{"id":"https://openalex.org/W1593573642","doi":"https://doi.org/10.1109/cdc.2003.1273024","title":"Nano-precision control of micromirrors using output feedback","display_name":"Nano-precision control of micromirrors using output feedback","publication_year":2004,"publication_date":"2004-07-08","ids":{"openalex":"https://openalex.org/W1593573642","doi":"https://doi.org/10.1109/cdc.2003.1273024","mag":"1593573642"},"language":"en","primary_location":{"id":"doi:10.1109/cdc.2003.1273024","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cdc.2003.1273024","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"42nd IEEE International Conference on Decision and Control (IEEE Cat. No.03CH37475)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111465346","display_name":"D.H.S. Maithiipala","orcid":null},"institutions":[{"id":"https://openalex.org/I12315562","display_name":"Texas Tech University","ror":"https://ror.org/0405mnx93","country_code":"US","type":"education","lineage":["https://openalex.org/I12315562"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D.H.S. Maithiipala","raw_affiliation_strings":["Depts. of Mechanical Engineering, Texas Tech University, Lubbock, TX, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Depts. of Mechanical Engineering, Texas Tech University, Lubbock, TX, USA","institution_ids":["https://openalex.org/I12315562"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084113243","display_name":"Richard Gale","orcid":null},"institutions":[{"id":"https://openalex.org/I12315562","display_name":"Texas Tech University","ror":"https://ror.org/0405mnx93","country_code":"US","type":"education","lineage":["https://openalex.org/I12315562"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R.O. Gale","raw_affiliation_strings":["Depts. of Electrical Engineering, Texas Tech University, Lubbock, TX, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Depts. of Electrical Engineering, Texas Tech University, Lubbock, TX, USA","institution_ids":["https://openalex.org/I12315562"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5098282716","display_name":"M.W. Holtzt","orcid":null},"institutions":[{"id":"https://openalex.org/I12315562","display_name":"Texas Tech University","ror":"https://ror.org/0405mnx93","country_code":"US","type":"education","lineage":["https://openalex.org/I12315562"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M.W. Holtzt","raw_affiliation_strings":["Depts. of Physics, Texas Tech University Lubbock, TX, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Depts. of Physics, Texas Tech University Lubbock, TX, USA","institution_ids":["https://openalex.org/I12315562"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111637004","display_name":"Jordan M. Berg","orcid":null},"institutions":[{"id":"https://openalex.org/I12315562","display_name":"Texas Tech University","ror":"https://ror.org/0405mnx93","country_code":"US","type":"education","lineage":["https://openalex.org/I12315562"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J.M. Berg","raw_affiliation_strings":["Depts. of Mechanical Engineering, Texas Tech University, Lubbock, TX, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Depts. of Mechanical Engineering, Texas Tech University, Lubbock, TX, USA","institution_ids":["https://openalex.org/I12315562"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109878297","display_name":"W.R. Dayawansa","orcid":null},"institutions":[{"id":"https://openalex.org/I12315562","display_name":"Texas Tech University","ror":"https://ror.org/0405mnx93","country_code":"US","type":"education","lineage":["https://openalex.org/I12315562"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"W.R. Dayawansa","raw_affiliation_strings":["Depts. of Mathematics & Statistics, Texas Tech University Lubbock, TX, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Depts. of Mathematics & Statistics, Texas Tech University Lubbock, TX, USA","institution_ids":["https://openalex.org/I12315562"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.1121,"has_fulltext":false,"cited_by_count":10,"citation_normalized_percentile":{"value":0.86030795,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"3","issue":null,"first_page":"2652","last_page":"2657"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9957000017166138,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9957000017166138,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10379","display_name":"Cellular Mechanics and Interactions","score":0.9945999979972839,"subfield":{"id":"https://openalex.org/subfields/1307","display_name":"Cell Biology"},"field":{"id":"https://openalex.org/fields/13","display_name":"Biochemistry, Genetics and Molecular Biology"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T11187","display_name":"Nonlinear Dynamics and Pattern Formation","score":0.9940000176429749,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/context","display_name":"Context (archaeology)","score":0.596754252910614},{"id":"https://openalex.org/keywords/observer","display_name":"Observer (physics)","score":0.5912185907363892},{"id":"https://openalex.org/keywords/controller","display_name":"Controller (irrigation)","score":0.5480513572692871},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5358665585517883},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.49214547872543335},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.47948750853538513},{"id":"https://openalex.org/keywords/trajectory","display_name":"Trajectory","score":0.4541664719581604},{"id":"https://openalex.org/keywords/focus","display_name":"Focus (optics)","score":0.44564497470855713},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3296605944633484},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2909359931945801},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.15293315052986145},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.12625113129615784}],"concepts":[{"id":"https://openalex.org/C2779343474","wikidata":"https://www.wikidata.org/wiki/Q3109175","display_name":"Context (archaeology)","level":2,"score":0.596754252910614},{"id":"https://openalex.org/C2780704645","wikidata":"https://www.wikidata.org/wiki/Q9251458","display_name":"Observer (physics)","level":2,"score":0.5912185907363892},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.5480513572692871},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5358665585517883},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.49214547872543335},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.47948750853538513},{"id":"https://openalex.org/C13662910","wikidata":"https://www.wikidata.org/wiki/Q193139","display_name":"Trajectory","level":2,"score":0.4541664719581604},{"id":"https://openalex.org/C192209626","wikidata":"https://www.wikidata.org/wiki/Q190909","display_name":"Focus (optics)","level":2,"score":0.44564497470855713},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3296605944633484},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2909359931945801},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.15293315052986145},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.12625113129615784},{"id":"https://openalex.org/C6557445","wikidata":"https://www.wikidata.org/wiki/Q173113","display_name":"Agronomy","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C1276947","wikidata":"https://www.wikidata.org/wiki/Q333","display_name":"Astronomy","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/cdc.2003.1273024","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cdc.2003.1273024","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"42nd IEEE International Conference on Decision and Control (IEEE Cat. No.03CH37475)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W599550356","https://openalex.org/W1545348465","https://openalex.org/W1658472922","https://openalex.org/W1968799012","https://openalex.org/W1982357817","https://openalex.org/W1992881859","https://openalex.org/W2004901174","https://openalex.org/W2008339616","https://openalex.org/W2010750745","https://openalex.org/W2062697573","https://openalex.org/W2089906151","https://openalex.org/W2100074416","https://openalex.org/W2103095193","https://openalex.org/W2103600962","https://openalex.org/W2154642391","https://openalex.org/W2162439313","https://openalex.org/W6642401594"],"related_works":["https://openalex.org/W4323768008","https://openalex.org/W4360995134","https://openalex.org/W2387529410","https://openalex.org/W2039473718","https://openalex.org/W3023605104","https://openalex.org/W2383578611","https://openalex.org/W2987583674","https://openalex.org/W3186928667","https://openalex.org/W2012531322","https://openalex.org/W2018658498"],"abstract_inverted_index":{"Micromirror":[0],"arrays":[1],"may":[2,190],"be":[3,191],"used":[4],"as":[5,123],"spatial":[6],"light":[7,74],"modulators,":[8],"to":[9,25,38,45],"vary":[10],"the":[11,33,46,56,93,138,143,149],"amplitude":[12],"and":[13,48,103,127,131],"phase":[14],"of":[15,21,29,32,51,60,75,95,111,140,151,173,187],"an":[16,152,174,183],"incident":[17,34],"image.":[18],"The":[19,118,158],"difficulty":[20],"controlling":[22],"analog":[23,71],"micromirrors":[24],"within":[26,39],"a":[27,30,40,124,170],"fraction":[28],"wavelength":[31],"light,":[35],"that":[36,182],"is,":[37],"few":[41],"nanometers,":[42],"has":[43],"led":[44],"development":[47],"successful":[49],"commercialization":[50],"digital":[52],"devices,":[53],"in":[54,73,78,137],"which":[55,88],"components":[57],"take":[58],"one":[59],"only":[61],"two":[62,109],"possible":[63],"configurations.":[64],"In":[65],"this":[66,156,188],"paper":[67],"we":[68],"revisit":[69],"true":[70],"operation,":[72],"past":[76],"advances":[77],"nonlinear":[79],"control.":[80],"Our":[81],"focus":[82],"is":[83,135,166],"electrostatically":[84,175],"actuated":[85],"mirrors,":[86],"for":[87,115,155],"control":[89],"objectives":[90],"include":[91],"extending":[92],"range":[94],"motion,":[96],"improving":[97,100],"transient":[98],"performance,":[99],"positioning":[101],"accuracy":[102],"preventing":[104],"electrode":[105],"contact.":[106],"We":[107,147,178],"consider":[108],"models":[110],"individual":[112],"micromirrors,":[113],"suitable":[114],"controller":[116,154],"design.":[117],"first":[119],"treats":[120],"each":[121],"micromirror":[122],"rigid":[125],"body,":[126],"allows":[128],"arbitrary":[129],"rotation":[130],"translation.":[132],"This":[133],"model":[134,189],"developed":[136,167],"context":[139],"dynamics":[141],"on":[142,162],"Lie":[144],"group":[145],"SE(3).":[146],"simulate":[148],"performance":[150],"observer-based":[153],"system.":[157],"second":[159],"model,":[160],"based":[161],"work":[163],"by":[164,193],"Pelesko,":[165],"directly":[168],"from":[169],"PDE":[171],"representation":[172],"forced":[176],"membrane.":[177],"show":[179],"via":[180],"simulation":[181],"unstable":[184],"equilibrium":[185],"point":[186],"stabilized":[192],"proportional":[194],"output":[195],"feedback.":[196]},"counts_by_year":[],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}
