{"id":"https://openalex.org/W2017056731","doi":"https://doi.org/10.1109/cdc.2014.7040457","title":"A dual probes AFM system with effective tilting angles to achieve high-precision scanning","display_name":"A dual probes AFM system with effective tilting angles to achieve high-precision scanning","publication_year":2014,"publication_date":"2014-12-01","ids":{"openalex":"https://openalex.org/W2017056731","doi":"https://doi.org/10.1109/cdc.2014.7040457","mag":"2017056731"},"language":"en","primary_location":{"id":"doi:10.1109/cdc.2014.7040457","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cdc.2014.7040457","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"53rd IEEE Conference on Decision and Control","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101577192","display_name":"Yi\u2010Ting Lin","orcid":"https://orcid.org/0000-0002-8745-8756"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210152758","display_name":"Institute of Atmospheric Physics","ror":"https://ror.org/0424h4e32","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210152758"]}],"countries":["CN","TW"],"is_corresponding":false,"raw_author_name":"Yi-Ting Lin","raw_affiliation_strings":["Key Laboratory of Middle Atmosphere and Global Environment Observation (LAGEO), Chinese Academy of Sciences, Beijing, China","National Taiwan Univ (Taiwan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Middle Atmosphere and Global Environment Observation (LAGEO), Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210152758","https://openalex.org/I19820366"]},{"raw_affiliation_string":"National Taiwan Univ (Taiwan)","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108221328","display_name":"Yu\u2010Ting Lo","orcid":null},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210152758","display_name":"Institute of Atmospheric Physics","ror":"https://ror.org/0424h4e32","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210152758"]}],"countries":["CN","TW"],"is_corresponding":false,"raw_author_name":"Yu-Ting Lo","raw_affiliation_strings":["Key Laboratory of Middle Atmosphere and Global Environment Observation (LAGEO), Chinese Academy of Sciences, Beijing, China","National Taiwan Univ (Taiwan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Middle Atmosphere and Global Environment Observation (LAGEO), Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210152758","https://openalex.org/I19820366"]},{"raw_affiliation_string":"National Taiwan Univ (Taiwan)","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064385770","display_name":"Jim\u2010Wei Wu","orcid":"https://orcid.org/0000-0001-8332-768X"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210152758","display_name":"Institute of Atmospheric Physics","ror":"https://ror.org/0424h4e32","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210152758"]}],"countries":["CN","TW"],"is_corresponding":false,"raw_author_name":"Jim-Wei Wu","raw_affiliation_strings":["Key Laboratory of Middle Atmosphere and Global Environment Observation (LAGEO), Chinese Academy of Sciences, Beijing, China","National Taiwan Univ (Taiwan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Middle Atmosphere and Global Environment Observation (LAGEO), Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210152758","https://openalex.org/I19820366"]},{"raw_affiliation_string":"National Taiwan Univ (Taiwan)","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058384431","display_name":"Wei-Chih Liu","orcid":null},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210152758","display_name":"Institute of Atmospheric Physics","ror":"https://ror.org/0424h4e32","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210152758"]}],"countries":["CN","TW"],"is_corresponding":false,"raw_author_name":"Wei-Chih Liu","raw_affiliation_strings":["Key Laboratory of Middle Atmosphere and Global Environment Observation (LAGEO), Chinese Academy of Sciences, Beijing, China","National Taiwan Univ (Taiwan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Middle Atmosphere and Global Environment Observation (LAGEO), Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210152758","https://openalex.org/I19820366"]},{"raw_affiliation_string":"National Taiwan Univ (Taiwan)","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101925654","display_name":"Li\u2010Chen Fu","orcid":"https://orcid.org/0000-0002-6947-7646"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210152758","display_name":"Institute of Atmospheric Physics","ror":"https://ror.org/0424h4e32","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210152758"]}],"countries":["CN","TW"],"is_corresponding":false,"raw_author_name":"Li-Chen Fu","raw_affiliation_strings":["Key Laboratory of Middle Atmosphere and Global Environment Observation (LAGEO), Chinese Academy of Sciences, Beijing, China","National Taiwan Univ (Taiwan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Middle Atmosphere and Global Environment Observation (LAGEO), Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210152758","https://openalex.org/I19820366"]},{"raw_affiliation_string":"National Taiwan Univ (Taiwan)","institution_ids":["https://openalex.org/I16733864"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"6801","last_page":"6806"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12466","display_name":"Near-Field Optical Microscopy","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/distortion","display_name":"Distortion (music)","score":0.6477422714233398},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.6113889813423157},{"id":"https://openalex.org/keywords/scanning-probe-microscopy","display_name":"Scanning probe microscopy","score":0.5882254242897034},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.5825831294059753},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.517688512802124},{"id":"https://openalex.org/keywords/flexibility","display_name":"Flexibility (engineering)","score":0.4971757233142853},{"id":"https://openalex.org/keywords/system-of-measurement","display_name":"System of measurement","score":0.45062875747680664},{"id":"https://openalex.org/keywords/sample","display_name":"Sample (material)","score":0.43401217460632324},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.39250215888023376},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.34106793999671936},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.33322814106941223},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.1880103349685669},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.15467330813407898},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.07397967576980591}],"concepts":[{"id":"https://openalex.org/C126780896","wikidata":"https://www.wikidata.org/wiki/Q899871","display_name":"Distortion (music)","level":4,"score":0.6477422714233398},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6113889813423157},{"id":"https://openalex.org/C36628996","wikidata":"https://www.wikidata.org/wiki/Q907287","display_name":"Scanning probe microscopy","level":2,"score":0.5882254242897034},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.5825831294059753},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.517688512802124},{"id":"https://openalex.org/C2780598303","wikidata":"https://www.wikidata.org/wiki/Q65921492","display_name":"Flexibility (engineering)","level":2,"score":0.4971757233142853},{"id":"https://openalex.org/C37649242","wikidata":"https://www.wikidata.org/wiki/Q932268","display_name":"System of measurement","level":2,"score":0.45062875747680664},{"id":"https://openalex.org/C198531522","wikidata":"https://www.wikidata.org/wiki/Q485146","display_name":"Sample (material)","level":2,"score":0.43401217460632324},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.39250215888023376},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.34106793999671936},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.33322814106941223},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.1880103349685669},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15467330813407898},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.07397967576980591},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C1276947","wikidata":"https://www.wikidata.org/wiki/Q333","display_name":"Astronomy","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.0},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/cdc.2014.7040457","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cdc.2014.7040457","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"53rd IEEE Conference on Decision and Control","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.46000000834465027,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1986101723","https://openalex.org/W1986179236","https://openalex.org/W2037991230","https://openalex.org/W2050165177","https://openalex.org/W2057309386","https://openalex.org/W2062553012","https://openalex.org/W2066073858","https://openalex.org/W2082971309","https://openalex.org/W2089751703","https://openalex.org/W2110167104","https://openalex.org/W2495912830","https://openalex.org/W3150248096","https://openalex.org/W3206706267","https://openalex.org/W6665921555"],"related_works":["https://openalex.org/W4236696095","https://openalex.org/W3143779693","https://openalex.org/W2626808643","https://openalex.org/W2004064826","https://openalex.org/W3103727510","https://openalex.org/W97045569","https://openalex.org/W2067621765","https://openalex.org/W2029367975","https://openalex.org/W1993703324","https://openalex.org/W2389441398"],"abstract_inverted_index":{"With":[0,108],"the":[1,7,42,47,53,68,72,109,121,162,166],"constant":[2],"improvement":[3],"of":[4,9,12,46,56,71,105,165],"micro-fabrication":[5],"techniques,":[6],"measurement":[8,27,37],"feature":[10,62],"size":[11],"micro-fabricated":[13,35],"structures":[14,36],"becomes":[15],"an":[16],"important":[17],"issue.":[18],"Atomic":[19],"force":[20],"microscopy":[21],"(AFM)":[22],"is":[23,84,95,136],"a":[24,78,132],"high":[25,59,93],"accuracy":[26],"instrument":[28],"which":[29,142],"has":[30],"been":[31],"widely":[32],"used":[33,96],"in":[34,49,86,97,115,139],"recently.":[38],"However,":[39],"due":[40],"to":[41,100,160],"monotonic":[43],"tilting":[44,103,110,123],"angle":[45,104,111],"probe":[48,81],"traditional":[50],"AFM":[51,82],"system,":[52],"scanning":[54,126,148,154],"results":[55,157],"sample":[57],"with":[58,92],"steep":[60],"wall":[61],"usually":[63],"have":[64],"distortion":[65],"phenomenon":[66],"at":[67],"corner":[69],"part":[70],"sample.":[73],"To":[74],"solve":[75],"this":[76,87,98,116,140],"problem,":[77],"novel":[79],"dual":[80],"system":[83,90,168],"proposed":[85,167],"paper.":[88],"A":[89],"structure":[91],"flexibility":[94],"work":[99],"create":[101],"different":[102,128,147],"each":[106],"probe.":[107],"deciding":[112],"method":[113,135],"developed":[114],"paper,":[117],"we":[118],"can":[119,143],"estimate":[120],"effective":[122],"angles":[124],"for":[125],"under":[127],"scenarios.":[129],"In":[130],"addition,":[131],"useful":[133],"merging":[134],"also":[137],"designed":[138],"work,":[141],"stich":[144],"result":[145],"from":[146],"unit":[149],"together":[150],"and":[151,169],"produce":[152],"high-precision":[153],"results.":[155],"Experimental":[156],"are":[158],"shown":[159],"validate":[161],"outstanding":[163],"capability":[164],"methods.":[170]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2016,"cited_by_count":3}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}