{"id":"https://openalex.org/W2048383761","doi":"https://doi.org/10.1109/cdc.2004.1428763","title":"Multi-objective H/sub /spl infin// control applied to a wafer stage model","display_name":"Multi-objective H/sub /spl infin// control applied to a wafer stage model","publication_year":2004,"publication_date":"2004-01-01","ids":{"openalex":"https://openalex.org/W2048383761","doi":"https://doi.org/10.1109/cdc.2004.1428763","mag":"2048383761"},"language":"en","primary_location":{"id":"doi:10.1109/cdc.2004.1428763","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cdc.2004.1428763","pdf_url":null,"source":{"id":"https://openalex.org/S4363608267","display_name":"2004 43rd IEEE Conference on Decision and Control (CDC) (IEEE Cat. No.04CH37601)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2004 43rd IEEE Conference on Decision and Control (CDC) (IEEE Cat. No.04CH37601)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5085019022","display_name":"M. J. Zandvliet","orcid":null},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"M.J. Zandvliet","raw_affiliation_strings":["Delft Center for Systems and Control, Delft University of Technnology, Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Delft Center for Systems and Control, Delft University of Technnology, Netherlands","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035889063","display_name":"Carsten W. Scherer","orcid":"https://orcid.org/0000-0001-8856-2697"},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"C.W. Scherer","raw_affiliation_strings":["Delft Center for Systems and Control, Delft University of Technnology, Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Delft Center for Systems and Control, Delft University of Technnology, Netherlands","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048740385","display_name":"C.W.J. Hol","orcid":null},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"C.W.J. Hol","raw_affiliation_strings":["Delft Center for Systems and Control, Delft University of Technnology, Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Delft Center for Systems and Control, Delft University of Technnology, Netherlands","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113953594","display_name":"M.M.J. van de Wal","orcid":null},"institutions":[{"id":"https://openalex.org/I4210122849","display_name":"Philips (Netherlands)","ror":"https://ror.org/02p2bgp27","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210122849"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"M.M.J. van de Wal","raw_affiliation_strings":["Philips Center for Industrial Technology, Eindhoven, Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Philips Center for Industrial Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I4210122849"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.11962891,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"11","issue":null,"first_page":"796","last_page":"802 Vol.1"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10791","display_name":"Advanced Control Systems Optimization","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10791","display_name":"Advanced Control Systems Optimization","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12810","display_name":"Real-time simulation and control systems","score":0.9972000122070312,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.756177544593811},{"id":"https://openalex.org/keywords/observer","display_name":"Observer (physics)","score":0.7201401591300964},{"id":"https://openalex.org/keywords/controller","display_name":"Controller (irrigation)","score":0.5512649416923523},{"id":"https://openalex.org/keywords/heuristic","display_name":"Heuristic","score":0.504463791847229},{"id":"https://openalex.org/keywords/point","display_name":"Point (geometry)","score":0.46379002928733826},{"id":"https://openalex.org/keywords/robust-control","display_name":"Robust control","score":0.4609672427177429},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.44805124402046204},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.3873981237411499},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3815912902355194},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.37448886036872864},{"id":"https://openalex.org/keywords/control-system","display_name":"Control system","score":0.3658962547779083},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.34840935468673706},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.33008161187171936}],"concepts":[{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.756177544593811},{"id":"https://openalex.org/C2780704645","wikidata":"https://www.wikidata.org/wiki/Q9251458","display_name":"Observer (physics)","level":2,"score":0.7201401591300964},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.5512649416923523},{"id":"https://openalex.org/C173801870","wikidata":"https://www.wikidata.org/wiki/Q201413","display_name":"Heuristic","level":2,"score":0.504463791847229},{"id":"https://openalex.org/C28719098","wikidata":"https://www.wikidata.org/wiki/Q44946","display_name":"Point (geometry)","level":2,"score":0.46379002928733826},{"id":"https://openalex.org/C31531917","wikidata":"https://www.wikidata.org/wiki/Q915157","display_name":"Robust control","level":3,"score":0.4609672427177429},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.44805124402046204},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.3873981237411499},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3815912902355194},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.37448886036872864},{"id":"https://openalex.org/C17500928","wikidata":"https://www.wikidata.org/wiki/Q959968","display_name":"Control system","level":2,"score":0.3658962547779083},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.34840935468673706},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.33008161187171936},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C6557445","wikidata":"https://www.wikidata.org/wiki/Q173113","display_name":"Agronomy","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/cdc.2004.1428763","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cdc.2004.1428763","pdf_url":null,"source":{"id":"https://openalex.org/S4363608267","display_name":"2004 43rd IEEE Conference on Decision and Control (CDC) (IEEE Cat. No.04CH37601)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2004 43rd IEEE Conference on Decision and Control (CDC) (IEEE Cat. No.04CH37601)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9","score":0.41999998688697815}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W171072194","https://openalex.org/W1488248731","https://openalex.org/W1504891015","https://openalex.org/W1601803999","https://openalex.org/W1949005869","https://openalex.org/W1964949272","https://openalex.org/W1967073510","https://openalex.org/W1999913571","https://openalex.org/W2042106612","https://openalex.org/W2073302274","https://openalex.org/W2102117333","https://openalex.org/W2119886959","https://openalex.org/W2138789454","https://openalex.org/W2221178412","https://openalex.org/W3148395168","https://openalex.org/W6635956553","https://openalex.org/W6793737006"],"related_works":["https://openalex.org/W3192036299","https://openalex.org/W2146428417","https://openalex.org/W3176458675","https://openalex.org/W1981875704","https://openalex.org/W2561776955","https://openalex.org/W576983769","https://openalex.org/W2122087045","https://openalex.org/W2138120972","https://openalex.org/W2724327981","https://openalex.org/W2054830681"],"abstract_inverted_index":{"This":[0],"paper":[1],"considers":[2],"several":[3],"practical":[4],"aspects":[5,51],"of":[6,68,103,106,123,136],"designing":[7,21,83],"multi-objective":[8,22,125],"H/sub":[9,23,84],"/spl":[10,24,85],"infin//":[11,25,86],"controllers.":[12],"As":[13],"a":[14,76,100,124,134,137,140],"starting":[15],"point,":[16],"the":[17,35,45,55,62,66,69,96,104,107,121,131],"LMI":[18],"approach":[19,126],"for":[20,30,82],"controllers,":[26],"as":[27,29],"well":[28],"computing":[31],"lower":[32],"bounds":[33],"on":[34,44,92],"achievable":[36],"performance,":[37],"is":[38,80,110],"summarized.":[39],"Both":[40],"techniques":[41,132],"are":[42,52,114,127],"based":[43],"Youla":[46,63,70,97,108],"parameterization.":[47,98],"Subsequently,":[48],"two":[49],"important":[50],"to":[53,60,94,133],"choose":[54],"initial":[56],"observer-based":[57],"controller":[58],"used":[59,144],"construct":[61],"parameterization":[64],"and":[65],"poles":[67,105],"parameter":[71,109],"itself.":[72],"In":[73],"this":[74],"paper,":[75],"specific":[77],"synthesis":[78],"technique":[79],"suggested":[81],"controllers":[87],"with":[88],"an":[89,117],"observer":[90],"structure":[91],"which":[93],"base":[95],"Furthermore,":[99],"heuristic":[101],"choice":[102],"presented.":[111],"The":[112],"results":[113],"illustrated":[115],"in":[116,145],"academic":[118],"example.":[119],"Finally,":[120],"benefits":[122],"demonstrated":[128],"by":[129],"applying":[130],"model":[135],"wafer":[138],"stage;":[139],"mechanical":[141],"positioning":[142],"system":[143],"IC":[146],"manufacturing.":[147]},"counts_by_year":[],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}