org/keywords/mathematical-analysis","display_name":"Mathematical analysis","score":0.1370842158794403},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.13035282492637634},{"id":"https://openalex.org/keywords/classical-mechanics","display_name":"Classical mechanics","score":0.10667687654495239},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.0764472484588623}],"concepts":[{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.7172555923461914},{"id":"https://openalex.org/C181605269","wikidata":"https://www.wikidata.org/wiki/Q497332","display_name":"Jerk","level":3,"score":0.6717767715454102},{"id":"https://openalex.org/C19118579","wikidata":"https://www.wikidata.org/wiki/Q786423","display_name":"Frequency domain","level":2,"score":0.6395151019096375},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5971629023551941},{"id":"https://openalex.org/C12713177","wikidata":"https://www.wikidata.org/wiki/Q1900281","display_name":"Perspective (graphical)","level":2,"score":0.5707671046257019},{"id":"https://openalex.org/C13662910","wikidata":"https://www.wikidata.org/wiki/Q193139","display_name":"Trajectory","level":2,"score":0.5693408250808716},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.5458912253379822},{"id":"https://openalex.org/C145565327","wikidata":"https://www.wikidata.org/wiki/Q852514","display_name":"Motion control","level":3,"score":0.5189132690429688},{"id":"https://openalex.org/C28719098","wikidata":"https://www.wikidata.org/wiki/Q44946","display_name":"Point (geometry)","level":2,"score":0.4813981056213379},{"id":"https://openalex.org/C2775936607","wikidata":"https://www.wikidata.org/wiki/Q466845","display_name":"Tracking (education)","level":2,"score":0.4595796465873718},{"id":"https://openalex.org/C36503486","wikidata":"https://www.wikidata.org/wiki/Q11235244","display_name":"Domain (mathematical analysis)","level":2,"score":0.45246198773384094},{"id":"https://openalex.org/C14103023","wikidata":"https://www.wikidata.org/wiki/Q11681459","display_name":"Pairing","level":3,"score":0.4513120949268341},{"id":"https://openalex.org/C104114177","wikidata":"https://www.wikidata.org/wiki/Q79782","display_name":"Motion (physics)","level":2,"score":0.4452044367790222},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.44430550932884216},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.42389976978302},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.34103280305862427},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.2041112780570984},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.1913135051727295},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.1658669412136078},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.14905160665512085},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.1370842158794403},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.13035282492637634},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.10667687654495239},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.0764472484588623},{"id":"https://openalex.org/C54101563","wikidata":"https://www.wikidata.org/wiki/Q124131","display_name":"Superconductivity","level":2,"score":0.0},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.0},{"id":"https://openalex.org/C19417346","wikidata":"https://www.wikidata.org/wiki/Q7922","display_name":"Pedagogy","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C1276947","wikidata":"https://www.wikidata.org/wiki/Q333","display_name":"Astronomy","level":1,"score":0.0},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/cdc49753.2023.10384162","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cdc49753.2023.10384162","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 62nd IEEE Conference on Decision and Control (CDC)","raw_type":"proceedings-article"},{"id":"pmh:oai:pure.tue.nl:openaire/79fe0bd1-261c-48b0-b070-e34cdc97672d","is_oa":true,"landing_page_url":"https://research.tue.nl/en/publications/79fe0bd1-261c-48b0-b070-e34cdc97672d","pdf_url":"https://pure.tue.nl/ws/files/337916101/Fourth-Order_Reference_Trajectories_in_Lithography_Stages_with_Weakly-Damped_Modes_-_a_Frequency-Domain_Perspective.pdf","source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Heertjes, M, Torres, J Z & Al Janaideh, M 2024, Fourth-Order Reference Trajectories in Lithography Stages with Weakly-Damped Modes - a Frequency-Domain Perspective. in 2023 62nd IEEE Conference on Decision and Control, CDC 2023., 10384162, Institute of Electrical and Electronics Engineers, pp. 8696-8701, 62nd IEEE Conference on Decision and Control, CDC 2023, Singapore, Singapore, 13/12/23. https://doi.org/10.1109/CDC49753.2023.10384162","raw_type":"info:eu-repo/semantics/publishedVersion"}],"best_oa_location":{"id":"pmh:oai:pure.tue.nl:openaire/79fe0bd1-261c-48b0-b070-e34cdc97672d","is_oa":true,"landing_page_url":"https://research.tue.nl/en/publications/79fe0bd1-261c-48b0-b070-e34cdc97672d","pdf_url":"https://pure.tue.nl/ws/files/337916101/Fourth-Order_Reference_Trajectories_in_Lithography_Stages_with_Weakly-Damped_Modes_-_a_Frequency-Domain_Perspective.pdf","source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Heertjes, M, Torres, J Z & Al Janaideh, M 2024, Fourth-Order Reference Trajectories in Lithography Stages with Weakly-Damped Modes - a Frequency-Domain Perspective. in 2023 62nd IEEE Conference on Decision and Control, CDC 2023., 10384162, Institute of Electrical and Electronics Engineers, pp. 8696-8701, 62nd IEEE Conference on Decision and Control, CDC 2023, Singapore, Singapore, 13/12/23. https://doi.org/10.1109/CDC49753.2023.10384162","raw_type":"info:eu-repo/semantics/publishedVersion"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4391019871.pdf","grobid_xml":"https://content.openalex.org/works/W4391019871.grobid-xml"},"referenced_works_count":24,"referenced_works":["https://openalex.org/W266941139","https://openalex.org/W1966991743","https://openalex.org/W1974984002","https://openalex.org/W1981643206","https://openalex.org/W1999177683","https://openalex.org/W2059373683","https://openalex.org/W2085252207","https://openalex.org/W2085448794","https://openalex.org/W2086652353","https://openalex.org/W2096825228","https://openalex.org/W2116154037","https://openalex.org/W2118547638","https://openalex.org/W2147592724","https://openalex.org/W2149974031","https://openalex.org/W2462400051","https://openalex.org/W2482067891","https://openalex.org/W2525120870","https://openalex.org/W2802903870","https://openalex.org/W2803994153","https://openalex.org/W3005016260","https://openalex.org/W3033386793","https://openalex.org/W3046176481","https://openalex.org/W4200204266","https://openalex.org/W6604963009"],"related_works":["https://openalex.org/W2497204748","https://openalex.org/W4281395624","https://openalex.org/W2351684991","https://openalex.org/W1561345858","https://openalex.org/W2539932329","https://openalex.org/W1983113136","https://openalex.org/W2392989031","https://openalex.org/W3015473028","https://openalex.org/W4293226006","https://openalex.org/W2122209352"],"abstract_inverted_index":{"The":[0],"tracking":[1,38],"accuracy":[2],"in":[3,11,68],"motion":[4,48],"control":[5],"systems":[6],"like":[7],"the":[8,26,36,59,69],"moving":[9],"stages":[10],"lithography":[12],"machines,":[13],"e.g.,":[14],"wafer":[15],"scanners":[16],"or":[17],"metrology":[18],"inspection":[19],"tools,":[20],"is":[21,33],"partly":[22],"determined":[23],"by":[24],"how":[25],"frequency":[27],"content":[28],"of":[29],"its":[30],"reference":[31,44],"trajectories":[32,45],"transferred":[34],"to":[35],"closed-loop":[37,70],"error.":[39],"In":[40],"this":[41],"regard,":[42],"fourth-order":[43],"for":[46],"point-to-point":[47],"will":[49],"be":[50,73],"studied":[51],"from":[52],"a":[53,79],"frequency-domain":[54],"perspective.":[55],"By":[56],"appropriately":[57],"pairing":[58],"maximum":[60,63],"snap":[61],"and":[62],"jerk":[64],"values,":[65],"weakly-damped":[66],"modes":[67],"response":[71],"can":[72],"robustly":[74],"dealt":[75],"with":[76],"without":[77],"introducing":[78],"penalty":[80],"on":[81],"throughput.":[82]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1}],"updated_date":"2026-03-17T17:19:04.345684","created_date":"2025-10-10T00:00:00"}