{"id":"https://openalex.org/W1561579159","doi":"https://doi.org/10.1109/cdc.2003.1272671","title":"Feedback control of growth rate and surface roughness in thin film growth","display_name":"Feedback control of growth rate and surface roughness in thin film growth","publication_year":2004,"publication_date":"2004-07-08","ids":{"openalex":"https://openalex.org/W1561579159","doi":"https://doi.org/10.1109/cdc.2003.1272671","mag":"1561579159"},"language":"en","primary_location":{"id":"doi:10.1109/cdc.2003.1272671","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cdc.2003.1272671","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"42nd IEEE International Conference on Decision and Control (IEEE Cat. No.03CH37475)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5113515290","display_name":"Yiming Lou","orcid":null},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"education","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Yiming Lou","raw_affiliation_strings":["Department of Chemical Engineering, University of California, Los Angeles, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Chemical Engineering, University of California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5002367171","display_name":"Panagiotis D. Christofides","orcid":"https://orcid.org/0000-0002-8772-4348"},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"education","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"P.D. Christofides","raw_affiliation_strings":["Department of Chemical Engineering, University of California, Los Angeles, CA, USA","[Dept. of Chem. Eng., California Univ., Los Angeles, CA, USA]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Chemical Engineering, University of California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]},{"raw_affiliation_string":"[Dept. of Chem. Eng., California Univ., Los Angeles, CA, USA]","institution_ids":["https://openalex.org/I161318765"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.06281974,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"1","issue":null,"first_page":"845","last_page":"850"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12141","display_name":"Fluid Dynamics and Thin Films","score":0.9641000032424927,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12141","display_name":"Fluid Dynamics and Thin Films","score":0.9641000032424927,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11087","display_name":"Solidification and crystal growth phenomena","score":0.9513000249862671,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12202","display_name":"nanoparticles nucleation surface interactions","score":0.9315000176429749,"subfield":{"id":"https://openalex.org/subfields/1902","display_name":"Atmospheric Science"},"field":{"id":"https://openalex.org/fields/19","display_name":"Earth and Planetary Sciences"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/surface-roughness","display_name":"Surface roughness","score":0.7746134996414185},{"id":"https://openalex.org/keywords/surface-finish","display_name":"Surface finish","score":0.6104457378387451},{"id":"https://openalex.org/keywords/growth-rate","display_name":"Growth rate","score":0.5881674289703369},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5485228300094604},{"id":"https://openalex.org/keywords/multivariable-calculus","display_name":"Multivariable calculus","score":0.48898184299468994},{"id":"https://openalex.org/keywords/kinetic-monte-carlo","display_name":"Kinetic Monte Carlo","score":0.47594451904296875},{"id":"https://openalex.org/keywords/estimator","display_name":"Estimator","score":0.44541600346565247},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.44022226333618164},{"id":"https://openalex.org/keywords/volumetric-flow-rate","display_name":"Volumetric flow rate","score":0.4156021475791931},{"id":"https://openalex.org/keywords/monte-carlo-method","display_name":"Monte Carlo method","score":0.3598431646823883},{"id":"https://openalex.org/keywords/mechanics","display_name":"Mechanics","score":0.2982162833213806},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2672109305858612},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17073917388916016},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.17013564705848694},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.1664896309375763},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1402667760848999},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.12524530291557312},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.11945044994354248},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.07405582070350647}],"concepts":[{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.7746134996414185},{"id":"https://openalex.org/C71039073","wikidata":"https://www.wikidata.org/wiki/Q3439090","display_name":"Surface finish","level":2,"score":0.6104457378387451},{"id":"https://openalex.org/C2778312390","wikidata":"https://www.wikidata.org/wiki/Q4139973","display_name":"Growth rate","level":2,"score":0.5881674289703369},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5485228300094604},{"id":"https://openalex.org/C117312493","wikidata":"https://www.wikidata.org/wiki/Q2035437","display_name":"Multivariable calculus","level":2,"score":0.48898184299468994},{"id":"https://openalex.org/C45786274","wikidata":"https://www.wikidata.org/wiki/Q3333611","display_name":"Kinetic Monte Carlo","level":3,"score":0.47594451904296875},{"id":"https://openalex.org/C185429906","wikidata":"https://www.wikidata.org/wiki/Q1130160","display_name":"Estimator","level":2,"score":0.44541600346565247},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.44022226333618164},{"id":"https://openalex.org/C172120300","wikidata":"https://www.wikidata.org/wiki/Q1134348","display_name":"Volumetric flow rate","level":2,"score":0.4156021475791931},{"id":"https://openalex.org/C19499675","wikidata":"https://www.wikidata.org/wiki/Q232207","display_name":"Monte Carlo method","level":2,"score":0.3598431646823883},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.2982162833213806},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2672109305858612},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17073917388916016},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.17013564705848694},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1664896309375763},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1402667760848999},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.12524530291557312},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.11945044994354248},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.07405582070350647},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/cdc.2003.1272671","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cdc.2003.1272671","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"42nd IEEE International Conference on Decision and Control (IEEE Cat. No.03CH37475)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":35,"referenced_works":["https://openalex.org/W40130861","https://openalex.org/W1899229769","https://openalex.org/W1965618643","https://openalex.org/W1975030398","https://openalex.org/W1987368754","https://openalex.org/W1991303900","https://openalex.org/W2000401286","https://openalex.org/W2001620602","https://openalex.org/W2011581571","https://openalex.org/W2013239615","https://openalex.org/W2016512473","https://openalex.org/W2025185454","https://openalex.org/W2035033289","https://openalex.org/W2036223873","https://openalex.org/W2038642526","https://openalex.org/W2041155652","https://openalex.org/W2042321087","https://openalex.org/W2042766445","https://openalex.org/W2047425478","https://openalex.org/W2050034305","https://openalex.org/W2061502779","https://openalex.org/W2076859179","https://openalex.org/W2078746189","https://openalex.org/W2079000916","https://openalex.org/W2083279088","https://openalex.org/W2086132688","https://openalex.org/W2102787760","https://openalex.org/W2137971290","https://openalex.org/W2146406789","https://openalex.org/W2150138384","https://openalex.org/W2156621573","https://openalex.org/W3008437073","https://openalex.org/W4238553373","https://openalex.org/W4285719527","https://openalex.org/W6650335610"],"related_works":["https://openalex.org/W2721687755","https://openalex.org/W2086932047","https://openalex.org/W2388146630","https://openalex.org/W418212511","https://openalex.org/W1964208669","https://openalex.org/W2112363989","https://openalex.org/W1582951828","https://openalex.org/W2224575301","https://openalex.org/W2300266636","https://openalex.org/W1976600037"],"abstract_inverted_index":{"In":[0],"this":[1],"work,":[2],"we":[3],"present":[4],"an":[5],"approach":[6,188],"for":[7,134],"multivariable":[8,123],"feedback":[9,124,206],"control":[10,164,195,207],"of":[11,30,86,101,137,161,174,196],"surface":[12,45,88,149,176,201],"roughness":[13,75,89,150,177,202],"and":[14,39,44,55,76,90,109,117,131,148,155,178,200],"growth":[15,20,33,58,77,91,146,179,198],"rate":[16,78,92,147,180,199],"in":[17,34,111],"thin":[18,31],"film":[19,32,53,57],"using":[21,203],"kinetic":[22],"Monte-Carlo":[23],"(MC)":[24],"models.":[25],"We":[26],"use":[27],"the":[28,48,67,70,87,98,102,107,112,128,135,145,162,167,175,182,197],"process":[29,169],"a":[35,74,94],"stagnation":[36],"flow":[37],"geometry":[38],"consider":[40],"atom":[41],"adsorption,":[42],"desorption":[43],"migration":[46],"as":[47],"three":[49],"processes":[50],"that":[51,82],"shape":[52],"micro-structure":[54],"determine":[56],"rate.":[59],"A":[60,122],"multiscale":[61,168],"model":[62,170],"is":[63,80,140,189],"used":[64],"to":[65,97,119,142,166,181,191,194],"simulate":[66],"process.":[68,103],"Following":[69],"methodology":[71],"presented":[72],"in,":[73],"estimator":[79,130],"constructed":[81],"allows":[83],"computing":[84],"estimates":[85],"at":[93],"time-scale":[95],"comparable":[96],"real-time":[99],"evolution":[100],"The":[104,186],"interactions":[105],"between":[106],"inputs":[108],"outputs":[110],"closed-loop":[113],"system":[114,165],"are":[115],"studied":[116],"found":[118,190],"be":[120,192],"significant.":[121],"controller,":[125],"which":[126],"uses":[127],"state":[129],"explicitly":[132],"compensates":[133],"effect":[136],"input/output":[138],"interactions,":[139],"designed":[141],"simultaneously":[143],"regulate":[144],"by":[151],"manipulating":[152],"substrate":[153],"temperature":[154],"inlet":[156],"precursor":[157],"mole":[158],"fraction.":[159],"Application":[160],"proposed":[163,187],"demonstrates":[171],"successful":[172],"regulation":[173],"desired":[183],"set-point":[184],"values.":[185],"superior":[193],"two":[204],"independent":[205],"loops.":[208]},"counts_by_year":[{"year":2012,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}