{"id":"https://openalex.org/W3035294134","doi":"https://doi.org/10.1109/ccta41146.2020.9206290","title":"Model-based Temperature Control of a Continuous Flow Heater for Efficient Processing of Silicon Wafers","display_name":"Model-based Temperature Control of a Continuous Flow Heater for Efficient Processing of Silicon Wafers","publication_year":2020,"publication_date":"2020-08-01","ids":{"openalex":"https://openalex.org/W3035294134","doi":"https://doi.org/10.1109/ccta41146.2020.9206290","mag":"3035294134"},"language":"en","primary_location":{"id":"doi:10.1109/ccta41146.2020.9206290","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ccta41146.2020.9206290","pdf_url":null,"source":{"id":"https://openalex.org/S4306498667","display_name":"2020 IEEE Conference on Control Technology and Applications (CCTA)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE Conference on Control Technology and Applications (CCTA)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5043859902","display_name":"Martin Kleindienst","orcid":"https://orcid.org/0000-0003-1127-1618"},"institutions":[{"id":"https://openalex.org/I167593883","display_name":"Lam Research (Austria)","ror":"https://ror.org/05d2rrs40","country_code":"AT","type":"company","lineage":["https://openalex.org/I167593883","https://openalex.org/I4210139090"]}],"countries":["AT"],"is_corresponding":true,"raw_author_name":"Martin Kleindienst","raw_affiliation_strings":["Lam Research AG, Villach, Austria"],"affiliations":[{"raw_affiliation_string":"Lam Research AG, Villach, Austria","institution_ids":["https://openalex.org/I167593883"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068035849","display_name":"Stefan Koch","orcid":"https://orcid.org/0000-0003-4221-0834"},"institutions":[{"id":"https://openalex.org/I4092182","display_name":"Graz University of Technology","ror":"https://ror.org/00d7xrm67","country_code":"AT","type":"education","lineage":["https://openalex.org/I4092182"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Stefan Koch","raw_affiliation_strings":["The Christian Doppler Laboratory for Model Based Control of Complex Test Bed Systems, Institute of Automation and Control, Graz University of Technology, Graz, Austria"],"affiliations":[{"raw_affiliation_string":"The Christian Doppler Laboratory for Model Based Control of Complex Test Bed Systems, Institute of Automation and Control, Graz University of Technology, Graz, Austria","institution_ids":["https://openalex.org/I4092182"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5032824476","display_name":"Markus Reichhartinger","orcid":"https://orcid.org/0000-0003-4681-9575"},"institutions":[{"id":"https://openalex.org/I4092182","display_name":"Graz University of Technology","ror":"https://ror.org/00d7xrm67","country_code":"AT","type":"education","lineage":["https://openalex.org/I4092182"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Markus Reichhartinger","raw_affiliation_strings":["The Institute of Automation and Control, Graz University of Technology, Graz, Austria"],"affiliations":[{"raw_affiliation_string":"The Institute of Automation and Control, Graz University of Technology, Graz, Austria","institution_ids":["https://openalex.org/I4092182"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5043859902"],"corresponding_institution_ids":["https://openalex.org/I167593883"],"apc_list":null,"apc_paid":null,"fwci":1.0335,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.68070175,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11110","display_name":"Stability and Controllability of Differential Equations","score":0.9873999953269958,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11110","display_name":"Stability and Controllability of Differential Equations","score":0.9873999953269958,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10791","display_name":"Advanced Control Systems Optimization","score":0.984000027179718,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12206","display_name":"Vibration and Dynamic Analysis","score":0.9775999784469604,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.8321054577827454},{"id":"https://openalex.org/keywords/observer","display_name":"Observer (physics)","score":0.6910837888717651},{"id":"https://openalex.org/keywords/temperature-control","display_name":"Temperature control","score":0.6384093761444092},{"id":"https://openalex.org/keywords/controller","display_name":"Controller (irrigation)","score":0.624435305595398},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.570343017578125},{"id":"https://openalex.org/keywords/rapid-thermal-processing","display_name":"Rapid thermal processing","score":0.5252918004989624},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5100101232528687},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.4614796042442322},{"id":"https://openalex.org/keywords/constant","display_name":"Constant (computer programming)","score":0.46131041646003723},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.4469861686229706},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.432958722114563},{"id":"https://openalex.org/keywords/flow","display_name":"Flow (mathematics)","score":0.42241600155830383},{"id":"https://openalex.org/keywords/steady-state","display_name":"Steady state (chemistry)","score":0.41060927510261536},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.31549909710884094},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.2805778682231903},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.2499476969242096},{"id":"https://openalex.org/keywords/mechanics","display_name":"Mechanics","score":0.1634497344493866},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.11497744917869568},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.10586169362068176}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.8321054577827454},{"id":"https://openalex.org/C2780704645","wikidata":"https://www.wikidata.org/wiki/Q9251458","display_name":"Observer (physics)","level":2,"score":0.6910837888717651},{"id":"https://openalex.org/C536315585","wikidata":"https://www.wikidata.org/wiki/Q7698332","display_name":"Temperature control","level":2,"score":0.6384093761444092},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.624435305595398},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.570343017578125},{"id":"https://openalex.org/C72832162","wikidata":"https://www.wikidata.org/wiki/Q2131545","display_name":"Rapid thermal processing","level":3,"score":0.5252918004989624},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5100101232528687},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.4614796042442322},{"id":"https://openalex.org/C2777027219","wikidata":"https://www.wikidata.org/wiki/Q1284190","display_name":"Constant (computer programming)","level":2,"score":0.46131041646003723},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4469861686229706},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.432958722114563},{"id":"https://openalex.org/C38349280","wikidata":"https://www.wikidata.org/wiki/Q1434290","display_name":"Flow (mathematics)","level":2,"score":0.42241600155830383},{"id":"https://openalex.org/C8171440","wikidata":"https://www.wikidata.org/wiki/Q903414","display_name":"Steady state (chemistry)","level":2,"score":0.41060927510261536},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.31549909710884094},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.2805778682231903},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.2499476969242096},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.1634497344493866},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.11497744917869568},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.10586169362068176},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C6557445","wikidata":"https://www.wikidata.org/wiki/Q173113","display_name":"Agronomy","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/ccta41146.2020.9206290","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ccta41146.2020.9206290","pdf_url":null,"source":{"id":"https://openalex.org/S4306498667","display_name":"2020 IEEE Conference on Control Technology and Applications (CCTA)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE Conference on Control Technology and Applications (CCTA)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.5400000214576721}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W316798226","https://openalex.org/W407896542","https://openalex.org/W1975387711","https://openalex.org/W1992410217","https://openalex.org/W2018466653","https://openalex.org/W2023228436","https://openalex.org/W2030249883","https://openalex.org/W2035974690","https://openalex.org/W2073979909","https://openalex.org/W2078746189","https://openalex.org/W2090857031","https://openalex.org/W2143503595","https://openalex.org/W2159772827","https://openalex.org/W2162072418","https://openalex.org/W2307581080","https://openalex.org/W2333662534","https://openalex.org/W2505482406","https://openalex.org/W2781393074","https://openalex.org/W2892611231","https://openalex.org/W2902526885","https://openalex.org/W4240790602"],"related_works":["https://openalex.org/W2076271866","https://openalex.org/W2115602968","https://openalex.org/W1992994236","https://openalex.org/W1991489478","https://openalex.org/W1984395419","https://openalex.org/W2048527162","https://openalex.org/W2099983347","https://openalex.org/W2157686919","https://openalex.org/W2088385920","https://openalex.org/W2056707302"],"abstract_inverted_index":{"This":[0,46],"paper":[1],"proposes":[2],"a":[3,8,49],"model-based":[4],"control":[5],"approach":[6],"for":[7],"liquid":[9],"flow":[10],"heater":[11],"operated":[12],"within":[13],"silicon":[14],"wafer":[15],"processing":[16],"tools":[17],"used":[18],"in":[19,53],"the":[20,30,35,38,54,75,80],"semiconductor":[21],"industry.":[22],"A":[23],"distributed-parameter":[24],"model":[25],"is":[26,44],"presented":[27],"to":[28],"describe":[29],"thermal":[31],"dynamic":[32],"behavior":[33],"of":[34,56,79],"heater.":[36],"Adopting":[37],"early-lumping":[39],"approach,":[40],"an":[41,68],"observer-based":[42,69],"controller":[43,47],"designed.":[45],"ensures":[48],"vanishing":[50],"steady-state":[51],"error":[52],"case":[55],"constant":[57],"input":[58],"signals":[59],"and":[60,77],"disturbances.":[61],"The":[62],"implemented":[63],"feedback":[64],"loop":[65],"relies":[66],"on":[67],"anti-windup":[70],"technique.":[71],"Real-world":[72],"tests":[73],"demonstrate":[74],"effectiveness":[76],"feasibility":[78],"proposed":[81],"approach.":[82]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1}],"updated_date":"2026-01-13T01:12:25.745995","created_date":"2025-10-10T00:00:00"}