{"id":"https://openalex.org/W1980083491","doi":"https://doi.org/10.1109/cdc.2011.6161500","title":"Design and implementation of an atomic force microscope with adaptive sliding mode controller for large image scanning","display_name":"Design and implementation of an atomic force microscope with adaptive sliding mode controller for large image scanning","publication_year":2011,"publication_date":"2011-12-01","ids":{"openalex":"https://openalex.org/W1980083491","doi":"https://doi.org/10.1109/cdc.2011.6161500","mag":"1980083491"},"language":"en","primary_location":{"id":"doi:10.1109/cdc.2011.6161500","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cdc.2011.6161500","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Conference on Decision and Control and European Control Conference","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5065782106","display_name":"Yuan-Zhi Peng","orcid":null},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yuan-Zhi Peng","raw_affiliation_strings":["Electrical Engineering Department, National Taiwan University, Taipei, Taiwan","[Electrical Engineering Dept, National Taiwan University, Taipei, Taiwan]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrical Engineering Department, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]},{"raw_affiliation_string":"[Electrical Engineering Dept, National Taiwan University, Taipei, Taiwan]","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064385770","display_name":"Jim\u2010Wei Wu","orcid":"https://orcid.org/0000-0001-8332-768X"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Jun-Wei Wu","raw_affiliation_strings":["Electrical Engineering Department, National Taiwan University, Taipei, Taiwan","[Electrical Engineering Dept, National Taiwan University, Taipei, Taiwan]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrical Engineering Department, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]},{"raw_affiliation_string":"[Electrical Engineering Dept, National Taiwan University, Taipei, Taiwan]","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113610740","display_name":"Kuan-Chia Huang","orcid":null},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Kuan-Chia Huang","raw_affiliation_strings":["Electrical Engineering Department, National Taiwan University, Taipei, Taiwan","[Electrical Engineering Dept, National Taiwan University, Taipei, Taiwan]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrical Engineering Department, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]},{"raw_affiliation_string":"[Electrical Engineering Dept, National Taiwan University, Taipei, Taiwan]","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078215591","display_name":"Jyun-Jhih Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Jyun-Jhih Chen","raw_affiliation_strings":["Electrical Engineering Department, National Taiwan University, Taipei, Taiwan","[Electrical Engineering Dept, National Taiwan University, Taipei, Taiwan]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrical Engineering Department, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]},{"raw_affiliation_string":"[Electrical Engineering Dept, National Taiwan University, Taipei, Taiwan]","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045416183","display_name":"Mei-Yung Chen","orcid":"https://orcid.org/0000-0002-3410-8373"},"institutions":[{"id":"https://openalex.org/I134161618","display_name":"National Taiwan Normal University","ror":"https://ror.org/059dkdx38","country_code":"TW","type":"education","lineage":["https://openalex.org/I134161618"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Mei-Yung Chen","raw_affiliation_strings":["Mechatronic Technology Department, National Taiwan Normal University, Taipei, Taiwan","Mechatronic Technology Department, Nation Taiwan Normal University, Taipei, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Mechatronic Technology Department, National Taiwan Normal University, Taipei, Taiwan","institution_ids":["https://openalex.org/I134161618"]},{"raw_affiliation_string":"Mechatronic Technology Department, Nation Taiwan Normal University, Taipei, Taiwan","institution_ids":["https://openalex.org/I134161618"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101925654","display_name":"Li\u2010Chen Fu","orcid":"https://orcid.org/0000-0002-6947-7646"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Li-Chen Fu","raw_affiliation_strings":["Electrical Engineering Department, National Taiwan University, Taipei, Taiwan","[Electrical Engineering Dept, National Taiwan University, Taipei, Taiwan]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrical Engineering Department, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]},{"raw_affiliation_string":"[Electrical Engineering Dept, National Taiwan University, Taipei, Taiwan]","institution_ids":["https://openalex.org/I16733864"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"13","issue":null,"first_page":"5577","last_page":"5582"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9930999875068665,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.6049197912216187},{"id":"https://openalex.org/keywords/controller","display_name":"Controller (irrigation)","score":0.5460125207901001},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4840518832206726},{"id":"https://openalex.org/keywords/microscope","display_name":"Microscope","score":0.4361315965652466},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4284655451774597},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4262964129447937},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3722448945045471},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3710402548313141}],"concepts":[{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.6049197912216187},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.5460125207901001},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4840518832206726},{"id":"https://openalex.org/C67649825","wikidata":"https://www.wikidata.org/wiki/Q196538","display_name":"Microscope","level":2,"score":0.4361315965652466},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4284655451774597},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4262964129447937},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3722448945045471},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3710402548313141},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C6557445","wikidata":"https://www.wikidata.org/wiki/Q173113","display_name":"Agronomy","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/cdc.2011.6161500","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cdc.2011.6161500","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Conference on Decision and Control and European Control Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.8199999928474426,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":27,"referenced_works":["https://openalex.org/W1965203667","https://openalex.org/W1966889561","https://openalex.org/W1967466231","https://openalex.org/W1975845848","https://openalex.org/W1992075251","https://openalex.org/W1994283401","https://openalex.org/W1997067736","https://openalex.org/W2035345827","https://openalex.org/W2036075377","https://openalex.org/W2048003262","https://openalex.org/W2050552850","https://openalex.org/W2067603665","https://openalex.org/W2076111440","https://openalex.org/W2077549745","https://openalex.org/W2081414658","https://openalex.org/W2102023741","https://openalex.org/W2143862071","https://openalex.org/W2147054649","https://openalex.org/W2158422680","https://openalex.org/W2164229301","https://openalex.org/W2166785907","https://openalex.org/W2167324635","https://openalex.org/W2167680182","https://openalex.org/W3124958681","https://openalex.org/W3150248096","https://openalex.org/W6648561199","https://openalex.org/W6681270468"],"related_works":["https://openalex.org/W120386264","https://openalex.org/W2369514825","https://openalex.org/W4309764133","https://openalex.org/W3094386287","https://openalex.org/W2031123327","https://openalex.org/W4389328717","https://openalex.org/W2132160072","https://openalex.org/W3210408447","https://openalex.org/W2761298569","https://openalex.org/W2078716683"],"abstract_inverted_index":{"Atomic":[0],"force":[1,26],"microscopy":[2],"(AFM)":[3],"is":[4,83,139,158],"an":[5,119,148],"advanced":[6],"technique":[7],"which":[8,58],"aims":[9],"to":[10,38,141,160],"scan":[11],"a":[12,18,21,51,124,130],"sample":[13],"through":[14],"the":[15,31,39,69,79,103,143,155,162,177],"use":[16],"of":[17,33,43,63,85,102,106,109,145,176],"probe":[19],"or":[20],"tip;":[22],"however,":[23],"conventional":[24],"atomic":[25],"microscope":[27],"system":[28,57,164],"suffers":[29],"from":[30],"limitation":[32],"small":[34],"scanning":[35,56,75],"range,":[36],"due":[37],"short":[40],"travelling":[41],"range":[42,54],"piezoelectric":[44,64,70,127],"actuation.":[45],"In":[46],"this":[47],"paper,":[48],"we":[49],"propose":[50],"large":[52,91],"measurement-":[53],"AFM":[55],"combines":[59],"both":[60],"fine":[61],"positioners":[62],"and":[65,123,166],"electromagnetic":[66,81,110],"actuations.":[67],"While":[68],"positioner":[71,82],"provides":[72],"high":[73],"speed":[74],"with":[76,94,116],"nanometer":[77],"resolution,":[78],"precision":[80],"capable":[84],"1":[86],"mm":[87],"<sup":[88],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[89],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[90],"field":[92],"positioning":[93],"30":[95],"nm":[96],"rms":[97],"error.":[98],"The":[99],"overall":[100],"design":[101],"stage":[104],"consists":[105],"4":[107],"pairs":[108],"actuator,":[111],"monolithic":[112],"serial":[113],"flexure":[114],"guidance":[115],"compression":[117],"springs,":[118],"eddy":[120],"current":[121],"damper,":[122],"commercial":[125],"xyz":[126],"positioner.":[128],"Besides,":[129],"stationary":[131],"compact":[132],"disk/digital":[133],"versatile":[134],"disk":[135],"pick-up-head":[136],"(CD/DVD":[137],"PUH)":[138],"used":[140,159],"measure":[142],"amplitude":[144],"samples.":[146],"Moreover,":[147],"adaptive":[149],"sliding":[150],"mode":[151],"controller":[152],"based":[153],"on":[154],"analytical":[156],"modeling":[157],"overcome":[161],"unmodeled":[163],"uncertainties":[165],"external":[167],"disturbances.":[168],"Finally,":[169],"preliminary":[170],"experiments":[171],"are":[172],"presented,":[173],"demonstrating":[174],"feasibility":[175],"proposed":[178],"system.":[179]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}